• Journal of Sensor Science and Technology
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• v.32 no.4
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• pp.223-231
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• 2023

An integrated-optical biochemical sensor structure that can perform homogeneous and surface sensing using a 2×2 balanced-bridge Mach-Zehnder interference structure based on the optimized SOI slot optical waveguide was described, and its performance and characteristics were evaluated. Equations for the two output optical powers were derived and examined using the transfer matrices of a 3-dB coupler and phase shifter (channel waveguide). The length of the 3-dB coupler was determined such that the two output optical powers were same using these formulas. In homogeneous sensing, the effect of the refractive index of an analyte in the range of 1.33-1.36 on the two output optical power distributions was numerically derived, and the sensitivity was calculated based on each output and the difference between the two outputs, the former and the latter being 7.5796-19.0305 [au/RIU] and 15.2601-38.1351 [au/RIU], respectively. In the case of surface sensing, the sensitivity range of the refractive index of 1.337 based on each of the two outputs was calculated as -2.2490--3.5854 [au/RIU] and 1.2194-3.8012 [au/RIU], and the sensitivity range of 4.8048-7.0694 [au/RIU] was confirmed based on the difference between the two outputs.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.2
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• pp.828-834
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• 2013

In this paper, TMC (Tracker Motion Controller) as one of the many research methods for condensing efficiency improvements can be condensed into efficient solar system configuration to improve the power generation efficiency of the castle with Concentrated solar silicon and photovoltaic systems (CPV)experiments using PV systems. Microprocessor used on the solar system, tracing the development of solar altitude and latitude of each is calculated in real time. Also accept the value from the sensor, motor control and communication with the central control system by calculating the value of the current position of the sun, there is a growing burden on the applicability. Through the way the program is appropriate for solar power systems and sensors hybrid-type algorithm was implemented in the ARM core with built-in TMC, Concentrated CPV system compared to the existing PV systems, through the implementation of the TMC in the country's power generation efficiency compared and analyzed. Sensor method using existing experimental results Concentrated solar power systems to communicate the value of GPS location tracking method hybrid solar horizons in the coordinate system of the sun's azimuth and elevation angles calculated by the program in the calculations of astronomy through experimental resultslook clear day at high solar irradiation were shown to have a large difference. Stopped after a certain period of time, the sun appears in the blind spot of the sensor, the sensor error that can occur from climate change, however, do not have a cloudy and clear day solar radiation sensor does not keep track of the position of the sun, rather than the sensor of excellence could be found. It is expected that research is constantly needed for the system with ongoing research for development of solar cell efficiency increases to reduce the production cost of power generation, high efficiency condensing type according to the change of climate with the optimal development of the ability TMC.

• Journal of Sensor Science and Technology
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• v.1 no.1
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• pp.23-34
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• 1992

In order to fabricate magnetoresistive sensor, Fe-Ni and Co-Ni alleys were evaporated on the slide glass and the silicon wafers. Saturation magnetic induction($B_{s}$), coercive field strength($H_{c}$) and magnetoresistance were measured for fabricated samples. The evaporated Fe-Ni thin films show that the saturation magnetic induction was 0.65 T, and coercive field strength was 0.379 A/cm, and this value was changed to 0.370 A/cm(//), 0.390 A/cm(${\bot}$), respectively after magnetic annealing. For the measurement of coercive field strength, magnetizing frequency of 1 kHz was used. For the fabricated sensor element, the change of magnetoresistance (${\Delta}R/R$) was excessively unstable due to oxidation in the process of fabrication. The evaporated Co-Ni alloy thin films show that saturation magnetic induction was 0.66 T, and coercive field strengthes were 5.895 A/cm(//), 5.898 A/cm(${\bot}$), respectively, after magnetic annelaing. The change of magnetoresistance(${\Delta}R/R$) was $3.6{\sim}3.7%$ of which value was excessively stable to room temperature. Fe-Ni thin film could have many problems due to large affinity in the process of fabrication of magnetoresistance sensor, but Co-Ni thin film could be a suitable material for fabrication of magnetoresistance sensor, because of its small affinity and definite magnetoresistance effects.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1818-1820
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• 1999

This paper presents direct ${\mu}c$-Si:H thin film growth on the glass substrates using RPCVD system (remote plasma chemical vapor deposition) in low temperature. Hydrogenated micro-crystalline silicon deposited by RPCVD system in low temperature is very useful material for photovoltaic devices, sensor applications, and TFTs (thin film transistors). Varying the deposition conditions such as substrate temperature, gas flow rate, reactive gas ratio $(SiH_4/H_2)$, total chamber pressure, and rf power, we deposited ${\mu}c$-Si:H thin films on the glass substrates (Corning glass 1737). And then we measured the structural and electrical properties of the films.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1248-1251
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• 1995

This paper reports some results of an experimental investigation of planar double injection magnetic sensors. The threshold voltage proved to be very sensitive to an applied magnetic field. The magnitude and direction of the threshold voltage variation depends on the field strength and its orientation with respect to the conduction chennel. The positively-directed field pushes the carriers into the bulk causing an increase in the threhold voltage. These results seem to agree with a path modulation due to Lorentz force. The application of a negative field causes a negative variation, which is dependent on the surface recombination velocity of the silicon-$SiO_2$ interface.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Journal of Sensor Science and Technology
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• v.22 no.3
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• pp.175-180
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• 2013

This paper describes the characteristics of cubic silicon carbide (3C-SiC) films grown on a carbonized Si(100) substrate, using hexamethyldisilane (HMDS, $Si_2(CH_3)_6$) as a safe organosilane single precursor in a nonflammable $H_2$/Ar ($H_2$ in Ar) mixture carrier gas by atmospheric pressure chemical vapor deposition (APCVD) at $1280^{\circ}C$. The growth process was performed under various conditions to determine the optimized growth and carbonization condition. Under the optimized condition, grown film has a single crystalline 3C-SiC with well crystallinity, small voids, low residual stress, low carrier concentration, and low RMS. Therefore, the 3C-SiC film on the carbonized Si (100) substrate is suitable to power device and MEMS fields.

• Proceedings of the KOSOMBE Conference
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• v.1990 no.11
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• pp.75-79
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• 1990

반도체 및 전자공업의 급속한 발달에 힘입어 압력센서가 소형, 경량, 대량 생산화됨으로써 의료용으로의 사용이 최근 급속히 늘고 있다. 따라서 본 논문은 현재 가장 활발히 개발되고 있는 압저항형 압력 센서의 원리인 압저항 효과에 대해 이론적인 분석을 상세히 소개하였다. 그리고 기존에 많이 소개된 바 있는 정사각형 모양의 박막모서리 중앙 부분에 위치한 압저항체의 설계 보다 직사각형 박막 중심에 위치한 압저항체의 설계가 우수한 특성을 보일 수 있는 이론적 근거를 설명한다.