• Title/Summary/Keyword: silicon dioxide

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Synthesis of $Ba_2SiS_4:Eu^{2+}$ Blue-Green Phosphor Prepared by Spray Drying Method Using Water Soluble Silicon Compound

  • Tezuka, Satoko;Suzuki, Yoshihito;Petrykin, Valery;Kakihana, Masato
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.243-245
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    • 2009
  • The single phase $Ba_2SiS_4$ doped with $Eu^{2+}$ was successfully synthesized by direct sulfurization of an oxide precursor prepared by a spray drying method using a novel water soluble silicon compound, which remains soluble in a given aqueous solution. The intensity of the emission peak of thus obtained $Ba_2SiS_4:Eu^{2+}$ was 1.75 times larger than that of a sample prepared by a solid state reaction method, and it approached 106% compared to one of the best commercially available YAG:$Ce^{3+}$ phosphor.

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Analysis of Interfacial Layer between Alumina and Silica/Silicon Substrate (알루미나와 실리카/실리콘 기판의 계면 분석)

  • 최일상;김영철;장영철
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.05a
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    • pp.252-254
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    • 2002
  • Metal oxides with high dielectric constants have the potential to expend scaling of transistor gate capacitance beyond that of ultrathin silicon dioxide. However, during deposition of most metal oxides on silicon, an interfacial region of SiOx is formed and limits the specific capacitance of the gate structure. We deposisted aluminum oxide and examined the composition of the interfacial layer by employing high-resolution X-ray photoelectron spectroscopy and X-ray reflectivity. We find that the interfacial region is not pure SiO$_2$, but is composed of a complex depth-dependent ternary oxide of $AlSi_xO_y$ and the pure SiO$_2$.

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Fabrication of Core-Sheath Nanocomposite Fibers by Co-axial Electrospinning (공축 전기방사를 이용한 Core-Sheath형 복합나노섬유의 제조)

  • Kang, Minjung;Lee, Seungsin
    • Journal of the Korean Society of Clothing and Textiles
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    • v.37 no.2
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    • pp.224-234
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    • 2013
  • This study investigates the fabrication of core-sheath nanocomposite fibers by locating germanium (Ge) and silicon dioxide ($SiO_2$) nanoparticles selectively in the sheath layer by co-axial electrospinning. Co-axially spun fibers were prepared by electrospinning a pure PVA solution and Ge/$SiO_2$/PVA solution as the core and sheath layer, respectively. Core-sheath nanocomposite fibers were electrospun under a variety of conditions that include various feed rates for the core and sheath solutions, voltages, and concentric needle diameters, in order to find an optimum spinning condition. Ge/$SiO_2$ nanocomposite fibers were also prepared by uniaxial electrospinning to compare fiber morphology and nanoparticle distribution with core-sheath nanofibers. Using scanning electron microscopy, transmission electron microscopy, and energy dispersive X-ray analysis, it was demonstrated that the co-axial approach resulted in the presence of nanoparticles near the surface region of the fibers compared to the overall distribution obtained for uni-axial fibers. The co-axially electrospun Ge/$SiO_2$/PVA nanofiber webs have possible uses in high efficiency functional textiles in which the nanoparticles located in the sheath region provide enhanced functionality.

Chemical Vapor Nucleation of Tungsten from $WF_6-SiH_4$ on Silicon Dioxide Surface (산화규소 표면위에서 $WF_6-SiH_4$ 화학증착에 의한 텅스텐 핵의 생성)

  • Choi, Kyeong-Keun;Yi, Chung;Rhee, Shi-Woo;Lee, Kun-Hong
    • Korean Journal of Materials Research
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    • v.2 no.1
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    • pp.19-26
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    • 1992
  • The rate of tungsten nuclei formation from $WF_6-SiH_4$ on silicon dioxide surface was measured. The nucleation rate became faster at high deposition temperature, low carrier gas flow rate and high deposition pressure. Also the rate became faster at the downstream of the oxide surface compared to the oxide surface near the inlet. Shape and cross-sectional view of the tungsten nuclei were observed with SEM and their chemical compositions were also determined.

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Study on the characteristics of inorganic thin film for OLED passovation (OLED passivation에 적용하기 위한 무기박막의 특성에 관한 연구)

  • Yoon, Jae-Kyoung;Kwon, Oh-Kwan;Yoon, Won-Min;Shin, Hoon-Kyu;Park, Chan-Eon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.176-176
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    • 2010
  • OLED(Organic Light Emitting Device)는 LCD(Liquid Crystal Display)의 뒤를 잇는 차세대 디스플레이의 선두주자로서 자체발광형이기 때문에 백라이트 등의 보조광원이 불필요하며, 구동전압이 낮고 넓은 시야각과 빠른 응답속도 등의 특징을 가지고 있다. 또한 플렉서블 기판을 사용할 수 있어 차세대 디스플레이인 플렉서블 디스플레이에 적합하다. 플렉서블한 디스플레이를 만들기 위해서 플라스틱 기판에 OLED 물질을 사용하여 기존에 무겁고, 깨지기 쉬우며, 변형이 불가능한 유리로 만든 소자 보다 더 가볍고 깨지지 않고 변형이 가능한 플렉서블 디스플레이를 제작 할 수 있다. 그러나 플라스틱 기판은 매우 큰 투습율을 가지고 있어 OLED소자에 적용시키면 공기 중의 수분이나 산소와 접촉이 많아져 쉽게 산화되어 소자의 효율 및 수명이 짧아진다. 또한 OLED에 사용되는 유기물도 산소나 수분에 의해 특성이 급격히 저하되기 때문에 산소 및 수분의 차단은 필수적이다. 이러한 단점을 최소화하기 위해서 PECVD(Plasma Enhanced Chemical Vapor Deposition)로 만든 SiON(Silicon Oxynitride), $SiO_2$(Sillicon dioxide), $Si_3N_4$(Sillicon nitride) 박막을 차단막(Passivation layer)으로 사용하였다. PECVD(Plasma Enhanced Chemical Vapor Deposition)로 만든 SiON(Silicon Oxynitride), $SiO_2$(Sillicon dioxide), $Si_3N_4$(Sillicon nitride) 각각의 박막의 Crack의 특성을 85%-$85^{\circ}C$조건에서 24hr 측정하였다.

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Stability of Ta-Mo alloy on thin gate dielectric (박막 게이트 절연체 위에서 Ta-Mo 합금의 안정성)

  • Lee, Chung-Keun;Kang, Young-Sub;Seo, Hyun-Sang;Hong, Shin-Nam
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04b
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    • pp.9-12
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    • 2004
  • This paper investigated the stability of Ta-Mo alloy on thin gate dielectric. Ta-Mo alloy was deposited by using co-sputtering process after thermal growing of 3.4nm and 4.2nm silicon dioxide. When the sputtering power of Ta and Mo were 100W and 70W, respectively, the suitable work function for NMOS gate electrode, 4.2eV, could obtain. To prove interface thermal stability of thin film gate dielectric and Ta-Mo alloy, rapid thermal annealing was performed at $600^{\circ}C$ and $700^{\circ}C$ for 10sec in Ar ambient. The results of interface reaction were surveyed by change of silicon dioxide thickness and work function after annealing process. Also, the reliability of alloy gate and gate dielectric could be confirmed by quantity of leakage current. Ta-Mo alloy was showed low sheet resistance and thermal stability, namely, little change of gate dielectric and work function, after $700^{\circ}C$ annealing process.

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Hybrid Passivation for a Flexible Organic Light Emitting Diode (다층 구조의 Hybrid flexible 박막 기술 연구)

  • Lee, Whee-Won;Kim, Young-Hwan;Seo, Dae-Shik;Kim, Yong-Hoon;Moon, Dae-Gyu;Han, Jeong-In
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.269-270
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    • 2005
  • A hybrid passivation method using parylene and silicon dioxide combination layer for a flexible organic light emitting diode (FOLED) was applied on a polycarbonate substrate. A parylene coating by vapor polymerization method is a highly effective passivation process for the FOLED, and it applies all top surface and the edges of the FOLED device. In order to minimize the permeation of moisture and oxygen from the top surface of the device, an additional layer of silicon dioxide was deposited over the parylene coated layer. It was found that the water vapor transmittance rate (WVTR) of parylene (15 m-in-thickness) / SiO2 (0.3$\mu$m-in-thickness) combination layers deposited on polycarbonate film was decreased under the value of 10-3 g/m2day. The FOLED with the hybrid passivation showed remarkably longer lifetime characteristics in the ambient conditions than the non-passivated FOLED. The lifetime of the passivated FOLED was 400 hours and it was more than ten times over the lifetime of the convectional non-passivated FOLED.

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Rapid Thermal Annealing at the Temperature of 650℃ Ag Films on SiO2 Deposited STS Substrates

  • Kim, Moojin;Kim, Kyoung-Bo
    • Applied Science and Convergence Technology
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    • v.26 no.6
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    • pp.208-213
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    • 2017
  • Flexible opto-electronic devices are developed on the insulating layer deposited stainless steel (STS) substrates. The silicon dioxide ($SiO_2$) material as the diffusion barrier of Fe and Cr atoms in addition to the electrical insulation between the electronic device and STS is processed using the plasma enhanced chemical vapor deposition method. Noble silver (Ag) films of approximately 100 nm thickness have been formed on $SiO_2$ deposited STS substrates by E-beam evaporation technique. The films then were annealed at $650^{\circ}C$ for 20 min using the rapid thermal annealing (RTA) technique. It was investigated the variation of the surface morphology due to the interaction between Ag films and $SiO_2$ layers after the RTA treatment. The results showed the movement of Si atoms in silver film from $SiO_2$. In addition, the structural investigation of Ag annealed at $650^{\circ}C$ indicated that the Ag film has the material property of p-type semiconductor and the bandgap of approximately 1 eV. Also, the films annealed at $650^{\circ}C$ showed reflection with sinusoidal oscillations due to optical interference of multiple reflections originated from films and substrate surfaces. Such changes can be attributed to both formation of $SiO_2$ on Ag film surface and agglomeration of silver film between particles due to annealing.

Suggestion of Physicochemical Characteristics and Safety Management in the Waste Containing Nanomaterials from Engineered Nano-materials Manufacturing Plants and Waste Treatment Facilities (산업용제조시설과 폐기물처리시설에서 발생된 나노폐기물의 물리화학적 특성 및 안전관리방안 제시)

  • Kim, Woo-Il;Yeon, Jin-Mo;Cho, Na-Hyeon;Kim, Yong-Jun;Um, Nam-Il;Kim, Ki-Heon;Lee, Young-Kee
    • Journal of Korea Society of Waste Management
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    • v.35 no.7
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    • pp.670-682
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    • 2018
  • Engineered nanomaterials (ENMs) can be released to humans and the environment through the generation of waste containing engineered nanomaterials (WCNMs) and the use and disposal of nano-products. Nanoparticles can also be introduced intentionally or unintentionally into waste streams. This study examined WCNMs in domestic industries, and target nanomaterials, such as silicon dioxide, titanium oxide, zinc oxide, nano silver, and carbon nanotubes (CNTs), were selected. We tested 48 samples, such as dust, sludge, ash, and by-products from manufacturing facilities and waste treatment facilities. We analyzed leaching and content concentrations for heavy metals and hazardous constituents of the waste. Chemical compositions were also measured by XRD and XRF, and the unique properties of nano-waste were identified by using a particle size distribution analyzer and TEM. The dust and sludge generated from manufacturing facilities and the use of nanomaterials showed higher concentrations of metals such as lead, arsenic, chromium, barium, and zinc. Oiled cloths from facilities using nano silver revealed high concentrations of copper, and the leaching concentrations of copper and lead in fly ash were higher than those in bottom ash. In XRF measurements at the facilities, we detected compounds such as silicon dioxide, sulfur trioxide, calcium oxide, titanium dioxide, and zinc oxide. We found several chemicals such as calcium oxide and silicon dioxide in the bottom ash of waste incinerators.

Si/SiO2 Multilayer-based Fabry-Perot Filter for 4.26 ㎛ Filtering in Carbon Dioxide Detection (이산화탄소 감지를 위한 4.26 ㎛ 필터용 poly-Si/SiO2 다층 박막 기반의 패브리 페로-필터)

  • Do, Nam Gon;Lee, Junyeop;Jung, Dong Geon;Kong, Seong Ho;Jung, Daewoong
    • Journal of Sensor Science and Technology
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    • v.30 no.1
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    • pp.56-60
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    • 2021
  • In this study, the relationship between the transmitted light intensity and full-width-at-half-maximum (FWHM) of a Fabry-Perot filter was investigated. The measured refractive indices and absorption coefficients of the fabricated thin films were applied to the Fabry-Perot filter via simulations using optical software. Although considerable research has been conducted on Fabry-Perot filters, this study focused on the usefulness of 4.26-㎛ infrared filtering in carbon dioxide detection. Optical analysis was performed considering the effects of the thickness, refractive indices, and number of thin films in a distributed Bragg reflector. Ultimately, a clear trade-off relationship was observed wherein the transmitted light intensity decreased as the number of multilayers increased; however, the FWHM was observed to be narrower.