• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.106-109
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• 2022

The green-emitting Zn₂SiO₄:Mn²⁺ phosphor film was evaluated in a xenon excimer lamp. The phosphor film with 2 ㎛ thick was formed of monolithic structure on the inner side of quartz through a long-time annealing process of coated ZnO solution doped with Mn²⁺ ion and SiO₂ of quartz tube. The coated quartz was filled with 100 torr of xenon gas, and simultaneously both sides was melt and sealed. The xenon-field quartz tube was discharge by applying the voltage of 15 kV with a frequency of 26 kHz, and emitted the glow with dominant peak at 172 nm. The vacuum ultraviolet excited the inner-side coated Zn₂SiO₄:Mn²⁺ phosphor film, which emitted the pure and strong green light.

• 마이크로전자및패키징학회지
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• 제12권1호
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• pp.59-63
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• 2005

금속-강유전체-반도체 전계효과 트랜지스터 (MFS/MFISFET)의 동작 특성을 technology computer-aided design (TCAD)과 simulation program with integrated circuit emphasis (SPICE)를 결합하여 전산모사하는 방법을 제시하였다. 복잡한 강유전체의 동작 특성을 수치해석을 이용하여 해석한 다음, 이를 이용하여 금속-강유전체-반도체 구조에서 반도체 표면에 인가되는 표면 전위를 계산하였다. 계산된 TCAD 변수인 표면 전위를 전계효과 트랜지스터의 SPICE 모델에서 구한 표면 전위와 같다고 보고게이트 전압에 따른 전류전압 특성을 구할 수 있었다. 이와 같은 방법은 향후 MFS/MFISFET를 이용한 메모리소자의 집적회로 설계에 매우 유용하게 적용될 수 있을 것이다.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.125-129
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• 2021

We investigated the electronic property and atomic structure for chalcopyrite (CH) Al_xGa_1-xAs semiconductor by using first-principles FPLMTO method. The CH-Al_xGa_1-xAs exhibits a p-type semiconductor with a direct band-gap. For low Al concentration unoccupied hole-carriers are induced, but for high Al concentration it is formed a localized bonding or anti-bonding state below Fermi level. The hybridization of Al(3s)-Ga(4s, or 4p) is larger than that of Al(3s)-As(4s, or 4p). And the Al film on As-terminated surface, Al/AsGa(001), is more energetically favorable one than that on Ga-terminated (001) surface. Consequently, the band-gap of CH-Al_xGa_1-xAs system increases exponentially with increasing Al concentration. The change of lattice parameter is shown two different configurations with increasing Al concentration. The calculated lattice parameters for CH-Al_xGa_1-xAs system are compared to the experimental ones of zinc-blend GaAs and AlAs.

• 한국결정성장학회지
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• 제24권3호
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• pp.106-110
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• 2014

Atomic layer deposition(ALD)을 이용하여 $Al_2O_3$ 박막을 형성하고 이에 대한 패시베이션 특성에 대한 연구를 수행하였다. ALD로 증착된 $Al_2O_3$ 박막은 $400^{\circ}C$ 5분간 후속 열처리 공정 후에도 $Al_2O_3$ - 실리콘 계면 반응 없이 비정질 상태를 유지할 만큼 구조적으로 안정한 특성을 나타내었다. 후속 열처리 후 $Al_2O_3$ 박막의 패시베이션 특성이 향상되었으며, 이는 field effective 패시베이션과 화학적 패시베이션 효과가 동시에 상승에 기인하는 것으로 판단된다. $Al_2O_3$ 박막의 음고정 전하를 정량적으로 평가하기 위해서 후속 열처리 공정을 거친 $Al_2O_3$ 박막을 이용하여 metal-oxide-semiconductor(MOS) 소자를 제작하고 capacitance-voltage(C-V) 분석을 수행하였다. C-V 결과로부터 추출된 flatband voltage($V_{FB}$)와 equivalent oxide thickness(EOT)의 관계식을 통하여 $Al_2O_3$ 박막의 고정음전하는 $2.5{\times}10^{12}cm^{-2}$로 계산되었으며, 이는 본 연구에서 제시된 $Al_2O_3$ 박막 공정이 N-type 실리콘 태양전지의 패시베이션 공정에 응용 가능하다는 것을 의미한다.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2005년도 춘계종합학술대회
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• pp.1013-1016
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• 2005

대기 중에서 Si 기판 상에 촉매를 사용하지 않고 Zn powder만을 사용하여 ZnO 나노 구조를 성장시켰다. 450$^{\circ}$C ${\sim}$ 600$^{\circ}C$의 성장 온도에서 형성된 ZnO 나노 구조는 다양한 측정 방법을 이용해 구조적, 광학적인 특성을 분석하였다. Scanning Electron Microscopy (SEM)로 관찰한 결과, 모든 성장 온도에서 tetrapod 형 나노 구조와 구형의 cluster가 관찰되었다. Tetrapod 형 나노 구조는 성장 온도에 의한 크기나 밀도에 큰 영향이 없었지만, 구형의 cluster의 경우 성장 온도에 따른 밀도와 크기의 변화가 관찰되었다. Energy Dispersive X-ray spectroscopy (EDX)로 각각의 구조의 원소 조성비를 분석한 결과, tetrapod는 Zn:O가 1:1인 화학양론적인 조성을 보였으나, cluster는 산소 결핍형의 조성비를 가지고 있었다. 성장된 모든 샘플은 실온에서 매우 강한 발광을 보였으며, 380nm 중심의 UV 발광 피크와 500nm 중심의 green 발광 피크 (G-밴드)가 관찰되었고, UV 발광의 강도에 대한 G-밴드의 강도는 성장 온도가 높아질수록 증가하였다. 이러한 두 가지 발광 피크의 기원을 조사하기 위해 Cathodoluminescence(CL) 측정이 이루어졌고, UV 발광은 주로 tetrapod 구조에서, G-밴드 발광은 주로 cluster 구조에서 기인한다는 사실을 알 수 있었다.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.59-63
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• 2007

The CNTs are the most extensively studied material which are characterized by the complete property of matter, structure, and the large thermal conductivity (thermal conductivity of CNTs ~>2000W/mK vs. thermal conductivity of Aluminum ~> 204W/mK). Thus, they are successfully applied to the various fields. However, due to the strong agglomeration caused by the van der waal's force, their applications are limited. In the present study, a new method for CNTs dispersion was developed by using the mechanical dispersion, acid treatment, and then Cu was coated. This process produces CNTs/Cu nanocomposite powders, whereby the CNTs are homogeneously located within the Cu powders. The electrical properties of the CNTs/Cu nanocomposite were investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1349_1350
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• 2009

Thin films of pp(ST-Co-VA) were fabricated by plasma deposition polymerization (PVDPM) technique. Properties of the plasma polymerized pp(ST-Co-VA) thin films were investigated for application to semiconductor device as insulator. Thickness, dielectric property, composition of the pp(ST-Co-VA) thin films were investigated considering the relationship with preparation condition such as gas pressure and deposition time. In order to verify the possibility of application to organic thin film transistor, a pentacene thin film was deposited on the pp(ST-Co-VA) insulator by vacuum thermal evaporation technique. Crystalline property of the pentacene thin film was investigated by XRD and SEM, FT-IR. Surface properties at the pp(ST-Co-VA)/pentacene interface was investigated by contact angle measurement. The pp(ST-Co-VA) thin film showed a high-k (k=4.6) and good interface characteristic with pentacene semiconducting layer, which indicates that it would be a promising material for organic thin film transistor (OTFT) application.

• 반도체디스플레이기술학회지
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• 제13권3호
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• pp.39-43
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• 2014

The effect of electrode charging on the ion energy distribution (IED) was investigated in the dual-frequency capacitively coupled plasma source which was powered of 100 MHz RF at the top electrode and 400 kHz bias on the bottom electrode. The charging property was analyzed with the distortion of the measured current and voltage waveforms. The capacitance and the resistance of electrode sheath can change the property of ion and electron charging on the electrode so it is sensitive to the plasma density which is controlled by the main power. The ion energy distribution was estimated by equivalent circuit model, being compared with the measured distribution obtained from the ion energy analyzer. Results show that the low frequency bias power changes effectively the low energy population of ion in the energy distribution.

• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 춘계학술대회 논문집
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• pp.50-53
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• 1995

In this paper we have obtained property by considering the change of optical energy gap as a function of photo-does for exposing photo on Ag/a-Se$\sub$75/Ge$\sub$25/ thin films. This U-type property was obsered for all photo-exposing except for blu-pass filtered Hg lamep. Expecially, very large band shift(~0.3[eV]) is obtained by exposing He-Ne laser (6328[${\AA}$]). It is impossible to explain this property for exposing He-Ne and semiconductor laser through DWP model, which was explained for photo-exposing above the energy gap. Therefore we suggest a new modified model of DWP model for Ag/a-Se$\sub$75/Ge$\sub$25/ bilayer thin films.