• Safety and Health at Work
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• v.9 no.3
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• pp.249-256
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• 2018

This article aims to provide a systematic review of the exposure assessment methods used to assign wafer fabrication (fab) workers in epidemiologic cohort studies of mortality from all causes and various cancers. Epidemiologic and exposure-assessment studies of silicon wafer fab operations in the semiconductor industry were collected through an extensive literature review of articles reported until 2017. The studies found various outcomes possibly linked to fab operations, but a clear association with the chemicals in the process was not found, possibly because of exposure assessment methodology. No study used a tiered assessment approach to identify similar exposure groups that incorporated manufacturing era, facility, fab environment, operation, job and level of exposure to individual hazardous agents. Further epidemiologic studies of fab workers are warranted with more refined exposure assessment methods incorporating both operation and job title and hazardous agents to examine the associations with cancer risk or mortality.

• 제어로봇시스템학회:학술대회논문집
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• 1988.10a
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• pp.401-406
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• 1988

Various types and huge volume of information such as process instructions, work-in process and parametric data are created in a wafer fabrication process and should be provided to personnels inside or outside the facility. This article describes design criteria and functional description on the information system for small-scale wafer fabrication process to accomplish paperless fab and to support efficient fab management.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.87-91
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• 2019

The diagnosis of the failure for the existing electrical facilities was based on regular preventive maintenance, but this preventive maintenance was limited in preventing a lot of cost loss and sudden system failure. To overcome these shortcomings, fault prediction and diagnostic techniques are critical to increasing system reliability by monitoring electrical installations in real time and detecting abnormal conditions in the facility early. As the performance and quality deterioration problem occurs frequently due to the increase in the number of users of the motor pump, the purpose is to build an intelligent control system that can control the motor pump to maximize the performance and to improve the quality and reliability. To this end, a vibration sensor, temperature sensor, pressure sensor, and low water level sensor are used to detect vibrations, temperatures, pressures, and low water levels that can occur in the motor pump, and to build a system that can identify and diagnose information to users in real time.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.38 no.4
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• pp.159-167
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• 2015

We consider a wafer lot transfer/release planning problem from semiconductor wafer fabrication facilities to probing facilities with the objective of minimizing the deviation of workload and total tardiness of customers' orders. Due to the complexity of the considered problem, we propose a two-level hierarchical production planning method for the lot transfer problem between two parallel facilities to obtain an executable production plan and schedule. In the higher level, the solution for the reduced mathematical model with Lagrangian relaxation method can be regarded as a coarse good lot transfer/release plan with daily time bucket, and discrete-event simulation is performed to obtain detailed lot processing schedules at the machines with a priority-rule-based scheduling method and the lot transfer/release plan is evaluated in the lower level. To evaluate the performance of the suggested planning method, we provide computational tests on the problems obtained from a set of real data and additional test scenarios in which the several levels of variations are added in the customers' demands. Results of computational tests showed that the proposed lot transfer/planning architecture generates executable plans within acceptable computational time in the real factories and the total tardiness of orders can be reduced more effectively by using more sophisticated lot transfer methods, such as considering the due date and ready times of lots associated the same order with the mathematical formulation. The proposed method may be implemented for the problem of job assignment in back-end process such as the assignment of chips to be tested from assembly facilities to final test facilities. Also, the proposed method can be improved by considering the sequence dependent setup in the probing facilities.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.39 no.1
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• pp.153-161
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• 2016

Semiconductor manufacturing has suffered from the complex process behavior of the technology oriented control in the production line. While the technological processes are in charge of the quality and the yield of the product, the operational management is also critical for the productivity of the manufacturing line. The fabrication line in the semiconductor manufacturing is considered as the most complex part because of various kinds of the equipment, re-entrant process routing and various product devices. The efficiency and the productivity of the fabrication line may give a significant impact on the subsequent processes such as the probe line, the assembly line and final test line. In the management of the re-entrant process such as semiconductor fabrication, it is important to keep balanced fabrication line. The Performance measures in the fabrication line are throughput, cycle time, inventory, shortage, etc. In the fabrication, throughput and cycle time are the conflicting performance measures. It is very difficult to achieve two conflicting goal simultaneously in the manufacturing line. The capacity of equipment is important factor in the production planning and scheduling. The production planning consideration of capacity can make the scheduling more realistic. In this paper, an input and scheduling rule are to achieve the balanced operation in semiconductor fabrication line through equipment capacity and workload are proposed and evaluated. New backward projection and scheduling rule consideration of facility capacity are suggested. Scheduling wafers on the appropriate facilities are controlled by available capacity, which are determined by the workload in terms of the meet the production target.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.8
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• pp.38-45
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• 2016

The objective of this research is to develop a method of improving MEP facility management based on 3D reverse engineering. Recently, 3D image scanning-based reverse engineering has been implemented in the fields of architecture, construction and (manufacturing). In the case where there are many objects and the MEP system is complicated, 3D reverse engineering is applied in semiconductor factories, because facility maintenance works cause the 2D drawing to be different from the original one. The 3D point cloud data obtained from 3D image scanning contains accurate data and can increase the efficiency of complicated MEP facility maintenance works. For this purpose, the present research studied the technology trends and analyzed the process of 3D reverse engineering. Based on the results, a method of improving MEP facility management is established and its effects described.

• Korean Management Science Review
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• v.29 no.1
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• pp.131-141
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• 2012

The automated material handling systems today are playing ever more important roles in semiconductor/LCD fabrication facilities. Recently they became more flexible, intelligent, and speedy than in the past. The facilities have been fully automated because the size and weight of the unit loads used in the facilities were being increased beyond the limits that a human operator can handle. This research develops an efficient procedure to streamline the delivery of unit loads by the automated material handling system (AMHS). For this task, the research employs the event scheduling theory that has been successfully used in the both academia and industry. The developed procedure was applied to an actual LCD fabrication facility and improved the performance of an existing material handling system.

• Journal of the Semiconductor & Display Technology
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• v.10 no.1
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• pp.75-81
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• 2011

Today, FPD manufactures are eager to develop larger and larger glass to become the prime market leader. To follow this need, larger AMHS(Automated Material Handling System) development is essential. The radical increase of glass/cassette weight puts a lot of pressure on stocker robot's dual arms, which can cause a damage of expensive glasses and contaminate a clean room facility. In this paper the axiomatic design method is used to institute a design guideline to evenly distribute a pressure throughout the stocker robot structure.

• Journal of the Semiconductor & Display Technology
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• v.18 no.1
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• pp.53-58
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• 2019

Since floating facility with mooring system can be moved and rotated by wind or other environmental variables, the error in azimuthal angle must be compensated using a GPS receiver and geo-magnetic sensor. Accordingly, when an existing photovoltaic tracking algorithm is applied to a floating photovoltaic system, it is difficult to do the optimal solar tracking. In this paper, an effective azimuthal angle algorithm is develop for the photovoltaic tracking in floating condition. In order to verify the developed algorithm, the prototype of the floating photovoltaic system is manufactured and the developed algorithm is applied to the system. The algorithm shows a good tracking feasibility on the prototype.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.83-86
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• 2021

In this paper, electric fields in electromagnetic reverberation chambers, which are used as a substitute facility for EM-free anechoic chambers, are analyzed. This paper focused on the 4-5 GHz band, which is expected to adversely affect equipment. To analyze the field uniformity inside the electromagnetic reverberation chamber, electric field strengths are sampled and finite-difference time-domain method was used for numerical analysis. Moreover, Quadratic residue diffuser was used to improve the characteristics of the electromagnetic reverberation chamber and the uniformity of the internal field strength. Standard deviation, tolerance characteristics, and partiality characteristics were compared while varying the aiming point of transmission antenna.