• 폴리머
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• 제30권3호
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• pp.187-195
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• 2006

원자힘 현미경 양극산화 패터닝 기술에 관한 연구를 유기 저항막의 종류 및 그들의 특성을 토대로 다루었다. 본 연구실에서 수행한 자기조립막, 랑뮈어-블라짓막, 고분자막 위에서의 원자힘 현미경 양극산화 패터닝에 대한 연구결과를 중심으로, 유기 저항막 위에서의 원자힘 현미경 양극산화 패터닝 기술에 대한 이해를 돕고자 하였다. 현실적인 공정 속도에서 높은 종횡비의 패턴을 형성하기 위해 원자힘 현미경 양극산화 패터닝에 유기 저항막의 전기-기계적 특성, 젖음 특성, 에칭 저항 특성 등이 중요한 인자들임을 제안하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.181-181
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• 1999

Self-assembled monolayers(SAMs) of alkanethiol have been formed on the Cu(111) surfaces in vacuum. The thermal behavior of octanethiol-based SAMs on the Cu(111) surface have been examined in ultrahigh vacuum. Using X-ray photoelectron spectroscopy (XPS), it is found that the monolayers are stable up to about 500K in vacuum. Decomposition is signaled by a decrease in the intensity of C ls peak, accompanied by an increase of the intensity of the Cu 2p peak. However, the intensity of the S 2p peak doesn't change much as a function of annealing temperature. Thermal the decomposition mass spectra show that n-alkene is the predominant species desorbing from the surface in the 500-600K temperature range. The totality of these data leads to the conclusion that the monolayers decompose through the S-C bond cleavage by hydrogen elimination reaction, resulting in the desorption of hydrocarbon moiety as n-alkene. Following this initial decomposition step, Cu2S layers are observed on the surface. For comparison, attempts were also made to examine the thermal behavior of octanethiol-based SAMs on the Cu(111) surface in air. It has been shown that the SAMs on the Cu(111) surfaces begin to desorb with the oxidation of the thiolate to sulfonate at 400K. Upon annealing to 450K, the monolayer has almost completely desorbed as indicated by the virtual disappearance of the S 2p peak.

• Journal of Electrical Engineering and Technology
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• 제4권1호
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• pp.106-110
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• 2009

An amperometric glucose biosensor has been developed using viologen derivatives as a charge transfer mediator between a glucose oxidase (GOD) and a gold electrode. A highly stable self-assembled monolayer (SAM) of thiol-based viologen was immobilized onto the gold electrode of a quartz crystal microbalance (QCM) and GOD was immobilized onto the viologen modified electrode. This biosensor response to glucose was evaluated amperometrically in the potential of -300mV. Upon immobilization of the glucose oxidase onto the viologen modified electrode, the biosensor showed rapid response towards glucose. Experimental conditions influencing the biosensor performance, such as pH potential, were optimized and assessed. This biosensor offered excellent electrochemical responses for glucose concentration below ${\mu}$ mol level with high sensitivity and selectivity and short response time. The levels of the RSDs (<5%) for the entire analyses reflected the highly reproducible sensor performance. A linear calibration range between the current and the glucose concentration was obtained up to $4.5{\times}10^{-4}M$. The detection limit was determined to be $3.0{\times}10^{-6}M$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.86-87
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• 2007

An amperometric glucose biosensor has been developed using viologen derivatives as electron mediator of glucose oxidase (GOD) at Au electrode. Highly stable self assembled monolayer (SAM) of thiol-based viologen is immobilized onto the Au electrode followed byGOD is immobilized onto the viologen modified electrode. This biosensor response to glucose was evaluated amperometrically in the potential of -300 mV. Upon immobilization of glucose oxidase onto the viologen modified-electrode, the biosensor showed rapid response towards glucose. Experimental conditions influencing the biosensor performance such as, pH, potential were optimized and assessed. This biosensor offered an excellent electrochemical response for glucose concentration below ${\mu}mol$ level with high sensitivity and selectivity and short response time. The levels of the RSD's (< 5 %) for the entire analyses reflected the highly reproducible sensor performance. Using the optimized a linear relationship between current and glucose concentration was obtained up to $4.5{\times}10^{-4}$ M. In addition, this biosensor showed well reproducibility and stability.

• 한국분말재료학회지
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• 제30권2호
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• pp.156-168
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• 2023

The semiconductor industry faces physical limitations due to its top-down manufacturing processes. High cost of EUV equipment, time loss during tens or hundreds of photolithography steps, overlay, etch process errors, and contamination issues owing to photolithography still exist and may become more serious with the miniaturization of semiconductor devices. Therefore, a bottom-up approach is required to overcome these issues. The key technology that enables bottom-up semiconductor manufacturing is area-selective atomic layer deposition (ASALD). Here, various ASALD processes for elemental metals, such as Co, Cu, Ir, Ni, Pt, and Ru, are reviewed. Surface treatments using chemical species, such as self-assembled monolayers and small-molecule inhibitors, to control the hydrophilicity of the surface have been introduced. Finally, we discuss the future applications of metal ASALD processes.

• Bulletin of the Korean Chemical Society
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• 제30권11호
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• pp.2549-2554
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• 2009

The structures of 1,n-alkanedithiol (n = 2, 4, 6, 8, 10) self-assembled monolayers (SAMs) on a Au(111) substrate were investigated by electrochemical measurements and theoretical calculations. The results of the experimental techniques indicated that the dithiols, except n = 2, showed an upright molecular structure in the SAMs, in which alkanedithiols were bound to the Au surface via only one thiol functionality and the other one faced up to the air. The results also suggested that the formed dithiol SAMs were densely packed and highly oriented. Except ethanedithiol, which was thought to form a bilayer, the reductive desorption peak potentials of 1,n-alkanedithiol (n = 4, 6, 8, 10) SAMs were more negative than those of the corresponding monothiol ones in 0.1 M KOH solutions. This illustrates that the dithiol SAMs had higher stability than the corresponding monothiol ones. The major part of the high stability may be attributed to the van der Waals interaction among the sulfur atoms on top of the dithiol SAMs. The molecular modeling calculation showed that the structures of dithiol SAMs were similar to those of the corresponding monothiol SAMs and that all the dithiol SAMs, except ethanedithiol, were more stable than the corresponding monothiol SAMs. The calculated energy differences between dithiol and monothiol SAMs decreased with the increment of alkyl-chain length.

• Journal of Ceramic Processing Research
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• 제19권5호
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• pp.361-368
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• 2018

We investigated the interfacial properties of fluorocarbon self-assembled monolayers (FC-SAMs) with different alkyl chain lengths. It was found that the substrate characteristics were changed rapidly with the fabrication time and temperature of the SAM. FC-3SAM, which has the shortest alkyl chain in this study, showed a contact angle of $54.1^{\circ}$ when it was fabricated in an electric oven at $60^{\circ}C$ for the first minute. The FC-3SAM showed a contact angle of up to $76.9^{\circ}$ when it was fabricated in an electric oven at the same temperature condition for 180 minutes. FC-10SAM, which has the longest alkyl chain in this study, showed a contact angle of $64.7^{\circ}$ when it was fabricated at a temperature condition of $60^{\circ}C$ for 1 minute, and a contact angle of $98.7^{\circ}C$ at a temperature condition of $60^{\circ}C$ for 180 minutes. It was found that the FC-10SAM shows an increased contact angle and hydrophobic properties due to a well-aligned molecular structure resulting from a strong van der Waals force. In contrast, the FC-3SAM shows a small contact angle due to the intermolecular disorder resulting from a weak van der Waals force. The average roughness of FC-SAMs was investigated using AFM. The surface roughness of FC-SAMs, which verifies the results of contact angle, was confirmed. At a fabrication time of 120 minutes, the FC-10SAM showed an improvement in average roughness by 62% compared to that of FC-3SAM due to its good alignment.

• 한국정보전자통신기술학회논문지
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• 제16권2호
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• pp.109-115
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• 2023

본 논문은 UV(ultraviolet) 처리된 자기 조립 단분자막(fluorinated self-assembled monolayers; FSAM)을 배향막으로 사용한 액정의 배향 특성을 분석하였다. 물리화학적 분석을 사용하여 UV 처리 전후의 ITO(indium-tin-oxide) 유리 기판의 FSAM 특성을 확인하였다. FSAM 표면은 UV 처리에 의해 소수성에서 친수성으로 변화하였다. LC(liquid crystal) 분자는 UV 처리된 FSAM 표면에서 수평방향으로 정렬되었고 선경사각도 90°에서 0°로 변화하였다. UV 처리된 FSAM을 배향막으로 사용하여 제작된 TN(twist nematic) 셀의 전기광학(electro optics; EO) 특성은 기존의 PI(polyimide) 배향막에 비해 응답 시간이 빠른 것을 확인하였다. 이는 UV 처리된 FSAM 이 LCD(liquid crystal display)의 기존 폴리이미드 배향막을 대체할 잠재적인 가능성을 가진다.

• 접착 및 계면
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• 제23권2호
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• pp.53-58
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• 2022

본 연구는 AlO_x유전체 표면에 유기 자립조립 단분자막 (self-assembled monolayer, SAM) 중간층을 도입함으로써 유전체의 표면특성을 제어하고, 최종적으로 유기전하변조트랜지스터 (Organic charge modulated field-effect transistor, OCMFET)의 전기적 특성을 향상시킨 결과를 제시하였다. 유기 중간층을 적용함으로써, OCMFET의 컨트롤 게이트(CG, Control gate)와 플로팅 게이트 (FG, Floating gate) 사이 커패시터 플레이트로 작용하는 산화알루미늄 게이트 유전체의 표면 에너지를 제어하였으며, FET의 가장 중요한 성능변수인 전계효과 이동도(field-effect transistor, μ_FET)를 향상시켰다. 사용된 SAMs은 네가지의 PA (Octadecylphosphonic acid, Butylphosphonic acid, (3-Bromopropyl)phosphonic acid, (3-Aminopropyl) phosphonic acid)를 사용하여 형성하였으며, 각각 0.73, 0.41, 0.34, 0.15 cm2V^-1s^-1의 μ_OCMFET를 나타내었다. 이 연구를 통해 유기 SAM 중간층의 알킬 체인(Alkyl chain)의 길이 및 말단기의 특성이 소자의 전기적 성능을 제어하는데 중요한 요인임을 확인하였으며, 이 결과를 통해 향후 최적의 센서 플랫폼으로서의 OCMFET 소자성능 최적화에 기여할 수 있을 것으로 기대한다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1166-1169
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• 2006

In this study, the effects of SAMs on the performance of OTFTs have been investigated. ALD technique was applied for the deposition of SAMs, which is an ultra-thin film deposition technique based on sequences of self-limiting surface reactions enabling thickness control on atomic scale. According to our investigation results, it is observed that the surface properties of the gate insulator was changed by SAMs, which allow pentacene molecules to be deposited in the upright direction on the gate insulator and hence the performance of OTFTs could be improved. These results will be discussed