• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.414-420
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• 1999

The oxide sacrificial layer technology is one of the key technologies in surface micromachining. However, the commonly used aqueous HF solutions, including the $NH_4F$ buffered HF solutions (BHF), are known to attack the Al metal layers during the oxide sacrificial etch. A mixed $NH_4F$/HF/glycerine aqueous solution of 4:1:2 ratio is known to have the best etch selectivity between oxide and AI, but even this sacrificial etchant has a significant etch rate for AI. This paper reports an extensive experimental study on various concentration ratios for HF, $NH_4F$ and glycerine, and develops the optimal mixture ratio for sacrificial etching. At the $NH_4F$/HF/glycerine ratio of 2:1:4, the etch selectivity between PSG and Al improves by approximately 6 times over the previously known best selectivity, to a value of 7,700. At this condition, the measured etch rate of PSG film is approximately $2.1\;{\mu}m/min$, which is sufficiently fast. The developed sacrificial etchant allows the addition of a Al metal layer in surface micromachining, without the worry of Al layer erosion during sacrificial etch.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.284-284
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• 2012

In this study, $V_2O_5/TiO_2$ catalyst was measured reactivity of ethanol when vanadia ratio was increasing. First, $V_2O_5/TiO_2$ catalyst was prepared to the increasing vanadia ($VO_x$) ratio as 0.2, 1, 10 wt%. And we were used X-ray diffraction (XRD), then not appear markedly peak to pure vanadia about XRD analysis. So we were decided vanadia that was evenly dispersed on $TiO_2$. Result about temperature-programmed reduction (TPR) analysis was obtained 3 reactions that was dehydrogenationfrom obtained to acetaldehyde, dehydration from obtained to ethylene, condensation from obtained to diethyl ether. If vanadia ratio was increasing in $V_2O_5/TiO_2$, reactions temperature of ethanol was known lower. And condensation into diethyl ether is quenched away with increasing vanadia loading. In addition, competition between reductive dehydration and oxidative dehydrogenation occurs, while the selectivity toward dehydrogenation is favored with increasing vanadia loading.

• Transactions of the Korean hydrogen and new energy society
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• v.32 no.6
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• pp.534-541
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• 2021

In this study, a novel microwave-matrix reformer was proposed to convert CH₄, which is a major component, to a high quality hydrogen energy. And to identify this performance, it was investigated for O₂/C ratio, steam feed amount and reformed gas recirculation which are affected for methane conversion and product gas yield. Through the parametric screening studies, optimal operating conditions were that O₂/C ratio, steam feed amount and recirculation rate were 1.1, 10 mL/min and 30 L/min. In this conditions, CH₄ conversion was 68.1%, H₂ selectivity 77.2 and H₂/CO ratio 2.62 which are possible applying SOFC stack for RPG (residential power generator).

• Journal of the Korean Chemical Society
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• v.46 no.6
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• pp.515-522
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• 2002

Solid beta-dicalcium silicate hydrate $(\beta-C_2SH)$ synthesized under hydrothermal conditions at $240^{\circ}C$ and Ca/Si=2 molar ratio shows cation exchange properties towards divalent metal cations such as Fe, Cu, Zn, Cd, or Pb. The ability of metal cation uptake by the solid was found to be in the order: $Fe^{2+}$〉$Cu^{2+}$〉$Zn^{2+}$〉$Cd^{2+}$ = $Pb^{2+}$. Cesium selectivity of the solid was demonstrated in the presence of univalent cation such as $Li^+$, $Na^+$ and $K^+$ and divalent cations such as $Ca^{2+}$, $Mg^{2+}$ and $Ba^{2+}$, which are one hundred times more concentrated than the $Cs^+$. The uptake of $Cs^+$ is maximum in the presence of $Mg^{2+}$ whereas it is minimum in the presence of $K^+$. The different affinities of ${\beta}-C_2SH$ towards divalent metal cations can be used for the separation of those ions. Due to its selectivity for cesium it can be used in partitioning of radioactive Cs+ from nuclear wastes containing numerous cations. The mechanism of the metal cation exchange and cesium selectivity reactions by the solid is studied.

• Corrosion Science and Technology
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• v.2 no.5
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• pp.238-242
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• 2003

The characteristics of Ru etching using $O_2/Cl_2$ plasmas were investigated by employing inductively coupled plasma (ICP) etcher. The changes of Ru etch rate, Ru to $SiO_2$ etch selectivity and Ru electrode etching slope with the gas flow ratio, bias power, total gas flow rate, and source power were scrutinized. A high etching slope (${\sim}86^{\circ}$) and a smooth surface after etching was attained using $O_2/Cl_2$ inductively coupled plasma.

• Bulletin of the Korean Chemical Society
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• v.20 no.1
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• pp.49-52
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• 1999

Various metal oxides such as Fe2O3, FeO, TiO2, MnO2, MoO3, WO3 and ZnO have been used as a catalyst for Gif-KRICT type cyclohexane oxidation. In this reaction, the conversion of cyclohexane to cyclohexanone and cyclohexanol and the selectivity ratio of cyclohexanone to cyclohexanol were greatly affected by the acidity of metal oxides. When metal oxide has more acidic property, the reactivity on oxidation is increased and the formation of cyclohexanone is more favored. From this result, we proposed a new mechanism for the biomimetic Gif-KRICT oxidation system.

• Bulletin of the Korean Chemical Society
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• v.15 no.6
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• pp.424-427
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• 1994

Effects of iron compounds in known biomimetic oxidation systems (Gif IV and GoAgg II) have been studied on activity and ketone/alcohol selectivity of cyclohexane oxidation. Both ketone/alcohol ratio and cyclohexane conversion were affected by counter-ion Z of iron compounds Z-Fe. When Z has a more electron withdrawing property, the reactivity is increased and the formation of ketone is favored. From these experimental results, a new mechanism is proposed for the biomimetic oxidation system.

• Transactions of the Korean hydrogen and new energy society
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• v.28 no.1
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• pp.40-46
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• 2017

We reviewed the electrical properties of SOFC anode manufactured using spherical Ni and nano YSZ powder. When core-shell is fabricated by using submicron Ni as core and nano-sized YSZ as shell for SOFC anode, the electrical conductivity of the $0.2{\mu}m$ Ni-YSZ core-shell was 3 times higher than that of $1.0{\mu}m$ NiO or $1.0{\mu}m$ Ni-YSZ. Hydrogen selectivity was similar at $800^{\circ}C$, but hydrogen selectivity and methane conversion rate under $750^{\circ}C$ was 10~25% higher, Power density was more than 2 times, ASR was about 1/3, when exposed to $H_2$ atmosphere at $750^{\circ}C$ for a long time, Ni particles did not have any growth or cut off conduction path.

• Applied Microscopy
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• v.32 no.4
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• pp.311-317
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• 2002

There is great requirement on the TEM specimen preparation method with particle size selectivity as a prerequisite for the quantitative structure analysis on the materials such as gibbsite powder, which generally forms a large agglomerate and shows a variation of transition process depending on their sizes. In this experiment, we made an attempt to give a methodology for the TEM specimen preparation of powder with the size selectivity. After mixing 1 wt% gibbsite powder with ethanol solvent, gibbsite suspension was prepared by application of ball-milling and ultrasonification with addition of 0.25 vol% dispersion agent, Darvan C, which was diluted into distilled water by the ratio 1:19. Appling the static sedimentation method to gibbsite suspension after estimation of the sedimentation time by the measurement of accumulative concentration variation, we acquired TEM specimens with well-dispersed and size selected gibbsite particles in nm scale. Overall picture of each sample was taken by SEM and morphology of each dispersed particle was imaged by TEM. Raw and processed gibbsite powders were also examined by XRD to investigate whether they were suffered from phase change during the process or not.

• Applied Chemistry for Engineering
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• v.2 no.4
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• pp.411-420
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• 1991

The dehydrocyclization of n-heptane was studied over $Pt-Sn/{\gamma}-Al/_2O_3$ catalysts with varying Sn content in a fixed bed continuous flow reactor. The range of experimental conditions was at the temperature between 450 and $550^{\circ}C$, the pressure $20{\times}10^5-50{\times}10^5Pa$, the contact time 0.09 and 0.27 hr and the $H_2/H.C$. mole ratio 10. The conversion and selectivity of dehydrocyclization increased with increasing temperature, but decreased with increasing pressure. When we use Sn as a promoter, the selectivity of dehydrocyclization changesa a little, but the conversion was increased and the selectivity of isomerization increased a lot. The activation energy of dehydrocyclization of n-heptane was 34.5 kcal/mol over 0.6 wt % Pt-0.6 wt % $Sn/{\gamma}-Al_2O_3$.