• ETRI Journal
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• v.25 no.6
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• pp.503-509
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• 2003

Selective epitaxial growth (SEG) of silicon has attracted considerable attention for its good electrical properties and advantages in building microstructures in high-density devices. However, SEG problems, such as an unclear process window, selectivity loss, and nonuniformity have often made application difficult. In our study, we derived processing diagrams for SEG from thermodynamics on gas-phase reactions so that we could predict the SEG process zone for low pressure chemical vapor deposition. In addition, with the help of both the concept of the effective supersaturation ratio and three kinds of E-beam patterns, we evaluated and controlled selectivity loss and non-uniformity in SEG, which is affected by the loading effect. To optimize the SEG process, we propose two practical methods: One deals with cleaning the wafer, and the other involves inserting dummy active patterns into the wide insulator to prevent the silicon from nucleating.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.26 no.3
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• pp.436-442
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• 2022

In this paper, the performance of the selective combining according to the channel selection decision method of frequency diversity is evaluated in the underwater frequency selective channel. The underwater acoustic channel in the shallow sea has a complex multipath characteristic by combining various environmental factors such as boundary surface reflection and sound wave refraction according to the water temperature layer. In particular, frequency selectivity due to multipath causes energy fluctuation in a communication channel, which reduces SNR (Signal to Noise Ratio) and deteriorates communication performance. In this paper, we applied the frequency diversity technique using multiple channels to secure the communication performance according to the frequency selectivity by multipath. For each channel, 4-FSK (Frequency Shift Keying) and selective combining were applied, the performance was evaluated by applying the maximum value, average value, and majority decision of the signal in order to decide the demodulation channel selection of the selective combining.

• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.190-195
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• 1995

The feature scale model for selective chemical vapor deopsition process was proposed and the simulation was performed to study the selectivity and uniformity of deposited thin film using Monte Carlo method and string algorithm. The effect of model parameters such as sticking coefficient, aspect ratio, and surface diffusion coefficient on the deposited thin film pattern was improved for lower sticking coefficient and higher aspect ratio. It was revealed that the selectivity loss ascrives to the surface diffusion. Different values of sticking coefficients on Si and on SiO2 surface greatly influenced the deopsited thin film profile. In addition, as the lateral wall angle decreased, the selectively deposited film had improved uniformity except the vicinity of trench wall. The optimum eondition for the most flat selective film deposition pattern is the case with low sticking coefficient and slightly increased surface diffusion coefficient.

• Journal of the Korean Applied Science and Technology
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• v.17 no.2
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• pp.113-119
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• 2000

Alkylation of phenol with tert-butanol in the liquid phase on mordenite was studied. The influence of many reaction parameters such as calcination temperature, reaction temperature, t-butanol/phenol molar ratio on catalytic properties was discussed. The main products were 2,4-di-t-butylphenol, o-t-butylphenol, p-t-butylphenol, the last of these was wanted product. In order to enhance the selectivity of p-t-butylphenol, optimum conditions were recommended at $500^{\circ}C$ calcination temperature, $140^{\circ}C$ reaction temperature, 1.0 molar ratio of reactants over mordenite. P-t-butylphenol was formed with 90% isomer selectivity at optimum conditions after 4hr reaction. On the basis of the behavior obtained in the cases mentioned, optimum conditions and catalytic properties for t-butylation of phenol were provided.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.866-869
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• 2001

In this study, (Ba,Sr)TiO$_3$(BST) thin films were etched with a magnetically enhanced inductively coupled plasma(MEICP). Etching characteristics of BST thin films including etch rate and selectivity were evaluated as a function of the etching parameters such as gas mixing ratio, rf power, dc bias voltage and chamber pressure. The maximum etch rate of the BST films was 1700 $\AA$/min at Ar(90)/CF$_4$(10), 600 W/350 V and 5 mTorr. The selectivity of BST to PR was 0.6, 0.7, respectively. To analyze the composition of surface residue remaining after the etching, samples etched with different CF$_4$/Ar gas mixing ratio were investigated with X-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). From the results of XPS and SIMS, there are chemical reaction between Ba, Sr, Ti and C, F radicals during the etching and remained on the surface.

• Proceedings of the PSK Conference
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• 2003.10b
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• pp.94.2-94.2
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• 2003

CJ-11668 is a new potent and selective COX-2 inhibitor. CJ-11668 showed COX-2 inhibition (IC50) of 65nM and selectivity ratio (COX-l/COX-2) of 770 in the cell based assay. In the human whole blood assay, CJ-11668 showed COX-2 inhibition (IC50) of 370nM and selectivity ratio (COX-l/COX-2), 135. The treatment of CJ-11668 (5 mg/kg, p.o) produced a significant inhibition (35%) of inflamed rat paw volume in the carrageenan-induced acute inflammation. CJ-11668 also suppressed the PGE2 level (69% inhibition, 1 mg/kg, p.o) in the zymosan-induced mouse air pouch model after 3 hrs. (omitted)

• Korean Chemical Engineering Research
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• v.58 no.4
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• pp.658-664
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• 2020

Zeolite HY is wet impregnated with Ni (0.1, 0.3, 0.4, 0.5 wt%), Pt (0.1 wt%) and reduced in presence of hydrogen to form nanosized particles of Ni and Pt. All the catalysts were characterized by XRD, TEM, ESCA, NH₃-TPD, Pyridine adsorbed FT-IR and BET. Characterization results confirm that the Ni and Pt fractions effectively rehabilitated the physio-chemical properties of the zeolite HY catalysts. Further, all the reduced catalyst were screened with hydroisomerization of m-xylene at LHSV = 2.0 h^-1 in the temperature range 250-400 ℃ in steps of 50 ℃ in hydrogen atmosphere (20 ml/g). The addition of Ni to Pt catalyst increases hydroisomerization conversion, as well as maximizes p-xylene selectivity by restricting the pore size. The increasing trend in activity continues up to 0.3 wt% of Ni and 0.1 wt% Pt addition over zeolite HY. The increasing addition of Ni increases the total number of active metallic sites to exposed, which increases the metallic sites/acid sites ratio towards the optimum value for these reactions by better balance of synergic effect for stable activity. The rate of deactivation is pronounced on monometallic catalysts. The results confirm the threshold Ni addition is highly suitable for hydroisomerization reaction for product selectivity over Ni-Pt bimetallic/support catalysts.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.51 no.3
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• pp.387-395
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• 2015

Starfish, a species of Echinoderm, is widely known as a predator on benthic invertebrate. A series of fishing experiments was carried out in the western coastal waters of Korea from September, 2011 to November, 2012, using the drum-shaped pots of different mesh sizes (17.1, 24.8, 35.3, 39.8, and 48.3 mm) to describe the composition of the catch species and the mesh selectivity of the pot for starfish. Some species including fish, crab, and starfish were caught in the experimental pots. The SELECT (Share Each Length's Catch Total) method was applied to describe the selectivity of the pot for starfish Asterina pectinifera. The master selection curve was estimated to be s(R) = exp(10.358R-4.086) / [1+exp(10.358R-4.086)], where R is the ratio of arm length to mesh size. The relative arm length of 50% retention was 0.395, and the selection range was 0.212. The results should be helpful to understand the relationship between the catch size of starfish and the mesh size of pot.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• The Journal of the Acoustical Society of Korea
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• v.24 no.8
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• pp.454-461
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• 2005

Time spread due to the multipath in underwater acoustic channel, induces ISI (Inter-Symbol Interference) which degrades the performance of the underwater acoustic communication system. The passive phase conjugation (PPC) which improves the signal to multipath interference ratio (SMR) and therefore reduces the frequency selectivity. is a diversity communication technique giving a less ISI under multipath fading channel. Its frequency selectivity depends on the number of receiver array sensors and time varying source to receiver range. In this study, frequency selectivity of the PPC and its effects on bit error of underwater acoustic communication is analyzed by numerical simulation.