• Title/Summary/Keyword: scanning process

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The Characteristics of the Wafer Bonding between InP Wafers and $\textrm{Si}_3\textrm{N}_4$/InP (Direct Wafer Bonding법에 의한 InP 기판과 $\textrm{Si}_3\textrm{N}_4$/InP의 접합특성)

  • Kim, Seon-Un;Sin, Dong-Seok;Lee, Jeong-Yong;Choe, In-Hun
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.890-897
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    • 1998
  • The direct wafer bonding between n-InP(001) wafer and the ${Si}_3N_4$(200 nm) film grown on the InP wafer by PECVD method was investigated. The surface states of InP wafer and ${Si}_3N_4$/InP which strongly depend upon the direct wafer bonding strength between them when they are brought into contact, were characterized by the contact angle measurement technique and atomic force microscopy. When InP wafer was etched by $50{\%}$ HF, contact angle was $5^{\circ}$ and RMS roughness was $1.54{\AA}$. When ${Si}_3N_4$ was etched by ammonia solution, RMS roughness was $3.11{\AA}$. The considerable amount of initial bonding strength between InP wafer and ${Si}_3N_4$/InP was observed when the two wafer was contacted after the etching process by $50{\%}$ HF and ammonia solution respectively. The bonded specimen was heat treated in $H^2$ or $N^2$, ambient at the temperature of $580^{\circ}C$-$680^{\circ}C$ for lhr. The bonding state was confirmed by SAT(Scannig Acoustic Tomography). The bonding strength was measured by shear force measurement of ${Si}_3N_4$/InP to InP wafer increased up to the same level of PECVD interface. The direct wafer bonding interface and ${Si}_3N_4$/InP PECVD interface were chracterized by TEM and AES.

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Weldability with Process Parameters During Fiber Laser Welding of a Titanium Plate (I) - Effect of Type and Flow Rate of Shielding Gases on Weldability - (티타늄 판재의 파이버 레이저 용접시 공정변수에 따른 용접특성 (I) - 실드가스 종류 및 유량에 따른 영향 -)

  • Kim, Jong Do;Kim, Ji Sung
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.40 no.12
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    • pp.1047-1053
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    • 2016
  • In this study, welding of pure titanium was carried out by using a continuous wave fiber laser with a maximum output of 6.3 kW. Because brittle regions form easily in titanium as a result of oxidation or nitriding, the weld must be protected from the atmosphere by using an appropriate shielding gas. Experiments were performed by changing the type and the flow rate of shielding gases to obtain the optimal shielding condition, and the weldability was then evaluated. The degree of oxidation and nitriding was distinguished by observing the color of beads, and weld microstructure was observed by using an optical microscope and a scanning electron microscope. The mechanical properties of the weld were examined by measuring hardness. When the weld was oxidized or nitrified, the bead color was gray or yellow, and the oxygen or nitrogen content in the bead surface and overall weld tended to be high, as a result of which the hardness of the weld was thrice that of the base metal. A sound silvery white bead was obtained by using Ar as the shielding gas.

Thermal Shock Resistance According to the Manufacturing Process of Lanthanum Gadolinium Zirconate Ceramic Igot for Thermal Barrier Coating by Electron Beam in the La2O3-Gd2O3-ZrO2 System (전자빔 증착 열차폐 코팅용 란타늄-가돌리늄 지르코네이트(La2O3-Gd2O3-ZrO2계) 세라믹 잉곳의 제조공정에 따른 열충격 저항성)

  • Choi, Seona;Chae, Jungmin;Kim, Seongwon;Lee, Sungmin;Han, Yoonsoo;Kim, Hyungtae;Jang, Byungkoog;Oh, Yoonsuk
    • Journal of the Korean institute of surface engineering
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    • v.50 no.6
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    • pp.465-472
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    • 2017
  • The ingot fabrication conditions related with the thermal shock bearing phase and microstructure have investigated for the rare earth zirconate ceramic material, lanthanum gadolinium zirconate, as a thermal barrier coating using electron beam evaporation method. The thermal shock resistance of the prepared ingot was evaluated by high energy electron beam irradiation. The rare earth zirconate ceramic powder was prepared by controlling the raw material powder composition of $La_2O_3$, $Gd_2O_3$ and $ZrO_2$ so as to have a composition of $(La_{0.3}Gd_{0.7})_2Zr_2O_7$ which was selected from the former study. Ingot samples were prepared under two conditions. The first condition is prepared by sintering the prepared powder mixture to form an ingot. The second condition is prepared by calcining the prepared powder mixture to form a composite phase and then sintering to form an ingot. X-ray diffraction(XRD) and Scanning Electron Microscope(SEM) were used to analyze phase forming behavior and microstructure of ingot samples. Nanoindentation method used to obtain elastic modulus and hardness of each ingot specimen. Also the stress distribution of ingot was simulated by using FEM method assuming the ingot surface was exposed to electron beam. As a results, in the case of an ingot having a network-shaped microstructure in which relatively coarse pores are included, it seems that the thermal shock resistance was higher than in the case of an ingot having a microstructure composed of relatively fine grains only or particles with the similar level size when the high energy electron beam irradiation.

Cyclic Oxidation Behavior of Vacuum Plasma Sprayed NiCoCrAlY Overlay Coatings (진공 플라즈마 용사법을 통해 형성된 NiCoCrAlY 오버레이 코팅의 반복 산화 거동)

  • Yoo, Yeon Woo;Nam, Uk Hee;Park, Hunkwan;Park, Youngjin;Lee, Sunghun;Byon, Eungsun
    • Journal of the Korean institute of surface engineering
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    • v.52 no.6
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    • pp.283-288
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    • 2019
  • MCrAlY overaly coatings are used as oxidation barrier coatings to prevent degradation of the underlying substrate in high temperature and oxidizing environment of the hot section of gas turbines. Therefore, oxidation resistance in high temperature is important property of MCrAlY coatings. Also, coefficients of thermal expansion (CTE) of MCrAlY have middle value of that of Ni-based superalloys and oxides, which have the effect of preventing the delamination of the surface oxides. Cyclic oxidation test is one of the most useful methods for evaluating the high temperature durability of coatings used in gas turbines. In this study, NiCoCrAlY overlay coatings were formed on Inconel 792(IN 792) substrates by vacuum plasma spraying process. Vacuum plasma sprayed NiCoCrAlY coatings and IN 792 susbstrates were exposed to 1000℃ one-hour cyclic oxidation environment. NiCoCrAlY coatings showed lower weight gain in short-term oxidation. In long-term oxidation, IN 792 substrates showed higher weight loss due to delamination of surface oxide but NiCoCrAlY coatings showed lower weight loss. X-ray diffraction (XRD) analysis showed α-Al2O3 and NiCr2O4 was formed during the cyclic oxidation test. Through cross-section observation using scanning electron microscopy (SEM) and electron back scatter diffraction (EBSD) analysis, thermally grown oxide (TGO) layer composed of α-Al2O3 and NiCr2O4 was formed and the thickness of TGO increased during 1000℃ cyclic oxidation test. β phase in upper side of NiCoCrAlY coating was depleted due to oxidation of Al and outer beta depletion zone thickness also increased as the cyclic oxidation time increased.

Morphological Change of Men's Hair Shaft by Weathering (풍화작용에 의한 정상모발의 형태학적 변화)

  • Hong, Wan-Sung;Chang, Byung-Soo;Lim, Do-Seon;Park, Sang-Ock;Yoe, Sung-Moon
    • Applied Microscopy
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    • v.30 no.1
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    • pp.11-20
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    • 2000
  • The morphological changes in normal and weathering hair shafts of the human scalp were investigated by using the transmission and scanning electron microscopes. The hair shaft composed of cuticular layer, cortex and medula. The surface of normal hairs are smooth and covered by imbricated cuticular scales. The cuticular layer consists of five to seven cuticle cells. These cells, which are flat and thin, measuring about $100{\mu}m$ long and $0.4{\mu}m$ thick, appears intercellular membrane complex in diameter 25 nm. The cortex composed of melanin granules and cornified cells, which multicomponent concentric microfibrils in diameter about 8 nm give rise to macrofibrils in diameter $0.5{\mu}m$ to $0.8{\mu}m$ encased in limiting membrane. The melanin granules are spherical shaped about $0.5{\mu}m$ in size and scattered between macrofibrils. The medulla in the normal hairs are $16{\mu}m$ in diameter centrally region of cortex. Normal hair shafts undergo progressive degenerative changes due to a variety of environmental insults. In the initial weathering process of hair, the cuticular scales became irregularly raised and broken, and then cuticle cells formed cytoplasmic vacuolation, following dissociated intercellular membrane complex, ultimately entirely lost and nuded cortex. Occasionally, transverse fissures were seen at hair shafts indicating that the hairs were deteriorated. Complete removal of the cuticular layer in the heavily damaged cortex portions appeared splitting of the cortical cell into its macrofibrils and scattering of melanin granules.

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The Enhancement of Thermal Stability of Nickel Monosilicide by Ir and Co Insertion (Ir과 Co를 첨가한 니켈모노실리사이드의 고온 안정화 연구)

  • Yoon, Ki-Jeong;Song, Oh-Sung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.6
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    • pp.1056-1063
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    • 2006
  • Thermal evaporated 10 nm-Ni/l nm-Ir/(or polycrystalline)p-Si(100) and 10 nm-$Ni_{50}Co_{50}$/(or polycrystalline)p-Si(100) films were thermally annealed using rapid thermal annealing fur 40 sec at $300{\sim}1200^{\circ}C$. The annealed bilayer structure developed into Ni(Ir or Co)Si and resulting changes in sheet resistance, microstructure, phase and composition were investigated using a four-point probe, a scanning electron microscopy, a field ion beam, an X-ray diffractometer and an Auger electron spectroscope. The final thickness of Ir- and Co-inserted nickel silicides on single crystal silicon was approximately 20$\sim$40 nm and maintained its sheet resistance below 20 $\Omega$/sq. after the silicidation annealing at $1000^{\circ}C$. The ones on polysilicon had thickness of 20$\sim$55 nm and remained low resistance up to $850^{\circ}C$. A possible reason fur the improved thermal stability of the silicides formed on single crystal silicon substrate is the role of Ir and Co in preventing $NiSi_2$ transformation. Ir and Co also improved thermal stability of silicides formed on polysilicon substrate, but this enhancement was lessened due to the formation of high resistant phases and also a result of silicon mixing during high temperature diffusion. Ir-inserted nickel silicides showed surface roughness below 3 nm, which is appropriate for nano process. In conclusion, the proposed Ir- and Co- inserted nickel silicides may be superior over the conventional nickel monosilicides due to improved thermal stability.

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Fabrication and Characterization of Lead Oxide (PbO) Film for High Efficiency X-ray Detector (고효율 X선 검출기 적용을 위한 PbO 필름 제작 및 특성 연구)

  • Cho, Sung-Ho;Kang, Sang-Sik;Choi, Chi-Won;Kwun, Chul;Nam, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.329-329
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    • 2007
  • Photoconductive poly crystalline lead oxide coated on amorphous thin film transistor (TFT) arrays is the best candidate for direct digital x-ray detector for medical imaging. Thicker films with lessening density often show lower x-ray induced charge generation and collection becomes less efficient. In this work, we present a new methodology used for the high density deposition of PbO. We investigate the structural properties of the films using X-ray diffraction and electron microscopy experiments. The film coatings of approximately $200\;{\mu}m$ thickness were deposited on $2"{\times}2"$ conductive-coated glass substrates for measurements of dark current and x-ray sensitivity. The lead oxide (PbO) films of $200\;{\mu}m$ thickness were deposited on glass substrates using a wet coating process in room temperature. The influence of post-deposition annealing on the characteristics of the lead oxide films was investigated in detail. X-ray diffraction and scanning electron microscopy, and atomic force microscopy have been employed to obtain information on the morphology and crystallization of the films. Also we measured dark current, x-ray sensitivity and linearity for investigation of the electrical characteristics of films. It was found that the annealing conditions strongly affect the electrical properties of the films. The x-ray induced output charges of films annealed in oxygen gas increases dramatically with increasing annealing temperatures up to $500^{\circ}C$ but then drops for higher temperature anneals. Consequently, the more we increase the annealing temperatures, the better density and film quality of the lead oxide. Analysis of this data suggests that incorporation and decomposition reactions of oxygen can be controlled to change the detection properties of the lead oxide film significantly. Post-deposition thermal annealing is also used for densely film. The PbO films that are grown by new methodology exhibit good morphology of high density structure and provide less than $10\;pA/mm^2$ dark currents as they show saturation in gain (at approximate fields of $4\;V/{\mu}m$). The ability to operate at low voltage gives adequate dark currents for most applications and allows voltage electronics designs.

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Fabrication Process of Natural Silk Including Ag Nano-particle (은나노 입자가 함유된 천연실크 제조 방법)

  • Jung, I-Yeon;Kang, Pil-Don;Kim, Kee-Young;Ryu, Kang-Sun;Sohn, Bong-Hee;Kim, Yong-Soon;Kim, Mi-Ja;Lee, Kwang-Gill;Chai, Chang-Keun;Koh, Seok-Keun
    • Journal of Sericultural and Entomological Science
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    • v.49 no.1
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    • pp.24-27
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    • 2007
  • Silkworm fed on the mulberry leaf mixed with silver nanoparticle to produce silver-nanoparticle embedded cocoon. Comparative analysis of silver content of cocoon shell, percentage of pupation and percentage of cocoon-shell weight showed that the optimum concentration and the feeding period of mulberry leaf mixed with silver nanoparticle were 500 ppm and the period from 3 day 5 instar to mounting of silkworm. The silver content of cocoon was observed variously by silkworm breedings. C212 variety makes pale yellow cocoon with the highest silver content(69%). Using the scanning electron microscope, we showed that the size of silver nanoparticles in silk was observed from 26.98 to 99.81nm. Silver-nanoparticle embedded silk is expected to use as high valuable application owing to the different functional properties including antibiotic characteristics and mechanical and electronic properties. The applicable fields expected is antistatic and/or electronic products with biological degradable natural materials.

Fabrication of Photocatalyst Glass Beads Coated with TiO2 Thin Film by a Layer-by-Layer Process (LBL법에 의해 TiO2막이 코팅된 광촉매 글라스 비드 제조)

  • Lee, Ji-Sun;Chae, Yoo-Jin;Lee, Mi-Jai;Kim, Sei-Ki;Hwang, Jong-Hee;Lim, Tae-Young;Hyun, Soong-Keun;Kim, Jin-Ho
    • Korean Journal of Materials Research
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    • v.22 no.7
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    • pp.379-383
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    • 2012
  • $TiO_2$ thin films consisting of positively charged poly(diallyldimethylammonium chloride)(PDDA) and negatively charged titanium(IV) bis(ammonium lactato) dihydroxide(TALH) were successfully fabricated on glass beads by a layer-by-layer(LBL) self-assembly method. The glass beads used here showed a positive charge in an acid range and negative charge in an alkaline range. The glass beads coated with the coating sequence of(PDDA/TALH)n showed a change in the surface morphology as a function of the number of bilayers. When the number of bilayers(n) of the(PDDA/TALH) thin film was 20, Ti element was observed on the surface of the coated glass beads. The thin films coated onto the glass beads had a main peak of the (101) crystal face and were highly crystallized with XRD diffraction peaks of anatase-type $TiO_2$ according to an XRD analysis. In addition, the $TiO_2$ thin films showed photocatalytic properties such that they could decompose a methyl orange solution under illumination with UV light. As the number of bilayers of the(PDDA/TALH) thin film increased, the photocatalytic property of the $TiO_2$-coated glass beads increased with the increase in the thin film thickness. The surface morphologies and optical properties of glass beads coated with $TiO_2$ thin films with different coating numbers were measured by field emission scanning electron microscopy(FE-SEM), X-ray diffraction(XRD) and by UV-Vis spectrophotometry(UV-vis).

Morphological Characteristics and Function of Hilum in Safflower Seed Germination (잇꽃 종자의 발아에서 제(Hilum)의 형태적 특성과 기능)

  • Ahn, Seok-Hyeon;Chung, Nam-Jin
    • Horticultural Science & Technology
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    • v.31 no.1
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    • pp.117-122
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    • 2013
  • This research was carried out to clarify the germination characteristics with reference to hard seed coat in safflower. Morphologically, seed coat surface has hilum and micropyle which were evident during seed development stage. In the flower of developing seeds, the hilum area is connected with placenta of maternal tissue while the micropyle area is connected with the style of pistil. When the seeds imbibed, the hilum surface began to crack and the embryo protrudes through the hilum. To investigate the route for moisture absorption and gas exchange on the seed coat, the hilum and the micropyle were artificially sealed by paraffin. The seeds whose hilum were sealed could not germinate, which indicates that the exchange of moisture and oxygen takes place through hilum in safflower seeds. The germination was tested at $15^{\circ}C$, $20^{\circ}C$, and $25^{\circ}C$ by three substrates with different moisture conditions; top of paper method (hilum submerged in water), between-paper method, and soil seeding. The germination percentages were 31.3% at $15^{\circ}C$, 15.7% at $20^{\circ}C$ and 6.0% at $25^{\circ}C$ in the top of paper method; and 45.5% at $15^{\circ}C$, 30.0% at $20^{\circ}C$ and 14.0% at $25^{\circ}C$ in the between-paper method; and 80.0% at $15^{\circ}C$, 77.0% at $20^{\circ}C$ and 78.0% at $25^{\circ}C$ in the soil seeding, respectively. When the internal structure of hilum was investigated through SEM, it was found out consisting of vascular bundle element. In conclusion, the hilum of safflower seed was closely related with water absorption and gas exchange during initial germination process.