• Title/Summary/Keyword: scanning acoustic microscope(SAM)

Search Result 25, Processing Time 0.019 seconds

태양전지용 단결정 실리콘 웨이퍼의 기계적 강도 및 결함 분포

  • Sin, Bong-Geol;Hyeon, Chang-Yong;Lee, Jun-Seong;Park, Seong-Eun;Kim, Dong-Hwan;Byeon, Jae-Won
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2009.06a
    • /
    • pp.450-450
    • /
    • 2009
  • 최근 전세계적으로 태양전지의 대량보급에 따라 실리콘 원료의 공급에 차질이 생겨 원자재 값이 상승하는 추세에 있다. 결정질 실리콘 태양전지의 제조비용중 실리콘 재료 및 웨이퍼가 차지하는 비율은 약 50~60%정도로 높기 때문에 실리콘 웨이퍼의 두께를 감소시키는 것이 비용절감을 위한 효과적인 방법으로 기대되고 있다. 그러나 실리콘 웨이퍼의 두께가 앓아질수록 제조공정중 균열이나 파손이 발생할 가능성이 높아지기 때문에 이에 따른 실리콘 웨이퍼의 기계적 물성에 대한 연구가 필수적이라 할 수 있다. 본 연구에서는 현재 상용으로 사용되고 있는 크기가 5 인치인 $200{\mu}m$ 두께의 실리콘웨이퍼 (As-saw)를 약 80여개의 시편으로 절단한 후 각각의 파단강도를 부위별로 측정하였다. 또한 표면절단결함을 제거하는 saw damage etching(SDE) 시간을 제어하여 두께가 $150{\mu}m$, $130{\mu}m$인 웨이퍼를 준비하였다. 이들 시험편에 대해서도 부위별 파단강도를 측정하여 as-saw상태의 시험편과 비교하였다. 파단강도 측정은 4 접 굽힘시험을 통하여 측정하였으며 파단면은 주사전자현미경을 통하여 관찰하였다. 또한 실리콘 웨이퍼의 미세균열을 비파괴적으로 검출하기 위하여 100MHz 고주파수를 이용하는 초음파현미경(SAM, scanning acoustic microscope)을 이용하여 균열의 분포를 영상화하였다.

  • PDF

Damage Behavior and Residual Bending Fatigue Strength of CFRP Composite Laminates Subjected to Impact Loading (충격하중을 받은 CFRP 적층판의 손상거동과 잔류굽힘피로강도)

  • Im, Kwang-Hee;Yang, In-Young
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.20 no.6
    • /
    • pp.1836-1842
    • /
    • 1996
  • In this paper, static and fatigue bending strengths of CFRP(carbon fiber reinforced plastic laminates having impact damage(FOD) are evaluated. Composite laminates used for this experiment are CF/EPOXY and CF/PEEK orthotropy laminated plates, which have two-interfaces[${0^0}_4{90^0}_4}$]$_sym$. A steel ball launched by the air gun colides against CFRP laminates to generate impact damages. The damage growth during bending fatigue test is observed by the scanning acoustic microscope(SAM). When the impacted side is compressed, the residual fatigue bending strength of CF/PEEK specimen P is greater that that of CF/EPOXY SPECIMEN B. On the other hand, when the impacted side is in tension, the residual fatigue bending strength of CF/PEEK speicemen P is smaller than that of CF/EPOXY specimen B. In the case of impacted-side compression, fracture is proposed from the transverse crack generated near impact point. On the other hand, fracture is developed toward the impact point from the edge of interface-b delamination in the case of impacted-side tension.

A Study on Effects to Residual Fatigue Bending Strength or Orthotropy CFRP Composite Laminates under High Temperature and Moisture (고온.고습하에서 직교이방성 CFRP 복합적층판이 잔류피로 굽힘강도에 미치는 영향에 관한 연구)

  • 임광희;양인영
    • Transactions of the Korean Society of Automotive Engineers
    • /
    • v.8 no.6
    • /
    • pp.247-258
    • /
    • 2000
  • It is thought that impact damages and hygrothermals can affect to CFRP (Carbon-fiber reinforced plastic) composite laminated due to the sensitivity on the composite laminated Therefore, this paper focuses on the fracture mechanisms experimentally based on a scanning acoustic microscope (SAM) when subjected to impact damages, i.e., foreign object damages(FOD), and also the influence of impact damages and hygrothermals on residual fatigue bending strength of CFRP laminates. Composite laminates used in the experiment are CF/EPOXY orthotropy laminated plates, which constist of two-interfaces [04/904]s. A steel ball launched by an air gun collides against CFRP laminates to generate impact damages. Bending fatigue tests are periodically interrupted for a nondestructive evaluation (NDE) measurement of the progrossive damages to built the fracture mechanism by impact damages, and three-point fatigue bending tests are carried out to investigate the influence of hygrothermals on the effect on the residual bending fatigue strength of CFRP laminates.

  • PDF

Precise Estimation of Nonlinear Parameter in Pulse-Like Ultrasonic Signal (펄스형 초음파 신호에서 비선형 파라미터의 정밀 추정)

  • Ha, Job;Jhang, Kyung-Young;Sasaki, Kimio;Tanaka, Hiroaki
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.26 no.2
    • /
    • pp.77-83
    • /
    • 2006
  • Ultrasonic nonlinearity has been considered as a solution for the detection of microcracks or interfacial delamination in a layered structure. The distinguished phenomenon in nonlinear ultrasonics is the generation of higher-order harmonic waves during the propagation. Therefore, in order to quantify the nonlinearity, the conventional method measures a parameter defined as the amplitude ratio of a second-order harmonic component and a fundamental frequency component included in the propagated ultrasonic wave signal. However, its application In field inspection is not easy at the present stage because no standard methodology has yet been made to accurately estimate this parameter. Thus, the aim of this paper is to propose an advanced signal processing technique for the precise estimation of a nonlinear ultrasonic parameter, which is based on power spectral and bispectral analysis. The method of estimating power spectrum and bispectrum of the pulse-like ultrasonic wave signal used in the commercial SAM (scanning acoustic microscopy) equipment is especially considered in this study The usefulness of the proposed method Is confirmed by experiments for a Newton ring with a continuous air gap between two glasses and a real semiconductor sample with local delaminations. The results show that the nonlinear parameter obtained tv the proposed method had a good correlation with the delamination.

The Determination of Resolution on the Improved FBP Tomographic Algorithm (개선된 FBP 토모그라픽 알고리즘에서 분해능의 결정)

  • Koo, Kil-Mo;Hwang, Ki-Hwan;Park, Chi-Seong;Ko, Duck-Young
    • Journal of the Institute of Electronics Engineers of Korea TE
    • /
    • v.42 no.1
    • /
    • pp.21-28
    • /
    • 2005
  • In this paper, we studied resolution to the FBP(Filtered Back-Propagation) tomographic image reconstruction algorithms. In order to analyze the resolution to the tomographic images, we derived ambiguity function to this algorithm which can be reconstructed from the improved FBP image reconstruction algorithm by using fixed coordinate system practically. Through simulation using this function, we determined the lateral and depth resolution quantitively and then analyzed respectively. Simulation results show that the lateral and depth resolution to the improved FBP image reconstruction algerian was determined $0.27\lambda\;and\;0.70\lambda$ at the 3dB, and also $0.89\lambda\;and\;0.96\lambda$ at the 6dB respectively. This results proved that improved FBP reconstruction algorithms for diffraction tomography of incident planar wave is useful to developed the tomographic image system, analyze the resolution to the tomographic images, we derived ambiguity function to this algerian which can be reconstructed from the improved FBP image reconstruction algorithm by using fixed coordinate system.