• Title/Summary/Keyword: saturation coverage

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An Empirical Relation between the Plating Process and Accelerator Coverage in Cu Superfilling

  • Cho, Sung-Ki;Kim, Myung-Jun;Koo, Hyo-Chol;Kim, Soo-Kil;Kim, Jae-Jeong
    • Bulletin of the Korean Chemical Society
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    • v.33 no.5
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    • pp.1603-1607
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    • 2012
  • The effects of plating process on the surface coverage of the accelerator were investigated in terms of Cu superfilling for device metallization. When a substrate having 500 nm-wide trench patterns on it was immersed in an electrolyte containing poly (ethylene glycol) (PEG)-chloride ion ($Cl^-$)-bis(3-sulfopropyl) disulfide (SPS) additives without applying deposition potential for such a time of about 100s, voids were generated inside of the electrodeposit. In time-evolved electrochemical analyses, it was observed that the process (immersion without applying potential) in the electrolyte led to the build-up of high initial coverage of SPS-Cl on the surface, resulting in the fast saturation of the coverage. Repeated experiments suggested that the fast saturation of SPS-Cl failed in superfilling while a gradual increase in the SPS-Cl coverage through competition with initially adsorbed PEG-Cl enabled it. Consequently, superfilling was achievable only in the case of applying the plating potential as soon as the substrate is dipped in an electrolyte to prevent rapid accumulation of SPS-Cl on the surface.

The change of alkali-metals/Si(111) surface structure and Investigation of desorption energy (알칼리금속/Si(111)표면에서의 구조변화 및 탈착에너지 조사)

  • Kwak, Ho-Weon;Jung, Sung-Min
    • Journal of the Korean Society of Industry Convergence
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    • v.6 no.3
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    • pp.201-205
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    • 2003
  • The effects of adsorption and desorption of alkali-metals on Si(111) surface were investigated by using AES and RHEED-system. The adsorption system is a fundamental interest because of its unique electronic properties such as measurement of work function change, adatom-core level shift. It was found that the growth node of K on Si(111) surface was layer by layer growth and the saturation coverage was 2.0ML at room temperature. Superstructure changes on Si(111) surface according to the alkali-metal thickness and substrate temperatures were accurately defined. By applying the isothermal desorption method, the desorption energies of Li/Si(111) and K/Si(111) surfaces was measured. On Li/Si(111) and K/Si(111) surfaces, the desorption energies were 3.07 eV, 2.19 eV respectively.

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STM Observation of Pt{111}(3$\times$3)-CI and c(4$\times$2)-CI Structures

  • Song, M.B.
    • Bulletin of the Korean Chemical Society
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    • v.22 no.3
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    • pp.267-270
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    • 2001
  • The adsorption of chlorine on a Pt(111) surface at 90 K has been studied using scanning tunneling microscopy (STM) in ultra-high vacuum environments. The adsorbed chlorine atoms give rise to two different ordered structures, (3${\times}$3)-Cl and c(4${\times}$2)- Cl, depending on the coverage. It has been determined from the STM image that the absolute coverage of (3${\times}$3)-Cl structure is 0.44, which is not in agreement with coverage calibrated by a low energy electron diffraction technique together with an Auger electron spectrometer and a thermal desorption spectrometer. The Cl atoms bound to on-top sites at the Pt(111)(3${\times}$3)-Cl surface appeared to effectively perturb the density of states of Pt atoms, as compared with that bound to bridging sites. The other ordered structure, c(4${\times}$2)-Cl, with small domain sizes, consists of both on-top and bridge-bonded species with a saturation coverage of 0.5.

The study of oxygen molecules on Pt (111) surface with high resolution x-ray photoemission spectroscopy

  • Kim, Yong-Su;Bostwick, Aaron;Rotenberg, Eli;Ross, Philip N.;Hong, Soon-Cheol;Mun, Bong-Jin Simon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.61-61
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    • 2010
  • By using high resolution x-ray photoelectron spectroscopy, we show that inelastic scattering of photoelectron at low temperature (30K~50K) generates two kinds of oxygen species on Pt (111) surface. Intense synchrotron radiation source dissociates oxygen molecules into chemisorbed atomic oxygen and induces the formation of PtO on surface. Estimated coverage of dissociated atomic oxygen is 0.5 ML, suggesting possible formation of p($2{\times}1$) surface structure, while PtO coverage shows saturation coverage of 0.5 ML. Molecular oxygen dosed at 30 K undergoes thermally activated transition from physisorbed to chemisorbed state at around 40K.

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Diagnosis on Degree of Saturation Model of COSMOS Affected by Geometric and Detection Conditions and Detector Placements (교통조건, 기하구조 조건 및 검지기 설치위치에 따른 실시간신호제어시스템 포화도 산출방식 진단)

  • KIM, Jun-Young;KIM, Jin Tae
    • Journal of Korean Society of Transportation
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    • v.34 no.1
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    • pp.81-94
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    • 2016
  • The Korean real-time traffic responsive control systems, Cycle Offset Split Model of Seoul (COSMOS), employs a single theoretical model to estimate the degree-of-saturation (DS) on approaches. However, the deployment of the system has been accomplished without practical consideration of its field performance. This paper delivers a diagnosis study performed to find the relationships yet known on the DS values against the operational conditions unproved in theory but ordinarily observed in field practice. Based on the analysis of the historical log data (476,505 cycles) obtained from the COSMOS server, it was found; (1) full coverage of lane detections should perform better than the sample coverage of detection in ordinary conditions, (2) the sample coverage of detection perform better than the other case with an exclusive bus lane, (3) detection in which a shared lane is involved provide poor estimation of DS, (4) poor DS estimation when a detection lane is adjacent to a shared lane, and (5) the DS values obtained during a day can hardly be stable all time. The findings suggest traffic engineers a progressive direction to move forward for the next real-time traffic control systems.

The Adsorption Energetics and Geometry of Ketene Physisorbed on Ag(111)$^*$

  • Kim, Jeong Su;Dae, Hye Ryeong
    • Bulletin of the Korean Chemical Society
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    • v.16 no.2
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    • pp.143-148
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    • 1995
  • Ketene (CH2CO) adsorption on Ag(111) has been studied in ultrahigh vacuum using electron energy loss spectroscopy and temperature programmed desorption. Ketene adsorbs molecularly on Ag(111) at temperatures below 126 K. The coverage increases linearly with exposure until saturation. No multilayer formation and no shift in desorption temperature with coverage were observed, indicating a lack of attractive interaction between adsorbate molecules. The desorption activation energy is estimated to be 7.8 kcal/mol by assuming first order kinetics and a pre-exponential factor of 1013 sec-1. The adsorption geometry of ketene on the surface is determined from the relative intensities of the vibrational energy loss peaks. The CCO axis of CH2CO is found to be almost parallel to (∼4°away from) the surface and the molecular plane is almost perpendicular to the surface (∼3°tilt).

Spontaneously Adsorbed Mo Layers on Pt(111) and Pt(100) Single Crystal Electrode Surfaces

  • Han, Yoon-gu;Jung, Chang-hoon;Rhee, Choong-Kyun
    • Bulletin of the Korean Chemical Society
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    • v.23 no.3
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    • pp.395-399
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    • 2002
  • The voltammetric behavior of spontaneously adsorbing Mo layers on Pt(111) and Pt(100) electrodes has been studied to estimate the number of electrons involved in the electrochemical processes of spontaneously adsorbed Mo and the number of the bloc ked Pt sites for hydrogen adsorption. On Pt(111) and Pt(100) surfaces, the spontaneously adsorbed Mo layers showed redox peaks at 0.10 V and 0.15 V, respectively, and continuous current-potential waves in the conventional hydrogen region. Since the potential range of the Mo redox processes on both surfaces overlapped partially with the potential range of hydrogen adsorption, the variation in the ratio of the total charge of Mo and H ($Q_H$ +$Q_{MO}$) to the hydrogen charge of clean Pt electrode ($Q_H^0$) was analyzed. From the analysis, six electrons were estimated to be involved in the electrochemical processes of the spontaneously adsorbed Mo, and four Pt sites for hydrogen adsorption were calculated to be blocked by one adsorbed Mo atom. Based on these figures and the pH dependence of the Mo redox processes, we have proposed an electrochemical equation for the spontaneously adsorbed Mo. This electrochemical equation led us to conclude that the saturation coverage of the spontaneously adsorbed Mo is 0.25. The coverage of Mo less than 0.25, however, could not be determined voltammetrically due to the convolution of the charges of Mo and H.

A Study on the Satellite Orbit Design for KPS Requirements

  • Shin, Miri;Lim, Deok Won;Chun, Sebum;Heo, Moon Beom
    • Journal of Positioning, Navigation, and Timing
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    • v.8 no.4
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    • pp.215-223
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    • 2019
  • This paper analyzes navigation performances of the Korean Positioning System (KPS) constellation with respect to the orbit parameters which fulfills the specification requirements. Specifically, the satellite configuration and navigation requirements of KPS are explained, and the daily mean horizontal dilution of precision (HDOP) and satellite visibility on KPS coverage are analyzed to confirm the adequate orbit parameters. However, due to orbital slot saturation, geostationary-orbit (GEO) satellites may not be allocated in the original orbit as specified in the KPS requirements. Therefore, in a spanned window of 4 degrees from the reference longitude the navigation performance of each GEO satellite orbit is investigated.

A Study on the Improvement of the Durability of Drive Plate in Automobiles by Shot Peening (쇼트피닝 가공에 의한 자동차용 Drive Plate의 내구성 향상)

  • Cheong Seongkyun;Lee Kookjin;Lee Dongsun;Lee Jaeheon
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.191-196
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    • 2005
  • The effects of shot peening on the fatigue strength of SK-5M steel is investigated by experiment. The shot peening process is investigated optimum peening condition by changing impeller speed and exposure time. Bending fatigue test is accomplished to investigate the effect of optimum peening condition on the fatigue characteristics. As exposure time is increased, fatigue life in high stress is increased in early stage, become the maximum from 60 to 100 seconds, and then is decreased. Observing fracture surface through SEM after fatigue test, we can see clear configuration of cracks and peening layer.

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The Adsorption and Desorption of $NH_3$ on Rutile $TiO_2(110)-1{\times}1$ Surfaces

  • Kim, Bo-Seong;Li, Zhenjun;Kay, Bruce D.;Dohnalek, Zdenek;Kim, Yu-Gwon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.265-265
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    • 2012
  • The adsorption of molecular $NH_3$ on rutile $TiO_2(110)-1{\times}1$ surfaces was investigated using a temperature-programmed desorption (TPD) technique combined with a molecular beam apparatus. A quantitative investigation into the TPD spectra of $NH_3$ was made for $NH_3$ adsorbed on two kinds of rutile $TiO_2(110)-1{\times}1$ surfaces with the oxygen vacancy ($V_O$) concentration of ~0% (p-$TiO_2(110)$) and ~5% (r-$TiO_2(110)$), respectively. On both surfaces, non-dissociative adsorption of $NH_3$ was inferred from a quantitative analysis on the amount of adsorbed $NH_3$ and those desorbed. With increasing coverage, the monolayer desorption feature shifted from 400 K toward lower temperatures until it saturates at 160 K, suggesting a repulsive nature in the interaction between $NH_3$ molecules. At the very low coverage regime, the desorption features were found to extend up to 430 K and 400 K on p-$TiO_2(110)$ and p-TiO(110), respectively. As a result, the saturation coverage of monolayer of $NH_3$ was higher on the p-$TiO_2(110)$ surface than on the p-TiO(110) by about 10%. The desorption energy ($E_d$) of $NH_3$ obtained by inversion of the Polanyi-Wigner equation indicated that the difference between the $E_d$'s of $NH_3$ (that is, $E_d(on\;p-TiO_2(110)$) - $E_d$(on p-TiO(110)) was 14 kJ/mol at ${\theta}(NH_3)=0$ and decreased to 0 as the coverage approached to a monolayer. The observed adsorption behavior of $NH_3$ was interpreted using an interaction model between $NH_3$ and surface defects on $TiO_2$ such as VO's and $Ti^{3+}$ interstitials.

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