• Journal of the Korean Institute of Gas
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• v.25 no.2
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• pp.42-51
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• 2021

Facilities that supply specialty gases used in semiconductor manufacturing mainly handles with hazardous and dangerous substances with flammable, toxic, and corrosive properties, and gas cabinets are mainly used as such supply facilities. The effects of the supply facilities were analyzed for each leak through the rupture disk in the gas cabinet and a leak where the leak hole. In this case, gas leaked to the outside depending on the leak area. It is a factor that creates a risk depending on the concentration of the leaked gas. Depending on the risk of leakage, all measures such as safe operation procedures should be reviewed again.

• Journal of the Korean Institute of Gas
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• v.16 no.4
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• pp.52-58
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• 2012

Recently, waste gas incineration is increasing due to strong environmental regulatory system in Korea. These incinerating facilities are usually connected with the top of the storage tank through pipeline and incinerate off gas with the flame. Therefore, the flame originated from these facilities is likely to move back into pipeline and might cause an explosion of the storage tank. Accordingly, the purpose of this study is to suggest the preventive measures and the way to improve the safety of these incineration systems through the cause analysis of a major industrial accident occurred in a acrylic acid manufacturing process in Korea. As a result of the study, the preventive measures are suggested as follows. (1) Air or inert gas inflow facilities should be well designed to dilute flammable gases into air or inert gas sufficiently before the blower is restarted in order to prevent the explosion (2) It is needed for the detonation-type flame arresters to be installed on the top of the storage tanks. (3) In case of using the deflagration-type flame arresters, it is necessary to install a rupture disk before the arresters, or blow off the flame outside tanks by connecting the tank top and the incinerator with hood-type pipe. (4) TDR should be installed to be restarted automatically after the momentary power failure.