Properties of Recessed Polysilicon/Silicon($n^{+}$ ) - Silicon(P) Junction with Process Condition
(공정조건에 따른 함몰된 다결정실리콘/실리콘($n^{+}$ ) - 실리콘(p) 접합의 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1994.05a
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- pp.152-153
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- 1994