• Title/Summary/Keyword: resolution correction

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Overlay correction in sub-0.18${\mu}{\textrm}{m}$ metal layer photolithography process (0.18${\mu}{\textrm}{m}$이하 metal layer 사진공정에서의 overlay 보정)

  • 이미영;이홍주
    • Proceedings of the KAIS Fall Conference
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    • 2002.05a
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    • pp.106-108
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    • 2002
  • 반도체 physical layout design rule이 작아짐에 따라 Proximity effect와 overlay가 Pattern 구현에 크게 영향을 미치고 있다. Metal layer와 contact의 부족한 overlay margin으로 overlay 불량이 발생하고, 감소한 space margin으로 인해 bridge와 같은 문제가 나타난다. 따라서, resolution을 향상시키고, 최소한의 overlay margin을 확보함으로써 미세 pattern의 구현을 가능하게 한다. 이를 위해 OPC와 attPSM 같은 분해능향상기술이 사용된다. 그러나 attPSM의 사용은 원하지 않는 pattern이 생성되는 sidelobe와 같은 문제가 발생한다. 따라서 serial image simulation올 통해 추출한 rule을 rule-based correction에 적용하여 sidelobe현상을 방지한다. 그리고 overlay margin 부족으로 나타나는 문제는 metal layer와 contact overlap되는 영역의 line edge를 확장하고, rule checking을 통해 최소한의 space margin을 확보하여 해결한다 따라서 overlay error를 rule-based correction을 사용하여 효과적으로 방지한다.

Error Correction of Laser Interferometer Using Capacitive Sensor (정전용량센서를 이용한 레이저 간섭계 오차보정)

  • Kim, Jae-Cheon;Seo, Suk-Hyun;Jeon, Jae-Wook;Park, Ki-Heon;You, Kwan-Ho
    • Proceedings of the KIEE Conference
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    • 2006.04a
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    • pp.342-344
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    • 2006
  • During last years, large investments have been directed to development and research of nano-technological products like semiconductor, display panel, optic-fiber communication components, life technology, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environmental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under $100{\mu}m$, than laser interferometer. New error correction method for laser interferometry using capacitive sensor will be introduced in this paper.

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Shading Correction Algorithm and CMOS Image Sensing System Design (쉐이딩 보정 알고리즘과 CMOS 이미지 센싱 시스템 설계)

  • Kim, Young Bin;Ryu, Conan K.R.
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.10a
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    • pp.1003-1006
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    • 2012
  • The image correction algorithm and system design for CMOS sensor to enhance the image resolution is presented in this paper. The proposed algorithm finds out the image cell from the sensor and process them by the limited memory configuration. The evaluation of the method is done by the designed hardware system. The experimental results are capable of improving contrast per channel and of sensing equalized image quality on an edge of image.

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A Low Frequency Band Watermarking with Weighted Correction in the Combined Cosine and Wavelet Transform Domain

  • Deb, Kaushik;Al-Seraj, Md. Sajib;Chong, Ui-Pil
    • Journal of the Institute of Convergence Signal Processing
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    • v.14 no.1
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    • pp.13-20
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    • 2013
  • A combined DWT and DCT based watermarking technique of low frequency watermarking with weighted correction is proposed. The DWT has excellent spatial localization, frequency spread and multi-resolution characteristics, which are similar to the theoretical models of the human visual system (HVS). The DCT based watermarking techniques offer compression while DWT based watermarking techniques offer scalability. These desirable properties are used in this combined watermarking technique. In the proposed method watermark bits are embedded in the low frequency band of each DCT block of selected DWT sub-band. The weighted correction is also used to improve the imperceptibility. The extracting procedure reverses the embedding operations without the reference of the original image. Compared with the similar approach by DCT based approach and DWT based approach, the experimental results show that the proposed algorithm apparently preserves superiori mage quality and robustness under various attacks such as JPEG compression, cropping, sharping, contrast adjustments and so on.

Measurement and Correction of PCB Alignment Error Using Two Cameras (2대의 카메라를 이용한 PCB의 위치 오차 측정 및 보정)

  • 김천환;신동원
    • 제어로봇시스템학회:학술대회논문집
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    • 2000.10a
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    • pp.302-302
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    • 2000
  • This paper presents the measurement and correction of PCB alignment errors for PCB-manufacturing machines. The conventional PCB-manufacturing machine doesn't have enough accuracy to accommodate the demand for high-resolution circuit pattern and high-density mounting capacity of electronic chips. It is because of alignment errors of PCB loaded to the PCB-manufacturing machine. Therefore, this study focuses on the development of the system which is able to measure and correct alignment errors whit high-accuracy. An automatic optical inspection part measures the PCB alignment error using two cameras, and the high-accuracy 3-axis stage makes correct of these error. The operating system is run in the environment of Window 98 (or NT). Finally we implemented this system to PCB screen printer and PCB exposure system.

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High Resolution Reconstruction of Multispectral Imagery with Low Resolution (저해상도 Multispectral 영상의 고해상도 재구축)

  • Lee, Sang-Hoon
    • Korean Journal of Remote Sensing
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    • v.23 no.6
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    • pp.547-552
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    • 2007
  • This study presents an approach to reconstruct high-resolution imagery for multispectral imagery of low-resolution using panchromatic imagery of high-resolution. The proposed scheme reconstructs a high-resolution image which agrees with original spectral values. It uses a linear model of high-and low- resolution images and consists of two stages. The first one is to perform a global estimation of the least square error on the basis of a linear model of low-resolution image associated with high-resolution feature, and next local correction then makes the reconstructed image locally fit to the original spectral values. In this study, the new method was applied to KOMPSAT-1 EOC image of 6m and LANDSAT ETM+ of 30m, and an 1m RGB image was also generated from 4m IKONOS multispectral data. The results show its capability to reconstruct high-resolution imagery from multispectral data of low-resolution.

Robust Radiometric and Geometric Correction Methods for Drone-Based Hyperspectral Imaging in Agricultural Applications

  • Hyoung-Sub Shin;Seung-Hwan Go;Jong-Hwa Park
    • Korean Journal of Remote Sensing
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    • v.40 no.3
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    • pp.257-268
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    • 2024
  • Drone-mounted hyperspectral sensors (DHSs) have revolutionized remote sensing in agriculture by offering a cost-effective and flexible platform for high-resolution spectral data acquisition. Their ability to capture data at low altitudes minimizes atmospheric interference, enhancing their utility in agricultural monitoring and management. This study focused on addressing the challenges of radiometric and geometric distortions in preprocessing drone-acquired hyperspectral data. Radiometric correction, using the empirical line method (ELM) and spectral reference panels, effectively removed sensor noise and variations in solar irradiance, resulting in accurate surface reflectance values. Notably, the ELM correction improved reflectance for measured reference panels by 5-55%, resulting in a more uniform spectral profile across wavelengths, further validated by high correlations (0.97-0.99), despite minor deviations observed at specific wavelengths for some reflectors. Geometric correction, utilizing a rubber sheet transformation with ground control points, successfully rectified distortions caused by sensor orientation and flight path variations, ensuring accurate spatial representation within the image. The effectiveness of geometric correction was assessed using root mean square error(RMSE) analysis, revealing minimal errors in both east-west(0.00 to 0.081 m) and north-south directions(0.00 to 0.076 m).The overall position RMSE of 0.031 meters across 100 points demonstrates high geometric accuracy, exceeding industry standards. Additionally, image mosaicking was performed to create a comprehensive representation of the study area. These results demonstrate the effectiveness of the applied preprocessing techniques and highlight the potential of DHSs for precise crop health monitoring and management in smart agriculture. However, further research is needed to address challenges related to data dimensionality, sensor calibration, and reference data availability, as well as exploring alternative correction methods and evaluating their performance in diverse environmental conditions to enhance the robustness and applicability of hyperspectral data processing in agriculture.

A Study on the Correction of Shadow Effects in High Resolution Satellite Images: Approach on the using Samples (고해상도 위성영상의 그림자 효과 보정에 관한 연구 - 표본을 통한 접근 -)

  • 윤아영
    • Proceedings of the KGS Conference
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    • 2004.05a
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    • pp.104-104
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    • 2004
  • 본 연구는 고해상도 위성영상에서 나타나는 그림자 효과를 보정하여 공간정보 획득을 향상하는데 목적이 있다. 이를 위한 방법으로 그림자 효과를 받은 화소와 그렇지 않은 화소의 군집을 표본으로. 사용하여 그림자 효과를 보정하는 방법을 제시한다. 표본은 그림자 효과를 받은 화소와 그렇지 않은 화소를 대상으로 각기 생성된다. (중략)

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Evaluation of Image Quality Using CT Attenuation Correction in SPECT/CT (SPECT/CT에서 CT감쇠보정에 따른 영상의 질 평가)

  • Cho, Sung Wook;Kim, Gye Hwan;Sung, Yong Joon;Lee, Hyung Jin;Kim, Jin Eui
    • The Korean Journal of Nuclear Medicine Technology
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    • v.17 no.2
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    • pp.78-83
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    • 2013
  • Purpose: SPECT/CT, a combination of SPECT and CT, is capable of expressing the results of attenuation correction on images biased by automatic program. As a result, this research evaluates the usefulness of images with CT attenuation correction, using various phantoms and images of patients. Materials and Methods: From July of 2012 to September of 2012, this research was conducted on the contrast, spatial resolution, and images of patients. We studied the contrast with IEC body phantom and Jaszczak phantom, while the spatial resolution was evaluated with NEMA triple line phantom. Further, a comparative study was carried out on the quality of the images, on the difference between the images before and after the CT attenuation correction. Results: Compared the differences between the contrast before and after the CT attenuation correction in IEC body phantom. The contrast was improved by 33.6% at minimum, 89.8% at maximum. In case of Jaszczak Phantom, the contrast was enhanced by 9.9% at minimum, 27.8% at maximum. In NEMA Triple line phantom, the resolution was raised by 4.5% in average: 4.4% in horizontal, 4.5% in vertical. In Anthropomorphic Torso Phantom, the perfusion score of the interior wall with the most severe attenuation was measured to be 29.4%. In the experiment carried out on myocardial perfusion SPECT/CT patients, 9% improvement was discovered in the interior wall, where the most dramatic attenuation occurred, after the CT attenuation correction. Conclusion: SPECT/CT proved its clinical usefulness by enabling the acquisition of images with enhanced contrast and spatial resolution compare to the ones resulted from SPECT.

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Performance Measurements of Positron Emission Tomography: An Investigation Using General Electric $Advance^{TM}$ (양전자방출단층촬영기의 표준 성능평가 방법: GE $Advance^{TM}$에 적용한 예)

  • Lee, J.R.;Choi, Y.;Choe, Y.S.;Lee, K.H.;Kim, S.E.;Shin, S.A.;Kim, B.T.
    • The Korean Journal of Nuclear Medicine
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    • v.30 no.4
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    • pp.548-559
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    • 1996
  • A series of performance measurements of positron emission tomography (PET) were performed following the recommendations of the Computer and Instrumentation Council of the Society of Nuclear Medicine and the National Electrical Manufacturers Association. We investigated the performance of the General Electric $Advance^{TM}$ PET. The measurements include the basic intrinsic tests of spatial resolution, scatter fraction, sensitivity, and count rate losses and randoms. They also include the tests of the accuracy of corrections: count rate linearity correction, uniformity correction, scatter correction and attenuation correction. GE $Advance^{TM}$ PET has bismuth germanate oxide crystals (4.0mm transaxial ${\times}$ 8.1mm axial ${\times}$ 30.0mm radial) in 18 rings, which form 35 imaging planes spaced by 4.25mm. The system has retractable tungsten septa 1mm thick and 12cm long. Transaxial resolution was 4.92mm FWHM in 2D and 5.14mm FWHM in 3D at the center. Average axial resolution in 2D decreased from 3.91mm FWHM at the center to 6.49mm FWHM at R=20cm. Average scatter fraction of direct and cross slices was 9.57%. Dead-time losses of 50% corresponded to a radioactivity concentration of $4.86{\mu}Ci/cc$ and a true count rate of 519 kcps in 2D. The accuracy of count rate linearity correction was 1.84% at the activity of $4.50{\mu}Ci/cc$. Non-uniformity was 2.06% in 2D and 2.93% in 3D. Remnant errors after scatter correction were 0.55% in 2D and 4.12% in 3D. The errors of attenuation correction were 6.21% (air), 0.20% (water), -6.32% (teflon) in 2D and 5.00% (air), 6.94% (water), 3.01% (teflon) in 3D. The results indicate the performance of GE $Advance^{TM}$ PET scanner to be well suited for clinical and research applications.

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