• 제목/요약/키워드: residual air

검색결과 372건 처리시간 0.026초

저진공 Single-step UV 나노임프린트 장치 개발 (The Development of Single-Step UV-NIL Tool Using Low Vacuum Environment and Additive Air Pressure)

  • 김기돈;정준호;이응숙;도현정;신흥수;최우범
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.155-156
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    • 2006
  • UV-NIL is a promising technology for the fabrication of sub-100 nm features. Due to non-uniformity of the residual layer thickness (RLT) and a strong possibility of defects, many UV-NIL processes have been developed and some are commercially available at present, most are based on the 'step-and-repeat' nanoimprint technique, which employs a small-area stamp, much smaller than the substrate. This is mainly because, when a large-area stamp is used, it is difficult to obtain acceptable uniform residual layer thickness and/or to avoid defects such as air entrapment. As an attempt to enable UV_NIL with a large-area stamp for high throughput, we propose a new UV-NIL tool that is able to imprint 4 inch wafer in a low vacuum environment at a single step.

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GRA(Generic Risk Analysis) 기법을 이용한 공기분리시설에 대한 준 정량적 위험성 평가에 관한 연구 (A Study on Semi Quantitative Risk Analysis for Air Separation Unit using a GRA(Generic Risk Analysis) Method)

  • 신정수;변헌수
    • 한국가스학회지
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    • 제17권1호
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    • pp.56-66
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    • 2013
  • 가스제조 시설들은 불활성 가스공급을 통하여 제조업 시설의 안전한 운영 및 유지하는 역할을 하며, 폭발성, 가연성 및 독성가스를 공급하여 화학제품 제조에 필요한 기초 원료의 공급을 담당하는 역할을 한다. 또한 가스의 제조과정에서 고온, 고압, 초저온 및 촉매반응 등의 운전조건 하에서 시설이 운전되기 때문에 안전하고 신뢰성 있는 운영이 반드시 필요하다. 이러한 공장들은 공정관리가 복잡하며 제조물질의 누출로 인한 화재, 폭발 및 독성가스 누출로 인한 중대산업사고의 위험성이 있고, 불활성가스로 인한 질식재해, 고온 및 초저온으로 인한 화상 등 잠재적인 위험요소를 많이 가지고 있다. 본 연구는 신뢰성 있는 준 정량적 위험성평가 기법인 GRA(Generic Risk Analysis) 모델을 공기분리시설(ASU)에 적용하여 초기위험도(Initial Risk) 산정, 안전방벽(Safety Barriers) 적용, 잔여위험도(Residual Risk) 산정 및 중요안전요소(EIS, Elements Important for Safety)를 도출 하였으며, 위험성 평가 결과로 도출된 중요안전요소에 대한 효과적인 안전관리 및 시행절차의 구축을 제안하였다.

초음파나노표면개질 다중충격 조건에서의 잔류응력 예측을 위한 유한요소 피닝해석 영역 결정 (Determination of Peening Area for Finite Element Residual Stress Analysis of Ultrasonic Nanocrystal Surface Modification under Multiple Impact Conditions)

  • 석태현;박승현;허남수
    • 한국압력기기공학회 논문집
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    • 제17권2호
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    • pp.145-156
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    • 2021
  • Ultrasonic Nanocrystal Surface Modification (UNSM) is a peening technology that generates elastic-plastic deformation on the material surface to which a static load of a air compressor and a dynamic load of ultrasonic vibration energy are applied by striking the material surface with a strike pin. In the UNSM-treated material, the structure of the surface layer is modified into a nano-crystal structure and compressive residual stress occurs. When UNSM is applied to welds in a reactor coolant system where PWSCC can occur, it has the effect of relieving tensile residual stress in the weld and thus suppressing crack initiation and propagation. In order to quantitatively evaluate the compressive residual stress generated by UNSM, many finite element studies have been conducted. In existing studies, single-path UNSM or UNSM in a limited area has been simulated due to excessive computing time and analysis convergence problems. However, it is difficult to accurately calculate the compressive residual stress generated by the actual UNSM under these limited conditions. Therefore, in this study, a minimum finite element peening analysis area that can reliably calculate the compressive residual stress is proposed. To confirm the validity of the proposed analysis area, the compressive residual stress obtained from the experiment are compared with finite element analysis results.

온도변화가 CF/PEEK 적층재의 충격 후 굽힘강도에 미치는 영향 (The Effects of Temperature Change on the Bending Strength of CF/PEEK Laminates after Impact)

  • 양인영;정종안;나승우
    • 한국안전학회지
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    • 제18권2호
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    • pp.34-39
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    • 2003
  • In this paper, when CF/PEEK laminates for high efficiency space structure are subjected to FOD(Foreign Object Damage), the effects of temperature change on the impact damages(interlaminar separation and transverse crack) of CF/PEEK laminates and the relationship between residual lift and impact damages are experimentally investigated. Composite laminates used in this experiment are CF/PEEK orthotropic laminated plates, which have two-interlaces [$0^{\circ}_4/90^{\circ}_8/0^{\circ}_4$]. A steel ball launched by the air gun collides against CF/PEEK laminates to generate impact damages. And then CF/PEEK specimens with impact damages are observed by a scanning acoustic microscope under room and high temperatures. In this experimental results, various relations are experimentally observed including the delamination area vs. temperature change, the bending strength vs. impact energy and the residual bending strength vs. impact damage of CF/PEEK laminates.

고온하에서 횡충격을 받는 CF/PEEK 적층재의 충격손상과 잔류강도 (The Impact Damage and the Residual Strength of CF/PEEK Laminate Subjected to Transverse Impact under the High Temperature)

  • 양인영;정종안
    • 한국자동차공학회논문집
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    • 제2권6호
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    • pp.66-75
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    • 1994
  • In this paper, the effects of temperature change on the impact damages of CF/PEEK laminates are experimentally investigated. Composite laminates used in this experiment are CF/PEEK orthotropic laminated plates, which have two-interfaces$[0^{\circ}_4/90^{\circ}_4]_{9+} A steel ball launched by the air gun collides against CFRP laminates to generate impact damage. The delamination damages are oberved by a scanning acoustic microscope. And various relations are experimentally observed including the impact energy vs. delamination area, the specimen temperature vs. transverse crack, and the impact energy vs. residual bending strength of carbon fiber peek composite laminates subjected to FOD(Foreign Object Damage) under high temperatures.

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Pilot 플라즈마 반응기를 이용한 하수 중 미생물의 불활성화 (Inactivation of Microorganisms in Sewage Using a Pilot Plasma Reactor)

  • 김동석;박영식
    • 한국환경보건학회지
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    • 제39권3호
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    • pp.289-299
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    • 2013
  • Objectives: For the field application of the dielectric barrier discharge plasma reactor, scale-up of the plasma reactor is needed. This study investigated the possibility of inactivation of microorganisms in sewage using pilot multi-plasma reactor. We also considered the possibility of degradation of total organic carbon (TOC) and nonbiodegradable matter ($UV_{254}$) in sewage. Methods: The pilot plasma reactor consists of plasma reactor with three plasma modules (discharge electrode and quartz dielectric tube), liquid-gas mixer, high voltage transformers, gas supply equipment and a liquid circulation system. In order to determine the operating conditions of the pilot plasma reactor, we performed experiments on the operation parameters such as gas and liquid flow rate and electric discharge voltage. Results: The experimental results showed that optimum operation conditions for the pilot plasma reactor in batch experiments were 1 L/min air flow rate), 4 L/min liquid circulation rate, and 13 kV electric discharge voltage, respectively. The main operation factor of the pilot plasma process was the high voltage. In continuous operation of the air plasma process, residual microorganisms, $UV_{254}$ absorbance and TOC removal rate at optimal condition of 13 kV were $10^{2.24}$ CFU/mL, 56.5% and 8.6%, respectively, while in oxygen plasma process at 10 kV, residual microorganisms, $UV_{254}$ absorbance and TOC removal rate at optimal conditions were $10^{1.0}$ CFU/mL, 73.3% and 24.4%, respectively. Electric power was increased exponentially with the increase in high voltage ($R^2$ = 0.9964). Electric power = $0.0492{\times}\exp^{(0.6027{\times}lectric\;discharge\;voltage)}$ Conclusions: Inactivation of microorganisms in sewage effluent using the pilot plasma process was done. The performance of oxygen plasma process was superior to air plasma process. The power consumption of oxygen plasma process was less than that of air plasma process. However, it was considered that the final evaluation of air and oxygen plasma must be evaluated by considering low power consumption, high process performance, operating costs and facility expenses of an oxygen generator.

WA 숫돌을 이용한 원통 연삭 시 압축냉각공기와 연삭유의 냉각효과에 관한 연구 (A Comparison of the Cooling Effects for the Compressed Cold Air and Coolant on the Cylindrical Grinding with WA Wheel)

  • 이석우;최헌종;정해도
    • 한국정밀공학회지
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    • 제17권10호
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    • pp.155-161
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    • 2000
  • Recently, environmental pollution has become a big problem in industry and many researches have been done in order to preserve the environment. In the grinding process, the coolant has great influence on environment. It contains several chemicals(sulfur, phosphorus and chlorine) to improve the grinding efficiency. If these additives go into the workplace atmosphere, it is harmful for workers. It can also cause the environment pollution. Because of these reasons many studies have been done to minimize the amount of coolant. However the small amount of coolant can cause the thermal defect on the ground surface layer. This study forced the effects of the compressed cold air when the spindle shaft materials(SCM4 & SCM21) were cylindrical ground with WA wheel. The compressed cold air was used as the coolant and grinding performance was compared with that of the conventional grinding fluids(emulsion). Many experiments were carried out with these two cooling materials. The surface roughness, residual stress, and roundness were measured for the cylindrical grinding. The test results showed that the compressed cold air was very useful as the cooling materials for grinding process. It was also efficient to minimize the thermal defects of workpiece and could also play a role in solving environmental pollution.

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비열 방전 플라즈마에 의한 실내 공기 청정기술 연구 (Study on the Indoor Air Purification Technology by Using Nonthermal Plasma)

  • 정재승;이헌경;김진규
    • 조명전기설비학회논문지
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    • 제30권2호
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    • pp.31-36
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    • 2016
  • For the purpose of indoor air purification, air conditioner or purifier is generally used, but the long operating time induced the contamination by cumulation of bacteria in the air filter. The ozone sterilization method can be one of the effective sterilization method for this case. Ozone has not leave a secondary residual contaminants, as well as a strong sterilization power. In this study, nonthermal plasma technology is investigated as an ozone generator for the air filter sterilization. Additionally, nonthermal plasma technology is possible to obtain the generation of negative ions and electrostatic force by simply adjusting the applied voltage.

도로터널 화재시의 환기분석 (The Analysis of Ventilation of Road Tunnel in Fire)

  • 김성준;류진웅
    • 산업기술연구
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    • 제23권A호
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    • pp.9-13
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    • 2003
  • Numerical experiments are done by a commercial code, PHOENICS to evaluate the backlayer phenomenon of smoke in case of the road tunnel fire. The independent and dependent variables are ventilation air velocity and the length of backlayer of smoke respectively. Hybrid scheme and ${\kappa}-{\varepsilon}$ turbulence model are adopted in the simulation process and mass residual is used as a convergence criterion. The experimental results say that the length of backlayer is reduced with the increase of ventilating air velocity and that there is a critical air velocity which prevents from the onset of backlayering phenomena. One finds that there is a fresh air region near the bottom of tunnel which could make the passenger escape safely from the polluted region by smoke. These phenomena come from the vertical stratification of the smoke air mixture in the tunnel.

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냉각 공기장치에 의한 환경 친화 연삭 연구 (A Study on Environment- Friendly Grinding by Using Cold Air)

  • 김남경;이동호;성낙창;송지복
    • 한국정밀공학회지
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    • 제15권9호
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    • pp.145-151
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    • 1998
  • In this study, the experimental and analytic investigation with cold air system has been performed for improving the working environment of the conventional grinding fluid. Very simple cold air system was developed which could replace by the conventional grinding fluid system. The identification of heat of grinding Bone is very important for precision grinding. The experimental data was analysed to investigate the heat which was transferred to the workpiece. It was found that 45∼55% of the total energy for dry grinding, 22∼28% for wet grinding, and 32∼35% for cold air system are conducted to the workpiece in grinding with cubic boron nitride wheel. Cubic boron nitride wheel could reduce the residual stress and thermal demage comparing with aluminium oxide wheel, because cubic boron nitride wheel has very high extreme thermal conductivity.

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