• Title/Summary/Keyword: recess

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Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process

  • Byoung-Gue Min;Jong-Min Lee;Hyung Sup Yoon;Woo-Jin Chang;Jong-Yul Park;Dong Min Kang;Sung-Jae Chang;Hyun-Wook Jung
    • ETRI Journal
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    • v.45 no.1
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    • pp.171-179
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    • 2023
  • We have developed an InAlAs/InGaAs metamorphic high electron mobility transistor device fabrication process where the gate length can be tuned within the range of 0.13㎛-0.16㎛ to suit the intended application. The core processes are a two-step electron-beam lithography process using a three-layer resist and gate recess etching process using citric acid. An electron-beam lithography process was developed to fabricate a T-shaped gate electrode with a fine gate foot and a relatively large gate head. This was realized through the use of three-layered resist and two-step electron beam exposure and development. Citric acid-based gate recess etching is a wet etching, so it is very important to secure etching uniformity and process reproducibility. The device layout was designed by considering the electrochemical reaction involved in recess etching, and a reproducible gate recess etching process was developed by finding optimized etching conditions. Using the developed gate electrode process technology, we were able to successfully manufacture various monolithic microwave integrated circuits, including low noise amplifiers that can be used in the 28 GHz to 94 GHz frequency range.

Effect of Geometrical Parameters on Discharge Coefficients of a Shear Coaxial Injector (전단동축형 분사기의 유량계수에 대한 형상학적 변수들의 영향)

  • Ahn, Jonghyeon;Lee, Keunseok;Ahn, Kyubok
    • Journal of ILASS-Korea
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    • v.25 no.3
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    • pp.95-102
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    • 2020
  • Six shear coaxial injectors for a 3 tonf-class liquid rocket engine using oxygen and methane as propellants were designed and manufactured by considering geometric design parameters such as a recess length and a taper angle. Cold-flow tests on the injectors were performed using water and air as simulants. By changing the water mass flow rate and air mass flow rate, the injection pressure drop under single-injection and bi-injection was measured. The discharge coefficients through the injector oxidizer-side and fuel-side were calculated and the discharge coefficient ratio between bi-injection and single-injection was obtained. Under single-injection, the recess served to reduce the injection pressure drop on the injector fuel-side. For the injectors without recess, the discharge coefficients under bi-injection were almost the same as those under single-injection. However, for the injectors with recess, the taper angle and bi-injection had a significant effect on the discharge coefficient.

A Numerical Study on Mixing Characteristics for Recess Length of Swirl Coaxial Injector (스월 동축형 분사기의 리세스 길이에 따른 혼합특성에 관한 수치적 연구)

  • Kim, Young-Jun;Hong, Moon-Geun;Lee, Soo-Yong;Sohn, Chae-Hoon
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2011.11a
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    • pp.74-77
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    • 2011
  • A mixing characteristics on recess length change of Gas-centered swirl coaxial injector using high-performance staged combustion rocket engine carry out study through CFD(Computational fluid dynamics). propellant phase that combined gas-liquid simulate gas-gas. In order to measure spreading angle, velocity distribution to injector exit and spray structure of propellant analyzed. Axial velocity increase by increasing recess length, but tangential velocity decrease. The result confirmed qualitative characteristics that the spreading angle decreases.

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Effect of vitamin $B_6$ deficiency on antioxidative status in rats with exercise-induced oxidative stress

  • Choi, Eun-Young;Cho, Youn-Ok
    • Nutrition Research and Practice
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    • v.3 no.3
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    • pp.208-211
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    • 2009
  • This study investigated the effect of vitamin $B_6$ deficiency on antioxidant enzyme activities and lipid profile in rats with exercise-induced oxidative stress. Forty eight rats were fed either a vitamin $B_6$ deficient diet (B6-) or a control diet (control) for 4 weeks and then subdivided into 3 groups: pre-exercise (PreE); post-exercise (PostE); recess after exercise (recessE). Compared to those of control group, plasma catalase and hepatic cytosol superoxide dismutase (SOD, EC 1.15.1.1) activities of B6- group were lower regardless of exercise. The ratio of reduced glutathione/oxidized glutathione (GSH/GSSG) of B6 - group was lower in PreE and there was no difference between PostE and recessE. The level of malondialdehyde (MDA) of B6- was significantly higher in PreE and PostE. High-density lipoprotein-cholesterol (HDL-C) level of B6- group was lower regardless of exercise. Atherosclerotic index of $B_6$- group was higher in PreE and there was no difference between PostE and recessE. It is suggested that a reduction in antioxidative status caused by vitamin $B_6$ deficiency may be aggravated under exercise-induced oxidative stress.

A Numerical Analysis on the Rotordynamic Characteristics of A Hybrid Journal Bearing with Pair-Type Angled Injection Orifices (짝(Pair)형태의 경사 공급구를 갖는 하이브리드 저널 베어링의 로터 동특성에 관한 수치해석)

  • 김창호;이용복
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1997.04a
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    • pp.111-121
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    • 1997
  • The stability of a rotor-bearing system supported by swirl-controlled hybrid journal bearing with pair-type angled injection orifices is investigated for improvement of the whirl frequency ratio by allowing effective control of the tangential flow inside the bearing clearance, i.e., by achieving more freedom in controlling strength and direction of the supply tangential flow inside the bearing clearance. It is suggested that the system instability can be improved through the change of bearing dynamic characteristic parameters with the swirl control. The orifice diameter d$_0$ and recess injection angle $\alpha$ along with combinations of swirl/anti-swirl supply pressures and directions (3.0-3.0MPa, 4.0-2.0MPa, 2.0-4.0MPa) are selected for design parameters for swirl-controlled effective factors dependent on journal speeds (3000, 9000, 15000, 21000 rpm). It has been found that the orifice diameter do shows strong effects on effective maneuverability of direct-stiffness and direct damping values, while recess injection angle $\alpha$ results in substantial magnitude and direction of cross-stiffness. Specifically, recess injection parameters which are functions of angle of orifice feeding flow and recess dimensions showed very feasible effect on the stability of swirl-controlled rotor-bearing system.

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RANS-LES Simulations of Scalar Mixing in Recessed Coaxial Injectors (RANS 및 LES를 이용한 리세스가 있는 동축분사기의 유동혼합에 대한 수치해석)

  • Park, Tae-Seon
    • Journal of the Korean Society of Propulsion Engineers
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    • v.16 no.1
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    • pp.55-63
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    • 2012
  • The turbulent flow characteristics in a coaxial injector were investigated by the nonlinear $k-{\varepsilon}-f_{\mu}$ model of Park et al.[1] and large eddy simulation (LES). In order to analyze the geometric effects on the scalar mixing for nonreacting variable-density flows, several recessed lengths and momentum flux ratios are selected at a constant Reynolds number. The nonlinear $k-{\varepsilon}-f_{\mu}$�� model proposed the meaningful characteristics for various momentum flux ratios and recess lengths. The LES results showed the changes of small-scale structures by the recess. When the inner jet was recessed, the development of turbulent kinetic energy became faster than that of non-recessed case. Also, the mixing characteristics were mainly influenced by the variation of shear rates, but the local mixing was changed by the adoption of recess.

트렌치 구조의 소스와 드레인을 이용한 AlGaN/GaN HEMT의 DC 출력특성 전산모사

  • Jeong, Gang-Min;Lee, Yeong-Su;Kim, Su-Jin;Kim, Jae-Mu;Kim, Dong-Ho;Choe, Hong-Gu;Han, Cheol-Gu;Kim, Tae-Geun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.145-145
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    • 2008
  • 갈륨-질화물(GaN) 기반의 고속전자이동도 트랜지스터(high electron mobility transistor, HEMT)는 최근 마이크로파 또는 밀리미터파 등의 차세대 고주파용 전력소자로 각광받고 있다. AlGaN/GaN HEMT는 이종접합구조(heterostructure) 로부터 발생하는 이차원 전자가스(two-dimensional electron gas, 2DEG) 채널을 이용하여 높은 전자 이동도, 높은 항복전압 및 우수한 고출력 특성을 얻는 것이 가능하다. AlGaN/GaN HEMT에서 ohmic 전극 부분과 채널이 형성되는 부분과의 거리에 의한 저항의 성분을 줄이고 전자의 터널링의 확률을 증가시키기 위해서 recess된 구조가 많이 사용되고 있다. 그러나 이 구조에서는 recess된 소스와 드레인에 의해 AlGaN층의 제거로 AlGaN층의 두께에 영향을 미치며 그에 따라 채널에 생성되는 전자의 농도를 변화시키게 된다. 본 논문에서는 소스와 드레인의 Trench 구조를 제안하였다. ohmic 전극 부분과 채널간의 거리의 감소로 특성을 향상시켜서 recess 구조의 장점이 유지된다. 그리고 recess되는 소스와 드레인 영역에서 AlGaN층을 전체적으로 제거하는 것이 아니고 Trench 즉 일부분만 제거하면서 AlGaN층의 두께의 변화에 따른 문제점도 줄일 수 있다. 따라서 이러한 전극 부분을 Trench구조화 시킨 AlGaN/GaN HEMT의 DC특성을 $ATLAS^{TM}$를 이용하여 전산모사하고 최적화된 구조를 제안하였다.

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An Experimental Assessment of Combustion Stability of Coaxial Swirl Injectors and an Impinging Injector through Simulating Combustion Test (상압기상연소시험을 통한 동축형 스월 분사기와 충돌형 분사기의 연소 안정성 평가)

  • Park, Junhyeong;Kim, Hongjip
    • Journal of the Korean Society of Combustion
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    • v.22 no.1
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    • pp.46-52
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    • 2017
  • High-frequency combustion instabilities may occur during the development of feasible engine combustors. These instabilities can result in irreparable damages to the wall of combustors or the degradation of engine performance. So, it is essential to identify injectors that have high stability characteristics during the early stages of development. The objective of present study was to assess the stability of coaxial injectors and an impinging injector with different recess lengths in order to develop stable injectors optimally. Stability margin was evaluated based on the distance from operating condition to the unstable regions. A simulating combustion test method was used to analyze the stability of injectors. A small-scale combustion chamber was designed to simulate the first tangential acoustic mode of the actual combustor. Gaseous oxygen and a mixture of methane and propane were used as simulant propellants to satisfy their flow similarity to the actual propellants of a combustor in a liquid rocket combustor. The results indicated that injectors having small recess lengths showed relatively large combustion stability margins. For the injectors of large recess lengths, instability regions with large and super-large amplitude oscillations were observed. Thus, injector with shorter recess lengths had a higher stability than that of longer one due to the different mixing processes.

A Numerical Analysis on the Rotordynamic Characteristics of a Hybrid Journal Bearing with Pair-Type Angled Injection Orifices (짝(Pair) 형태의 경사 공급구를 갖는 하이브리드 저널 베어링의 로터 동특성에 관한 수치해석)

  • 김창호;이용복
    • Tribology and Lubricants
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    • v.13 no.3
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    • pp.63-72
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    • 1997
  • The stability of a rotor-bearing system supported by swirl-controlled hybrid journal bearing with pair-type angled injection orifices is investigated for improvement of the whirl frequency ratio by allowing effective control of the tangential flow inside the bearing clearance, i.e., by achieving more freedom in controlling strength and direction of the supply tangential flow inside the bearing clearance. It is suggested that the system instability can be improved through the change of bearing dynamic characteristic parameters with the swirl control. The orifice diameter $d_0$ and recess injection angle $\alpha$ along with combinations of swirl/anti-swirl supply pressures and directions (3.0~3.0 MPa, 4.0~2.0 MPa, 2.0~4.0 MPa) are selected for design parameters for swirl-controlled effective factors dependent on journal speeds (3000, 9000, 15000, 21000 rpm). It has been found that the orifice diameter $d_0$ shows strong effects on effective maneuverability of direct-stiffness and direct damping values, while recess injection angle $\alpha$ results in substantial effects on the magnitude and direction of cross-stiffness. Specifically, recess injection parameters which are functions of angle of orifice feeding flow and recess dimensions showed very feasible effect on the stability control of swirl-controlled rotor-bearing system.