• Title/Summary/Keyword: range camera

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Ex situ combined in situ target strength of Japanese horse mackerel using a broadband echosounder (중심 주파수 200 kHz의 과학어군탐지기를 활용한 전갱이의 광대역 주파수 특성)

  • Myounghee KANG;Hansoo KIM;Dongha KANG;Jihoon JUNG;Fredrich SIMANUNGKALIT;Donhyug KANG
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.60 no.2
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    • pp.142-151
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    • 2024
  • Recently, domestic fishing production of Japanese horse mackerel has been continuously decreasing. To achieve sustainable fishing of this species, it is essential to acquire its target strength (TS) for accurate biomass estimation and to study its ecological characteristics. To date, there has been no TS research using a broadband echosounder targeting Japanese horse mackerel. In this study, for the first time, we synchronized an underwater camera with a broadband frequency (nominal center frequency of 200 kHz, range: 160-260 kHz) to measure the TS according to the body size (16.8-35.5 cm) and swimming angle of the species. The relationship between Japanese horse mackerel length and body weight showed a general tendency for body weight to increase as length increased. The pattern of the frequency spectra (average values) by body length exhibited a similar trend regardless of body length, with no significant fluctuations in frequency observed. The lowest TS value was observed at 243 kHz while the highest TS values were recorded at 180 and 257.5 kHz. The frequency spectra for the swimming angles appeared to be flat at angles of -5, 0, 30, 60, 75, and 80° while detecting more general trends of frequency spectra for swimming angle proved challenging. The results of this study can serve as fundamental data for Japanese horse mackerel biomass estimation and ecological research.

Reference Values of Functional Parameters in Gated Myocardial Perfusion SPECT : Comparison with $QGS^{\circledR}$ and $4DM^{\circledR}$ Program (게이트 심근 관류 스펙트의 심기능 지표의 정상 참고값 : $QGS^{\circledR}$ 프로그램과 $4DM^{\circledR}$ 프로그램의 비교)

  • Jeong, Young-Jin;Park, Tae-Ho;Cha, Kwang-Soo;Kim, Moo-Hyun;Kim, Young-Dae;Kang, Do-Young
    • The Korean Journal of Nuclear Medicine
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    • v.39 no.6
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    • pp.430-437
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    • 2005
  • Purpose: The objectives of this study were - First, to determine the normal range of left ventricular end diastolic volume (EDV), end systolic volume (ESV) and election fraction (EF) from gated myocardial perfusion SPECT for Quantitative Gated SPECT (QGS) and 4D-MSPECT (4DM), respectively. Second, to evaluate the relationships between values produced by both software packages. Materials & Methods: Tc-99m MIBI gated myocardial perfusion SPECT were performed for 77 patients (mean age: $49.6{\pm}13.7y$, n=37(M), 40(F)) with a low likelihood (<10%) of coronary artery disease (CAD) using dual head gamma camera (E.CAM, Siemens, USA). Left ventricular EDV, ESV and EF were automatically measured by means of QGS and 4DM, respectively. Results: in QGS, the mean EDV, ESV and EF for all patients were $78.2{\pm}25.2ml,\;27.4{\pm}12.9ml\;and\;66.6{\pm}8.0%$ at stress test respectively, not different from rest test (p>0.05). In 4DM, the mean EDV, ESV and EF for all patients were $89.1{\pm}26.4ml,\;29.1{\pm}12.8ml\;and\;68.5{\pm}6.7%$ at stress test. Most cases in 4DM, there was no significant difference statistically between stress and rest test (p>0.05). But statistically significant difference was found in EF ($68.5{\pm}6.7%$ at stress vs $70.9{\pm}8.0%$ at rest, p<0.05). Correlation coefficients between the methods for EDV, ESV and EF were comparatively high (0.95, 0.93, 0.71 at stress test and 0.95, 0.90, 0.69 at rest test, respectively). However, Bland-Altman plots showed a large range of the limit value of agreement for EDV, ESV and EF between both methods ($-30ml{\sim}10ml,\;-12ml{\sim}8ml,\;-14%{\sim}11%$ at stress test and $-32ml{\sim}5ml,\;-13ml{\sim}13ml,\;-18%{\sim}12%$ at rest test). Conclusion: We found the normal ranges of EDV, ESV and EF for patients with a low likelihood of CAD in both methods. We expect these values will be a good reference to interpret gated myocardial perfusion SPECT. Although good correlation was observed between both methods, they should not be used interchangeably. Therefore, when both programs are used at the same site, it will be important to apply normal limits specific to each method.

The Simulation for the Organization of Fishing Vessel Control System in Fishing Ground (어장에 있어서의 어선관제시스템 구축을 위한 모의실험)

  • 배문기;신형일
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.36 no.3
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    • pp.175-185
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    • 2000
  • This paper described on a basic study to organize fishing vessel control system in order to control efficiently fishing vessel in Korean offshore. It was digitalized ARPA image on the fishing processing of a fleet of purse seiner in conducting fishing operation at Cheju offshore in Korea as a digital camera and then simulated by used VTMS. Futhermore, it was investigated on the application of FVTMS which can control efficiently fishing vessels in fishing ground. The results obtained were as follows ; (1) It was taken 16 minutes and 35 minutes to casting and hauling net in fishing processing respectively. The length of rope pulled by scout boat was 200m, tactical diameter in casting net was 340.8m, turning speed was 6kts as well. (2) The processing of casting and hauling net was moved to SW, NE as results of simulation when the current direction and speed set into NE, 2kts and SW, 2kts respectively. Such as these results suggest that can predict to control the fishing vessel previously with information of fishing ground, fishery and ship's maneuvering, etc. (3) The control range of VTMS radar used in simulation was about 16 miles. Although converting from a radar of the control vessel to another one, it was continuously acquired for the vector and the target data. The optimum control position could be determined by measuring and analyzing to distance and direction between the control vessel and the fleet of fishing vessel. (4) The FVTMS(fishing vessel traffic management services) model was suggested that fishing vessels received fishing conditions and safety navigation information can operate safely and efficiently.

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Phase Equilibria of the System Pd-Sb-Te and Its Geological Implications (팔라듐-안티몬-테루르 계(系)의 상평형(相平衡)과 지질학적(地質學的) 의의(意義))

  • Kim, Won-Sa;Chao, George Y.
    • Economic and Environmental Geology
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    • v.26 no.3
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    • pp.327-335
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    • 1993
  • Phase relations in the system Pd-Sb-Te were investigated at $1000^{\circ}$, $800^{\circ}$, and $600^{\circ}C$, using the sealed-capsule technique; the quenched products were studied by reflected light microscopy, X-ray diffraction, and electron microprobe analysis. At $1000^{\circ}C$, the solid phases Pd, $Pd_{20}Sb_7$, $Pd_8Sb_3$, $Pd_{31}Sb_{12}$, and $Pd_5Sb_2$ are stable with a liquid phase that occupies most of the isothermal diagram. Additional solid phases at $800^{\circ}C$ are $Pd_5Sb_3$, PdSb, $Pd_8Te_3$, $Pd_7Te_3$, and a continuous $Pd_{20}Te_7-Pd_{20}Sb_7$ solid solution becomes stable. At $600^{\circ}$, $PdSb_2$, $Pd_{17}Te_4$, $Pd_9Te_4$, PdTe, $PdTe_2$, $Sb_2Te_3$, and Sb and continuous PdSb-PdTe and $PdTe-PdTe_2$ solid solutions are stable. All the solid phases exhibit solid solution, mainly by substitution between Sb and Te to an extent that varies with temperature of formation. The maximum substitution (at.%) of Te for Sb in the Pd-Sb phases is: 44.3 in $Pd_8Sb_3$, 52.0 in $Pd_{31}Sb_{12}$, 46.2 in $Pd_5Sb_2$ at $800^{\circ}C$; 15.3 in $Pd_5Sb_3$, 68.3 in $PdSb_2$ at $600^{\circ}C$. The maximum substitution (at.%) of Sb for Te in the Pd-Te phases is 34.5 in $Pd_5Sb_3$ at $800^{\circ}C$, and 41.6 in $Pd_7Te_3$, 5.2 in $Pd_{17}T_4$, 12.4 in $Pd_9Te_4$, and 19.1 in $PdTe_2$ at $600^{\circ}C$. Physical properties and X-ray data of the synthetic $Pd_9Te_4$, PdTe, $PdTe_2$, $Pd_8Sb_3$, PdSb, and $Sb_2Te_3$ correspond very well with those of telluropalladinite, kotulskite, merenskyite, mertieite II, sudburyite, and tellurantimony, respectively. Because X-ray powder diffraction data consistently reveal a 310 peak ($2.035{\AA}$), the $PdSb_2$ phase is most probably of cubic structure with space group $P2_13$. The X-ray powder pattern of a phase with PdSbTe composition, synthesized at $600^{\circ}C$, compares well with that of testibipalladite. Therefore, testibiopalladite may be a member of the $PdSb_2-Pd(Sb_{0.32}Te_{0.68})$ solid solution series which is cubic and $P2_13$ in symmetry. Thus the ideal fonnula for testibiopalladite, presently PdSbTe, must be revised to PdTe(Sb, Te). Borovskite($pd_3SbTe_4$) has not been found in the synthetic system in the temperature range $1000^{\circ}-600^{\circ}C$.

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A Kinematic Analysis of Uchi-mata(inner thigh reaping throw) by Kumi-kata types in Judo (유도 맞잡기 타입에 따른 허벅다리걸기의 Kinematic 분석[I])

  • Kim, Eui-Hwan;Cho, Dong-Hee;Kwon, Moon-Seok
    • Korean Journal of Applied Biomechanics
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    • v.12 no.1
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    • pp.63-87
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    • 2002
  • The purpose of this study was to analyze the kinematic variables when Uchi-mata(inner thigh reaping throw) performing by Kumi-kata(engagement position, basic hold) types A, B(A: grasping part-behind neck lapel, B: chest lapel) in Judo with three dimensional analysis technique DLT method by videography. The subjects were four male judokas who have been training in Yong-In University(YIU), on Korean Representative level and Uchi-mata is their tokui-nage(favorite technique), the throwing form was filmed on two S-VHS 16mm video camera( 30frame/sec. Panasonic). Kinematic variables were temporal, posture, and COG. The data collection was performing by Uchi-mata. Six good trials were collected for each condition (type A, B) among over 10 trials. The mean values and the standard deviation for each variable were obtained and used as basic factors for examining characteristics of Uchi-mata by Kumi-kata types. The results of this analysis were as follows : 1) Temporal variables The total time elapsed(TE) by Uchi-mata of types A, B were 1.45, 1.56 sec. respectively. Types A shorter than B. 2) Posture variables In performing of Uchi-mata, the range of flexion in type A, left elbow was $45^{\circ}$ and B was $89^{\circ}$ from Event 2(E2) to Event 6(E6). Type A and B were quite different in right elbow angle in Event1(E1). Left shoulder angle of type A was extended and type B was flexed in E4. Both types right shoulder angles were showed similar pattern. Also both hip angles(right/left) were showed similar pattern. When type A performed Uchi-mata the knee-angle of supporting foot showed $142^{\circ}$in the 1st stage of kake phase[KP], and extended to $147^{\circ}$in the 2nd stage of KP. And the foot-ankle angle of supporting foot showed $83^{\circ}$in the 1st stage of KP, and extended to $86^{\circ}$in the 2nd stage of KP. moreover, The knee angle of attacking foot showed $126^{\circ}$in the 1st stage of KP, and extended to $132^{\circ}$in the 2nd stage of KP, and the foot-ankle angle of attacking foot showed $106^{\circ}$in the 1st stage of KP, and extended to $121^{\circ}$in the 2nd stage of KP. When type B performed Uchi-mata the knee-angle of supporting foot showed $144^{\circ}$in the 1st stage of KP, and extended to $154^{\circ}$in the 2nd stage of KP. And the foot-ankle angle of supporting foot showed $83^{\circ}$in the 1st stage of KP, and extended to $92^{\circ}$in the 2nd stage of KP. moreover, The knee angle of attacking foot showed $132^{\circ}$in the 1st stage of KP, and extended to $140^{\circ}$in the 2nd stage of KP, and the foot-ankle angle of attacking foot showed $103^{\circ}$in the 1st stage of KP, and extended to $115^{\circ}$in the 2nd stage of KP. During Uchi-mata performing, type A showed pulling pattern and type B showed lift-pulling pattern. As Kumi-kata types, it were different to upper body(elbow, shoulder angle), but mostly similar to lower body(hip, knee, ankle angle) on both types. 3) C. O. G. variables When the subjects performed Uchi-mata, COG of type A, B up and down in vertical aspect was 71cm, 73.8cm in height from the foot in the 2nd stage of KP. As Kumi-kata types, it were different on medial-lateral direction aspect but weren't different in Kuzushi phase on vertical direction aspect.

Reproducibility of Adenosine Tc-99m sestaMIBI SPECT for the Diagnosis of Coronary Artery Disease (관동맥질환의 진단을 위한 아데노신 Tc-99m sestaMIBI SPECT의 재현성)

  • Lee, Duk-Young;Bae, Jin-Ho;Lee, Sang-Woo;Chun, Kyung-Ah;Yoo, Jeong-Soo;Ahn, Byeong-Cheol;Ha, Jeoung-Hee;Chae, Shung-Chull;Lee, Kyu-Bo;Lee, Jae-Tae
    • The Korean Journal of Nuclear Medicine
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    • v.39 no.6
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    • pp.473-480
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    • 2005
  • Purpose: Adenosine myocardial perfusion SPECT has proven to be useful in the detection of coronary artery disease, in the follow up the success of various therapeutic regimens and in assessing the prognosis of coronary artery disease. The purpose of this study is to define the reproducibility of myocardial perfusion SPECT using adenosine stress testing between two consecutive Tc-99m sestaMIBI (MIBI) SPECT studies in the same subjects. Methods: Thirty patients suspected of coronary artery disease in stable condition underwent sequential Tc-99m MIBI SPECT studies using intravenous adenosine. Gamma camera, acquisition and processing protocols used for the two tests were identical and no invasive procedures were performed between two tests. Mean interval between two tests were 4.1 days (range: 2-11 days). The left ventricular wall was divided into na segments and the degree of myocardial tracer uptake was graded with four-point scoring system by visual analysis. Images were interpretated by two independent nuclear medicine physicians and consensus was taken for final decision, if segmental score was not agreeable. Results: Hemodynamic responses to adenosine were not different between two consecutive studies. There were no serious side effects to stop infusion of adenosine and side effects profile was not different. When myocardial uptake was divided into normal and abnormal uptake, 481 of 540 segments were concordant (agreement rate 89%, Kappa index 0.74). With four-grade storing system, exact agreement was 81.3% (439 of 540 segments, tau b=0.73). One and two-grade differences were observed in 97 segments (18%) and 4 segments (0.7%) respectively, but three-grade difference was not observed in any segment. Extent and severity scores were not different between two studios. The extent and severity scores of the perfusion defect revealed excellent positive correlation between two test (r value for percentage extent and severity score is 0.982 and 0.965, p<0.001) Conclusion: Hemodynamic responses and side effects profile were not different between two consecutive adenosine stress tests in the same subjects. Adenosine Tc-99m sestaMIBI SPECT is highly reproducible, and could be used to assess temporal changes in myocardial perfusion in individual patients.

The Accuracy of the Table Movement During a Whole Body Scan (전신 영상 검사 시행 시 테이블 이동속도의 정확성에 관한 연구)

  • Lee, Ju-Young;Jung, Woo-Young;Jung, Eun-Mi;Dong, Kyung-Rae
    • The Korean Journal of Nuclear Medicine Technology
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    • v.13 no.3
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    • pp.86-91
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    • 2009
  • Purpose: The whole body scan in Nuclear Medicine is a widely accepted examination and procedure. Especially, it is mainly used in bone, I-131, MIBI, and HMPAO WBC scans. The diverse uses of the whole body scan range from the HMPAO WBC scan with a speed of 13cm/min, to a whole body bone scan using the Onco. Flash technique with a speed of 30cm/min. The accuracy of table movement has a strong correlation with the image quality, and inaccuracy of speed could negatively affect the image quality. The purpose of this study is to evaluate the accuracy of the table movement while considering the influence of the age of the equipment and the variability in the weight of the patients. Material and Methods: The study was conducted using two of Seoul Asan Medical Center's SIEMENS gamma cameras which are commonly used in our whole body study. The first one is the oldest gamma camera, an ECAM plus (installed in 2000), and the last is brand new one, a SYMBIA T2 (installed in 2008). Three trials were conducted with the tables moving at a different speed each time; 10, 15 and 30 cm/min. The tables' speeds were measured by checking how long it took for the table to move 10cm, and this was repeated every 10cm until the table reached 100 cm. With an average body weight of the patients of about 60~70 kg, the table speed was measured with weights of 0 kg, 66 kg and 110 kg placed on the table, then compared among conditions. Results: The coefficient of variance (CV) of the ECAM plus showed 1.23, 1.42, 2.02 respectively when the table movement speeds were set at 10, 15, and 30 centimeters per minute. Under the same conditions, the SYMBIA T2 showed 1.23, 1.83 and 2.28 respectively. As table movement speed more, the variance of CV as the speed increases. When the patient body weight was set to 0, 66 and 110kg, the CV values of both cameras showed 0.96, 1.45, 2.08 (0 Kg), 1.32, 1.72, 2.27 (66 Kg) and 1.37, 1.73, 2.14 (110 Kg). There was no significant difference (p>0.05) in 95 percent of confidence intervals and measured CV values were acceptable. However, the CV value of the SYMBIA T2 was relatively larger than the ECAM plus. Conclusion: The scan speed of the whole body scan is predetermined based on which examination is being performed. It is possible for the accuracy of the speed to be affected, such as the age of the equipment, the state of the bearings or the weight of a patient. These factors can have a negative impact on the diagnostic consistency and the image quality. Therefore, periodic quality control should be needed on the gamma cameras currently being used, focusing on the table movement speed in order to maintain accuracy and reproducibility.

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Imaging Neuroreceptors in the Living Human Brain

  • Wagner Jr Henry N.;Dannals Robert F.;Frost J. James;Wong Dean F.;Ravert Hayden T.;Wilson Alan A.;Links Jonathan M.;Burns H. Donald;Kuhar Michael J.;Snyder Solomon H.
    • The Korean Journal of Nuclear Medicine
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    • v.18 no.2
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    • pp.17-23
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    • 1984
  • For nearly a century it has been known that chemical activity accompanies mental activity, but only recently has it been possible to begin to examine its exact nature. Positron-emitting radioactive tracers have made it possible to study the chemistry of the human mind in health and disease, using chiefly cyclotron-produced radionuclides, carbon-11, fluorine-18 and oxygen-15. It is now well established that measurable increases in regional cerebral blood flow, glucose and oxygen metabolism accompany the mental functions of perception, cognition, emotion and motion. On May 25, 1983 the first imaging of a neuroreceptor in the human brain was accomplished with carbon-11 methyl spiperone, a ligand that binds preferentially to dopamine-2 receptors, 80% of which are located in the caudate nucleus and putamen. Quantitative imaging of serotonin-2, opiate, benzodiazapine and muscarinic cholinergic receptors has subsequently been accomplished. In studies of normal men and women, it has been found that dopamine and serotonin receptor activity decreases dramatically with age, such a decrease being more pronounced in men than in women and greater in the case of dopamine receptors than serotonin-2 receptors. Preliminary studies in patients with neuropsychiatric disorders suggests that dopamine-2 receptor activity is diminished in the caudate nucleus of patients with Huntington's disease. Positron tomography permits quantitative assay of picomolar quantities of neuro-receptors within the living human brain. Studies of patients with Parkinson's disease, Alzheimer's disease, depression, anxiety, schizophrenia, acute and chronic pain states and drug addiction are now in progress. The growth of any scientific field is based on a paradigm or set of ideas that the community of scientists accepts. The unifying principle of nuclear medicine is the tracer principle applied to the study of human disease. Nineteen hundred and sixty-three was a landmark year in which technetium-99m and the Anger camera combined to move the field from its latent stage into a second stage characterized by exponential growth within the framework of the paradigm. The third stage, characterized by gradually declining growth, began in 1973. Faced with competing advances, such as computed tomography and ultrasonography, proponents and participants in the field of nuclear medicine began to search for greener pastures or to pursue narrow sub-specialties. Research became characterized by refinements of existing techniques. In 1983 nuclear medicine experienced what could be a profound change. A new paradigm was born when it was demonstrated that, despite their extremely low chemical concentrations, in the picomolar range, it was possible to image and quantify the distribution of receptors in the human body. Thus, nuclear medicine was able to move beyond physiology into biochemistry and pharmacology. Fundamental to the science of pharmacology is the concept that many drugs and endogenous substances, such as neurotransmitters, react with specific macromolecules that mediate their pharmacologic actions. Such receptors are usually identified in the study of excised tissues, cells or cell membranes, or in autoradiographic studies in animals. The first imaging and quantification of a neuroreceptor in a living human being was performed on May 25, 1983 and reported in the September 23, 1983 issue of SCIENCE. The study involved the development and use of carbon-11 N-methyl spiperone (NMSP), a drug with a high affinity for dopamine receptors. Since then, studies of dopamine and serotonin receptors have been carried out in over 100 normal persons or patients with various neuropsychiatric disorders. Exactly one year later, the first imaging of opitate receptors in a living human being was performed [1].

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The Evaluation of Reconstructed Images in 3D OSEM According to Iteration and Subset Number (3D OSEM 재구성 법에서 반복연산(Iteration) 횟수와 부분집합(Subset) 개수 변경에 따른 영상의 질 평가)

  • Kim, Dong-Seok;Kim, Seong-Hwan;Shim, Dong-Oh;Yoo, Hee-Jae
    • The Korean Journal of Nuclear Medicine Technology
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    • v.15 no.1
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    • pp.17-24
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    • 2011
  • Purpose: Presently in the nuclear medicine field, the high-speed image reconstruction algorithm like the OSEM algorithm is widely used as the alternative of the filtered back projection method due to the rapid development and application of the digital computer. There is no to relate and if it applies the optimal parameter be clearly determined. In this research, the quality change of the Jaszczak phantom experiment and brain SPECT patient data according to the iteration times and subset number change try to be been put through and analyzed in 3D OSEM reconstruction method of applying 3D beam modeling. Materials and Methods: Patient data from August, 2010 studied and analyzed against 5 patients implementing the brain SPECT until september, 2010 in the nuclear medicine department of ASAN medical center. The phantom image used the mixed Jaszczak phantom equally and obtained the water and 99mTc (500 MBq) in the dual head gamma camera Symbia T2 of Siemens. When reconstructing each image altogether with patient data and phantom data, we changed iteration number as 1, 4, 8, 12, 24 and 30 times and subset number as 2, 4, 8, 16 and 32 times. We reconstructed in reconstructed each image, the variation coefficient for guessing about noise of images and image contrast, FWHM were produced and compared. Results: In patients and phantom experiment data, a contrast and spatial resolution of an image showed the tendency to increase linearly altogether according to the increment of the iteration times and subset number but the variation coefficient did not show the tendency to be improved according to the increase of two parameters. In the comparison according to the scan time, the image contrast and FWHM showed altogether the result of being linearly improved according to the iteration times and subset number increase in projection per 10, 20 and 30 second image but the variation coefficient did not show the tendency to be improved. Conclusion: The linear relationship of the image contrast improved in 3D OSEM reconstruction method image of applying 3D beam modeling through this experiment like the existing 1D and 2D OSEM reconfiguration method according to the iteration times and subset number increase could be confirmed. However, this is simple phantom experiment and the result of obtaining by the some patients limited range and the various variables can be existed. So for generalizing this based on this results of this experiment, there is the excessiveness and the evaluation about 3D OSEM reconfiguration method should be additionally made through experiments after this.

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Direct bonding of Si(100)/Si$_3$N$_4$∥Si (100) wafers using fast linear annealing method (선형열처리를 이용한 Si(100)/Si$_3$N$_4$∥Si (100) 기판쌍의 직접접합)

  • Lee, Young-Min;Song, Oh-Song;Lee, Sang-Hyun
    • Korean Journal of Materials Research
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    • v.11 no.5
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    • pp.427-430
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    • 2001
  • We prepared 10cm-diameter Si(100)/500 $\AA$-Si$_3$N$_4$/Si(100) wafer Pairs adopting 500 $\AA$ -thick Si$_3$N$_4$layer as insulating layer between single crystal Si wafers. Si3N, is superior to conventional SiO$_2$ in insulating. We premated a p-type(100) Si wafer and 500 $\AA$ -thick LPCVD Si$_3$N$_4$∥Si (100) wafer in a class 100 clean room. The cremated wafers are separated in two groups. One group is treated to have hydrophobic surface and the other to have hydrophilic. We employed a FLA(fast linear annealing) bonder to enhance the bond strength of cremated wafers at the scan velocity of 0.1mm/sec with varying the heat input at the range of 400~1125W. We measured bonded area using a infrared camera and bonding strength by the razor blade crack opening method. We used high resolution transmission electron microscopy(HRTEM) to probe cross sectional view of bonded wafers. The bonded area of two groups was about 75%. The bonding strength of samples which have hydrophobic surface increased with heat input up to 1577mJ/$m^2$ However, bonding strength of samples which have hydrophilic surface was above 2000mJ/$m^2$regardless of heat input. The HRTEM results showed that the hydrophilic samples have about 25 $\AA$ -thick SiO layer between Si and Si$_3$N$_4$/Si and that maybe lead to increase of bonding strength.

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