• 제목/요약/키워드: quartz glass

검색결과 178건 처리시간 0.027초

ANALYSIS OF THIN FILM POLYSILICON ON GLASS SYNTHESIZED BY MAGNETRON SPUTTERING

  • Min J. Jung;Yun M. Chung;Lee, Yong J.;Jeon G. Han
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2001년도 추계학술발표회 초록집
    • /
    • pp.68-68
    • /
    • 2001
  • Thin films of polycrystalline silicon (poly-Si) is a promising material for use in large-area electronic devices. Especially, the poly-Si can be used in high resolution and integrated active-matrix liquid-crystal displays (AMLCDs) and active matrix organic light-emitting diodes (AMOLEDs) because of its high mobility compared to hydrogenated _amorphous silicon (a-Si:H). A number of techniques have been proposed during the past several years to achieve poly-Si on large-area glass substrate. However, the conventional method for fabrication of poly-Si could not apply for glass instead of wafer or quartz substrate. Because the conventional method, low pressure chemical vapor deposition (LPCVD) has a high deposition temperature ($600^{\circ}C-1000^{\circ}C$) and solid phase crystallization (SPC) has a high annealing temperature ($600^{\circ}C-700^{\circ}C$). And also these are required time-consuming processes, which are too long to prevent the thermal damage of corning glass such as bending and fracture. The deposition of silicon thin films on low-cost foreign substrates has recently become a major objective in the search for processes having energy consumption and reaching a better cost evaluation. Hence, combining inexpensive deposition techniques with the growth of crystalline silicon seems to be a straightforward way of ensuring reduced production costs of large-area electronic devices. We have deposited crystalline poly-Si thin films on soda -lime glass and SiOz glass substrate as deposited by PVD at low substrate temperature using high power, magnetron sputtering method. The epitaxial orientation, microstructual characteristics and surface properties of the films were analyzed by TEM, XRD, and AFM. For the electrical characterization of these films, its properties were obtained from the Hall effect measurement by the Van der Pauw measurement.

  • PDF

Study of Littoral Sand Migration Along the West Coast of Ahnmyeon Island, Korea

  • Park, Yong Ahn
    • 한국해양학회지
    • /
    • 제10권1호
    • /
    • pp.1-6
    • /
    • 1975
  • A marine geological investigation of the glass sand deposit in the beach along the west coast of Ahnmyeon Island, South Chung Cheong Province, Korea was carried out to solve the problen of sand material migration, textural properties of the sands and the glass sand reserve for future exploitation. Several bos coring analyses by means of the internal sedimentary structure.i.e., cross- stratification show significantly that most sands are moving and accumulation along the mean vector direction of $N20^{\circ}E-N60^{\circ}$ E in the area investigated. The average mean size of the sand sediments in the area studied ranges from 0.212mm to 0.275mm. The mechanism of sand migration in the area is considered to be interplay between longshore drift and flood tidal current. The sorting value of the sands ranges from 0.24 to 0.50. Therefore, these sand sediments are characteristic to be "well sorted". The average chemical composition of the glass sand in the area is the following: $SiO\_2$:-90.8%, $Al_2O_3$: -2.18%, $Fe_2O_3$:-0.73%, CaO:-1.79. The binocular microscope examination of the sands show that most of the sands are characteristically ice- clear quartz in mineral composition and their count percentage is mostly 92% or 96%.

  • PDF

도금공정 공기중 6가 크롬 시료채취여과지 비교에 관한 연구 (Comparison of Sampling Filters for Airborne Hexavalent Chromium in Plating Operation)

  • 이병규;신용철
    • 한국환경보건학회지
    • /
    • 제29권2호
    • /
    • pp.69-76
    • /
    • 2003
  • Hexavalent chromium may reduce on polyvinyl chloride (PVC) filter during sampling and storage of sample. Recently, new or modified filters for preventing Cr(VI) from the reduction has been introduced. Thus, this study was performed to compare the reduction behaviors of Cr(VI) on several sampling filters and to find the most appropriate filter for airborne Cr(VI) sampling in plating operation. The results were as follows. 1. There were statistically significant differences among PVC, polytetrafluoroethylene (PTFE). glass fiber (GF) and polyvinylidene fluoride (PVDF) filters in recovery rates of spiked Cr(VI) samples by storage time(p<0.05). There was no significant difference between PVC and PTFE filters(p>0.05). The PVC and PTFE filters showed higher recoveries than GF and PVDF filters(p<0.05). 2. The quartz fiber(QF) filter treated with an alkali solution(2% NaOH/3% Na$_2$CO$_3$, 1% NaOH) showed a significantly higher recovery of Cr(VI) by storage time than other filters(GF and QF filter)(p<0.05). There was no difference in recovery of Cr(VI) between alkali-treated and untreated GF it filters(p>0.05). But the QF filters treated with two alkali solution showed a significantly higher recovery than the untreated QF filter(p<0.05). There was no significant difference in recovery of Cr(VI) between QF filters treated with 1% NaOH and 2% NaOH/3% Na$_2$CO$_3$(p>0.05). In conclusion, treatment of QF fillers with alkali solution was most effective in protecting from the reduction of Cr(VI).

Influence of modification in core building procedure on fracture strength and failure patterns of premolars restored with fiber post and composite core

  • Kim, Young-Hoi;Lee, Jong-Hyuk
    • The Journal of Advanced Prosthodontics
    • /
    • 제4권1호
    • /
    • pp.37-42
    • /
    • 2012
  • PURPOSE. The influence of the modified process in the fiber-reinforced post and resin core foundation treatment on the fracture resistance and failure pattern of premolar was tested in this study. MATERIALS AND METHODS. Thirty-six human mandibular premolars were divided into 4 groups (n = 9). In group DCT, the quartz fibre post (D.T. Light-post) was cemented with resin cement (DUO-LINK) and a core foundation was formed with composite resin (LIGHT-CORE). In group DMO and DMT, resin cement (DUO-LINK) was used for post (D.T. Lightpost) cementation and core foundation; in group DMO, these procedures were performed simultaneously in one step, while DMT group was accomplished in separated two steps. In group LCT, the glass fiber post (LuxaPost) cementation and core foundation was accomplished with composite resin (LuxaCore-Dual) in separated procedures. Tooth were prepared with 2 mm ferrule and restored with nickel-chromium crowns. A static loading test was carried out and loads were applied to the buccal surface of the buccal cusp at a 45 degree inclination to the long axis of the tooth until failure occurred. The data were analyzed with MANOVA (${\alpha}$= .05). The failure pattern was observed and classified as either favorable (allowing repair) or unfavorable (not allowing repair). RESULTS. The mean fracture strength was highest in group DCT followed in descending order by groups DMO, DMT, and LCT. However, there were no significant differences in fracture strength between the groups. A higher prevalence of favorable fractures was detected in group DMT but there were no significant differences between the groups. CONCLUSION. The change of post or core foundation method does not appear to influence the fracture strength and failure patterns.

졸-겔 방법에 의한 $Li_2O-Al_2O_3-SiO_2$계 저열팽상성 결정화유리의 제조 (Preparation of Ultra-Low Thermal Expansion L$i_2$O-A$l_2$$O_3$-Si$O_2$ Glass-Ceramics by Sol-gel Technique)

  • 양중식;김종범;양중식
    • 한국재료학회지
    • /
    • 제3권3호
    • /
    • pp.207-214
    • /
    • 1993
  • $Li_2O-Al_2O_3-SiO_3$계 결정화유리의 저온합성을 위하여 출방원료로서 각 해당 금속 알콕시드를 사용하였다. 알코올을 용매로 충분히 첨가하고, drying control chemical additive로 dimethy1 formamide를 적당량 첨가한 혼합용용액을 과잉의 물로 충분히 가수분해시킨 습윤겔을 저온으로 건고하여 균열이 없는 건조된 monolith겔을 합성하였다. 건조겔로부터 750-$950^{\circ}C$로 10시간 이상 소결하여 저열팽창성을 나타내는 ${\beta}$-eucrypytite(${\beta}$-quartz 고용체), $Li_2O\cdot Al_2O_3\cdot 3SiO_2$${\beta}$-spodumene등의결정상을 석출시켰다.

  • PDF

C-축으로 정렬된 sol-gel ZnO 박막의 특성 (Characteristics of c-axis oriented sol-gel derived ZnO films)

  • 김상수;장기완;김인성;송호준;박일우;이건환;권식철
    • 한국결정성장학회지
    • /
    • 제11권2호
    • /
    • pp.49-55
    • /
    • 2001
  • sol-gel방법에 의해서 p-형 Si(100)웨이퍼와 ITO glass, quartz glass기판 위 ZnO박막을 형성시켰으며 출발 물질은 zinc acetate dihydrate를 사용하였다. Zinc acetate dihydrate를 2-methoxyethanol-monoethanolamine(MEA)용액에 녹여 :균질하고 안정된 용액을 만들었다. ZnO박막은 2800rpm에서 25초 동안 spin-coating하고 $250^{\circ}C$의 hot plate에서 10분 동안 중간 열처리한 후 이를 반복하여 형성시켰고 결정화를 위한 열처리는 $400^{\circ}C$~$800^{\circ}C$공기 분위기에서 1시간 동안 시행하였다. X-ray diffraction(XRD), scanning electron microscopy(SEM), UV-vis 투과 스펙트럼, IR 투과 스펙트럼, photoluminescence(PL)스펙트럼 등의 측정 결과로부터 박막의 구조적 특성과 광학적 성질에 대해서 논의하였다. 제조된 ZnO막은 (002)면으로 정렬되어 있으며 380nm파장에서 예리한 흡수단이 있고 가시광선 영역에서 투명(투과율 70% 이상)하였는데 이 흡수단은 ZnO의 밴드 갭(3.2eV)과 잘 일치한다. 저온에서의 띠끝 PL스펙트럼은 속박된 엑시톤 복합체와 포논 복제에 의한 다중선 구조를 보인다.

  • PDF

경주(慶州) 황남동(皇南洞) 출토(出土) 철부(鐵釜)의 보존처리(保存處理) 및 과학적분석(科學的分析) (Scientific Analysis and Conservation Treatment of the Kettle Excavated from Hwangnam-dong, Gyeongju)

  • 문선영;전익환;유혜선
    • 박물관보존과학
    • /
    • 제4권
    • /
    • pp.23-32
    • /
    • 2003
  • 경주 황남동의 통일신라시대 생활유적에서 출토된 철솥을 유리공방에서 사용된 도가니로 추정하고 있어, 이에 대한 과학적인 분석을 통해 철솥의 용도를 밝혀보기로 하였다. 우선 보존처리를 실시해 철솥의 원형을 찾아주고, 철솥 표면에 발생한 부식물 5점에 대해 SEM-EDS 분석 및 XRD 분석을 수행하였다. 철솥의 외형에 있어 도가니로 추정하는 데 가장 큰 역할을 했던 주구부분의 편이 보존처리 과정에서 발견되어 구연부는 완전한 상태로 복원되었다. 금속시편의 조직을 관찰한 결과 열처리없이 서서히 냉각시킨 주조철제로 밝혀졌다. 부식물의 성분원소는 Fe과 O를 주성분으로 한 P, Si, Ca, S 등으로서, 주요 구성 화화물은 quartz, vivianite, goethite, akaganeite, lepidocrocite, hematite 등이었다. 이와 같은 구성 성분들은 유리의 제조원료로서 이들이 철솥 외부표면의 부식물층에서 용융상태가 아닌 원료로 확인되었다는 것은 철솥이 출토된 유적이 유리제조와 관련된 공방지였다는 것을 알려주는 증거가 될 수는 있으나, 철솥이 유리 용융 도가니로 사용되었다는 증거가 될 수는 없다. 또한 철솥 출토 당시 우물지 안에 퇴적되어 있던 유기물 부식토와 사질점토 등을 고려해 보면 이들이 철솥의 부식물 형성인자로 작용한 것으로 볼 수도 있다. 따라서 철솥은 전형적인 주조철제로 도가니로 사용되지는 않은 것으로 결론지을 수 있다.

Plasma etching behavior of RE-Si-Al-O glass (RE: Y, La, Gd)

  • 이정기;황성진;이성민;김형순
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2010년도 춘계학술발표대회
    • /
    • pp.49.1-49.1
    • /
    • 2010
  • The particle generation during the plasma enhanced process is highly considered as serious problem in the semiconductor manufacturing industry. The material for the plasma processing chamber requires the plasma etching characteristics which are homogeneously etched surface and low plasma etching depth for preventing particulate contamination and high durability. We found that the materials without grain boundaries can prevent the particle generation. Therefore, the amorphous material with the low plasma etching rate may be the best candidate for the plasma processing chamber instead of the polycrystalline materials such as yttria and alumina. Three glasses based on $SiO_2$ and $Al_2O_3$ were prepared with various rare-earth elements (Gd, Y and La) which are same content in the glass. The glasses were plasma etched in the same condition and their plasma etching rate was compared including reference materials such as Si-wafer, quartz, yttria and alumina. The mechanical and thermal properties of the glasses were highly related with cationic field strength (CFS) of the rare-earth elements. We assumed that the plasma etching resistance may highly contributed by the thermal properties of the fluorine byproducts generated during the plasma exposure and it is expected that the Gd containing glass may have the highest plasma etching resistance due to the highest sublimation temperature of $GdF_3$ among three rare-earth elements (Gd, Y and La). However, it is found that the plasma etching results is highly related with the mechanical property of the glasses which indicates the cationic field strength. From the result, we conclude that the glass structure should be analyzed and the plasma etching test should be conducted with different condition in the future to understand the plasma etching behavior of the glasses perfectly.

  • PDF

Study on Recycling of Scraps from Process of Silicon-single-crystal for Semiconductor

  • Lee, Sang-Hoon;Lee, Kwan-Hee;Hiroshi Okamoto
    • 대한전자공학회:학술대회논문집
    • /
    • 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
    • /
    • pp.705-710
    • /
    • 2001
  • So for the quartz-glassy crucible wastes which was used for pulling up silicon-single-crystal ingot have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC (Epoxy Molding Compound). Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silicafiller. In view of the results, if the chemical, physical and thermal pre-treatment process for efficient elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment (heat hysteresis phenomenon) was not changed. So, it was understood that as fused silica in the amorphous state, as It is, recycling possibility was very high

  • PDF

Femtosecond Laser Ablation of Polymer Thin Films for Nanometer Precision Surface Patterning

  • Jun, Indong;Lee, Jee-Wook;Ok, Myoung-Ryul;Kim, Yu-Chan;Jeon, Hojeong
    • 한국표면공학회지
    • /
    • 제49권1호
    • /
    • pp.20-25
    • /
    • 2016
  • Femtosecond laser ablation of ultrathin polymer films on quartz glass using laser pulses of 100 fs and centered at ${\lambda}=400nm$ wavelength has been investigated for nanometer precision thin film patterning. Single-shot ablation craters on films of various thicknesses have been examined by atomic force microscopy, and beam spot diameters and ablation threshold fluences have been determined by square diameter-regression technique. The ablation thresholds of polymer film are about 1.5 times smaller than that of quartz substrate, which results in patterning crater arrays without damaging the substrate. In particular, at a $1/e^2$ laser spot diameter of $0.86{\mu}m$, the smallest craters of 150-nm diameter are fabricated on 15-nm thick film. The ablation thresholds are not influenced by the film thickness, but diameters of the ablated crater are bigger on thicker films than on thinner films. The ablation efficiency is also influenced by the laser beam spot size, following a $w_{0q}{^{-0.45}}$ dependence.