• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.552-555
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• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• Transactions of the Society of Information Storage Systems
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• v.2 no.2
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• ICROS
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• v.8 no.6
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• pp.11-17
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• 2002

• Ingenium
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• v.8 no.2
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• pp.51-57
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• 2001

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.84-93
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• 2001

An electromagnetic micro x-y stage for probe-based data storage (PDS) has been fabricated. The x-y stage consists of a silicon body inside which planar copper coils are embedded, a glass substrate bonded to the silicon body, and eight permanent magnets. The dimensions of flexures and copper coils were determined to yield $100{\;}\mu\textrm{m}$ in x and y directions under 50 mA of supplied current and to have 440 Hz of natural frequency. For the application to PDS devices, electromagnetic stage should have flat top surface for the prevention of its interference with multi-probe array, and have coils with low resistance for low power consumption. In order to satisfy these design criteria, conducting planar copper coils have been electroplated within silicon trenches which have high aspect ratio ($5{\;}\mu\textrm{m}$in width and $30{\;}\mu\textrm{m}$in depth). Silicon flexures with a height of $250{\;}\mu\textrm{m}$ were fabricated by using inductively coupled plasma reactive ion etching (ICP-RIE). The characteristics of a fabricated electromagnetic stage were measured by using laser doppler vibrometer (LDV) and dynamic signal analyzer (DSA). The DC gain was $0.16{\;}\mu\textrm{m}/mA$ and the maximum displacement was $42{\;}\mu\textrm{m}$ at a current of 180 mA. The measured natural frequency of the lowest mode was 325 Hz. Compared with the designed values, the lower natural frequency and DC gain of the fabricated device are due to the reverse-tapered ICP-RIE process and the incomplete assembly of the upper-sided permanent magnets for LDV measurements.

• Transactions of the Society of Information Storage Systems
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• v.3 no.2
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• pp.59-65
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• 2007

Scanning Prove Microscope (SPM) - based Data Storage (SDS)는 Atomic Force Microscope (AFM)을 이용하여 Cantilever Tip 이 저장 장치 미디어에 나노미터 단위로 비트를 읽고, 쓰고 지우는 저장 장치로써, x, y 두 축을 이용한다. 따라서 축간 coupling 의 영향이 크게 발생한다. 따라서 축간 coupling 의 영향을 고려하여 제어기를 설계하여야 한다. 본 논문은 coupling 요소를 제거하기 위하여 Feedforward Decoupler 를 설계하여 Stage 의 입력 앞 단에 추가하는 방법을 제안하였다. Feedforward Decoupler 를 추가함으로써 coupling 요소가 줄어드는 것을 모의 실험을 통해 확인한다. 이를 통해 나노급으로 보다 정밀한 제어가 가능함을 확인하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.373-378
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• 2004

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55％, that is very large compared with conventional ones having a few percentage.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.185-189
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• 2005

We reported here nano-scale electrical phase-change recording in amorphous $Ge_2Sb_2Te_5$ media using an atomic force microscope (AFM) having conducting probes. In recording process, a pulse voltage is applied to the conductive probe that touches the media surface to change locally the electrical resistivity of a film. However, in contact operation, tip/media wear and contamination could major obstacles, which degraded SNR, reproducibility, and lifetime. In order to overcome tip/media wear and contamination in contact mode operation, we adopted the W incorporated diamond-like carbon (W-DLC) films as a protective layer. Optimized mutilayer media were prepared by a hybrid deposition system of PECVD and RF magnetron sputtering. When suitable electrical pulses were applied to media through the conducting probe, it was observed that data bits as small as 25 nm in diameter have been written and read with good reproducibility, which corresponds to a data density of $1 Tbit/inch^2$. We concluded that stable electrical phase-change recording was possible mainly due to W-DLC layer, which played a role not only capping layer but also resistive layer.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.224-229
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• 2006

There has been studied flow to minimize the spot size to increase data capacity. Optical data storage devices are being developed near practical limits with wavelength and NA of 405nm and 0.85. There has been studied many types of next generation storage devices such as blu-ray multilayer system, probe based data storage and holographic data storage. Among these data storage devices, solid immersion lens(SIL) based near field recording (NFR) has been widely studied. In this system, SIL is the key component that focuses the laser beam with a very small size which enables ultra high data capacity. Therefore, optical performance evaluation system is required for SIL assembly. In this dissertation, a simple and accurate SIL assembly measurement method is proposed with wedge plate lateral shearing interferometer(LSI). Wedge plate LSI is cheaper than commercialized interferometer, robust to the vibration and the moving distance for phase shifting is large that is order of micrometer. We designed the thickness, wedge angle, material, surface quality and wavelength of wedge plate as 1mm, 0.02degree, fused silica, lamda/10(10-5) and 405nm, respectively. Also, we confirmed simulation and experimental results with quantitative analysis. This simple wedge plate LSI can be applied to different types of SIL such as solid immersion mirror(SIM), hemispherical, super-hemispherical and elliptical SIL.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.19 no.5
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• pp.70-81
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• 2020

Point-by-point data, which is abundantly collected by vehicles with embedded GPS (Global Positioning System), generate useful information. These data facilitate decisions by transportation jurisdictions, and private vendors can monitor and investigate micro-scale driver behavior, traffic flow, and roadway movements. The information is applied to develop app-based route guidance and business models. Of these, speed data play a vital role in developing key parameters and applying agent-based information and services. Nevertheless, link speed values require different levels of physical storage and fidelity, depending on both collecting and reporting intervals. Given these circumstances, this study aimed to establish an appropriate collection interval to efficiently utilize Space Mean Speed information by vehicles with embedded GPS. We conducted a comparison of Probe-vehicle data and Image-based vehicle data to understand PE(Percentage Error). According to the study results, the PE of the Probe-vehicle data showed a 95% confidence level within an 8-second interval, which was chosen as the appropriate collection interval for Probe-vehicle data. It is our hope that the developed guidelines facilitate C-ITS, and autonomous driving service providers will use more reliable Space Mean Speed data to develop better related C-ITS and autonomous driving services.