• Title/Summary/Keyword: pressure sensor

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Hysteresis Behavior in Electric Resistance-hydrogen Concentration of Pd Thin Films (Pd 박막의 전기저항-수소농도 이력현상)

  • Lee, Eunsongyi;Lee, Jun Min;Jeon, Kye Jin;Lee, Wooyoung
    • Korean Journal of Metals and Materials
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    • v.47 no.6
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    • pp.372-377
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    • 2009
  • We report on hysteresis behavior in the electrical resistance-hydrogen concentration of Pd thin films. The variation of the electrical resistance has been investigated during the process of absorption and desorption of hydrogen gas ($H_{2}$) as a function of thickness of Pd thin films. The hysteresis behavior in the electrical resistance with $H_{2}$ concentration was found for Pd thin films and consists of $\alpha$ phase, ${\alpha}+{\beta}$ phase, and $\beta$ phase regions. The sensitivity of Pd thin films with $H_{2}$ concentration was found to follow Sieverts' law in the $\alpha$ phase region. However, the sensitivity was observed to increase abruptly with $H_{2}$ concentration in the ${\alpha}+{\beta}$ phase co-exist region. This is because Pd-H interaction is stronger in the $\beta$ phase than in the $\alpha$ phase and needs a higher concentration gradient as a driving force to desorb. The formation of the $\beta$ phase also was observed to cause the structural change because of the lattice expansion during absorption. The hysteresis height and the trace of structural change were affected by the thickness of the Pd film. As the film becomes thinner, the hysteresis height becomes lower and the amount of delamination on the surface becomes smaller. For films thinner than 20 nm in thickness, the delamination was not found but electrical resistance hysteresis was still observed.

Design and Function Analysis of Dust Measurement Platform based on IoT protocol (사물인터넷 프로토콜 기반의 미세먼지 측정 플랫폼 설계와 기능해석)

  • Cho, Youngchan;Kim, Jeongho
    • Journal of Platform Technology
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    • v.9 no.4
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    • pp.79-89
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    • 2021
  • In this paper, the fine dust (PM10) and ultrafine dust (PM2.5) measurement platforms are designed to be mobile and fixed using oneM2M, the international standard for IoT. The fine dust measurement platform is composed and designed with a fine dust measurement device, agent, oneM2M platform, oneM2M IPE, and monitoring system. The main difference between mobile and fixed is that the mobile uses the MQTT protocol for interconnection between devices and services without blind spots based on LTE connection, and the fixed uses the LoRaWAN protocol with low power and wide communication range. Not only fine dust, but also temperature, humidity, atmospheric pressure, volatile organic compounds (VOC), carbon monoxide (CO), sulfur dioxide (SO2), nitrogen dioxide (NO2), and noise data related to daily life were collected. The collected sensor values were managed using the common API provided by oneM2M through the agent and oneM2M IPE, and it was designed into four resource types: AE and container. Six functions of operability, flexibility, convenience, safety, reusability, and scalability were analyzed through the fine dust measurement platform design.

Fabrication of surface-enhanced Raman scattering substrate using black silicon layer manufactured through reactive ion etching (RIE 공정으로 제조된 블랙 실리콘(Black Silicon) 층을 사용한 표면 증강 라만 산란 기판 제작)

  • Kim, Hyeong Ju;Kim, Bonghwan;Lee, Dongin;Lee, Bong-Hee;Cho, Chanseob
    • Journal of Sensor Science and Technology
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    • v.30 no.4
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    • pp.267-272
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    • 2021
  • In this study, Ag was deposited to investigate its applicability as a surface-enhanced Raman scattering substrate after forming a grass-type black silicon structure through maskless reactive ion etching. Grass-structured black silicon with heights of 2 - 7 ㎛ was formed at radio-frequency (RF) power of 150 - 170 W. The process pressure was 250 mTorr, the O2/SF6 gas ratio was 15/37.5, and the processing time was 10 - 20 min. When the processing time was increased by more than 20 min, the self-masking of SixOyFz did not occur, and the black silicon structure was therefore not formed. Raman response characteristics were measured based on the Ag thickness deposited on a black silicon substrate. As the Ag thickness increased, the characteristic peak intensity increased. When the Ag thickness deposited on the black silicon substrate increased from 40 to 80 nm, the Raman response intensity at a Raman wavelength of 1507 / cm increased from 8.2 × 103 to 25 × 103 cps. When the Ag thickness was 150 nm, the increase declined to 30 × 103 cps and showed a saturation tendency. When the RF power increased from 150 to 170 W, the response intensity at a 1507/cm Raman wavelength slightly increased from 30 × 103 to 33 × 103 cps. However, when the RF power was 200 W, the Raman response intensity decreased significantly to 6.2 × 103 cps.

A Study on the Improvement of Comfortable Living Environment by Using real-time Sensors

  • KIM, Chang-Mo;KIM, Ik-Soo;SHIN, Deok-Young;LEE, Hee-Sun;KWON, Seung-Mi;SHIN, Jin-Ho;SHIN, YongSeung
    • Journal of Wellbeing Management and Applied Psychology
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    • v.5 no.4
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    • pp.19-31
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    • 2022
  • Purpose: This study was conducted to identify indoor air quality in various living spaces using sensors that can measure noise, vibration, fine dust, and odor in real time and to propose optimal indoor air quality maintenance management using Internet of Things(IoT). Research design, data and methodology: Using real-time sensors to monitor physical factors and environmental air pollutants that affect the comfort of the residential environment, Noise, Vibration, Atmospheric Pressure, Blue Light, Formaldehyde, Hydrogen Sulfide, Illumination, Temperature, Ozone, PM10, Aldehyde, Amine, LVOCs and TVOCs were measured. It were measured every 1 seconds from 4 offices and 4 stores on a small scale from November 2018 to January 2019. Results: The difference between illuminance and blue light for each measuring point was found to depend on lighting time, and the ratio of blue light in total illumination was 0.358 ~ 0.393. Formaldehyde and hydrogen sulphide were found to be higher than those that temporarily attract people in an indoor office space that is constantly active, requiring office air ventilation. The noise was found to be 50dB higher than the office WHO recommendation noise level of 35 ~ 40dB. The most important factors for indoor environmental quality were temperature> humidity> illumination> blue light in turn. Conclusions: Various factors that determine the comfort of indoor living space can be measured with real-time sensors. Further, it is judged that the use of IoT can help maintain indoor air quality comfortably.

A Study on Drone Flight Trajectory for Accurate Detection of Air Pollutant Emission Designation (정확한 대기오염물질 배출 지정 탐지를 위한 드론 비행 궤도에 관한 연구)

  • Kim, Suyeong;Lee, Sukhoon;Jeong, Dongwon
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2021.10a
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    • pp.15-17
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    • 2021
  • This paper proposes a drone flight trajectory method for accurate air pollutant emission designation detection. In areas with many factories, such as industrial complexes, there are workplaces that illegally emit air pollutants in a situation where monitoring is neglected. In the past, studies have been actively conducted to measure air pollutants in these areas using drones. The measurement method using a drone uses a method of detecting pollution by stopping around the chimney of a factory, but it has a problem in that the detection of air pollutants is inaccurate depending on environmental factors such as air pressure and wind. Therefore, this paper proposes a drone flight trajectory method for accurate air pollutant emission designation detection. This paper devises a screw orbit flight method in which a drone flies upward while rotating the chimney, and the total area of the chimney is detected and measured considering environmental factors. In the experiment, our proposal shows a higher performance than the existing method.

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Recent Advances in 3D/4D Printed Electronics and Biomedical Applications (3D/4D 프린트된 전자기기 및 바이오메디컬 응용기술의 최근 발전)

  • Hyojun Lee;Daehoon Han
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.4
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    • pp.1-7
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    • 2023
  • The ability of 3D/4D printing technology to create arbitrary 3D structures provides a greater degree of freedom in the design of printed structures. This capability has influenced the field of electronics and biomedical applications by enabling the trends of device miniaturization, customization, and personalization. Here, the current state-of-the-art knowledge of 3D printed electronics and biomedical applications with the unique and unusual properties enabled by 3D/4D printing is reviewed. Specifically, the review encompasses emerging areas involving recyclable and degradable electronics, metamaterial-based pressure sensor, fully printed portable photodetector, biocompatible and high-strength teeth, bioinspired microneedle, and transformable tube array for 3D cell culture and histology.

Detection with a SWNT Gas Sensor and Diffusion of SF6 Decomposition Products by Corona Discharges (탄소나노튜브 가스센서의 SF6 분해생성물 검출 및 확산현상에 관한 연구)

  • Lee, J.C.;Jung, S.H.;Baik, S.H.
    • Journal of the Korean Vacuum Society
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    • v.18 no.1
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    • pp.66-72
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    • 2009
  • The detection methods are required to monitor and diagnose the abnormality on the insulation condition inside a gas-insulated switchgear (GIS). Due to a good sensitivity to the products decomposed by partial discharges (PDs) in $SF_6$ gas, the development of a SWNT gas sensor is actively in progress. However, a few numerical studies on the diffusion mechanism of the $SF_6$ decomposition products by PD have been reported. In this study, we modeled $SF_6$ decomposition process in a chamber by calculating temperature, pressure and concentration of the decomposition products by using a commercial CFD program in conjunction with experimental data. It was assumed that the mass production rate and the generation temperature of the decomposition products were $5.04{\times}10^{-10}$ [g/s] and over 773 K respectively. To calculate the concentration equation, the Schmidt number was specified to get the diffusion coefficient functioned by viscosity and density of $SF_6$ gas instead rather than setting it directly. The results showed that the drive potential is governed mainly by the gradient of the decomposition concentration. A lower concentration of the decomposition products was observed as the sensors were placed more away from the discharge region. Also, the concentration increased by increasing the discharge time. By installing multiple sensors the location of PD is expected to be identified by monitoring the response time of the sensors, and the information should be very useful for the diagnosis and maintenance of GIS.

Effects of an $Al_2$O$_3$Surfasce Protective Layer on the Sensing Properties of $SnO_2$Thin Film Gas Sensors (Al$_2$O$_3$ 표면 보호층이 박막형 $SnO_2$ 가스센서의 감지 특성에 미치는 영향)

  • Seong, Gyeong-Pil;Choe, Dong-Su;Kim, Jin-Hyeok;Mun, Jong-Ha;Myeong, Tae-Ho
    • Korean Journal of Materials Research
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    • v.10 no.11
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    • pp.778-783
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    • 2000
  • Effects of the $Al_2$O$_3$surface protective layer, deposited on the SnO$_2$sensing layer by aerosol flame deposition (AFD) method, on the sensing properties of SnO$_2$thin film ags sensors were investigated.Effects of Pt doping to the $Al_2$O$_3$surface protective layer on the selectivity of CH$_4$ gas were also investigated. 0.3$\mu\textrm{m}$ thick SnO$_2$thin sensing layers on Pt electrodes were prepared by R.F. magnetron sputtering with R.F. power of 50 W, at working pressure of 4mTorr, and at 20$0^{\circ}C$ for 30 min. $Al_2$O$_3$surface protective layers on SnO$_2$layers were prepared by AFD using a diluted aluminum nitrade (Al(NO$_3$).9$H_2O$) solution. The sensitivity of CO gas in the SnO$_2$gas sensor with an $Al_2$O$_3$surface protective layer was significantly decreased. But that of CH$_4$gas remained almost same with pure SnO$_2$gas sensor. This result shows that the selectivity of CH$_4$gas is increased because of the $Al_2$O$_3$surface protective layer. In the case of SnO$_2$gas sensors with Pt-doped $Al_2$O$_3$surface protective layers, low sensing property to CO gas and high sensing property to CH$_4$were observed. This results in the increasing of selectivity of CH$_4$gas selectivity are discussed.

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Spectral Response of $TiO_{2}$/Se : Te Heterojunction for Color Sensor (컬러센서를 위한 $TiO_{2}$/Se : Te 이종접합의 스펙트럼 응답)

  • Woo, Jung-Ok;Park, Wug-Dong;Kim, Ki-Wan;Lee, Wu-Il
    • Journal of Sensor Science and Technology
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    • v.2 no.1
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    • pp.101-108
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    • 1993
  • $TiO_{2}$/Se : Te heterojunction for color sensor has been fabricated by RF reactive sputtering and thermal evaporation methods onto glass substrate. The optimum deposition condition of $TiO_{2}$ films was such that RF power was 120 W, substrate temperature was $100^{\circ}C$, oxygen concentration was 50%, working pressure was 50 mTorr for the $TiO_{2}$ film thickness of $1000{\AA}$. In this case, the optical transmittance of $TiO_{2}$ film at 550 nm-wavelength was 85%, resistivity was $2{\times}10^9{\Omega}{\cdot}cm$, refractive index was 2.3, and optical bandgap was 3.58 eV. The composition ratio of 0 to Ti by AES analysis was 1.7. When $TiO_{2}$ films were annealed at $400^{\circ}C$ for 30 min. in $O_{2}$ ambient, the optical transmittance of $TiO_{2}$ films at the wavelength range of $300{\sim}580$ nm was improved from 0 to 25%. When Se : Te films were annealed at $190^{\circ}C$ for 1 min., photosensitivity under illumination of 1000 lux was 0.75. The optical bandgap of Se : Te films was 1.7 eV. The structures of Se : Te films were the hexagonal with (100) and (110) orientation. The spectral response of a-Se was improved by the addition of Te, especially in the long wavelength region. The $TiO_{2}$/Se : Te heterojunction showed wide spectral response, and more improved one than that of a-Si film in the blue light region.

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M-mode Ultrasound Assessment of Diaphragmatic Excursions in Chronic Obstructive Pulmonary Disease : Relation to Pulmonary Function Test and Mouth Pressure (만성폐쇄성 폐질환 환자에서 M-mode 초음파로 측정한 횡격막 운동)

  • Lim, Sung-Chul;Jang, Il-Gweon;Park, Hyeong-Kwan;Hwang, Jun-Hwa;Kang, Yu-Ho;Kim, Young-Chul;Park, Kyung-Ok
    • Tuberculosis and Respiratory Diseases
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    • v.45 no.4
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    • pp.736-745
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    • 1998
  • Background: Respiratory muscle interaction is further profoundly affected by a number of pathologic conditions. Hyperinflation may be particularly severe in chronic obstructive pulmonary disease(COPD) patients, in whom the functional residual capacity(FRC) often exceeds predicted total lung capacity(TLC). Hyperinflation reduces the diaphragmatic effectiveness as a pressure generator and reduces diaphragmatic contribution to chest wall motion. Ultrasonography has recently been shown to be a sensitive and reproducible method of assessing diaphragmatic excursion. This study was performed to evaluate how differences of diaphragmatic excursion measured by ultrasonography associate with normal subjects and COPD patients. Methods: We measured diaphragmatic excursions with ultrasonography on 28 healthy subjects(l6 medical students, 12 age-matched control) and 17 COPD patients. Ultrasonographic measurements were performed during tidal breathing and maximal respiratory efforts approximating vital capacity breathing using Aloka KEC-620 with 3.5 MHz transducer. Measurements were taken in the supine posture. The ultrasonographic probe was positioned transversely in the midclavicular line below the right subcostal margin. After detecting the right hemidiaphragm in the B-mode the ultrasound beam was then positioned so that it was approximately parallel to the movement of middle or posterior third of right diaphragm. Recordings in the M-mode at this position were made throughout the test. Measurements of diaphragmatic excursion on M-mode tracing were calculated by the average gap in 3 times-respiration cycle. Pulmonary function test(SensorMedics 2800), maximal inspiratory(PImax) and expiratory mouth pressure(PEmax, Vitalopower KH-101, Chest) were measured in the seated posture. Results: During the tidal breathing, diaphragmatic excursions were recorded $1.5{\pm}0.5cm$, $1.7{\pm}0.5cm$ and $1.5{\pm}0.6cm$ in medical students, age-matched control group and COPD patients, respectively. Diaphragm excursions during maximal respiratory efforts were significantly decreased in COPD patients ($3.7{\pm}1.3cm$) when compared with medical students, age-matched control group($6.7{\pm}1.3cm$, $5.8{\pm}1.2cm$, p< 0.05}. During maximal respiratory efforts in control subjects, diaphragm excursions were correlated with $FEV_1$, FEVl/FVC, PEF, PIF, and height. In COPD patients, diaphragm excursions during maximal respiratory efforts were correlated with PEmax(maximal expiratory pressure), age, and %FVC. In multiple regression analysis, the combination of PEmax and age was an independent marker of diaphragm excursions during maximal respiratory efforts with COPD patients. Conclusion: COPD subjects had smaller diaphragmatic excursions during maximal respiratory efforts than control subjects. During maximal respiratory efforts in COPD patients, diaphragm excursions were well correlated with PEmax. These results suggest that diaphragm excursions during maximal respiratory efforts with COPD patients may be valuable at predicting the pulmonary function.

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