• Tribology and Lubricants
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• v.27 no.1
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• pp.13-18
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• 2011

The ultra-precision products which recently experienced high in demands had included the large areas of most updated technologies, for example, the semiconductor, the computer, the aerospace, the media information, the precision machining. For early 21st century, it was expected that the ultra-precision technologies would be distributed more throughout the market and required securing more nation-wise advancements. Furthermore, there seemed to be increasing in demand of the single crystal diamond tool which was capable of the ultra-precision machining for parts requiring a high degree of complicated details which were more than just simple wrapping and policing. Moreover, the highest degree of precision is currently at 50 nm for some precision parts but not in all. The machining system and technology should be at very high performed level in order to accomplish this degree of the ultra-precision.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.75-76
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.103-104
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.77-78
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.671-672
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.455-458
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• 2002

In recent years, precision positioning stage is demanded fur some industrial fields such as semi conductor lithography, ultra precision machining and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of it such as 3-axis positioning, characteristic of motion and resolution is verified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.15-19
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• 2002

With the rapid development of industrial technologies, the demand for high precision products has been increasing drastically. For this reason, the need for developing of high performance machine tool, which can ensure high precision, is desired in the industrial fields. Technologies on the spindle system manufacture, guideway manufacture, error compensation, design of bed structure, protection against vibrations, and system integration are core technology for developing of high precision machine tools. Especially, among these, design of spindle system, which is leading precision and manufacturing technique. is one of the most important technologies. A high speed and high precision spindle system, which will be used for final machining of ferrule, is designed considering the effect caused by thermal, cutting torque, cutting farce, and work-piece materials. The detail process of analysis is presented.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.193-200
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• 2006

To perform the finish grinding process of ferrules which are widely used as fiber optic connectors, a high-precision centerless grinding machine is necessary. The high-precision centerless grinding machine is consisted of the hydrostatic GW and RW spindle systems, hydrostatic RW feeding mechanism, RW swivel mechanism, on-machine GW and RW dressers, and concrete-filled steel bed. In this study, the thermal characteristics of the high-precision centerless grinding machine such as the temperature distribution, temperature rise and thermal deformation, are estimated based on the virtual prototype of the grinding machine and the heat generation rates of heat sources related to the machine operation conditions. The reliability of the predicted results is demonstrated by the temperature characteristics measured from the physical prototype. Especially, the predicted and measured results show the fact that the high-precision centerless grinding machine has very stable thermal characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.