• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.32-38
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• 2021

We developed an inductively coupled plasma (ICP) etcher for GaN etching using a parallel plasma electrode source with a multifunctional chuck matched to it in order for the low power consumption and low process cost in comparison with the conventional ICP system with a helical-type plasma electrode source. The optimization process condition using it for the micro light-emitting diode (µ-LED) chip fabrication was established, which is an ICP RF power of 300 W, a chuck power of 200 W, a BCl₃/Cl₂ gas ratio of 3:2. Under this condition, the mesa structure with the etch depth over 1 ㎛ and the etch angle over 75° and also with no etching residue was obtained for the µ-LED chip. The developed ICP showed the improved values on the process pressure, the etch selectivity, the etch depth uniformity, the etch angle profile and the substrate temperature uniformity in comparison with the commercial ICP. The µ-LED chip fabricated using the developed ICP showed the similar or improved characteristics in the L-I-V measurements compared with the one fabricated using the conventional ICP method

• Journal of Biosystems Engineering
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• 제41권4호
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• pp.304-312
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• 2016

Purpose: Soil strength has been measured using a cone penetrometer, which is making it difficult to obtain the spatial data required for precision agriculture. Our objectives were to evaluate real-time horizontal soil strength (RHSS) to measure soil strength in real time while moving across the field. Using the RHSS data, the tillage depth was determined, and the power consumption of a tractor and rotavators were compared. Methods: The horizontal soil-strength index (HSSI) obtained by the RHSS was compared with the cone index (CI), which was measured using a cone penetrometer. Comparison analysis in accordance with the measurement depth that increased at 5-cm interval was conducted using kriged maps at six sensing depths. For tillage control and evaluation of the power consumption, the system was installed with a potentiometer for tillage depth, a torque sensor from the rear axle, and a power take-off (PTO) shaft. Results: The HSSI was lower than the CI, but they were the same at 54.81% of the total grids for the 5-cm depth and at 3.85% for the 10-cm depth. In accordance with the recommended tillage map, tillage operations between 0 and 15 cm left 2.3% and 7% residue cover on the soil, and that between 20 and 10 cm covered a wider utilization of 3% and 18.4%, respectively. When the tillage depth was 15 cm, the comparison result of the power requirements between the PTO and rear axle in terms of control performance revealed that the maximum power requirements of the axle and PTO were 44.63 and 23.24 kW, respectively. Conclusions: An HSSI measurement system was evaluated by comparison with the conventional soil strength measurement system (CI) and applied to a tractor to compare the tillage power consumption. Further study is needed on its application to various farm works using a tractor for precision agriculture.

• 한국재료학회지
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• 제23권9호
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• pp.510-516
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• 2013

Fly ash is one of the aluminosilicate sources used for the synthesis of geopolymers. The particle size distribution of fly ash and the content of unburned carbon residue are known to affect the compressive strength of geopolymers. In this study, the effects of particle size and unburned carbon content of fly ash on the compressive strength of geopolymers have been studied over a compositional range in geopolymer gels. Unburned carbon was effectively separated in the $-46{\mu}m$ fraction using an air classifier and the fixed carbon content declined from 3.04 wt% to 0.06 wt%. The mean particle size ($d_{50}$) decreased from $22.17{\mu}m$ to $10.79{\mu}m$. Size separation of fly ash by air classification resulted in reduced particle size and carbon residue content with a collateral increase in reactivity with alkali activators. Geopolymers produced from carbon-free ash, which was separated by air classification, developed up to 50 % higher compressive strength compared to geopolymers synthesized from raw ash. It was presumed that porous carbon particles hinder geopolymerization by trapping vitreous spheres in the pores of carbon particles and allowing them to remain intact in spite of alkaline attack. The microstructure of the geopolymers did not vary considerably with compressive strength, but the highest connectivity of the geopolymer gel network was achieved when the Si/Al ratio of the geopolymer gel was 5.0.

• 한국산학기술학회논문지
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• 제12권3호
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• pp.1473-1478
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• 2011

본 연구에서는 전처리 공정을 거친 천연가스로부터 에탄 이상의 성분을 회수하기 위한 탈메탄탑에 대한 전산모사와 공정 최적화를 수행하였다. 전처리된 천연가스는 탈메탄탑 상부의 차가운 기상류와의 열교환 및 프로판 냉동 사이클이 포함된 예냉공정을 거친 후에 기상과 액상이 분리된다. 기상은 터보 팽창기를 거치면서 생산되는 동력을 residue gas의 압력을 높이기 위한 압축기에 전달한 후에 부분적으로 응축되어 탈메탄탑 상부로 주입된다. 액상류는 줄-톰슨 팽창 밸브를 거친 후 더욱 냉각되어 탈메탄탑의 중간부로 주입된다. 원료 대비 에탄의 회수율은 75% 이상으로 정하였으며, 탈메탄탑의 탑저에서 에탄에 대한 메탄의 몰비는 0.015로 정하였다. 한편 프로판 냉동 사이클의 heat duty를 최소화시키기 위해서 원료를 분리하여 side reboiler와 열교환시킴으로써 냉열의 일부 회수할 수 있었다.

• 전자공학회논문지D
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• 제34D권3호
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• pp.87-92
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• 1997

Inductively coupled Cl$_{2}$ plasma has been studied to etch Pt thin films, which hardly form volatile compound with any reactive gas at normal process temperature. Low etch rate and residue problems are frequently observed. For higher etch rate, high density plasma and higher process temperature is adopted observed. For higher etch rate, high density plasma and higher process temperature is adopted and thus SiO$_{2}$ is used as for patterning mask instead of photoresist. The effect of O$_{2}$ or Ar addition to Cl$_{2}$ was investigated, and the chamber pressure, gas flow rate, surce RF power and bias RF power are also varied to check their effects on etch rate and selectivity. The major etching mechanism is the physical sputtering, but the ion assisted chemical raction is also found to be a big factor. The proposs can be optimized to obtain the etch rate of Pt up to 200nm/min and selectivity to SiO$_{2}$ at 2.0 or more. Patterning of submicron Pt lines are successfully demonstrated.

• 한국농공학회:학술대회논문집
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• 한국농공학회 2000년도 학술발표회 발표논문집
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• pp.477-483
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• 2000

Fly ash is the unburned residue resulting from the combustion of coal in utility and industrial boilers such as thermal power plants. Annually about 5 million tons of fly ash is being produced in korea. Less than 25 percent of total volume of fly ash is currently being used effectively for some ways. In the future, the volume of fly ash discharge from thermal power stations will be increasing more and more, and the development of the utilization of high volume fly ash is required. Fly ash has a lower compacted density and specific gravity than coarse grained natural aggregates but equivalent strength properties indicating that the fly ash could be used as a structural fill materials. So, clay-fly ash mixtures can be used as a fill material in the construction of embankments. Laboratory tests have been carried out to determine the physical, chemical, and geotechnical characteristics of the clay and fly ash. The fly ash is mixed with the clay in different proportions and the geotechnical characteristics of the mixtures have been studied also. In this study describes the results of the experimental study. The implications of the use of clay and clay-fly ash mixtures on the stability of embankments are discussed.

• 전기학회논문지
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• 제63권1호
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• pp.1-9
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• 2014

The parameters of electromechanical modes offer considerable insight into the dynamic stability properties of a power system. This paper describes an initial result for extraction of dynamic parameters from synchrophasor measurements collected on the KEPCO system. Dominant modes of the system are estimated by oscillation detecting program in K-WAMS. The critical wide-area modes of KEPCO system have frequencies in the 0.4 to 0.7Hz range. And the local mode causing the low frequency oscillation of generators located on the west coast area has in the frequency 0.97 and 1.25 Hz, respectively. This results can serve as a reference in the future for reliable system operation in KEPCO system.

• 자원리싸이클링
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• 제23권1호
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• pp.40-47
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• 2014

폐자원으로 분류되는 석탄재의 미연탄소를 경제적으로 재활용하기 위한 방안을 모색하기 위하여, 서천화력발전소 매립 석탄재로부터 미연탄소를 분리한 후 활성탄소 제조가능성을 평가하였다. 정선부선을 4단계 실시하여 얻어진 미연탄소 정광의 고정탄소 품위는 87%로 얻어졌다. 미연탄소 정광에 포함된 결정질 불순물로는 주로 석영과 뮬라이트가 존재하였다. 화학적 활성화 전 미연탄소의 비표면적은 $10m^2/g$로 매우 낮았으며, 이는 국내 무연탄의 높은 탄화도와 관련되는 것으로 추측되었다. 또한 미연탄소는 대체로 다공성이며 결정학적으로는 터보스트래틱 구조를 갖고 있었다. 미연탄소 1 g과 KOH 6 g 을 혼합하여 활성화시킨 경우 얻어진 비표면적값이 $670m^2/g$로 가장 높았으며 미세공이 발달된 것을 확인하였다. KOH 용액을 사용한 경우 질소흡착량이 분말상 활성화 시료보다 낮게 나타난 것은 탄소입자의 젖음성 및 함침성이 낮은 때문으로 추측되었다. 본 실험에서 제조한 활성탄소는 미세공 분포가 높은 기능성 활성탄소의 세공특성을 보이며, 범용의 활성탄소에 준하는 비표면적값을 나타내 기존의 석탄계 활성탄소보다 우수하며 회분 함량도 적정 수준이었다. 따라서 공정의 경제성과 미연탄소 자체의 특성을 고려하여, 정수용 활성탄소 대체재나 혹은 카본블랙 대체용으로 재활용하는 것이 가능할 것으로 판단된다.

• 한국식품영양과학회지
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• 제37권8호
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• pp.1079-1083
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• 2008

본 연구에서는 고추잎 추출물에 대한 항산화 활성과 암세포 증식억제 활성을 분석하고 각 추출물에 따른 차이를 비교 분석하고자 하였다. 추출물의 항산화력은 ABTS와 DPPH 라디칼 제거능, 환원력 및 금속이온 제거능을 이용하여 평가하였으며 암세포 증식 억제능은 유방암, 대장암 및 위암 세포주를 이용하였다. 각 추출물 중 70% acetone 추출물의 경우 polyphenol 함량(56.6 mg GAE/g residue)과 총 항산화력(450.8 mM TEAC/g residue), DPPH 라디칼 제거능(230.3 mM TEAC/g residue), 환원력(0.5 A700) 측정에서 모두 가장 높은 수치를 나타내었다. 또한 암세포 증식억제활성 측정 결과 대장암세포(HCT116)에서는 70% acetone 추출물이 1 mg/mL의 농도에서 96.2%의 증식억제 활성을 나타냈고 유방암세포(MCF7)에서는 methanol 추출물이 78.4%의 활성을 나타냈으며, 위암세포(MKN45)에서는 water 추출물이 89.7%의 활성을 나타내었다. 본 연구결과는 점차 관심이 높아지고 있는 천연 항산화 항암제로서의 고추잎에 대한 활성연구에 있어 기초자료가 될 것으로 예상되며, 주산물인 고추열매에 비해 그 활용도가 극히 적은 고추잎에 대한 소비촉진에 영향을 끼칠 것으로 기대된다.

• Journal of the Korean Wood Science and Technology
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• 제43권6호
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• pp.826-837
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• 2015

본 연구에서는 목질계 바이오매스로부터 옥살산 전처리 액상 가수분해산물을 이용하여 바이오에탄올을 생산하였다. 생산된 바이오에탄올은 투과증발에 의해 분리, 농축하였으며 투과증발 잔류물에 대한 항산화 활성을 측정하였다. 옥살산 전처리 후 액상 가수분해산물에는 자일로스($37.28g/{\ell}$)가 대부분을 차지하고 있었으며 발효저해물질인 초산, 푸르푸랄 및 페놀성 화합물을 포함하고 있었다. 전기투석에 의해 초산을 제거하였으며 전기투석 후 가수분해산물로 발효를 수행한 결과 $12.21g/{\ell}$의 에탄올을 생산하였다. 에탄올 농축 후 투과증발 잔류물의 에틸아세테이트 분획에서는 86.81 mg/100 g(추출물)의 페놀성 화합물을 함유하고 있었으며 DPPH, ABTS 라디칼 소거활성 및 환원력에 대한 $IC_{50}$ 값은 각각 $0.87mg/m{\ell}$, $0.85mg/m{\ell}$, $0.59mg/m{\ell}$로 나타났다. GC-MS로 구성성분을 확인한 결과 당 분해산물과 페놀 유도체들이 검출되었다.