• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.658-661
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• 1996

For ultraprecision positioning, the use of the twist roller-type friction drive is proposed. In our study, it is difficult to decrease the resolution of positioning below 100 nm when we use general servo motors. Therefore we propose the feed hive with a small lead like a the cam-roller type traction drive leadscrew and modify it more accurately. By using the semi-loop control system, the positioning resolution of the drive can be 22.4 nm, where the pulse per revolution of the motor is 655360 and the the lead is 0.734 mm.