• 제목/요약/키워드: poor scattering

검색결과 42건 처리시간 0.026초

Effect of Plasma Pretreatment on Superconformal Cu Alloy Gap-Filling of Nano-scale Trenches

  • 문학기;이정훈;이수진;윤재홍;김형준;이내응
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.53-53
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    • 2011
  • As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

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Conformational Transition of Form II to Form Ⅰ PoLy(L-proline) and the Aggregation of Form Ⅰ in the Transition: Water-Propanol Solvent System

  • 김현돈
    • Bulletin of the Korean Chemical Society
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    • 제18권9호
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    • pp.922-928
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    • 1997
  • The conformational transition of poly(L-proline) (PLP), Form Ⅱ → Form Ⅰ and the intermolecular aggregation of the product, Form Ⅰ, during and after the transition in water-propanol (1:7, 1:9, 1:15.7, and 1:29 v/v) were studied. For the study, the viscosity change and excess light scattering intensity were measured in the course of the transition which was determined by the Form Ⅰ fraction, fI of the sample solution. For the PLP sample of molecular weight Mv=31,000 the experimental results show that the reaction course is roughly divided into three regions: in the first region [fI=0.27 to 0.40 (- [α]D=400 to 330)], the conformational change of Form Ⅱ → Form Ⅰ occurs with decrease of viscosity, in the second region [fI=0.40 to 0.80 (- [α]D=330 to 120)], a partial side-by-side (p-S-S) type aggregation in which Form Ⅰ blocks interact with each other, which induces the increase of viscosity, starts to occur, and in the third region [fI=0.80 to 1.00 (- [α]D=120 to 15)], a side-by-side type (raft like) aggregation of Form Ⅰ or an end-to-end (E-E) type aggregation occurs according to the solvent situation, i.e., in a water-rich medium [water-propanol (1:9 or 1:7 v/v)], the (S-S) type aggregation with a gross decrease in viscosity occurs while in a water-poor medium [water-propanol (1:29 or 1:15.7 v/v), the (E-E) type aggregation with a large increase in viscosity occurs. The (S-S) type aggregation was promoted at high temperatures. Based on the structure of PLP, a reasonable mechanism for the (p-S-S) and (S-S) aggregation which occurs with the transition of Form Ⅱ → Form Ⅰ is considered. The suggested mechanism was also supported by the result of chain length effect of PLP for the aggregation.

후방산란법(RBS)/양성자 여기 X-선 방출법(PIXE)을 이용한 다층자성박막의 두께 및 조성 정량분석 (Analysis of Magnetic Multi-layers by RBS and PIXE)

  • 송종한;김태곤;전기영;황정남;신윤하;김영만;장성호;김광윤
    • 한국자기학회지
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    • 제11권6호
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    • pp.272-277
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    • 2001
  • FeMr에 의해 교환 바이어스된 synthetic antiferromagnet(CoFe/Ru/CoFe)을 가진 Top Ta/NiFe/CoFe/Cu/CoFe/Ru/CoFe/FeMn/Ta 스핀 밸브 구조를 마그네트론 스퍼터링법에 의해 증착하였다. 이러한 스핀 밸브에서는 자유층, 구속층등의 두께 및 조성이 층간 결합력의 세기를 비롯한 자성특성에 영향을 미치게 된다 후방산란법은 두께 및 조성에 대한 절대정량이 가능하며 비파괴 분석법이라는 장점을 지니고 있으나, 원자번호가 20번 이상인 주기율표상의 인접원소로 이루어진 자성박막을 분석하는데 있어서 신호의 중첩현상으로 인해 분석이 불가능하였다 본 연구에서는 element-specific 한 분석기술인 양성자 여기 X선 검출법과, 절대 정량이 가능하고 깊이분해능을 현저히 향상시킨 grazing-exit 후방산란법 (RBS : Rutherford Backscattering Spectrometry)을 동시에 사용하여 상호 보완적인 분석을 함으로써 스핀밸브에 대한 성분 및 두께에 대한 정량분석을 수행하였다. 이를 위하여 먼저 spin valve 구조에서 자성층인 NiFe, CoFe, FeMn 단일층이 증착된 시료에 대한 표준화를 수행함으로써 spin valve 구조에서 grazing-exit 후방산란 스펙트럼 상의 중첩된 신호를 Simulation을 통하여 분리가 가능하였으며, 특히 Ru층의 두께는 단위의 정확도로 측정이 가능 하였다

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Kirschner Wire Fixation for the Treatment of Comminuted Zygomatic Fractures

  • Kang, Dai-Hun;Jung, Dong-Woo;Kim, Yong-Ha;Kim, Tae-Gon;Lee, JunHo;Chung, Kyu Jin
    • 대한두개안면성형외과학회지
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    • 제16권3호
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    • pp.119-124
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    • 2015
  • Background: The Kirschner wire (K-wire) technique allows stable fixation of bone fragments without periosteal dissection, which often lead to bone segment scattering and loss. The authors used the K-wire fixation to simplify the treatment of laborious comminuted zygomatic bone fracture and report outcomes following the operation. Methods: A single-institution retrospective review was performed for all patients with comminuted zygomatic bone fractures between January 2010 and December 2013. In each patient, the zygoma was reduced and fixed with K-wire, which was drilled from the cheek bone and into the contralateral nasal cavity. For severely displaced fractures, the zygomaticofrontal suture was first fixated with a microplate and the K-wire was used to increase the stability of fixation. Each wire was removed approximately 4 weeks after surgery. Surgical outcomes were evaluated for malar eminence, cheek symmetry, K-wire site scar, and complications (based on a 4-point scale from 0 to 3, where 0 point is 'poor' and 3 points is 'excellent'). Results: The review identified 25 patients meeting inclusion criteria (21 men and 4 women). The mean age was 52 years (range, 15-73 years). The mean follow up duration was 6.2 months. The mean operation time was 21 minutes for K-wire alone (n=7) and 52 minutes for K-wire and plate fixation (n=18). Patients who had received K-wire only fixation had severe underlying diseases or accompanying injuries. The mean postoperative evaluation scores were 2.8 for malar contour and 2.7 for K-wire site scars. The mean patient satisfaction was 2.7. There was one case of inflammation due to the K-wire. Conclusion: The use of K-wire technique was associated with high patient satisfaction in our review. K-wire fixation technique is useful in patient who require reduction of zygomatic bone fractures in a short operating time.

Simultaneous Transfer and Patterning of CVD-Grown Graphene with No Polymeric Residues by Using a Metal Etch Mask

  • 장미;정진혁;;이내응
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.642-642
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    • 2013
  • Graphene, two dimensional single layer of carbon atoms, has tremendous attention due to its superior property such as high electron mobility, high thermal conductivity and optical transparency. Especially, chemical vapor deposition (CVD) grown graphene has been used as a promising material for high quality and large-scale graphene film. Unfortunately, although CVD-grown graphene has strong advantages, application of the CVD-grown graphene is limited due to ineffective transfer process that delivers the graphene onto a desired substrate by using polymer support layer such as PMMA(polymethyl methacrylate). The transferred CVD-grown graphene has serious drawback due to remaining polymeric residues generated during transfer process, which induces the poor physical and electrical characteristics by a p-doping effect and impurity scattering. To solve such issue incurred during polymer transfer process of CVD-grown graphene, various approaches including thermal annealing, chemical cleaning, mechanical cleaning have been tried but were not successful in getting rid of polymeric residues. On the other hand, lithographical patterning of graphene is an essential step in any form of microelectronic processing and most of conventional lithographic techniques employ photoresist for the definition of graphene patterns on substrates. But, application of photoresist is undesirable because of the presence of residual polymers that contaminate the graphene surface consistent with the effects generated during transfer process. Therefore, in order to fully utilize the excellent properties of CVD-grown graphene, new approach of transfer and patterning techniques which can avoid polymeric residue problem needs to be developed. In this work, we carried out transfer and patterning process simultaneously with no polymeric residue by using a metal etch mask. The patterned thin gold layer was deposited on CVD-grown graphene instead of photoresists in order to make much cleaner and smoother surface and then transferred onto a desired substrate with PMMA, which does not directly contact with graphene surface. We compare the surface properties and patterning morphology of graphene by scanning electron microscopy (SEM), atomic force microscopy(AFM) and Raman spectroscopy. Comparison with the effect of residual polymer and metal on performance of graphene FET will be discussed.

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O/W 유제의 물리적 안정성에 대한 PVP의 영향 (Effect of PVP on the Physical Stability of O/W Emulsion)

  • 오인준;이미영;이정민;이용복;신상철;최보길;김종국
    • Journal of Pharmaceutical Investigation
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    • 제27권4호
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    • pp.287-293
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    • 1997
  • To make a stable o/w emulsion, the effects of egg lecithin as an emulsifier and polyvinylpyrrolidone (PVP) as an auxiliary emulsifier on the physical stability of emulsion were investigated. The oil-in-water emulsion system was manufactured by microfluidizer and evaluated the physical stability. Average particle size and size distribution of emulsion was measured by dynamic light scattering analyzer and interfacial tension was measured. From the interfacial tension tested, critical micelle concentration of the egg lecithin was 0.1 %w/v and optimal concentration for the preparation of emulsion was 1.0 %w/v. The mean particle size was about $0.2\;{\mu}m$ which was suitable for injections. The short-term accelerated stability studies were conducted by centrifugation, freeze-thaw method and shaking of the emulsion samples. The addition of PVP was caused the reduction in the particle size and improved the physical stability of emulsion. These results suggested that a mixed interfacial film comprising the egg lecithin and PVP was formed at the o/w interface and it was effective in preventing phase separation under thermic or mechanical stress. We used antineoplaston A10 (A10) as a model drug which is peptide and amino acid derivative having a action to the living organism against the development of neoplastic growth by a nonimmunological progress. It has a poor solubility in water and there may be a difficulty in formulation of A10. Emulsion formulation study about A10 was performed. Solubility of A10 in emulsion was about five times as high as that in water. From the results of solubility and partition coefficient, almost A10 molecules in o/w emulsion exist in the interface between oil and water.

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광모드변환기가 집적된 $1.3\mum$ SC-FP-LD 제작 및 특성 해석 (Fabrication and analysis of $1.3\mum$ spot-size-converter integrated laser diodes)

  • 심종인
    • 한국광학회지
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    • 제11권4호
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    • pp.271-278
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    • 2000
  • 광가입자용 광원으로서 유망한 모드변환기가 집적된 1.3$\mu\textrm{m}$ SSC-FP-LD를 저압 MOVPE결정성장법을 사용해 제작하고 이의 특성을 분석하였다. SSC-LD의 활성영역과 SSC영역은 BJB방법으로 접합하였으며 taper형 도파로 구조를 선택성장법으로 성장하였다. 제작한 SSC-LD의 특성을 측정한 결과 SSC 단면으로 부터의 미분효율 0.23~0.32 mW/mA, FFP의 FWHM값은 9.5$^{\circ}$~12.3$^{\circ}$, 단일모드 광섬유와의 광결합 시 추가광결합손실 -1dB 범위내에서 수평방향으로 $\pm$2.5$\mu\textrm{m}$ 및 수직방향으로 $\pm$2.3$\mu\textrm{m}$의 정렬오차 허용도 등과 같은 양호한 특성을 얻었다. SSC-LD의 문제점들을 이해하고 SSC-LD의 성능향상에 대한 지침을 얻고자 방사모드를 고려한 SSC-LD특성 해석을 행하였다. 해석결과 SSC-LD에서의 비대칭 광출력특성, FFP과 SSC영역단면 근처의 도파로 구조와 비상관성, 온도특성열화 등은 BJB 및 SSC영역내의 불균일한 도파로 구조에 의해 발생되는 방사모드와 두 영역 사이의 좋지 못한 광결합 효율에 의해 발생되는 SHB현상에 기인함을 처음으로 지적하였다.

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Holographic phase gratings in back- and frontlights for LCD's

  • Bastiaansen, C.W.M.;Heesch, C. van;Broer, D.J.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.421-421
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    • 2006
  • The light and energy-efficiency of classical liquid crystal displays is notoriously poor due to the use of absorption-based linear polarisers and colour filters. For instance, the light efficiency of PVAL polarisers is typically between 40 and 45 % and the colour filters have a typical efficiency below 35 % which results in a total light and energy-efficiency of the display below 10 %. In the past, a variety of polarizers were developed with an enhanced efficiency in generating linearly polarized light. Typically, these polarizers are based on the polarisationselective reflection, scattering or refraction of light i.e. one polarisation direction of light is directly transmitted to the LCD/viewer and the other polarization direction of light is depolarised and recycled which results in a typical efficiency for generating linearly polarized light of 70-85 %. Also, special colour filters have been proposed based on chiral-nematic reactive mesogens which increase the efficiency of generating colour. Despite the enormous progress in this field, a need persists for improved methods for generating polarized light and colour based on low cost optical components with a high efficiency. Here, the use of holographic phase gratings is reported for the generation of polarized light and colour. The phase grating are recorded in a photopolymer which is coated onto a backor frontlight for LCDs. Typically the recording is performed in the transmisson mode or in the waveguiding mode and slanted phase gratings are generated with their refractive index modulation at an angle between 20o and 45o with the normal of the substrate. It is shown that phase gratings with a high refractive index modulation and a high efficiency can be generated by a proper selection of the photopolymer and illumination conditions. These phase gratings coupleout linearly polarized light with a high contrast (> 100) and the light is directed directly to the LCD/viewer without the need for redirection foils. Dependent on the type of phase grating, the different colours are coupled-out at a slightly different angle which potentially increases the efficiency of classical colour filters. Moreover, the phase gratings are completely transparent in direct view which opens the possibility to use them in frontlights for LCDs. Holographic polarization gratings posses a periodic pattern in the polarization state of light (and not in the intensity of light). A periodic pattern in the polarization direction of linearly polarized light is obtained upon interference of two circularly polarized laser beams. In the second part of the lecture, it is shown that these periodic polarization patterns can be recorded in a linear photo-polymerizable polymer (LPP) and that such an alignment layer induces a period rotation in the director of (reactive and non-reactive) liquid crystals. By a proper design, optical components can be produced with only first order diffraction and with a very high efficiency (>0.98). It is shown that these diffraction gratings are potentially useful in projection displays with a high brightness and energy efficiency

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생성적 대립쌍 신경망을 이용한 깊이지도 기반 연무제거 (Single Image Dehazing Based on Depth Map Estimation via Generative Adversarial Networks)

  • 왕야오;정우진;문영식
    • 인터넷정보학회논문지
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    • 제19권5호
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    • pp.43-54
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    • 2018
  • 연무가 있는 상황에서 촬영된 영상은 낮은 대비로 인해 시인성이 낮아지는 문제가 있다. 이렇게 연무로 인해 흐릿한 영상에서 연무의 효과를 제거하는 과정을 연무제거라고 한다. 연무제거에서 가장 중요한 문제 중 하나는 전달지도 (transmission map) 또는 깊이지도 (depth map)를 정확하게 추정하는 것이다. 본 논문에서는 정확한 깊이지도 추정을 위해 생성적 대립쌍 신경망 (Generative Adversarial Network: GAN)을 이용한 정확한 깊이 영상 추정 방법을 제안한다. 제안된 GAN 모델은 흐릿한 입력영상과 이에 상응하는 깊이지도 간의 비선형 매핑을 학습한다. 그리고 연무제거단계에서는 훈련된 모델을 사용하여 입력영상의 깊이지도를 추정하고 이것을 전달지도를 계산하는데 사용한다. 이어서 guided filter를 사용하여 전달지도를 다듬는다. 마지막으로 대기 산란 모델을 기반으로 연무가 제거된 영상을 복원한다. 제안된 GAN 모델은 합성실내영상으로 훈련되었다. 하지만 실제 연무영상에 대해서도 적용할 수 있다. 이를 실험을 통해 증명하였다. 또한 실험에서 제안된 방법이 이전에 연구된 방법에 비해 시각적 및 정량적 측면에서 우수한 결과를 나타냈다.

물질 보류 : 안료 코팅 처리를 위한 새로운 시도 (Material Retention: A Novel Approach to Performance of Pigment Coating Colors)

  • McKenzie, Ken;Rutanen, Anne;Lehtovuori, Jukka;Ahtikari, Jaana;Piilola, Teuvo
    • 한국펄프종이공학회:학술대회논문집
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    • 한국펄프종이공학회 2008년도 제33회 펄프종이기술 국제세미나
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    • pp.47-70
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    • 2008
  • Cost efficiency is today the primary requirement in the paper and board industry. This has led therefore, to a greater preponderance of products with specifically designed functionality to take account of current industry needs. Continually increasing machine coating speeds together with these new coating colour components have put more emphasis on the importance of the correct rheology and water retention of the coating colours to achieve good runnability and end product quality. In the coating process, some penetration of the aqueous phase, to the base paper or board must occur to anchor the pre-coating to the base or the topcoat to the pre-coat. The aqueous phase acts as a vehicle not only for the binder, but also for the other components. If this water or material penetration is not controlled, there will be excessive material shift from the coating colour to the base, before immobilization of the coating colour will stop this migration. This can result in poor machine runnability, unstable system and uneven coating layer, impacting print quality. The performance of rheology modifiers or thickeners on the coating color have tended to be evaluated by the term, "water retention". This simple term is not sufficient to explain their performance changes during coating. In this paper we are introducing a new concept of "material retention", which takes note of the total composition of the coating colour material and therefore goes beyond the concept of only water retention. Controlled material retention leads to a more uniform z-directional distribution of coating colour components. The changes that can be made to z-directional uniformity will have positive effects on print quality as measured by surface strength, ink setting properties, print gloss, mottling tendency. Optical properties, such as light scattering, whiteness and light fastness delivery should also be improved. Additionally, controlled material retention minimizes changes to the coating colour with time in re-circulation giving less fluctuation in quality in the machine direction since it more closely resembles fresh coating for longer periods. Use of the material retention concept enables paper and board producers to have more stable runnability (i.e. lower process costs), improved end product quality (i.e. better performance of used chemicals) and/or optimized use of coating colour components (i.e. lower total formulation cost)

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