• 전기학회논문지
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• 제58권1호
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• pp.147-154
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• 2009

This paper presents a grating~integrated SPR (Surface Plasmon Resonance) sensor chip for simple and inexpensive biomolecule detection. The grating-integrated SPR sensor chip has two sensing channels having a nano grating for SPR coupling. An external mirror is used for multi channel SPR sensing. The present sensor chip replaces bulky and expensive optical components, such as fiber-optic switches or special shaped prisms, resulting in a simple and inexpensive wavelength modulated multi-channel SPR sensing system. We fabricate a SPR sensor chip integrated with 835 nm-pitch gratings by a micromolding technique to reduce the fabrication cost. In the experimental characterization, the refractive index sensitivity of each sensing channel is measured as $321.8{\pm}8.1nm$/RI and $514.3{\pm}8.lnm$/RI, respectively. 0.5uM of the target biomolecule (streptavidin) was detected by a $1.13{\pm}0.16nm$ shift of the SPR dip in the 10%-biotinylated sample channel, while the SPR dip in the reference channel for environmental perturbation monitoring remained at the same position. From the experimental results, multi-channel biomolecule detection capability of the present grating-integrated SPR sensor chip has been verified. On the basis of the preliminary experiments, we successfully measured the binding reaction rate for the $2\;nM{\sim}200\;nM$ monoclonal-antibiotin, thus verifying biomolecule concentration detectability of the present SPR sensor chip. The binding reaction rates measured from the present SPR sensor chip agredd well with those from a commercialized SPR sensor.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.157-157
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• 2010

Vertical-structure light-emitting diodes (V-LEDs) by laser lift-off (LLO) have been exploited for high-efficiency GaN-based LEDs of solid-state lightings. In V-LEDs, emitted light from active regions is reflected-up from reflective ohmic contacts on p-GaN. Therefore, silver (Ag) is very suitable for reflective contacts due to its high reflectance (>95%) and surface plasmon coupling to visible light emissions. In addition, low contact resistivity has been obtained from Ag-based ohmic contacts annealed in oxygen ambient. However, annealing in oxygen ambient causes Ag to be oxidized and/or agglomerated, leading to degradation in both electrical and optical properties. Therefore, preventing Ag from oxidation and/or agglomeration is a key aspect for high-performance V-LEDs. In this work, we demonstrate the enhanced thermal stability of Ag-based Ohmic contact to p-GaN by reducing the thermal compressive stress. The thermal compressive stress due to the large difference in CTE between GaN ($5.6{\times}10^{-6}/^{\circ}C$) and Ag ($18.9{\times}10^{-6}/^{\circ}C$) accelerate the diffusion of Ag atoms, leading to Ag agglomeration. Therefore, by increasing the additional residual tensile stress in Ag film, the thermal compressive stress could be reduced, resulting in the enhancement of Ag agglomeration resistance. We employ the thin Ni layer in Ag film to form Ni/Ag mutli-layer structure, because the lattice constant of NiO ($4.176\;{\AA}$ is larger than that of Ag ($4.086\;{\AA}$). High-resolution symmetric and asymmetric X-ray diffraction was used to measure the in-plane strain of Ag films. Due to the expansion of lattice constant by oxidation of Ni into NiO layer, Ag layer in Ni/Ag multi-layer structure was tensilely strained after annealing. Based on experimental results, it could be concluded that the reduction of thermal compressive stress by additional tensile stress in Ag film plays a critical role to enhance the thermal stability of Ag-based Ohmic contact to p-GaN.

• 한국광학회지
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• 제19권1호
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• pp.73-79
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• 2008

금속선 도파로 면과 금속 평면이 수직으로 적층된 장거리 표면-플라즈몬 도파로 구조를 제안하였으며, 표면-플라즈몬 모드의 특성을 유전체의 굴절율과 두께 변화에 대하여 이론적으로 분석하고 실험적으로 검증하였다. 위층의 금속선 도파로를 S-곡선과 Y-분기 형태로 변형시킨 이중-금속 도파로를 제작하여, 제안된 이중-금속 도파로 구조의 광 소자 응용 가능성을 살펴보았다. 제안된 이중금속 구조에서는 도파로 코어에 해당하는 두 금속 박막 사이의 유전체 굴절률을 임의로 선택하여도 장거리 표면 플라즈몬 모드가 존재할 수 있으며, 표면-플라즈몬 모드의 전파거리는 두 금속 박막 사이의 유전체 두께를 조절함으로써 증가시킬 수 있다. 또한, 이중-금속 도파로는 표면-플라즈몬을 전달할 뿐만 아니라, 삽입된 코어 유전체에 전압 및 전류를 인가하기에도 매우 적합한 구조로서, 표면-플라즈몬 능동소자 및 비선형 소자 구현에 많은 가능성을 열어줄 것으로 기대된다.

• 마이크로전자및패키징학회지
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• 제29권1호
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• pp.55-59
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• 2022

본 논문에서는 플라즈몬 공명 현상을 통하여 나노 입자 주변의 전기장을 증폭시키며, 흡광률을 높일 수 있는 구조를 시간영역 유한차분(FDTD)시뮬레이션을 이용하여 나노입자를 평면에 배열하였을 때와 비교하여 나노 구조에 배열하였을 때의 전기장과 흡광도를 비교하였다. 또한 나노구조의 폭을 240 nm ~ 300 nm로 조절하여 입자간의 간격이 좁을수록 광 흡수율이 높음을 보이고자 하였다. 또한 UV 임프린트를 통하여 나노 입자와 나노 구조를 표면에 함께 형성시키는 방법에 대한 연구를 진행하였다. 해당 구조에 입자를 형성하기 위하여 스프레이 코팅을 이용하여 나노 입자를 구조 제작에 사용되는 몰드에 먼저 배열한 후, UV 임프린팅을 통해 제작하였고 나노구조와 입자가 함께 형성됨을 Scanning Electron Microscopy 로 확인하였다.