• 한국재료학회지
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• 제11권10호
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• pp.900-906
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• 2001

We prepared tunnel magnetoresistance(TMR) devices of Ta($50\AA$)/NiFe($50\AA$)/IrMn(150$\AA$)/CoFe($50\AA$)/Al ($13\AA$)-O/CoFe($40\AA$)/NiFe($400\AA$)/Ta(50$\AA$) structure which has 100$\times$100 $\mu\textrm{m}^2$ junction area on $2.5\Times2.5 cm^{2}$ $Si/SiO_2$ ($1000\AA$) substrates by a inductively coupled plasma(ICP) magnetron sputter. We fabricated the insulating layer using a ICP plasma oxidation method by varying oxidation time from 80 sec to 360 sec, and measured resistances and magnetoresistance(MR) ratios of TMR devices. We used a high resolution transmission electron microscope(HRTEM) to investigate microstructural evolution of insulating layer. The average resistance of devices increased from 16.38 $\Omega$ to 1018 $\Omega$ while MR ratio decreased from 30.31 %(25.18 %) to 15.01 %(14.97 %) as oxidation time increased from 80 sec to 360 sec. The values in brackets are calculated values considering geometry effect. By comparing cross-sectional TEM images of 220 sec and 360 sec-oxidation time, we found that insulating layer of 360 sec-oxidized was 30 % and 40% greater than that of 150 sec-oxidized in thickness and thickness variation, respectively. Therefore, we assumed that increase of thickness variation with oxidation time is major reason of MR decrease. The resistance of 80 sec-oxidized specimen was 160 k$\Omega$$\mu\textrm{m}^2$ which is appropriate for industrial needs of magnetic random access memory(MRAM) application.

• 한국자기학회지
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• 제12권4호
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• pp.127-131
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• 2002

자성터널접합(magnetic tunnel junction: MTJ)소자의 AlO$_{x}$터널장벽 절연층을 플라즈마 산화법으로 2번에 나누어 금속증착.산화를 반복하여 만들어 보았다. 이중산화I그룹은 10A의 $\AA$의 Al 하부 절연막을 증착하고 산화시간을 10 s로 완성한 후 그 위에 13$\AA$의 Al을성막하고 50, 80, 120s간 산화시켜 완성한 절연막의 특성을 알아보았다. 이중산화II그룹은 10$\AA$봐 Al하부 절연막의 산화시간을 30~120 s간 달리하고 그 위에 13 $\AA$의 Al을 성막하고 210 s간 산화시켜 완성한 절연막의 특성을 알아보았다. 이중산화공정으로 제조된 시편은 전 실험범위에서 자기저항비(magnetoresistance： MR)는 27% 이상으로 우수하였고, 이는 13 $\AA$의 Al을 증착하고 한번만 산화시키는 통상의 단일산화에 비해 MR비가 우수하고 공정범위가 넓었다. 수직단면 투과전자현미경(transmission electron microscope： TEM)으로 미세구조를 확인한 결과 이중산화가 단일산화보다도 더 얇고 균일한 두께를 유지함을 알 수 있었다 X선광전자분석(X-ray photoelectron spectroscopy： XPS)으로 확인한 결과 이중산화는 절연막층 하부 CoFe 자성층의 Fe의 산화를 방지하여, 결과적으로 단일산화법에 비해서 하부자성층의 산화를 방지하여 긴 산화시간 공정 범위에서도 우수한 MR비를 가질 수 있었다.

• Corrosion Science and Technology
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• 제5권2호
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• pp.77-83
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• 2006

The plasma electrolytic oxidation (PEO) process is a relatively new surface treatment technique that produces a chemically stable and environment-friendly electrolytic coating that can be applied to all types of magnesium alloys. In this study, the characteristics of oxide film were examined after coating the extruded AZ31 alloy through the PEO process. Hard ceramic coatings were obtained on the AZ31 alloy by changing the coating time from 10min to 60min. The morphologies of the surface and the cross-section of the PEO coatings were examined by scanning electron microscopy and optical microscopy, and the thickness of the coating was measured. The X-ray diffraction pattern of the coating shows that the coated layer consists mainly of the MgO and $Mg_2SiO_4$ phases after the oxidation reaction. The hardness of the coated AZ31 alloy increased with increasing coating time. In addition, the corrosion rates of the coated and uncoated AZ31 alloys were examined by salt spray tests according to ASTM B 117 and the results show that the corrosion resistance of the coated AZ31 alloy was superior to that of the un-coated AZ31 alloy.

• 한국주조공학회지
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• 제28권1호
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• pp.20-24
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• 2008

The characteristics, such as roughness, thickness, microhardness and corrosion resistance, of plasma electrolytic oxide coatings on AZ91D alloy were investigated under the processing condition of various coating times. The coatings on AZ91D alloy consisted of MgO, $MgAl_{2}O_{4}$ and $Mg_{2}SiO_{4}$ oxides. The surface roughness and thickness of coatings became larger with increasing the coating time. The microhardness in cross section of coatings was much higher than not only that in surface but that in the conventional anodic oxide coatings, which increased progressively as the coating time increased. After being immersed in 3.5%NaCl solution and methyl alcohol, the corrosion resistance of AZ91D alloy was markedly improved by plasma electrolytic oxidation coating treatment, and the AZ91D alloy coated for 50min revealed excellent corrosion resistance.

• 한국재료학회지
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• 제18권5호
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• pp.241-246
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• 2008

Pure Mg and Mg-6wt.%Al alloy were coated by the plasma electrolytic oxidation with various coating times and the microstructural and mechanical characteristics of the coatings were investigated. The coatings on pure Mg and Mg-6wt.%Al alloy consisted of MgO and $Mg_2SiO_4$. The surface roughness and thickness of the coatings became larger as the coating time increased. The coatings on the Mg-6wt.%Al alloy were more uniform and thicker than those on pure Mg. The microhardness and friction coefficient of the coatings increased progressively as the coating time increased. In addition, the coatings on the Mg-6wt.%Al alloy compared to pure Mg showed improved microhardness and a better friction coefficient.

• 한국재료학회지
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• 제33권4호
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• pp.115-123
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• 2023

In this paper, we report and discuss the semi-permanently hydrophilic (SPH) treatment of polyester fabric using plasma polymerization and oxidation based on atmospheric pressure dielectric barrier discharge (APDBD) technology. SiO_xC_y(-H) was coated on polyester fabric using Hexamethylcyclotrisiloxane (HMCTSO) as a precursor, and then plasma oxidation was performed to change the upper layer of the thin film to SiO₂-like. The degradation of hydrophilicity of the SPH polyester fabrics was evaluated by water contact angle (WCA) and wicking time after repeated washing. The surface morphology of the coated yarns was observed with scanning electron microscopy, and the presence of the coating layer was confirmed by measuring the Si peak using energy dispersive x-ray spectroscopy. The WCA of the SPH polyester fabric increased to 50 degrees after 30 washes, but it was still hydrophilic compared to the untreated fabric. The decrease in hydrophilicity of the SPH fabric was due to peeling of the SiO_xC_y(-H) thin film coated on polyester yarns.

• 한국세라믹학회지
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• 제46권3호
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• pp.295-300
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• 2009

The crystal structure of surface coatings on Al1050 alloy by PEO (Plasma Electrolytic Oxidation), were investigated. The electrolyte for PEO was Na-Si-P system solution. The main crystalline phase were $\gamma$-alumina and $\alpha$-alumina. Crystallinity was increased with applied voltage and applied time. The dominant crystalline phase were affected not only chemical composition of Al alloy substrate and electrolyte, but also the +/- ratio of applied voltage.

• Corrosion Science and Technology
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• 제8권6호
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• pp.227-231
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• 2009

Mg and Mg alloys have been used for lots of applications, including automobile industry, aerospace, mobile phone and computer parts owing to low density. However, Mg and Mg alloys have a restricted application because of poor corrosion properties. Thus, improved surface treatments are required to produce protective films that protect the substrate from corrosive environments. Environmental friendly Plasma Electrolytic Oxidation (PEO) has been widely investigated on magnesium alloys. PEO process combines electrochemical oxidation with plasma treatment in the aqueous solution. In this study, AZ91 Mg alloys were treated by PEO process in controlling the current with PC condition and treated time, concentration of NaF, NaOH, and $Na_2SiO_3$. The surface morphology and phase composition were analyzed using SEM, EDS and XRD. The potentiodynamic polarization tests were carried out for the analysis of corrosion properties of specimen. Additionally, salt spray tests were carried out to examine and compare the corrosion properties of the PEO treated Mg alloys.

• 한국물환경학회지
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• 제29권5호
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• pp.666-673
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• 2013

Chloroform is harmful volatile organics and representatives of Trihalomethane (THM). Well-known removal methods of Chloroform are photo oxidation or OH radical oxidation. Plasma on water surface at slightly vacuum condition (45 torr) can produce OH radical and it will help chloroform removal. 81.5% of chloroform is removed by vacuum and plasma in 10 min.. Plasma can totally oxidize it till 2.8% and partially oxidize chloroform up to 18.5%. Water-surface plasma is good method to remove chloroform in short time.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.458-458
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• 2012

Fuel Cell is used stacking metal or polymer substrate. This hydro property of substrate surface is very important. Usually, surface property is hydrophilic. The surface oxidation of SUS is investigated through plasma treatments with an atmospheric-pressure dielectric barrier discharge (DBD) for increasing hydrophilic property. The plasma process makes an experiment under various operating conditions of the DBD, which operating conditions are treatment time, plasma gas mixture ratio, the plasma source supply frequency. Two kinds of SUS substrate, SUS-304 and SUS 316L, were used. Discharge frequency has a crucial impact on equipment performance and gas treatment. After the plasma treatment of a SUS plate, highly improved wettability was noted. But, when high oxygen supply, the substrate damaged seriously.