• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.26-31
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• 2023

We investigated the impact of NF₃ / H₂O remote plasma dry cleaning conditions on the SiO₂ etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF₃ flow rate, and H₂O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO₂ layer was situated between Si₃N₄ and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

• Journal of Animal Science and Technology
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• v.66 no.5
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• pp.891-904
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• 2024

The primary cause of sperm quality decline during the freeze-thaw pathway is the peroxidation hazard caused by reactive oxygen species produced by the biological molecules of sperm. Ascorbic acid (Vitamin C) and lycopene are two potent antioxidants that operate to prevent oxidation processes. This study aimed to analyse the effects of ascorbic acid and lycopene on the motility, viability, abnormality and plasma membrane integrity of post-thawed Sapudi rams. Sperm samples were obtained and pooled from six sexually mature Sapudi rams, separated into ten equal proportions and diluted with Tris-egg yolk-glycerol (TEY) extender. Semen was supplemented with 0 (C0; L0), 1 (C1; L1), 2 (C2; L2), 3 (C3; L3) and 4 (C4; L4) mg/100 mL (1%-4%) diluent each of ascorbic acid and lycopene, respectively. Total sperm motility, viability, abnormalities and semen membrane plasma (%) were analysed after thawing. C3 and L3 extenders resulted in higher total motility (p < 0.05) compared to the other extenders, with all treatments higher than that of the control. The extender C3 (p < 0.05) exhibited the highest semen quality. Finally, the current findings show that C3 and L3 can increase the quality of post-thawed Sapudi ram spermatozoa.

• Journal of Society of Preventive Korean Medicine
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• v.8 no.2
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• pp.141-156
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• 2004

Objectives : JianTeng-Yuan(交藤圓) is said to be a prescription for preservation of health in ${\ulcorner}$HuaTuo ZhongZangJing(華陀 中藏經)${\lrcorner}$. It is known to have the effect of Bu-Shen(補腎: strengthening kidney) and Yi-Shou(益壽: prolonging the span of one's life). This study investigates whether JTY is effective on inhibition of oxidation stress. Methods : Sprague-Dawley Rats(12-week-old, weight $300{\pm}20g$) were divided into 3 groups. Normal group(n=8) was injected PBS(1ml/body, s.c) at the back neck's skin. Control group(n=8) was injected D-galactose(50mg/kg, 1ml PBS/body, s.c) to induce pathological animals. JTY group was injected the same treatment for the Control group, and fed containing JTY(10%). The whole groups were treated 1 time per day for 6 weeks. After rats were sacrificed and anti-oxidant enzyme(SOD, CAT, G-px) activity, GSH quantity of RBC and tissue(heart, liver and kidney), plasma Vit-C quantity were examined. Besides, the MDA levels of liver and kidney, lipofuscin of heart and endurance of erythrocyte membrane were measured. Results : In the JTY group, RBC's SOD activity decline was halted by 21% of the normal level, compared to the control group ; G-px activity(unit/g of Hb) increased significantly, compared to the normal group ; and the level of Vit-C in plasma increased by 16%. Heart's SOD activity was kept at the same level as that of the normal group ; and CAT activity decline was halted by 26%. Kidney's CAT and G-px activities were kept at the same level as that shown in the normal group, implying the existence of halting effect. Liver also showed a slight halting effect against the decline of anti-oxidant ability, but the effect was not significant(a=0.05). A comparison between the levels of peroxide in SD rats showed that the level of TBARS in plasma increased significantly in the control group and that it was normal in the JTY group. The livers in the JTY group, compared to those in the control group, showed 36% halting effect of the normal level while their kidney's indicated the level significantly lower than the normal level. Heart's lipofuscin increased significantly in the control group, but was alike in both the JTY and the normal groups. Endurance of erythrocyte membrane(%) decreased significantly in the control group while it was kept at the similar level in both the JTY and the normal groups, indicating the halting effect. Conclusions : This study suggests that JTY is effective to defend oxidation stress caused by D-galactose in the animals. It showed that the anti-oxidant ability was maintained and strengthened. On the other hand, it reduced the level of peroxide in animals. In sum, JTY appeared to have the equilibrium normal physiological function in SD rat.

• Journal of The Korean Society of Inherited Metabolic disease
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• v.19 no.1
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• pp.20-25
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• 2019

Very-long-chain acyl-CoA dehydrogenase (VLCAD) deficiency (OMIM#201475) is an autosomal recessively inherited metabolic disorder of mitochondrial long-chain fatty acid oxidation. The clinical features of VLCAD deficiency is classified by three clinical forms according to the severity. Here, we report a case of later-onset episodic myopathic form of VLCAD deficiency whose diagnosis was confirmed by plasma acylcarnitine analysis and" multigene panel multigene panel sequencing. A 34-year old female patient visited genetics clinic for genetic evaluation for history of recurrent myopathy with intermittent rhabdomyolysis. She suffered first episode of rhabdomyolysis with acute renal failure requiring hemodialysis at twelve years old. After then, she suffered several times of recurrent rhabdomyolysis provoked by prolonged exercise or fasting. Physical and neurologic exam was normal. Serum AST/ALT and creatinine kinase (CK) levels were mildly elevated. However, according to her previous medical records, her AST/ALT, CK were highly elevated when she had rhabdomyolysis. In suspicion of fatty acid oxidation disorder, multigene panel sequencing and plasma acylcarnitine analysis were performed in non-fasting, asymptomatic condition for the differential diagnosis. Plasma acylcarnitine analysis revealed elevated levels of C14:1 ($1.453{\mu}mol/L$; reference, 0.044-0.285), and C14:2 ($0.323{\mu}mol/L$; 0.032-0.301) and upper normal level of C14 ($0.841{\mu}mol/L$; 0.065 -0.920). Two heterozygous mutation in ACADVL were detected by multigene panel sequencing and confirmed by Sanger sequencing: c.[1202G>A(;) 1349G>A] (p.[(Ser 401Asn)(;)(Arg450His)]). Diagnosis of VLCAD deficiency was confirmed and frequent meal with low-fat diet was educated for preventing acute metabolic derangement. Fatty acid oxidation disorders have diagnostic challenges due to their intermittent clinical and laboratorial presentations, especially in milder late-onset forms. We suggest that multigene panel sequencing could be a useful diagnostic tool for the genetically and clinically heterogeneous fatty acid oxidation disorders.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.12
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• pp.2247-2254
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• 2000

This study was carried out to investigate the reaction characteristics of NOx with reagents to grope the power consumption rate reduction and NOx removal rate improvement for the non-thermal plasma denitrification process. The experiments were performed using the real flue gas and wire-plate type plasma reactor. and the flow rate of real flue gas is $20Nm^3/hr$. Paraffinic and olefinic hydrocarbons and ammonia were used as reagents. Olefinic hydrocarbon oxidizes NO more actively than paraffinic hydrocarbon under the non-thermal plasma conditions, resulting in the generation of large amount of $NO_2$ and a very small amount of CO. When the initial NOx concentration increases. oxidation rate of NO decreases and the consumption rate of olefinic hydrocarbon increases significantly. On the other hand. $NH_3$ did not promote reduction reaction with NO under non-thermal plasma conditions. however, there was a tendency that the NHa was effective to remove the $NO_2$ oxidized by olefinic hydrocarbon.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.2
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• pp.65-69
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• 2014

Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1100, A5052, A6061, A6063, A7075, were investigated. Two types of electrolyte $Na_2Si_2O_3$ and Na2P2O7 were also compared. Bipolar pulse, $2000{\mu}sec$ with $400{\mu}sec+420V$ impulse and $300{\mu}sec$ - impulse were applied for 20 min. ${\alpha}-alumina$, ${\gamma}-alumina$, ${\eta}-alumina$, $Al_{4.95}Si_{1.05}O_{9.52}$, and $(Al_{0.9}Cr_{0.1})_2O_3$ were mainly observed. Si, component of electrolyte, were moved into the PEO layer by bipolar pulse. Glassy phase was also observed at the surface of $Na_2Si_2O_3$ electrolyte treated PEO layer, and increased with the Mg content of Al alloy. It is concluded that at first glassy phase was formed by the micro plasma, and the high temperature of plasma turns glassy phase to several crystalline phases. And we could expect that many other crystalline phase could be formed by PEO process.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.2
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• pp.59-64
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• 2014

Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1050, were investigated. The electrolyte of PEO was $Na_2Si_2O_3$ and KOH. Unipolar pulse, $ 2000{\mu}sec$ with $400{\mu}sec+420V$ impulse, were applied for 2 min, 5 min, 15 min, and 30 min. ${\gamma}-Alumina$, as well as ${\alpha}-alumina$, was main crystal phase. ${\gamma}-Alumina$ was appeared in the beginning, then the amount of ${\alpha}-alumina$ was increased with time, but the amount of ${\gamma}-Alumina$ remained constant without any increasing. So, it is concluded that plasma gas produce ${\gamma}-Alumina$ at the first, and then ${\gamma}-Alumina$ transform ${\alpha}-alumina$ finally. During the transformation, high temperature of micro plasma gives transformation energy.

• Corrosion Science and Technology
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• v.15 no.3
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• pp.120-124
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• 2016

The effect of alloying element Ca (0, 1, and 2 wt%) on corrosion resistance and bioactivity of the as-received and anodized surface of rolled plate AM60 alloys was investigated. A plasma electrolytic oxidation (PEO) was carried out to form anodic oxide film in $0.5mol\;dm^{-3}\;Na_3PO_4$ solution. The corrosion behavior was studied by polarization measurements while the in vitro bioactivity was tested by soaking the specimens in Simulated Body Fluid (1.5xSBF). Optical micrograph and elemental analysis of the substrate surfaces indicated that the number of intermetallic particles increased with Ca content in the alloys owing to the formation of a new phase $Al_2Ca$. The corrosion resistance of AM60 specimens improved only slightly by alloying with 2 wt% Ca which was attributed to the reticular distribution of $Al_2Ca$ phase existed in the alloy that might became barrier for corrosion propagation across grain boundaries. Corrosion resistance of the three alloys was significantly improved by coating the substrates with anodic oxide film formed by PEO. The film mainly composed of magnesium phosphate with thickness in the range $30-40{\mu}m$. The heat resistant phase of $Al_2Ca$ was believed to retard the plasma discharge during anodization and, hence, decreased the film thickness of Ca-containing alloys. The highest apatite forming ability in 1.5xSBF was observed for AM60-1Ca specimens (both substrate and anodized) that exhibited more degradation than the other two alloys as indicated by surface observation. The increase of surface roughness and the degree of supersaturation of 1.5xSBF due to dissolution of Mg ions from the substrate surface or the release of film compounds from the anodized surface are important factors to enhance deposition of Ca-P compound on the specimen surfaces.

• Journal of the Korean Applied Science and Technology
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• v.34 no.1
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• pp.108-115
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• 2017

Generally, there are three ways to remove VOCs from the small painting booth; adsorption, burn and oxidation catalyst. RTO and RCO are high efficiency methods for removing VOCs. But they require large installation areas, which are not suitable for the small painting booth. And we need a new removing method because it is difficult to predict the A/C changing time and the recycle time. To solve these problems, we have developed the Arc plasma system which is simple and enable consecutive-use. It removes VOCs effectively and eco-friendly. In this study we have investigated the enrichment material and VOCs removal efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.308-309
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• 2016

Reducing surface recombination is a critical factor for high efficiency silicon solar cells. The passivation process is for reducing dangling bonds which are carrier. Tunnel oxide layer is one of main issues to achieve a good passivation between silicon wafer and emitter layer. Many research use wet-chemical oxidation or thermally grown which the highest conversion efficiencies have been reported so far. In this study, we deposit ultra-thin tunnel oxide layer by PECVD (Plasma Enhanced Chemical Vapor Deposition) using $N_2O$ plasma. Both side deposit tunnel oxide layer in different RF-power and phosphorus doped a-Si:H layer. After deposit, samples are annealed at $850^{\circ}C$ for 1 hour in $N_2$ gas atmosphere. After annealing, samples are measured lifetime and implied Voc (iVoc) by QSSPC (Quasi-Steady-State Photo Conductance). After measure, samples are annealed at $400^{\circ}C$ for 30 minute in $Ar/H_2$ gas atmosphere and then measure again lifetime and implied VOC. The lifetime is increase after all process also implied VOC. The highest results are lifetime $762{\mu}s$, implied Voc 733 mV at RF-power 200 W. The results of C-V measurement shows that Dit is increase when RF-power increase. Using this optimized tunnel oxide layer is attributed to increase iVoc. As a consequence, the cell efficiency is increased such as tunnel mechanism based solar cell application.