• 제목/요약/키워드: plasma oxidation

검색결과 691건 처리시간 0.03초

마이크로파 여기 프라즈마법으로 제조한 강자성 터널링 접합의 국소전도특성 (Local Current Distribution in a Ferromagnetic Tunnel Junction Fabricated Using Microwave Excited Plasma Method)

  • 윤대식;김철기;김종오
    • 한국자기학회지
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    • 제13권2호
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    • pp.47-52
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    • 2003
  • DC 마그네트론 스파터법과 RLSA(Radial Line Slot Antenna)을 이용한 마이크로파 여기 프라즈마를 이용하여 Ta/Cu/Ta/NiFe/Cu/Mn$_{75}$Ir$_{25}$/ $Co_{70}$Fe$_{30}$/Al-oxide 구조의 접합을 제조한 후, contact-mode AM(Atomic Force Microscope)을 이용하여 Al 산화막의 국소전도 특성의 평가를 수행하였다. AFM 동시전류측정으로부터, 얻어지는 표면상과 전류상은 대응하지 않는다. 국소 전류-전압(I-V)의 측정 결과, 전류상은 절연층의 barrier height의 분포를 나타내고 있다는 것을 알았다.다.다.

가스 분사법으로 제조한 Mg-Zn-Y 합금의 플라즈마 전해 산화 피막 특성에 관한 연구 (Characteristics of Plasma Electrolytic Oxidation Coatings on Mg-Zn-Y Alloys Prepared by Gas Atomization)

  • 장시영;조한경;이두형;김택수
    • 한국분말재료학회지
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    • 제14권6호
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    • pp.372-379
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    • 2007
  • The microstructure, mechanical and electrochemical properties of plasma electrolytic coatings (PEO) coatings on Mg-4.3 wt%Zn-1.0 wt%Y and Mg-1.0 wt%Zn-2.0 wt%Y alloys prepared by gas atomization, followed by compaction at 320 for 10 min under the pressure of 700 MPa and sintering at 380 and 420 respectively for 24 h, were investigated, which was compared with the cast Mg-1.0 wt%Zn alloy. All coatings consisting of MgO and $Mg_2SiO_4$ oxides showed porous and coarse surface features with some volcano top-like pores distributed disorderly and cracks between pores. In particular, the surface of coatings on Mg-1.0 wt%Zn-2.0 wt%Y alloy showed smaller area of pores and cracks compared to the Mg-4.3 wt%Zn-1.0 wt%Y and Mg-1.0 wt%Zn alloys. The cross section micro-hardness of coatings on the gas atomized Mg-Zn-Y alloys was higher than that on the cast Mg-1.0 wt%Zn alloy. Additionally, the coated Mg-1.0 wt%Zn-2.0 wt%Y alloy exhibited the best corrosion resistance in 3.5%NaCl solution. It could be concluded that the addition of Y has a beneficial effect on the formation of protective and hard coatings on Mg alloys by plasma electrolytic oxidation treatment.

고지혈증 흰쥐에서 운동훈련이 혈액, 대사 변인 및 유전자 발현에 미치는 영향 (The Effect of Exercise Training on Blood and Metabolic Variances, and Genes Expressions in Hyperlipidemic Rats)

  • 김기훈;권태동;김종연
    • 운동영양학회지
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    • 제13권2호
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    • pp.93-100
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    • 2009
  • This study was conducted to investigate the effect of exercise training on blood and metabolic variances and genes expressions in hyperlipidemic rats. Three weeks-old male rats were randomly assigned into chow (n=7), high-fat diet (HF, n=7) and HF+exercise (HF+EX, n=7) groups. Exercise training consisted of the treadmill running 5 times per week during 8 weeks (0% grade, 30 min/time for first 4 weeks and 0% grade, 60 min/time the other 4weeks). The levels of triglyceride and total -cholesterol were increased in HF diet compared with chow group, and recovered to level of chow group by exercise training. Plasma glucose and insulin concentrations increased by 40 and 50%, respectively in HF diet compared with chow diet group, and these increases returned to the level of chow group by exercise training (p<.05). Body weight and abdominal fat mass were increased by high-fat diet compared with chow diet, and recovered to level of chow group by exercise training. Long-chain fatty acid oxidation rate and AMPK protein expression was not changed by HF diet, but increased by exercise training compared with high-fat diet (p<.05). UCP3 protein expression was not changed by either high-fat diet or exercise training compared with chow group. There was high correlation between plasma triglyceride and total cholesterol concentrations(p<.01). Plasma triglyceride or total cholesterol level showed correlation with following factors; plasma insulin and glucose levels, body weight, abdominal fat weight, UCP3 protein expression and long-chain fatty acid oxidation rate. These results showed that exercise training on the treadmill recovered hyperlipidemia, hyperglycemia and hyperinsulinemia induced by high-fat diet for 8 weeks. These exercise effects may be related with decreased body weight and abdominal fat mass, and increased long-chain fatty acid oxidation rate.

플라즈마 실리콘 질화막의 전기적 특성에 관한 연구 (A Study on the Electrical Properties of Plasma Silicon Nitride)

  • 주현성;주승기
    • 한국표면공학회지
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    • 제22권4호
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    • pp.215-220
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    • 1989
  • Silicon Nitride whose thickness is about $100\AA$by the ellipsometer was successfully formed by the Plasma reaction. Nitrogen Plasma was formed by applying the 200KHz, 500Watt power between the two electroes and nitridation of silicon was carried out directly on the top of the silicon wafer. Thus Silicon Nitride formed was oxidized to from oxynitrides and their electrical characterlstice were analyzed by measuring I-V curves and capacitances. Through ESCA depth profiles, the chemical composition changes before and after the oxidation wers analyzed.

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Magnetotransport Properties of Co-Fe/Al-O/Co-Fe Tunnel Junctions Oxidized with Microwave Excited Plasma

  • Nishikawa, Kazuhiro;Orata, Satoshi;Shoyama, Toshihiro;Cho, Wan-Sick;Yoon, Tae-Sick;Tsunoda, Masakiyo;Takahashi, Migaku
    • Journal of Magnetics
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    • 제7권3호
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    • pp.63-71
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    • 2002
  • Three fabrication techniques for forming thin barrier layer with uniform thickness and large barrier height in magnetic tunnel junction (MTJ) are discussed. First, the effect of immiscible element addition to Cu layer, a high conducting layer generally placed under the MTJ, is investigated in order to reduce the surface roughness of the bottom ferromagnetic layer, on which the barrier is formed. The Ag addition to the Cu layer successfully realizes the smooth surface of the ferromagnetic layer because of the suppression of the grain growth of Cu. Second, a new plasma source, characterized as low electron energy of 1 eV and high density of $10^{12}$ $cm^{-3}$, is introduced to the Al oxidation process in MTJ fabrication in order to reduce damages to the barrier layer by the ion-bombardment. The magnetotransport properties of the MTJs are investigated as a function of the annealing temperature. As a peculiar feature, the monotonous decrease of resistance area product (RA) is observed with increasing the annealing temperature. The decrease of the RA is due to the decrease of the effective barrier width. Third, the influence of the mixed inert gas species for plasma oxidization process of metallic Al layer on the tunnel magnetoresistance (TMR) was investigated. By the use of Kr-O$_2$ plasma for Al oxidation process, a 58.8 % of MR ratio was obtained at room temperature after annealing the junction at $300{^{\circ}C}$, while the achieved TMR ratio of the MTJ fabricated with usual Ar-$0_2$ plasma remained 48.4%. A faster oxidization rate of the Al layer by using Kr-O$_2$ plasma is a possible cause to prevent the over oxidization of Al layer and to realize a large magnetoresistance.

Diagnostic Studies of Plasmas in Saline Solutions: the Frequency Effects and the Electrode Erosion Mechanism

  • Hsu, Cheng-Che
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.16-16
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    • 2011
  • Plasmas in saline solutions receive considerable attention in recent years. How the operating parameters influence the plasma characteristics and how the electrode erosion occurs have been topics that require further study. In the first part of this talk, the effect of the frequency on the plasmas characteristics in saline solution driven by 50~1000 Hz AC power will be presented. Two distinct modes, namely bubble and jetting modes, are identified. The bubble mode occurs under low frequencies. In this mode, one mm-sized bubble is tightly attached to the electrode tip and oscillates with the applied voltage. With an increase in the frequency, it shows the jetting mode, in which many smaller bubbles are continuous formed and jetted away from the electrode surface. Multiple mechanisms that are potentially responsible to such a change in bubble dynamics have been proposed and the dominant mechanism is identified. From the Stark broadening of the hydrogen optical emission line, electron densities in both modes are estimated. It shows clearly that the driving frequency greatly influences the bubble dynamics, which in turn alters the plasma behavior. In the second part, the study of the erosion of a tungsten electrode immersed in saline solution under conditions suitable for bio-medical applications is presented. The electrode is immersed in 0.1 M saline solution and is positively or negatively biased using a DC power source up to 600 V. It is identified that when the electrode is positively biased, erosion by the surface electrolytic oxidation is the dominant mechanism with an applied voltage below 150 V. An increase in the applied voltage leads to the formation of the plasma and the damage by the plasma and the thermal effect becomes more prominent. The formation of the gas film at the electrode surface leads to the formation of the plasma and hinders the electrolytic erosion. In the negatively-biased electrode, no electrolytic oxidation is seen and the damage is mostly likely due to the plasma erosion and the thermal effect.

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