• Economic and Environmental Geology
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• v.29 no.1
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• pp.21-24
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• 1996

Inductively coupled plasma atomic emission spectrophotometer (ICP/AES) is a versatile modern instruments for the multi-element analysis, but quantitative analysis using ICP/AES with normal pneumatic nebulizer is not applicable for the measurement of elemental concentrations in water down to the drinkining water standard level except a few elements because of poor detection limits. However, the detection limit can be lowered enough to measure drinking water standard, if ultrasonic nebulizer and/or hydride vapor generator is attached. This method is tested with groundwater samples from Tajeon area. It is confirmed that the elemental concentrations in these samples are within the limit of drinking water standard for the most elements. However, uranium concentration is very high in some samples compared with the concentrations suggested by Environmental Protection Agency of U.S.A. There is no standard concentration level to this element in Korea and it should be prepared immediately.

• Journal of Advanced Marine Engineering and Technology
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• v.18 no.4
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• pp.33-42
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• 1994

The radiative heat transfer analysis in the fluidized particles layer has important application in many technological areas such as combustion chambers at high pressure and temperature, plasma generators for nuclear fusion, MHD generator using pulverized coal and the liquid droplet radiator used to reject wasted heat from a power plant operating in space. To accurately model the radiation properties of the fluidized particles layer, it is necessary to know the radiation interchange factors of particles in each layer. But the solutions are usually not possible for the equations of radiative heat transfer because it has an inherent difficulty in treating the governing intergo- differential equations, which are derived from the remote effects of radiative heat transfer. In this study, the analysis uses the Monte Carlo simulation method with optical depth model to calculate the radiation interchange factors of particles in each layer with wall and with each other.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.64-71
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• 2023

If an impedance mismatch occurs between the source and load in a Radio Frequency transmission system, reflected power is generated. This results in incomplete power transmission and the generation of Reflected Power, which returns to the Radio Frequency generator. To minimize this Reflected Power, Impedance matching is performed. Fast and efficient Impedance matching, along with converging reflected power towards zero, is advantageous for achieving desired plasma characteristics in semiconductor processes. This paper explores Impedance matching by adjusting the Vacuum Variable Capacitor of an L-type Matching Module based on the trends observed in the voltage of the Phase Sensor and Electromotive Force voltage. After assessing the impedance matching characteristics, the findings are described.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.240-240
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• 2011

The first neutral beam injector (NBI-1) has been developed for the Korea Superconducting Tokamak Advanced Research (KSTAR) tokamak. A first long pulse ion source (LPIS-1) has been installed on the NBI-1 for an auxiliary heating and current drive of KSTAR core plasmas. Performance of ion and neutral beam extractions in the LPIS-1 was investigated initially on the KSTAR NBI-1 system, prior to the neutral beam injection into the main plasmas. The ion source consists of a JAEA magnetic bucket plasma generator with multi-pole cusp fields and a set of KAERI prototype-III tetrode accelerators with circular apertures. The inner volume of plasma generator and accelerator column in the LPIS-1 is approximately 123 liters. Final design requirements for the ion source were a 120 kV/ 65 A deuterium beam and a 300 s pulse length. The extraction of ion beams was initiated by the formation of arc plasmas in the LPIS-1, called as an arc-beam extraction method. A stable ion beam extraction of LPIS-1 has been achieved up to an 100 kV/42 A for a 4 s pulse length and an 80 kV/25 A for a 14 s pulse length. Optimum beam perveance of 1.21 microperv has been found at an accelerating voltage of 80 kV. Neutralization efficiency has been measured by using a water flow calorimetry (WFC) method of calorimeter and an operation of bending magnet. The full-energy species of ion beams have been detected by using the diagnostic method of optical multichannel analyzer (OMA). An arc efficiency of the LPIS was 0.6~1.1 A/kW depending on the operating conditions of arc discharge.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.163-170
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• 1998

An ion energy spectrometer which has the $45^{\circ}$ parallel electrostatic deflection plate was designed and constructed for measuring ion temperature in high temperature plasma. The energy calibration and the energy resolution were studied in detail for a hydrogen ion at the $0.24{\sim}1.92\;keV$ energy using electrostatic accelerator with a duoplasmatron ion source. The voltage of the deflection plate was linearly increased for the decreased ion detector position at the constant ion energy and decreased for the increased ion energy at the fixed ion detector position. The inclination of the deflection plate voltage to the ion energy was between 0.92 and 1.61, and linearly decreased for the increased the ion detector position. The measured energy resolution, which is $4.2%\;{\sim}\;11.6%$ in this experiment region, was improved for the increased ion dector position and ion energy. The relative efficiency was increased for the decreased the ion detector position. The ion energy spectrum of the DC plasma in the multi-purpose plasma generator was measured using this equipment. The ion temperature was 203-205 eV at the discharge voltage 320 V, discharge current 1.7 A.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.111-111
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• 1999

반도체 소자의 고집적화 및 고속화에 따라 다층 금속배선에서의 RC 지연이 전체 지연의 주된 요소로 되고 있다. 이런 RC 진연을 줄이기 위해서 현재 다층 금속배선의 층간 절연막으로 사용하고 있는 SiO2 박막(k~3.9)을 보다 낮은 유전상수(low-k)를 가지는 물질로 대체할 것이 요구된다. 층간 절연막으로서 가져야 할 가장 중요한 것은 낮은 유전상수와 높은 열적안정성($\geq$45$0^{\circ}C$)이다. 본 연구에서는 Toluene을 precursor로 사용한 PECVD방법으로 low-k 유사중합체 유기박막을 성장시켰으며 부동한 온도에서 성장된 박막의 특성을 비교하여 증착온도가 박막의 특성에 미치는 영향에 대하여 조사하였다. 유사중합체 유기박막은 platinum(Pt)기판과 silicon 기판위에 같이 증착되었다. Precursor는 4$0^{\circ}C$로 유지된 bubbler에 담겨지고 증발된 precursor molecules는 Argon(Ar:99.999%) carrier 가스에 의해 process reactor 내부로 유입된다. Plasma는 RF(13.56MHz generator로 연결된 susceptor 주위에 발생시켰다. Silicon 기판위에 증착한 시편으로 Fourier transform infrared (FTIR) spectra 및 열적 안정성을 측정하였고, Pt 기판위에 증착한 시편으로 Al/유기박막/Pt 구조의 capacitor를 만들어 열적안정성을 측정하였고, Pt 기판위에 증착한 시편으로는 Al/유기박막/Pt 구조의 capacitor를 만들어 K값 및 절연성을 측정하였다. Capacitance는 1MHz 주파수에서 측정하였다. 열적안정성은 30분동안 Ar 분위기에서 annealing하기 전후의 증착막의 두께의 변화를 측정함으로써 조사하였으며 유기박막의 두께는 surface profilometer로 측정하였다. 증착온도가 45$^{\circ}C$에서 15$0^{\circ}C$, 25$0^{\circ}C$로 높아짐에 따라 k값은 높아졌지만 대신 열적안정성은 좋아졌다. plasma power 30W인 경우 45$^{\circ}C$에서 증착했을 때 유전상수는 2.80으로 낮았지만 40$0^{\circ}C$에서 30분 동안 열처리한 후 두께가 49% 감소하였다. 그러나 25$0^{\circ}C$에서 증착했을 때 유전상수는 3.10으로 좀 높아졌지만 열적으로는 40$0^{\circ}C$까지 안정하였으며 45$0^{\circ}C$에서도 두께의 감소는 8%에 불과했다.

• YAKHAK HOEJI
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• v.41 no.5
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• pp.607-614
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• 1997

Flurbiprofen- and flurbiprofen axetil-loaded microemulsions composed of soybean oil, poloxamer 407, glycerine and water were prepared by generator-type homgenizer and ultrasoni c probe system. The particle size of microemulsions was measured by the dynamic light scattering method. The pharmacokinetics and organ distribution of flurbiprofen were investigated after intravenous injection of flurbiprofen solution, flurbiprofen-loaded microemulsion and flurbiprofen axetil-loaded microemulsions equivalent to 10mg/kg of flurbiprofen to rats. Blood samples were collected from the anterior ciliary artery of rats for 24hr, and flurbiprofen in plasma and organs was analyzed by HPLC. Stable microemulsions were prepared. Even though there is a little change in droplet size just after the preparation, no creaming and no separation were occured during the storage period for 6 months at 4, 21, 37 and 45$^{\circ}C$. Pharmacokinetic parameters and organ distribution of flurbiprofen after intravenous injection of flurbiprofen- and flurbiprofen axetil-loaded microemulsions emulsified with poloxamer 407 were not significantly different from those of commercial lipid microemulsion emulsified with lecithin. Therefore, it is concluded that flurbiprofen- and flurbiprofen axetil-loaded microemulsion prepared with poloxamer 407 could be used as a parenteral formulation.

• Proceedings of the KIPE Conference
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• 2018.07a
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• pp.78-80
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• 2018

본 논문은 용량성 결합 플라즈마 응용 시스템을 위한 전류형 토폴로지 기반의 전력 변환장치 구조를 제안한다. 제안된 시스템은 독립적으로 제어된 두 개의 고 정밀 펄스 전류를 부하로 출력하는 병렬 연결된 전류형 전력 변환장치로 구성된다. 전체 회로 토폴로지는 네 가지 세부 부분; 바이어스 전류 발생기, 바이어스 전류 모듈레이터, 슬롭 전류 발생기, 슬롭 전류 모듈레이터로 구성되어 있다. 제안된 시스템은 빠른 과도 특성을 위해 1200V/90A급 SiC MOSFET 스위치를 사용하였다. 제안된 전력 변환장치는 4.5kV의 출력전압, 40A급 출력전류와 100ns급 전류 상승/하강 특성을 충족시키도록 설계되었다. 본 연구는 펄스 전류형 전력 변환회로를 제안함으로써 전압형 전력 변환장치에 비해 전압 스파이크 및 전압 파형 왜곡을 줄여 보다 정확한 출력 전압을 발생시킴으로써 용량성 결합 플라즈마 시스템의 안정도 및 정밀도를 향상시킬 수 있다.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.28 no.5
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• pp.76-81
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• 2014

The ozone generation is commonly made with silent discharge method using quartz glass dielectric. In this paper, using $Al_2O_3$ dielectric to instead of the traditional quartz glass dielectric to improve the system efficiency is presented. The dielectric was manufactured as tube shape (Internal diameter${\times}$ Outside diameter: $11{\times}15mm$) using 99% $Al_2O_3$ ceramic. The characteristics of dielectric discharge and ozone generation were studied of experiments with variation of discharge power, discharge electrode space and rate of flow for supplied gas ($O_2$/Air). As the experimental results, in the same discharge space, the ozone concentration continuously increased with input power increasing, and ozone yield increased until saturation happened. Also, the expended power increased with discharge space extended due to discharge power increased. In additional, the ozone concentration of oxygen ozone was higher than air that was observed when using oxygen ozone in proposed experiments.

• 한국가시화정보학회:학술대회논문집
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• 2006.12a
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• pp.111-112
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• 2006

In order to investigate flow characteristics of blood flow in a micro tube ($100{\mu}m$ in diameter) according to hematocrit, in-vitro experiments were carried out using a micro-PIV technique. The micro-PIV system consists of a microscope, a 2 head Nd:YAG laser, a 12 bit cooled CCD camera and a delay generator. Blood was supplied into the micro tube using a syringe pump. Hematocrit of blood was controlled to be 20%, 30% and 40%. The blood flow has a cell free layer near the tube wall and its thickness was changed with increasing the flow rate and hematocrit. The hemorheological characteristics such as shear rate and viscosity were evaluated using the velocity field data measured. As the flow rate increased, the blunt velocity profile in the tube center was sharpened. The viscosity of blood was rapidly increased with decreasing shear rate, especially in the region of low shear rate, changing RBC rheological properties. The variation of velocity profile and blood viscosity shows typical characteristics of Non-Newtonian fluids. On the basis of inflection points, the cell free layer and two-phase flow consisting of plasma and suspensions including RBCs were clearly discriminated.