• Title/Summary/Keyword: plasma $D_3$

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On the Etching Mechanism of Parylene-C in Inductively Coupled O2 Plasma

  • Shutov, D.A.;Kim, Sung-Ihl;Kwon, Kwang-Ho
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.4
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    • pp.156-162
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    • 2008
  • We report results on a study of inductively coupled plasma (ICP) etching of Parylene-C (poly-monochloro-para-xylylene) films using an $O_2$ gas. Effects of process parameters on etch rates were investigated and are discussed in this article from the standpoint of plasma parameter measurements, performed using a Langmuir probe and modeling calculation. Process parameters of interest include ICP source power and pressure. It was shown that major etching agent of polymer films was oxygen atoms O($^3P$). At the same time it was proposed that positive ions were not effective etchant, but ions played an important role as effective channel of energy transfer from plasma towards the polymer.

Design of the Vacuum Vessel for the KT-2 Project

  • S.R.In;Yoon, B.J.;S.H.Jeong;Lee, B.S.
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05d
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    • pp.438-442
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    • 1996
  • The design of the vacuum vessel of KT-2(a large-aspect-ratio, mid-size tokamak) is presented. The KT-2 vacuum vessel provides necessary environments to contain a plasma of double-null configuration with elongation of up to 1.8. The vacuum vessel is designed as an all-metal welded structure. Eddy currents are induced on the vessel during all stages of the plasma operation. Influences of the continuous vessel on the plasma were investigated. No significant effect of the vessel on the plasma in every aspect of null formation, plasma initiation, plasma control was found. Stresses and deformations in the vessel by atmospheric pressure and electromagnetic forces due to the eddy currents were calculated using 3D FEM code.

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Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices (차세대 메모리 디바이스Gap-Fill 공정 위한 공간 분할 PE-ALD개발 및 공정 설계)

  • Lee, Baek-Ju;Hwang, Jae-Soon;Seo, Dong-Won;Choi, Jae-Wook
    • Journal of the Korean institute of surface engineering
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    • v.53 no.3
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    • pp.124-129
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    • 2020
  • This study is for the development of high temperature ALD SiO2 film process, optimized for gap-fill process in manufacturing memory products, using a space-divided PE-ALD system equipped with an independent control dual plasma system and orbital moving unit. Space divided PE-ALD System has high productivity, and various applications can be applied according to Top Lid Design. But space divided ALD system has a limitation to realize concentric deposition map due to process influence due to disk rotation. In order to solve this problem, we developed an orbit rotation moving unit in which disk and wafer. Also we used Independent dual plasma system to enhance thin film properties. Improve productivity and film density for gap-fill process by having deposition and surface treatment in one cycle. Optimize deposition process for gap-fill patterns with different depths by utilizing our independently controlled dual plasma system to insert N2and/or He plasma during surface treatment, Provide void-free gap-fill process for high aspect ratio gap-fill patterns (up to 50:1) with convex curvature by adjusting deposition and surface treatment recipe in a cycle.

The Relationships between Plasma δ - aminolevulinic acid Concentration and Lead Exposure Indices in Lead Workers (연 노출 근로자들의 혈장 δ - aminolevulinic acid 량과 연 노출 지표들과의 관련성)

  • Kim, Jin-Ho;Ahn, Kyu-Dong;Lee, Sung-Soo;Hwang, Kyu-Yoon;Kim, Yong-Bae;Lee, Hyung-Kook
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.10 no.2
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    • pp.165-172
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    • 2000
  • This study was carried out to investigate relationship between plasma $\delta$ - aminolevulinic acid (ALAP) and lead exposure indices in exposure to lead. The subjects were 218 male workers in 2 storage battery companies and 2 secondary smelting companies. Blood lead(PbB), blood zinc-protoporphyrin( ZPP), urinary $\delta$ - aminolevulinic acid (ALAU), hemoglobin(Hb), and hematocrit(Hct) were measured as lead exposure indices. The results were as follows, 1. The means of blood lead and blood ZPP concentration of subjects were $27.2{\pm}14.0{\mu}g/d{\ell}$ and $55.1{\pm}47.6{\mu}g/d{\ell}$, respectively. The means of plasma $\delta$ - ALA and urinary $\delta$ - ALA concentration were $18.9{\pm}25.1{\mu}g/d{\ell}$ and $2.1{\pm}4.6mg/{\ell}$, respectively. 2. The concentration of ALAP was $11.2{\mu}g/{\ell}$ for below $20{\mu}g/d{\ell}$ PbB, $12.8{\mu}g/{\ell}$ for from $21-40{\mu}g/d{\ell}$ PbB, and $51.2{\mu}g/{\ell}$ for over $40{\mu}g/d{\ell}$ PbB, respectively. 3. ALAP was significantly correlated with ALAU(r=0.829, p<0.01), ZPP(r=0.724, p<0.01) and PbB(r=0.552, p<0.01).

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Low temperature deposition of LaMnO3 on IBAD-MgO template assisted by plasma (IBAD-MgO 기판상에 플라즈마를 이용한 LaMnO3 저온 증착)

  • Kim, H.S.;Oh, S.S.;Ha, D.W.;Ha, H.S.;Ko, R.K.;Moon, S.H.
    • Progress in Superconductivity and Cryogenics
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    • v.14 no.1
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    • pp.1-3
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    • 2012
  • LMO($LaMnO_3$) buffer layer of superconducting coated conductor was deposited on IBAD-MgO template in the plasma atmosphere at $650^{\circ}C$ which is relatively low compared with conventional deposition temperature of more than $800^{\circ}C$. Deposition method of LMO was DC sputtering, and target and deposition chamber were connected to the cathode and anode respectively. When DC voltage was applied between target and chamber, plasma was formed on the surface of target. The tape substrate was located with the distance of 10 cm between target and tape substrate. When anode bias was connected to the tape substrate, electrons were attracted from plasma in target surface to the tape substrate, and only tape substrate was heated by electron bombardment without heating any other zone. The effect of electron bombardment on the surface of substrate was investigated by increasing bias voltage to the substrate. We found out that the sample of electron bombardment had the effect of surface heating and had good texturing at low controlling temperature.

Effect of Rubi Fructus(Fruit of Rubus Coreanus Miq.) on Antioxidant Capacity in D-galactose Induced Aging Rats (복분자(覆盆子)가 노화유발(老化誘發) 흰쥐의 항산화능(抗酸化能)에 미치는 영향(影響))

  • Park Sung-Jun;Lee Song-Sil;Baek Jin-Woong;Lee Sang-Jae;Kim Kwang-Ho
    • Journal of Society of Preventive Korean Medicine
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    • v.8 no.1
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    • pp.75-87
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    • 2004
  • Objectives: Rubi Fructus(fruit of Rubus coreanus Miq.) composed of Polygonum multiflorum THUNB. and some medical herbs is known as formula of senescence delay effect. The purpose of this study is to investigate the effect of Rubi Fructus(fruit of Rubus coreanus Miq.) on antioxidant enzyme activity such as Thiobarbituric acid reactive substance(TBARS), Superoxide dismutase(SOD), Catalase(CAT), Glutathione peroxidase(GSH-px) in rat erythrocytes and blood plasma. Methods: Sprague-Dawley rats were divided into 3 groups, Normal group(supplied enough water and feeds only, Normal Group), D-galatose administered group(injected D-galatose 50mg/kg, 1time/day for 6 weeks, Control Group) and Rubi Fructus (fruit of Rubus coreanus Miq.) administered group(D-galactose 50mg/kg and Rubi Fructus(fruit of Rubus coreanus Miq.) extracts 85.0mg/200g 1time/day for 6 weeks, BBJ Group). Rats were sacrificed and TBARS, SOD, CAT, GSH-px, Plasma total lipid, Plasma triglyceride and cholesterol were measured in rat erythrocytes and blood plasma. Results : Plasma TBARS concentrations of all experimental group were not significantly different. Red blood cell(RBC) SOD activities of BBJ group was increased, and RBC catalase activities of all experimental group were not significantly different. RBC GSH-px activities of BBJ group was increased. Plasma total lipid concentration of BBJ group were significantly lower than those of control. Plasma triglyceride, total cholesterol and HDL-cholesterol concentrations of all experimental group were not signi ficantly different. Conclusions: According to the above results, it is considered that Rubi Fructus(fruit of Rubus coreanus Miq.) is effective in inhibiting lipid peroxidation and increasing antioxidative enzyme activities in D-galactose induced aging rat.

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Effect of knife castration on leukocyte cytokine expression and indicators of stress, pain, and inflammation in Korean cattle bull calves

  • Seonpil Yoo;Seok-Hyun Beak;Hyeok Joong Kang;Da Jin Sol Jung;Dilla Mareistia Fassah;InHyuk Jeong;Seung Ju Park;Md Najmul Haque;Myunghoo Kim;Myunggi Baik
    • Animal Bioscience
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    • v.36 no.3
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    • pp.521-528
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    • 2023
  • Objective: This study investigated the effects of surgical castration on behavior, physiological and inflammatory indicators, and leukocyte cytokine mRNA levels in Korean cattle bull calves. Methods: Nineteen Korean cattle bull calves (average body weight, 254.5 kg; average age, 8.2 months) were divided into two treatment groups: control (n = 9) and castration (n = 10). Surgical castration was performed using Newberry knives and a Henderson castrating tool. Blood was obtained just before castration (0 h) and at 0.5 h, 6 h, 1 d, 3 d, 7 d, and 14 d after castration. Plasma cortisol (PC), saliva cortisol (SC), plasma substance P, and plasma haptoglobin concentrations, and the leucocyte mRNA levels of the interleukin-1-alpha (IL1A), interleukin-1-beta (IL1B), interleukin-1 receptor antagonist (IL1RN), and interleukin-6 (IL6) genes were analyzed. Results: Castration decreased (p<0.01) the average daily gain and gain/feed ratio. Castration reduced the time spent eating (p<0.001) and the eating frequency (p<0.01) and increased (p<0.001) the lying frequency. Castration temporarily increased (p<0.05) circulating PC and SC concentrations at 0.5 h after castration. Castration temporarily increased (p<0.05) plasma substance P concentrations at 1 d after castration. Castration increased (p<0.05) plasma haptoglobin concentrations at 1 and 3 d after castration. Castration increased (p<0.05) leukocyte mRNA levels of the IL1A, IL1B, IL1RN, and IL6 genes at 6 h after castration. Conclusion: Castration temporarily induced stress and expression of leucocyte inflammatory cytokine genes in Korean cattle bull calves.

Growth and characterization of BON thin films prepared by low frequency RF plasma enhanced MOCVD method

  • Chen, G.C.;Lim, D.-C.;Lee, S.-B.;Hong, B.Y.;Kim, Y.J.;Boo, J.-H.
    • Journal of the Korean institute of surface engineering
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    • v.34 no.5
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    • pp.510-515
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    • 2001
  • It was first time that low frequency R.F. derived plasma enhanced MOCVD with frimethylborate precursor was used to fabricate a new ternary compound $BO_{x}$ $N_{y}$ . The formation of BON molecule was resulted from nitrogen nitrifying B-O, and forming the angular molecule structure proved by XPS and FT-IR results. The relationship between hardness and film thickness was studied. An thickness-independent hardness was fond about 10 GPa. The empirical calculation of band-gap and UV test result showed that our deposited $BO_{x}$ $N_{y}$ thin film was semiconductor material with 3.4eV of wide band gap. The electrical conductivity, $4.8$\times$10^{-2}$ /($\Omega$.cm)$^{-1}$ also confirmed that $BO_{x}$ $N_{y}$ has a semiconductor property. The roughness detected from the as-grown films showed that there was no serious bombarding effect due to anion in the plasma occurring in the RF frequency derived plasma.

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The Relationships between Plasma Insulin-like Growth Factor (IGF)-1 and IGF-Binding Proteins (IGFBPs) to Growth Pattern, and Characteristics of Plasma IGFBPs in Steers

  • Lee, H.G.;Hidari, H.;Kang, S.K.;Hong, Z.S.;Xu, C.X.;Kim, S.H.;Seo, K.S.;Yoon, D.H.;Choi, Y.J.
    • Asian-Australasian Journal of Animal Sciences
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    • v.18 no.11
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    • pp.1575-1581
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    • 2005
  • This study was conducted to determine the characteristics of IGFBPs in plasma of steers, and to profile the relationship between growth and plasma IGF-1 and IGFBPs with aging in Holstein steers. Four blots of IGFBP at molecular weights of 38-43, 34, 29-32 and 24 kDa bands were detected by western ligand blot assay using $^{125}I-IGF-1$. On the basis of immunoblotting with anti-bovine IGFBP-2 and -3 antiserums, we observed the band for IGFBP-2 at approximately 34 kDa, and the IGFBP-3 band was detected at 38-43 kDa and 34 kDa in adult steers and calves. The IGFBP-3 antiserum used on the blots exhibited significant cross-reactivity with 34 kDa IGFBP-2. Furthermore, the 38-43 kDa IGFBP-3 bands were reduced to a 36 kDa band after deglycosylation, whereas the 34 kDa IGFBP-2 was intact. The plasma IGF-1, IGFBP-3 and other IGFBPs showed stability throughout a whole day. The change in live weight was found to be positively correlated to the plasma IGF-1 concentration (r = 0.6801, n = 64, p<0.05) and plasma IGFBP-3 (r = 0.6321, n = 64, p<0.05), while inversely correlated to plasma IGFBP-2 (r = -0.2919, n = 64, p<0.05). Furthermore, plasma IGF-1 was positively correlated to plasma IGFBP-3 (r = 0.6191, p<0.001), but was not correlated to plasma IGFBP-2. The portion of IGFBP-2 for total IGFBPs in calves was higher than in adult steers (p<0.05) and was decreased with growth, whereas that of IGFBP-3 was increased with increased live weight (p<0.05). The ratio IGFBP-3 for IGFBP-2 (BP-3/BP-2) was increased with growing of liveweight. Therefore, the changes in plasma IGF-1 level with increased liveweight may be related to the changes in plasma IGFBP-3 level and IGFBP-2 may give an important role in anabolic action of IGF-1 with the growth of body during calfhood in Holstein steers.

Surface Treatment of Mg95Zn4.3Y0.7 Alloy Powder Consolidates using Plasma Electrolytic Oxidation (플라즈마 전해산화공정을 이용한 Mg95Zn4.3Y0.7 합금분말 성형체의 표면특성제어)

  • Kim, J.H.;Choi, H.S.;Kim, D.H.;Hwang, D.Y.;Kim, H.S.;Kim, T.S.
    • Journal of Powder Materials
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    • v.15 no.2
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    • pp.95-100
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    • 2008
  • The investigation is to modify the mechanical and chemical properties of Mg alloys using a combination of rapid solidification and surface treatment. As the first approach, $Mg_{95}Zn_{4.3}Y_{0.7}$ was gas atomized and pressure sintered by spark plasma sintering process (SPS), showing much finer microstructure and higher strength than the alloys as cast. Further modification was performed by treating the surface of PM Mg specimen using Plasma electrolytic oxidation (PEO) process. During the PEO processing, MgO layer was initiated to form on the surface of Mg powder compacts, and the thickness and the density of MgO layer were varied with the reaction time. The thickening rate became low with the reaction time due to the limited diffusion rate of Mg ions. The surface morphology, corrosion behavior and wear resistance were also discussed.