• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.12
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• pp.1060-1064
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• 2002

We have studied the effect of crystallization temperature, composition and film thickness, which are the fundamental processing parameters of lead zirconate titanate(PZT) thin film fabrication, in the respect of the piezoelectric properties by our pneumatic loading method(PLM). A great deal of research has been done in the field of characterization for piezoelectric thin films after the first report on the measurement for the piezoelectric coefficient of thin films in 1990. Even though the piezoelectric properties of thin films are very critical factors in the micro-electro mechanical system(MEMS) and thin film sensor devices, a few reports for the piezoelectric characterization are provided for the last decade unlikely the bulk piezoelectric devices. We have found that the piezoelectric properties of thin films are improved as the increase of crystallization temperature up to 750$\^{C}$ and this behavior can be also explained by the analysis of dielectric polarization hysteresis loop, X-ray diffraction and scanning electron microscopy. The effect of Zr/Ti composition has been also studied. This gives us the fact that the maximum piezoelectricity is found near Morphotropic Phase Boundary(MPB) as bulk PZT system does.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• Proceedings of the KIEE Conference
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• 1989.07a
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• pp.333-334
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• 1989

Electrically active part of the piezoelectric sound element is a ceramic thin circular disk cemented to a metal base plate (using a type of thermosetting epoxy). The active part is a thin lead zirconate titanate disk (PZT). The piezoelectric sound element is so dimensioned that its basic resonance frequency is approximately if the center of the audible frequency band: This frequency is mainly determined by the geometry and the sort of the metal base plate materials. In this study, four kinds of PZT ceramic and two classes of thin metal base plate were prepared. It is observed that dielectric and pizoelectric properties relate to acoustical properties (particularly sound pressure level).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.11
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• pp.904-911
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• 2001

High-density lead zirconate titanate(Pb(Zr$\_$0.53/Ti$\_$0.47/)O$_3$, PZT) ceramics were fabricated by a new milling-precipitation(MP) process improved from the conventional solid state process. This process was progressed by a milling impregnation through mixing ZrO$_2$ and TiO$_2$ powders with lead nitrate(Pb(NO$_3$)$_2$) water solution in zirconia ball media, and then milling precipitation was induced from precipitation of PbC$_2$O$_4$ by adding ammonium of oxalate monohydrate((NH$_4$)$_2$C$_2$O$_4$$.$H$_2$O) as a precipitant. As a result of this process, single-phase perovskite structure was formed at the calcination temperature of 750$\^{C}$ for Pb(Zr$\_$0.53/Ti$\_$0.47/)O$_3$ powders. In addition, the highest density at the sintering temperature of 1100$\^{C}$ was obtained, because of the highly sinterable PZT Powders ground through the re-milling process. Piezoelectric and dielectric properties of sintered sample were improved by MP process.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.188-191
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• 2005

Taguchi method is used to determine the optimal configuration of PZT (Lead Zirconate-Titanate) patch on the host structure for improving the performance of piezoelectric shunt system. The charges generated on the surface of PZT patch are selected to be the objective function in the Taguchi method. Full three dimensional finite element models are used to simulate vibration of smart panel and to obtain the admittance of the piezoelectric shunt system. Using Taguchi method in Minitab, the optimal model is obtained. The experiment with piezoelectric shunt circuit is performed to verify the validity of the optimal model comparing with initial model.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2011.04a
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• pp.680-683
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• 2011

This study deals with damage detection in beam structure by using modal strain energy-based technique with three different sensor types: accelerometer, lead zirconate titanate (PZT) piezoelectric sensor and electrical strain gage. First, the use of direct piezoelectric effect of PZT sensor for dynamic strain response are presented. Next, a modal strain energy-based damage detection method is outlined. For validation, forced vibration tests are carried out on lab-scale aluminum cantilever beam. The dynamic responses are measured for several damage scenarios. Based on damage localization results, the performance of three different sensor types is evaluated.

• Smart Structures and Systems
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• v.11 no.2
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• pp.185-197
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• 2013

We developed a simultaneous strain measurement and damage detection technique using a pair of surface-mounted piezoelectric transducers and a fiber connecting them. This is a novel sensor configuration of the fiber acoustic wave (FAW) piezoelectric transducer. In this study, lead-zirconate-titanate (PZT) transducers are installed conventionally on a plate's surface, which is a technique used in many structural health monitoring studies. However, our PZTs are also connected with an optical fiber. A FAW and Lamb wave are simultaneously guided in the optical fiber and the structure, respectively. The dependency of the time-of-flight of the FAW on the applied strain is quantified for strain sensing. In our experimental results, the FAW exhibited excellent linear behavior and no hysteresis with respect to the change in strain. On the other hand, the well-known damage detection function of the surface-mounted PZT transducers was still available by monitoring the waveform change in the conventional Lamb wave ultrasonic path.

• Journal of Electrical Engineering and Technology
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• v.12 no.2
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• pp.846-851
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• 2017

Piezoelectricity is the capability of a piezoelectric material to change mechanical energy into electrical energy. The determination of electrical and mechanical properties plays a significant role in characterizing the piezoelectric material. The energy losses characteristics of piezoelectric material can be described by mechanical quality factor. In this paper, the output voltage and mechanical quality factor of Lead Zirconate Titanate (PZT-4A) piezoelectric material is determined under various resistance and loading conditions by using the test setup. The commercial FEM software ABAQUS is used to analyze the performance of piezoelectric material under static loading conditions. It is observed that these properties affect the performance of a material particularly in the designing of smart structures. The experimental results are partially compared to the simulation values.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.5
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.313-316
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• 2003

The lead zirconate titanate, $Pb(Zr_{0:52}Ti_{0:48})O_3$, films of $0.5\;{\mu}m,\;1\;{\mu}m$ and $2\;{\mu}m$ thickness were fabricated on $Pt/Ti/SiO_2/Si$ substrate by the rf magnetron sputtering method. The PZT films were annealed using by a rapid thermal annealing (RTA) method. The thickness dependence of the film structure, dielectric properties, Polarization-electric field hysteresis loops and capacitance-voltage characteristics were investigated over the thickness range of $0.5\;{\mu}m,\;1\;{\mu}m$ and $2\;{\mu}m$. According to the XRD patterns of the films, (110) peak intensity increases with film thickness increased. The increase of PZT films thickness leads to the decrease of the remanent polarization and the dielectric constant.