• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.119-125
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• 2001

This paper presents an experimental study on active control of self-excited vibration for a high speed turbomachinery. In order to suppress the self-excited vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by pivots containing piezoelectric actuators and their radial position can be actively controlled by applying voltage to the actuators. The transfer characteristics from actuator inputs to shaft vibration outputs are experimentally investigated. In a tilting-pad gas bearing (TPGB), a shaft is supported by the pressurized air film. Four gap sensors were used to measure the vibration of the shaft and PID was used in the feedback control of the shaft vibration. The experimental results show that the self-excited vibration of the rotor can be effectively suppressed if the PID controller gains are properly chosen. As a result we find that the feedback control is effective for suppressing the self-excited vibration of a rotor system using stack-type PZT actuators.

• Smart Structures and Systems
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• v.9 no.1
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• pp.21-33
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• 2012

In this study, a Lamb-wave based damage detection approach is proposed for damage localization in plate. A sensor network consisting of three PZT wafer type actuators/sensors is used to generate and detect Lamb waves. To minimize the complication resulted from the multimode and dispersive characteristics of Lamb waves, the fundamental symmetric Lamb mode, $S_0$ is selectively generated through designing the excitation frequency of the narrowband input signal. A damage localization algorithm based upon the configuration of the PZT sensor network is developed. Time-frequency analysis method is applied to purify the raw signal and extract damage features. Experimental result obtained from aluminum plate verified the proposed damage localization approach.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1326-1331
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• 2003

Thick PZT films are required for the cases of micro actuators and sensors with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Total 8 types of samples using thick PZT films with thicknesses, about $1{\mu}m$ and $2{\mu}m$, and Pt top electrodes shapes for measuring transverse piezoelectric coefficient ($e_{31,f}$) were fabricated using MEMS processes. They were characterized by fabricated e31,f measurement system before and after poling. $e_{31,f}$ values of samples after poling were higher than before poling. Those of $2{\mu}m$ thick PZT films were also higher than $1{\mu}m$ thick PZT films. And those with long electrodes as top electrodes were also higher than shorter.

• Journal of Sensor Science and Technology
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• v.18 no.6
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• pp.461-466
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• 2009

This paper represents a piezoelectric ultrasonic linear actuator with flexural vibration mode. The actuator is composed of two piezo ceramics, the elastic body, and the connecting tip. It is driven by the frictional force between the connecting tip and the linear motion guide. Unimorph actuators have flexural vibration. Its middle point is fixed so that suitable to the flexural vibration of $3/2\lambda$. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. It was generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. A linear movement can be easily obtained using the elliptical motion. The ATILA, FEM simulator has been used to design actuator and verify the kinetic and dynamic analysis. We used the ceramics of $20\times10\times1$ mm size and confirmed the flexural vibration of the $3/2\lambda$ at the 79 kHz through the scanning of 3D-vibrometer. The maximum velocity of actuator was 221 mm/sec and the thrust force of actuator was 2.7 N in 200Vp-p of additional voltage.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2003.10a
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• pp.549-555
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• 2003

The objective of かis study is to investigate the feasibility of piezoelectric transducers as a damage detection system for civil infrastructures. There have been considerable amount of efforts by the modal analysis community to localize damage and evaluate its severity without looking at a reliable way to excite the structure. The detection of damages by modal analysis and similar vibration techniques depends upon the knowledge and estimation of various modal parameters. In addition to the associated difficulties, such low-frequency dynamic response based techniques fail to detect incipient damages. Smart piezoelectric ceramic (PZT) transducers which act as both actuators and sensors in a self-analyzing manner are emerging to be effective in non-parametric health monitoring of structural systems. In this paper, we present the results of an experimental study for the detection of damages using smart PZT transducers on the steel plate. The method of extracting the impedance characteristics of the PZT transducer, which is electro-mechanically coupled to the host structure, is adopted for damage detection. Two damages are simulated and assessed by the bonded PZT transducers for characterization. The experimental results verified the efficacy of the proposed approach and provided a demonstration of good robustness at the realistic steel structures, emphasizing the great potential for developing an automated in situ structural health monitoring system for application to large civil infrastructures without the need to blow the modal parameters.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.194-194
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• 2008

Lead oxide based ceramics, represented by PZT, are the most widely used materials for piezoelectric actuators, sensors, and transducers due to their excellent piezoelectric properties. In particular, high-performance multilayered piezoelectric ceramics for advanced electronic components have drawn great attention. In order to develop piezoelectric ceramics capable of being sintered at low temperature for multilayer piezoelectric device applications, the effect of CuO additions on the microstructures and electromechanical properties of the 0.4Pb$(Mg_{1/3}Nb_{2/3})O_3-0.25PbZrO_3-0.35PbTiO_3$ ceramics was investigated. The samples with CuO addition were synthesized by ordinary sintering technique. X-ray diffractions indicated that all samples formed a single phase perovskite structure. The addition of CuO improved the sinterability of the samples and caused an increase in the density and grain size at low temperature. The optimum sintering temperature was lowered by CuO additions. Excellent piezoelectric and electromechanical responses, $d_{33}$ ~ 663 pC/N, $k_p$ ~ 0.72, were obtained for the samples of high density with 0.1 wt% CuO addition sintered at $1050^{\circ}C$ for 4 h in air. These results show that the piezoelectric properties of PMNZT ceramics can be improved by controlling the microstructure and this system is potentially a good candidate as multilayer piezoelectric device for a wide range of electro-mechanical transducer applications.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1295-1302
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• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10b
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• pp.545-549
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• 1993

an alignment system in the X-and Y-directions an X-Y-.theta. stage driven by piezoelectric actuators is presented. A pair of quadruple gratings and a quadruple photo-detector are used. The difference between the two 0-th order moire signals in reflection with a relative spatial phase of 180.deg. is used in each direction to control the alignment of the X-Y-.theta. stage. The stage is aligned at the position where the difference is zero. The quadruple gratings are 10 mm * 10 mm, and of a binary square-type with a 1/2 duty cycle. Their pitches are 16 .mu.m. Alignment accuracy of .+-.20nm was obtained in this system.