• Title/Summary/Keyword: photonics

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A Study on Micro-Tip Fabrication by Plating and CMP (도금 및 CMP에 의한 Micro-Tip 제작 공정 연구)

  • Han, Myung-Soo;Park, Chang-Mo;Shin, Gwang-Soo;Ko, Hang-Ju;Kim, Doo-Gun;Hann, S-Wook;Kim, Seon-Hoon;Ki, Hyun-Chul;Kim, Hyo-Jin;Kim, Jang-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.152-152
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    • 2009

  • We investigate micro-tip properties as Ni-Co plating and CMP processes for MEMS probe card and units. The micro-tip are fabricated by using Ni-Co plating machine, lapping machine, and chemo-mechanical polisher. In order to get high conductive and reliable micro-tip, we control Co contents and thickness by CMP speed. We have found that about 20-25% of Co contents are required and have to lapping speed of 30 rpm. Also, we investigate photolithography and Ni-Co plating processes conditions for the one-step and the three-step micro-tips.

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PHOTONICS NEWS

  • Korea Association for Photonics Industry Development
    • Photonics industry news
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    • s.43
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    • pp.58-65
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    • 2007

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Photonics News

  • Korea Association for Photonics Industry Development
    • Photonics industry news
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    • s.38
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    • pp.50-59
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    • 2007

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