• Title/Summary/Keyword: photo-thermal cure resin

Search Result 1, Processing Time 0.014 seconds

Experiment and Numerical Study on Thermal Characteristics of UV-NIL Process Considering the Cure Kinetics of Photo-polymer (레진의 경화 반응을 고려한 UV-NIL공정의 열특성에 관한 실험 및 수치해석 연구)

  • Kim, Woo-Song;Park, Gyeong-Seo;Nam, Jin-Hyun;Yim, Hong-Jae;Jang, Si-Yeol;Lee, Kee-Sung;Jeong, Jay;Lim, Si-Hyeong;Shin, Dong-Hoon
    • Proceedings of the KSME Conference
    • /
    • 2008.11a
    • /
    • pp.1847-1850
    • /
    • 2008
  • The process conditions during ultraviolet nanoimprint lithography (UV-NIL) process such as temperature, stamping pressure, UV irradiation, etc. are effective factors for successful imprinting of complex and fine patterns. In this study, the effects of aluminum mold on the thermal characteristics of UV-NIL process were investigated through imprinting experiments and numerical simulations. The temperature of polymer resin on mold was measured to study thermal characteristics during UV curing. From the experimental and numerical results, the importance of curing reaction control for UV-NIL process was discussed for deformation characteristics.

  • PDF