• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.368-368
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• 2008

Ion implantation has been widely developed during the past decades to become a standard industrial tool. To comply with the growing needs in ion implantation, innovative technology for the control of ion beam parameters is required. Beam current, beam profile, ion fractions are of great interest when uniformity of the implant is an issue. Especially, it is important to measure the spatial distribution of beam power and also the energy distribution of accelerated ions. This energy distribution is influenced by the proportion of mass for ion in the plasma generator(ion source) and by charge exchange and dissociation within the accelerator structure and also by possible collective effects in the neutralizer which may affect the energy and divergence of ions. Hydrogen atom has been the object of a good study to investigate the energy distribution. Hydrogen ion sources typically produce multi-momentum beams consisting of atomic ion ($H^+$) and molecular ion ($H_2^+$ and $H_3^+$). In the beam injector, the molecular ions pass through a charge-exchanges gas cell and break up into atomic with one-half (from $H_2^+$) or one-third (from $H_3^+$) according to their accelerated energy. Burrell et al. have observed the Doppler shifted lines from incident $H^+$, $H_2^+$, and $H_3^+$ using a Doppler shift spectroscopy. Several authors have measured the proportion of mass for hydrogen ion and deuterium using an ion source equipped with a magnetic dipole filter. We developed an ion implanter with 50-KeV and 20-mA ion source and 100-keV accelerator tube, aiming at commercial uses. In order to measure the proportion of mass for ions, we designed a filter system which can be used to measure the ion fraction in any type of ion source. The hydrogen and helium ion species compositions are used a filter system with the two magnets configurations.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1999.10a
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• pp.56-56
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• 1999

For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.9
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• pp.832-838
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• 2011

The shock absorber with magnetic effect is suggested for a lunar lander. The shock absorber consists of a metal tube, a piston rod, and several permanent magnets moved by a piston rod in the tube, and the shock energy can be dispersed and dissipated by magnetic effects such as the magnetic force existed between a metal and magnets and the eddy current effect generated by a relative motion with a conductor and magnets. Besides, the shock-absorbing effect similar to that of a coil spring can be obtained by arranging the magnets in line, which are facing the same polar each other. The device has a very simple structure and is usable in space due to the unnecessariness of any oil or gas. The shock absorber was designed and manufactured for experiments and its spring and damping characteristics were studied by the theoretical, analytical and experimental methods.

• Journal of the Korean institute of surface engineering
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• v.40 no.3
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• pp.125-130
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• 2007

Many fundamental studies have been carried out regarding waste water and hazardous gas treatment technology using the photolysis effect of $TiO_2$. However, photolysis of both organic and organic-inorganic binders immobilizing $TiO_2$ makes permanent use impossible. In this study we manufactured a catalytic electrode by nickel-$TiO_2$ composite plating in order to immobilize $TiO_2$. The surface properties according to the current density changes of cathode and concentration changes of $TiO_2$ powder in nickel plating bath has been analysed with EDX, XRF, SEM, Raman spectrometer etc. The characterization of the catalytic electrode in decomposition of organic compound has been obtained by using UV-Visible spectrophotometer through analysing concentration changes of methyl orange solution containing the catalytic electrode vs. time with projecting UV-light in the solution. The study shows that a catalytic electrode of nickel-$TiO_2$ composite plating with high-efficiency in decompostion of organic compound has been formed under high concentration of $TiO_2$ powder and low current density of cathode.

• Journal of Ecology and Environment
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• v.30 no.2
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• pp.161-170
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• 2007

The ultimate target of restoring waste landfills is revegetation. The most effective method for increasing species richness and biomass in nutrient limited waste landfills is the use of fertilizers. The aim of the present study was to investigate the effects of nitrogen fertilizer, and the addition of carbon through sawdust, sucrose and litter, on vegetation dynamics at a representative municipal waste landfill in South Korea: Kyongseodong. A total of 288 permanent plots $(0.25m^2)$ were established and treated with nitrogen fertilizer (5, 10 and $20Ng/m^2$), sawdust $(289g/m^2)$ sucrose $(222g/m^2)$ and litter $(222g/m^2)$. The aboveground biomass was significantly enhanced by nitrogen fertilizer at 5 and $10Ng/m^2$, compared with the control plots. The total cover of all plant species increased significantly on plots treated with 5 and $20Ng/m^2$, as well as on those treated with sawdust and sucrose, compared with the control plots. The higher species richness after nitrogen fertilization of 10 to $20Ng/m^2$, and the sawdust and sucrose treatment demonstrated that this was an appropriate restoration option for nutrient deficient waste landfills. This study demonstrated positive nutrient impacts on plant biomass and species richness, despite the fact that municipal waste landfills are ecosystems that are highly disturbed by anthropogenic and internal factors (landfill gas and leachate). Adequate N and C combined treatments will accelerate species succession (higher species richness and perennial increase) for restoration of waste landfills.

• Journal of the Korean institute of surface engineering
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• v.42 no.4
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• pp.157-160
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• 2009

Many fundamental studies have been carried out regarding waste water and hazardous gas treatments technologies using the photolysis effect of $TiO_2$. However, a permanent use of $TiO_2$ particles immobilized using organic or organic-inorganic binders is impossible. In this study, Ni-$TiO_2$ composite coating was produced by electroless plating to trap $TiO_2$ particles in the Ni coating layer. The electroless plating was performed in the bath solutions with three different concentrations of $TiO_2$ particles : 10 g/l, 20 g/l, and 40 g/l. The surface and photolytic characteristics of the coating layer was investigated by the use of SEM, a scratch tester, and an UV-Visible spectrophotometer. The results showed that the amounts of immobilized $TiO_2$ particles and the photolytic rate of the coating increased with the initial content of $TiO_2$ particles in the electroless bath. In addition, the photolytic rate of the Ni-$TiO_2$ composite coating was remarkably promoted by etching process in 10% HCl solution.

• Tribology and Lubricants
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• v.35 no.4
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• pp.222-228
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• 2019

As rubber products such as O-rings, which are also known as packings or toric joints, come in regular, long term contact with liquid fuel, they can eventually swell, become mechanically weakened, and occasionally crack; this diminishes both their usefulness and intrinsic lifetime and could cause leaks during the steady-state flow condition of the fuel. In this study, we evaluate the lifetime of such products through compression set tests of FKM, a family of fluorocarbon elastomer materials defined by the ASTM international standard D141; these materials have great compression, sunlight, and ozone resistance as well as a low gas absorption rate. In this process, O-rings are immersed in the liquid fuel of airtight containers that can be expressed as a compression set, and the liquid fuel leakage in a flow rig tester at variable temperatures over 12 months is investigated. Using the Power Law model, our study determined a theoretical O-ring lifetime of 2,647 years, i.e. a semi-permanent lifespan, by confirming the absence of liquid fuel leakage around the O-ring assembled fittings. These results indicate that the FKM O-rings are significantly compatible for fuel tests to evaluate long-term sealing conditions.

• The Journal of the Korea institute of electronic communication sciences
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• v.17 no.3
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• pp.441-448
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• 2022

In the distribution system, there are multiple power protection systems such as circuit breakers at substations, and reclosers, minimum circuit ampacities, fault interrupters on distribution lines. They are widely used to prevent partial outages, cascading power failure or blackout so that other healthy systems could maintain the integrity in case of the instant fault or permanent failure on the power lines. However, when a fault happens, it could cause a major black out due to the lack of the protection cooperation between the protection relay of the circuit breaker at a substation and a protection system on the distribution lines. To achieve the power system integrity better, it is required to develop the circuit breaker which can be operational within 1 cycle(16ms). In this study, the high speed circuit breaker which is filled up with eco-friendly gas is developed. This equipment achieved an excellent test results based on IEC 62271-111 standard. It is respected that this equipment would contribute to prevent the wide area blackout by isolating a fault area quicker and faster.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.403-409
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• 1998

In this study, the effects of multi-dipole type of magnets on the characteristics of the inductively coupled plasmas and $SiO_2$ etch properties were investigated. As the magnets, 4 pairs of permanent magnets were used and, to etch $SiO_2, C_2F_6, CHF_3, C_4F_8, H_2$, and their combinations were used. The characteristics of the magnetized inductively coupled plasmas were investigated using a Langmuir probe and an optical emission spectrometer, and $SiO_2$ etch rates and the etch selectivity over photoresist were measured using a stylus profilometer. The use of multi-dipole magnets increased the uniformity of the ion density over the substrate location even though no significant increase of ion density was observed with the magnets. The use of the magnets also increased the electron temperature and radical densities while reducing the plasma potential. When $SiO_2$ was etched using the fluorocarbon gases, the significant increase of $SiO_2$ etch rates and also the increase of etch uniformity over the substrate were obtained using the magnets. In case of gas combinations with hydrogen, $C_4F_8/H_2$ showed the highest etch rates and etch selectivities over photoresist among the gas combinations with hydrogen used in the experiment. By optimizing process parameters at 1000 Watts of inductive power with the magnets, the highest $SiO_2$ etch rate of 8000 $\AA$/min could be obtained for 50% $C_4F_8/50% H_2$.

• Journal of the Society of Naval Architects of Korea
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• v.60 no.4
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• pp.278-287
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• 2023

This study aims to analyze and evaluate the structural strength of a 53ft Liquefied Natural Gas (LNG) tank container according to International Organization for Standardization (ISO) 1496-3, amidst growing global demand for LNG transportation. The research was conducted in two main stages: structural analysis using Finite Element Analysis (FEA) under various load conditions, and structural strength tests following ISO 1496-3 test procedures. The structural analysis was performed considering different loading conditions to assess the structural safety of the tank container. Calculated stresses were compared with allowable stress under specified load conditions. The structural strength tests were conducted at Mokpo National University's Subsea Umbilical cable Riser Flowline R&D Center, which provided a suitable testing environment. The study found that calculated stresses met the allowable stress under specified load conditions, confirming the structural safety of the tank container. Additionally, the maximum deformation and permanent deformation satisfied the design criteria for all test cases, indicating the container's structural strength meets requirements. The research also contributed valuable data for future structural strength tests of similar products and facilitated the development of safe and efficient LNG transportation solutions by developing effective test procedures in accordance with ISO 1496-3 standards.