• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.159-159
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• 2009

본 연구는 기판 바이어스 전압변화에 따른 DC 스퍼터링 TiN 박막의 우선 결정배향성, 표면조도, 평균결정립 크기 및 단면 미세구조에 미치는 영향에 대해 조사하였다.

• Journal of the Korean institute of surface engineering
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• v.21 no.1
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• pp.10-18
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• 1988

The variation of Composition and the microstructure of Zn-Ni alloy electrodespposits were investigated to the electrolysis conditions chloride bath. The codeposition mechanism is of the equilibrium type in the electrolysis condition of the high temperature(6$0^{\circ}C$)and high flow rate (1.2-3.0m/sec). The(411, 330) perferred orienation was mainly developed in the Zn-Ni electrodeposir with ${\gamma}$-phase structure, while the(422.600) orientation was closely related to the commposition and the structure of the alloy electrodeposit.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.10
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• pp.833-841
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• 1998

ZnO thin films on glass substrate were deposited by on RF mangetron reaction sputter with various grgon/oxygen gas ratios and sbustrate temperatures. Crystallinities, surface morphologies, chemical compositions, and electrical properties of the films were investigated by XRD, AFM, XPS, RBS, and electrometer(keithley 617). All films showed a strong perferred orientation along the x-axis on glass substrate, and the chemical stoichiometry of Zn/)=1/1.0 was obtained at Ar/$O_2$ =50/50. Surface roughness and resistivity depended on the argon/oxygen gas ratio. The minimum surface roughness of 20$\AA$ and maximum resistivity of $10^8$ $\Omega$ cm were achieved at Ar/$O_2$=10/90.

• Journal of the Korean institute of surface engineering
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• v.17 no.4
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• pp.106-119
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• 1984

Brass was electrodeposited over the range of the current densities from 2 to 8 A/$dm^2$ in cyanide bath at 20 and 40$^{\circ}C$. The cathode overpotential increased and the cathode efficiency was decreased respectively with decreasing temperature, increasing current density and addition of organic substance. The perferred orientation of the deposits were associated with the cathode overpotential and the nucleation energy of lattice planes. The (111) preferred orientation developed at the low current density and low cathode overpotential (440-520mV). On the other hand, the (111)+(100) preferred orientation developed at higher cathode overpotential (528-680mV). The (111)+(100) preferred orientation developed over the whole range of overpotential in the cyanide solution with organic additive. The copper content of deposit decreased with increasing current density and decreasing temperature. The morphology of the deposits with no additive was the polygonal body type of structure and the structure of the cross section was columnar structure. The morphology of the deposits with additive, on the other hand, was fine crystallite type of structure. And the structure of the cross section of them was the finer granular structure.

• Journal of the Korean Magnetics Society
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• v.12 no.1
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• pp.34-40
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• 2002

In order to improve the microstructure of the strip cast Nd-Fe-B alloys that are frequently used for production of high energy sintered magnets, influence of various strip casting conditions on the microstructure and phase formation and distribution were investigated. Nd-Fe-B strips consisting of microstructures suitable for preparation of high energy sintered magnets could be obtained when the wheel speed was below 5 m/s. The compositional limit that can avoid the crystallization of free iron in the as-cast state was estimated to be Nd$\_$14/Fe$\_$79/B$\_$7/. Regardless of the compositional variation, <001> preferred orientation of Nd$_2$Fe$\_$14/B normal to the strip surface was always occurred below 5 m/s, which would eventually enhance the grain alignment during pressing the powder under a magnetic field. While the coercivity of the strip cast alloys increased with the increase of the wheel speed, mainly due to the refinement of Nd$_2$Fe$\_$14/B grains, it decreased with the reduction of Nd content in the alloy composition as the formation of free iron increased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.58-62
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• 2002

Pb($Zr_{0.52}Ti_{0.48}$)$O_3$ (PZT) thin films deposited on the Pt/Ti and Ru/$RuO_2$ bottom electrode by rf magnetron sputtering methode. Ru/$RuO_2$ bottom electrode deposited on the p-type wafer as Ru thickness by in-situ process. Our results show that all PZT films indicated perovskite polycrystalline structure with perferred orientation (110) and no pyrochlore phase is observed. A well-fabricated $RuO_2$/PZT/Ru(100nm)/$RUO_2$ capacitor showed a leakage current density in the order of $2.13{\times}10^{-7}A/cm^2$ as 100 kV/cm, a remanent polarization of 7.20 ${\mu}C/cm^2$, and a coercive field of 58.37 kV/cm. The results show that the new Ru/$RuO_2$ bottom electrodes are expected to reduce the degradation ferroelectric fatigue and excellent ferroelectric properties.