• Title/Summary/Keyword: pattern shape

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Collision Behavior of Molten Metal Droplet by Laser Beam (레이저 빔에 의해 생성된 금속액적의 충돌거동)

  • 김용욱;양영수
    • Laser Solutions
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    • v.6 no.1
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    • pp.1-8
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    • 2003

  • A molten metal droplets are deposited onto solid substrate for solid freeform fabrication, Collision dynamic and substrate heat transfer associated with solidification determine the final shape of molten metal droplets. In this study, the experimental model, based on the variational condition with substrate temperature and falling height, was produced reliable optimal data of droplet pattern.

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The Effect of Mechanical Properties of Polishing Pads on Oxide CMP ( Chemical Mechanical Planarization )

  • Hong, Yi-Koan;Eom, Dae-Hong;Kang, Young-Jae;Park, Jin-Goo;Kim, Jae-Suk;Kim, Geon;Lee, Ju-Yeol;Park, In-Ha
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.445-446
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    • 2002

  • The purpose of this study was to investigate the effect of micro holes, pattern structure and elastic modulus of pads on the polishing behavior such as the removal rate and WIWNU (within wafer non-uniformity) during CMP. The regular holes on the pad act as the superior abrasive particle's reservoir and regular distributor at the bulk pad, respectively. The superior CMP performance was observed at the laser processed bulk pad with holes. Also, th ε groove pattern shape was very important for the effective polishing. Wave grooved pad showed higher removal rates than K-grooved pad. The removal rate was linearly increased as the top pad's elastic modulus increased.

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