• Journal of Industrial Technology
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• v.21 no.B
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• pp.149-153
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• 2001

A study on the particle growth in $TEOS/O_2$ plasma was performed, and particle size and its distribution was measured by the electrical aerosol analyzer (EAA), light scattering particle size analyzer and the particle size was also determined by SEM. The effects of process variables such as total gas flow rate, reactor pressure, supplied power and initial reactant concentration on the particle growth were investigated. From the EAA results, the particle size distribution is divided into three groups of the cluster size and the small and large size particles. The particle size distribution measured by the light scattering particle size analyzer becomes bimodal, because the cluster size particles smaller than 20 nm in diameter cannot be detected by the light scattering particle size analyzer. The size of particles measured by the light scattering particle size analyzer is in good agreements with those by the SEM. Also we could understand that the particle formation is very sensitive to the changes of reactor pressure and reactant concentration. As the total gas flow rate increases, the particle size decreases because of the shorter residence time. As the reactor pressure, or the reactant concentration increases, the particle concentration increases and the particles grow more quickly by the faster coagulation between particles.

• Journal of Industrial Technology
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• v.26 no.B
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• pp.173-181
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• 2006

We analyzed systematically particle growth in the pulsed $SiH_4$ plasmas by a numerical method and investigated the effects of pulse modulations (pulse frequencies, duty ratios) on the particle growth. We considered effects of particle charging on the particle growth by coagulation during plasma-on. During plasma-on ($t_{on}$), the particle size distribution in plasma reactor becomes bimodal (small sized and large sized particles groups). During plasma-off ($t_{off}$), there is a single mode of large sized particles which is widely dispersed in the particle size distribution. During plasma on, the large sized particles grows more quickly by fast coagulation between small and large sized particles than during plasma-off. As the pulse frequency decreases, or as the duty ratio increases, $t_{on}$ increases and the large sized particles grow faster. On the basis of these results, the pulsed plasma process can be a good method to suppress efficiently the generation and growth of particles in $SiH_4$ PCVD process. This systematical analysis can be applied to design a pulsed plasma process for the preparation of high quality thin films.

• Journal of Industrial Technology
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• v.23 no.A
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• pp.175-179
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• 2003

A study on the particle growth in $TEOS/O_2$ plasma was performed by observing the particle size and its morphology by TEM. The qualitative chemical analysis of particles was also determined by the EDS (Energy Dispersive X-Ray Spectrometer). The effects of process variables such as the plasma on-time and bubbler temperature on the particle growth were investigated. The particle size becomes larger as the plasma on-time because of the longer coagulation, and also as the bubbler temperature increases because of the faster coagulation between particles.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.275-281
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• 2001

We used the discrete-sectional model to analyze the particle growth by coagulation of particles in silane plasma reactor, considering the Gaussian distribution function for particle charges. The effects of process conditions such as monomer size and mass generation rate of monomers on particle growth in plasma reactor were analyzed theoretically/ Based on the Gaussian distribution function of particle charges, the large particles of more than 40 nm in size are almost found to be charged negatively, but some fractions of small, tiny particles are in neutral state or even charged positively. As the particle size and surface area increase with time by particle coagulation, the number of charges per particle increases with time. As the large particles are generated by particle coagulation, the particle size distribution become bimodal. The results of discrete-sectional model for the particle growth in silane plasma reactor were in close agreement with the experimental results by Shiratani et al. [3] for the same plasma conditions. We believe the model equations for the particle charge distribution and coagulation between particles can be applied to understand the nano-sized particle growth in plasma reactor.

• KEPCO Journal on Electric Power and Energy
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• v.8 no.2
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• pp.103-110
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• 2022

Ultrafine Particle number and size distributions were simultaneously measured at rural area around the power plant in Dangjin, South Korea. New Particle formation and growth events were frequently observed during January, 2021 and classified based on their strength and persistence as well as the variation in geometric mean diameter(GMD) on January 12, 21 and 17. In this study, we investigated mechanisms of new particle growth based on measurements using a high resolution time of flight aerosol mass spectrometer(HR-ToF-AMS) and a scanning mobility particle sizer(SMPS). On Event days(Jan 12 and 21), the total average growth rate was found to be 8.46 nm/h~24.76 nm/hr. These growth rate are comparable to those reported for other urban and rural sites in South Korea using different method. Comparing to the Non-Event day(Jan 17), New Particle Growth mostly occurred when solar radiation is peaked and relative humidity is low in daytime, moreover enhanced under the condition of higher precusors, NO₂ (39.9 vs 6.2ppb), VOCs(129.5 vs 84.6ppb), NH₃(11 vs 4.7ppb). The HR-ToF-AMS PM_1.0 composition shows Organic and Ammoniated nitrate were dominant species effected by emission source in domestic. On the other hand, The Fraction of Ammoniated sulfate was calculated to be approximately 16% and 31% when air quality is inflow from China. Longer term studies are needed to help resolve the relative contributions of each precusor species on new particle growth characteristics.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1997.10a
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• pp.13-19
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• 1997

From the formation of the monodispersed silica particle which is a valuable for the industry by Sol-Gel process, the effects of the parameters participated in the process, the growth mechanism and the characteristics of silica particles for each rection conditions are investigated. To investigate about the formation of final silica particles, the suspension which performs the polymerization is reacted with molybdic acid, and the evolutions of TEOS and silica particle size are investigated in the reaction time ？ 새 the characteristics of molybdic acid with the suspension. From the results, a constant number of silica particle is formed at early reaction stage. Silica particles grow through the aggregation of smaller particles and nucleation is rate-limiting step for the growth of particles. In the conditions of this study, spherical silica particles are formed, [NH$_3$] and [$H_2O$] concentration increase the particle size but particle size decrease with [$H_2O$] concentration which is a certain above region. Average particle sizes are 187.4~483.3 nm and standard deviations in the average particle size are 1.7~2.9% with each experimental condition. From the BET results, specific surface area is 5.5~23.4 $m^2$/g and these values decrease with increase size. The average pore size is 50~70$\AA$.

• Environmental Engineering Research
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• v.21 no.4
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• pp.365-372
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• 2016

The effects of hydrodynamics and alum dose on particle growth were investigated by monitoring particle counts in a rapid mixing process. Experiments were performed to measure the particle growth and breakup under various conditions. The rapid mixing scheme consisted of the following operating parameters: Velocity gradient (G) ($200-300s^{-1}$), alum dose (10-50 mg/L) and mixing time (30-180 s). The Poisson regression model was applied to assess the effects of the doses and velocity gradient with mixing time. The mechanism for the growth and breakup of particles was elucidated. An increase in alum dose was found to accelerate the particle count reduction. The particle count at a G value of $200s^{-1}$ decreased more rapidly than those at $300s^{-1}$. The growth and breakup of larger particles were more clearly observed at higher alum doses. Variations of particles due to aggregation and breakup of micro-flocs in rapid mixing step were interactively affected by G, mixing time and alum dose. Micro-flocculation played an important role in a rapid mixing process.

• Journal of the Korean Ceramic Society
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• v.32 no.2
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• pp.147-154
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• 1995

Abnormal grain growth behavior of BaTiO3 ceramics with controlling of particle size distribution of calcined powder was investigated. The particle size distribution was controlled by changing the calcining temperature or by using of classification and regrinding process. With broadening of the normallized size distribution in calcined powder, it showeda normal grain growth behavior in sintered body due to an increase of volume fraction of seed grain in the calcined powder. It was supposed that the seed grains could easily contact each other for the rapid grain growth during sintering process and resulted in fast switching-over from abnormal to normal grain growth stage.

• Journal of the Korean Society of Visualization
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• v.20 no.2
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• pp.63-69
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• 2022

In this study, we numerically simulate the condensational growth of micron-sized particles traveling through a pipe filled with humidified air. Using the finite volume method and Lagrangian particle tracking technique, the mixture of particle-laden flow with moist air in a T-juction pipe is simulated. The condensational growth of particles is calculated by considering the mass transfer of vapor in the air onto the particle surface. The results indicate that the growth rate of the particles increases as the relative humidity of air is higher. Furthermore, the placement of a porous media with low permeability in the pipe could enhance the degree of condensational growth.

• International Journal of Korean Welding Society
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• v.2 no.1
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• pp.25-28
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• 2002

In the coarse grain HAZ adjacent to the fusion line, most of the TiN particles in conventional Ti added steel are dissolved and austenite grain growth is easily occurred during welding process. To avoid this difficulty, thermal stability of TiN particle is improved by increasing the nitrogen content in steel. In this study, the effect of hlgh nitrogen TiN particle on preventing austenite grain growth in HAZ was investigated. Increased thermal stability of TiN particle is helpful for preventing the austenite grain growth by pinning effect. High nitrogen TiN particle in simulated HAZ were not dissolved even at high temperature such as 1400'E and prevented the austenite grain growth in simulated HAZ. Owing to small austenite grain size in HAZ the width of coarse grain HAZ in high nitrogen TiN steel was decreased to 1/10 of conventional TiN steel. Even high heat input welding, the microstructure of coarse grain HAZ consisted of fine polygonal ferrite and pearlite and toughness of coarse grain HAZ was significantly improved.