• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.319-319
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• 2013

Even though the fabrication methods of metal oxide based thin film capacitor have been well established such as RF sputtering, Sol-gel, metal organic chemical vapor deposition (MOCVD), ion beam assisted deposition (IBAD) and pulsed laser deposition (PLD), an applicable capacitor of printed circuit board (PCB) has not realized yet by these methods. Barium Strontium Titanate (BST) and other high-k ceramic oxides are important materials used in integrated passive devices, multi-chip modules (MCM), high-density interconnect, and chip-scale packaging. Thin film multi-layer technology is strongly demanded for having high capacitance (120 nF/$mm^2$). In this study, we suggest novel multi-layer thin film capacitor design and fabrication technology utilized by plasma assisted deposition and photolithography processes. Ba0.6Sr0.4TiO3 (BST) was used for the dielectric material since it has high dielectric constant and low dielectric loss. 5-layered BST and Pt thin films with multi-layer sandwich structures were formed on Pt/Ti/$SiO_2$/Si substrate by RF-magnetron sputtering and DC-sputtering. Pt electrodes and BST layers were patterned to reveal internal electrodes by photolithography. SiO2 passivation layer was deposited by plasma-enhanced chemical vapor deposition (PE-CVD). The passivation layer plays an important role to prevent short connection between the electrodes. It was patterned to create holes for the connection between internal electrodes and external electrodes by reactive-ion etching (RIE). External contact pads were formed by Pt electrodes. The microstructure and dielectric characteristics of the capacitors were investigated by scanning electron microscopy (SEM) and impedance analyzer, respectively. In conclusion, the 0402 sized thin film multi-layer capacitors have been demonstrated, which have capacitance of 10 nF. They are expected to be used for decoupling purpose and have been fabricated with high yield.

• 한국자동차공학회논문집
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• 제21권6호
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• pp.183-194
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• 2013

Liquid urea based SCR has been used in the market to reduce NOx in the exhaust emission of the diesel engine vehicle. This system has several problems at low temperature, which are freezing below $-12^{\circ}C$, solid deposit formation in the exhaust, and difficulties in dosing system at exhaust temperature below $200^{\circ}C$. Also, it is required complicated exhaust packaging equipment and mixer due to supply uniform ammonia concentration. In order to solve these issues, solid urea, ammonium carbonate, and ammonium carbamate are selected as ammonia sources for the application of solid SCR. In this paper, basic research on reaction rate of three ammonia-transporting materials was performed. TGA (Thermogravimetric Analysis) and DTA (Differential Thermal Analysis) tests for these materials are carried out for various heating conditions. From the results, chemical kinetic parameters such as activation energy and frequency factor are obtained from the Arrhenius plot. Additionally, from test results of DSC (Differential Scanning Calorimeter) for these materials, chemical kinetic parameters using the Kissinger method are calculated. Activation energies of solid SCR from this experiment are compared with proper data of literature study, then obtained data of this experiment are used for the design of reactor and dosing system for candidate vehicle.

• 한국산학기술학회논문지
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• 제11권4호
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• pp.1210-1215
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• 2010

프로브 카드는 반도체 제조 공정 전에 반도체 소자 및 필름의 기능과 성능을 검사하기 위한 테스트 장비이다. 반도체 산업의 급속한 기술 발전과 반도체 소자의 고집적화로 인하여 반도체 소자의 패드 간격과 패드의 수가 증가하고 있다. 따라서 반도체 소자의 크기 및 배열의 형태가 계속 축소됨에 따라 미세 피치를 갖고 검사용 핀의 수가 많은 프로브 카드가 필요하다. 본 논문에서는 수직형 프로브 카드의 적용을 위하여 MEMS 기술을 이용한 프로브 팁을 개발하였다. 프로브 팁의 설계를 위해서 유한요소해석을 이용하여 프로브 팁의 구조 및 기계적 특성에 대한 구조설계를 수행하였다. 또한 구조 설계를 적용한 프로브 팁을 제작하여 유한요소해석의 결과와 실제 시험을 통한 접촉력의 평가를 수행하였다. 이에 따라 피치 간격이 약 $50{\mu}m$이하의 프로브 카드를 제작하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.3.1-3.1
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• 2011

Over the past decade, the major efforts for lowering the cost of electronics has been devoted to increasing the packaging efficiency of the integrated circuits (ICs), which is defined by the ratio of all devices on system-level board compared to the area of the board, and to working on a larger but cheaper substrates. Especially, in flexible electronics, the latter has been the favorable way along with using novel nanomaterials that have excellent mechanical flexibility and electrical properties as active channel materials and conductive films. Here, the tool for achieving large area patterning is by printing methods. Although diverse printing methods have been investigated to produce highly-aligned structures of the nanomaterials with desired patterns, many require laborious processes that need to be further optimized for practical applications, showing a clear limit to the design of the nanomaterial patterns in a large scale assembly. Here, we demonstrate the alignment of highly ordered and dense silicon (Si) NW arrays to anisotropically etched micro-engraved structures using a simple evaporation process. During evaporation, entropic attraction combined with the internal flow of the NW solution induced the alignment of NWs at the corners of pre-defined structures. The assembly characteristics of the NWs were highly dependent on the polarity of the NW solutions. After complete evaporation, the aligned NW arrays were subsequently transferred onto a flexible substrate with 95% selectivity using a direct gravure printing technique. As proof-of-concept, flexible back-gated NW field effect transistors (FETs) were fabricated. The fabricated FETs had an effective hole mobility of 0.17 $cm2/V{\cdot}s$ and an on/off ratio of ${\sim}1.4{\times}104$. These results demonstrate that our NW gravure printing technique is a simple and effective method that can be used to fabricate high-performance flexible electronics based on inorganic materials.

• 대한전자공학회논문지TE
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• 제42권3호
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• pp.45-50
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• 2005

산업용, 의학용 및 군사용, 환경감시용 등 다양한 분야에서 UV 카메라가 이용되고 있다. 높은 분해능과 고효율을 가진 GaN 계열의 III-V족 질화물 반도체를 이용하여 제작한 UV 센서인 포토다이오드로 부터 최적의 자외선 응답을 읽어낼 수 있는 ROIC(ReadOut IC)를 개발 했다. FPA(Focal Plane Array)용 UV $8{\times}8$ ReadOut IC(ROIC)를 설계를 위하여 포토다이오드 타입 센서 소자를 커패시터로 모델링하였다. ROIC는 검출되는 신호를 받아 이를 증폭하고 잡음제거 필터링을 거쳐 픽셀 단위로 순차적으로 출력하는 기능을 수행하도록 하였다. ROIC는 $0.5{\mu}m$ 2Poly, 3Metal N-well CMOS process를 이용하여 제작되었으며, 이방성 전도성 페이스트 (Anisotropic Conductive Paste:ACP)를 사용하는 gold stud bumping 공정으로 ROIC와 포토다이오드 어레이를 하이브리드 패키지 (package)한 후 PC에서 자외선 영상으로 확인함으로써 ROIC의 동작을 검증하였다.

• 전자공학회논문지
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• 제51권3호
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• pp.45-54
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• 2014

전류제한 에피 구조를 적용하여 MINT에서 개발한 최적화된 공정방법으로 InP Gunn 다이오드 칩을 제작하고 칩을 이용하여 MINT의 최적화된 조건을 이용하여 패키지 하였다. 또한 제작된 패키지 InP Gunn 다이오드의 RF 특성을 측정하기 위하여 2체배 구조의 W-band 도파관 FTO(Fixed Tuned Oscillator)를 설계 및 제작하였다. 패키지된 InP Gunn 다이오드는 ceramic ring, Au plating stud와 lid 그리고 Maltese cross로 구성되어있다. 측정된 20개의 InP Gunn 다이오드는 최대 전류가 399 mA의 전류특성을 가지고 92.9~94.78 GHz에서 발진하였고 11.8~17.8 dBm 의 출력전력을 얻었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.1051-1054
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• 2000

We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the $O_2$ RIE (reactive ion etching) patterned Parylene thin film to be about 5~10 microns in thickness on the silicon wafer. The dimension of the rectangular nozzle is 0.2＊0.2 $\textrm{mm}^2$ and the membrane 0.45 mm in diameter. The bridge width is designed variously from 0.04 mm to 0.12 mm to control the valve characteristics. To protect the membrane and bridge in the CSF flow, we developed the packaging system for the CSF micro shunt valve with the deep RIE of the silicon wafer. Using this package, we can control the gap size between the membrane and the nozzle, and protect the bridge not to be broken in the flow. The total dimension of the assembled system is 2.5＊2.5 $\textrm{mm}^2$ in square, 0.8 mm in height. We could precisely control the burst pressure and low rate of the valve varing the design parameters, and develop the whole CSF shunt system using this polymer MEMS fabricated CSF shunt valve.

• 한국융합학회논문지
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• 제9권10호
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• pp.257-263
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• 2018

본 연구는 트랜스미션에 들어가는 부품인 차동기어에 대한 자동 검사 장비를 개발하고자 하는 것이다. 본 기술개발은 Micro Vision 자동 검사 장비와 마이크로레이저 자동 검사 장비를 사용하여 만들 것이다. 이는 작업자가 부주의하게 가공한 제품을 전수검사 단계에서 불량률 0를 만들고자 한다. 본 연구를 통해 개발된 장비를 여러 분야 사업에 적용할 것이다. 포장회사, 너트 볼트 가공업체, 정밀 반도체 상단에 인쇄를 위한 업체, SMT 업체 등 다양한 분야에 비전검사 장비를 판매하고자 한다. 본 기술개발을 통해 불량률 0를 실현하면 모기업으로부터 안정적 물량 확보, 나아가 제품 신뢰도를 바탕으로 수출을 할 수 있는 기반마련의 기회도 가능하다. 자동검사시스템을 국내 자동차 부품 가공업체에 적용할 경우 우리나라 자동차의 신뢰도 또한 크게 상승 할 것으로 생각된다.

• Preventive Nutrition and Food Science
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• 제11권4호
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• pp.348-357
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• 2006

Nano is a unit that designates a billionth; accordingly nanotechnology could be described as the study and applications of the unique characteristics and phenomena of nanometer size materials. Applications of nanotechnology fall into two categories (one is top-down and the other is bottom-up). Currently, most products are the results of the top-down approach. Nanofoods have distinct functional characteristics stemming from the size, mass, chemical combinations, electrolytic features, magnetic properties of food sources at the nano level and which can be applied for safe absorption and delivery into the body. The greatest advantage of nanofood is that it permits the efficient use of small quantities of nutritional elements by increasing digestive absorption ability and by delivering natural elements without any change in their original characteristics. On the other hand, there are still unsolved problems, such as questions about safety and introduction of harmful material. The demand for new commercial food products is increasing, and commercial food producers are gradually combining nanotechnology and traditional food preparation methods. Nanofoods will improve our eating habits remarkably in the future. Tomorrow we will design nanofoods by shaping molecules and atoms. It will have a big impact on the food and food-processing industries. The future belongs to new products and new processes with the goals of customizing and personalizing consumer products. Nanotechnology is expected to be applied to not only foods themselves, but also to food packaging, production, safety, processing and storage. Also, it is believed that nanotechnology will be applied tracking finished products back to production facilities and even to specific processing equipment in those facilities. The aim of this study is the introduction of technology, applications, products, markets, R&D, and perspectives of nanofoods in the food industry.

• Human Ecology Research
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• 제55권6호
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• pp.593-607
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• 2017

Cosmetics market information is important due to advances in information communication technology and the growth of cosmetics market. This study analyzed the relationship between the pre-purchase utilization of information (commercial, neutral, personal and experiential) and the post-purchase satisfaction of skin care cosmetics, categorized as functionality, safety, economic feasibility, information reliability, purchase convenience, condition of purchase place, packaging/design of product and service. This study analyzed reliability, frequency, differences, correlation and regression analysis using SPSS ver. 24.0. The study results are summarized as follows. First, gender was a significant variable in the level of information source utilization. Women used commercial, neutral, and experiential information sources more actively than men. However, women had lower post-purchase satisfaction that could be understood through expectation disconfirmation theory. Women have very high expectations that can lower post-purchase satisfaction. Second, information source utilization can improve post-purchase satisfaction for cosmetics. The consumer post-purchase satisfact the lowest in the commercial information source; however, consumers were satisfied when the commercial informationinformation sourceenon and regre. Third, the consumeried itnformation sourceenon and regression analysis ial, neutral,source and reflected the characteristics of experiential goods. Therefore, companies should provide accurate commercial, personal and experiential information to increase consumervide accurate commercial, per as well as conduct experiential marketing.