• 한국진공학회지
• /
• 제8권4A호
• /
• pp.482-489
• /
• 1999

AC PDP(P1asma Display Pane1)s use the mixture of inert gases to generate a discharge inside the display pixels. Impurities such as CO, $CO_2$ and OH inside discharge region may deteriorate the characteristics of PDP operation during long life time of PDP. Electro-negative gas such as CO can cause the sustain pulse amplitude to rise by attaching electrons which will play an important role in the earlier stage of the discharge. MgO film is used to protect the dielectric layer in AC PDP, and is in contact with the free space of display pixel where it is filled with the inert gas mixture. So, MgO film can be a main source of impurities. In this experiment, we observed the change of impurity generation of various MgO films which were deposited by different methods, by using QMS. (quadropole mass spectrometer) The main impurites were $H_2$, CO and $CO_2$. And with the comparison of the TPD (temperature programmed desorption) result, it can be understood that impurity gases are generated by sputtering of MgO surface not by outgassing. Deposition method had effects on the characteristics of the impurity generation. The MgO film manufactured by e-beam evaporation generated more amount of impurity gases than the MgO films manufactured by sputtering or ion-plating. And also heat treatment of MgO film after deposition decreased the magnitude of impurity gas generation.

• 조명전기설비학회논문지
• /
• 제15권6호
• /
• pp.1-7
• /
• 2001

플라즈마 디스플레이의 구동원리를 해석하기 위하여 공간전하가 방전특성에 미치는 영향을 연구하였다. 프라이밍(priming) 방전에 의해 발생된 공간전하는 다음 방전의 방전지연시간을 단축시켜 응답속도를 빠르게 한다. 이러한 영향은 프라이밍 방전 이후 30[$\mu\textrm{s}$] 정도까지 유효하다. 이 공간전하는 프라이밍 셀 인근의 방전개시전압 을 저하시키고 바로 옆의 셀의 방전에 가장 크게 그 영향을 미친다. 그리고 방전 펄스 폭이 좁을수록 방전개시전압 강하 폭이 커지므로 공간전하에 대한 의존도가 강하다. 그러나 펄스 폭 1[$\mu\textrm{s}$] 이상에서는 공간전하에 대한 영향이 매우 미약하게 관측되었다. 그러므로 인접한 방전의 공간전하에 대해 영향을 받지 않고 안정적인 방전이 일어나기 위해서 최소한 펄스 폭이 1[$\mu\textrm{s}$] 이상 되어야 함을 알았다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
• /
• pp.117-120
• /
• 1998

In this study, $Al_2O_3/MgO$ bilayer was prepared with Electron-beam evaporation and the properties of the film was investigated in order to improve the property of MgO film, which is used for the protection layer in PDP(P1asma Display Panel). The thickness of $Al_2O_3/MgO$ bilayer was optimized by the Matrix Theory for the fabrication of antireflection structure for 5350A wavelength. The secondary electron emission yields of as-deposited film and annealed film were measured and compared, the bilayer was considered for the applicability as PDP. XRD showed the strong (200) primary peak of MgO. The intensity of (200) peak in the film annealed at 300C was decreased. As the result of SEM analysis for MgO films and Alz03 films, it is considered that the morphology of the films were improved of roughness and it were condensed by annealing.