• 제목/요약/키워드: oxygen diffusion

검색결과 511건 처리시간 0.023초

Czochralski 법으로 성장시킨 실리콘 단결정 Wafer에서의 Gettering에 관한 연구 (A Study on the Gettering in Czochralski-grown Single Crystal Silicon Wafer)

  • 양두영;김창은;한수갑;이희국
    • 한국세라믹학회지
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    • 제29권4호
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    • pp.273-282
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    • 1992
  • The effects of intrinsic and extrinsic gettering on the formation of microdefects in the wafer and on the electrical performance at near-surfaces of three different oxygen-bearing Czochralski silicon single crystal wafers were investigated by varying the combinations of the pre-heat treatments and the phosphorus diffusion through the back-surface of the wafers. The wafers which had less than 10.9 ppma of oxygen formed no gettering zones irrespective of any pre-heat treatments, while the wafers which had more than 14.1 ppma of oxygen and were treated by Low+High pre-heat treatments generated the gettering zone comprising oxygen precipitates, staking faults, and dislocation loops. The effects of extrinsic gettering by phosphorus diffusion were evident in all samples such that the minority carrier lifetimes were increased and junction leakage currents were decreased. However, the total gettering effects among the different pre-heat treatments did not necessarily correspond to the gettering structure revealed by synchrotron radiation section topograph.

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메탄/산소 난류 확산화염의 연소 특성에 관한 연구 (A Study on Combustion Characteristics of Turbulent Methane/Oxygen Diffusion Flames)

  • 이상민;김호근;김한석;안국영
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2004년도 제28회 KOSCO SYMPOSIUM 논문집
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    • pp.118-123
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    • 2004
  • The combustion characteristics of 0.03MW turbulent methane/oxygen diffusion flames have been investigated to give basic informations for designing industrial oxyfuel combustors. NOx reduction has become one of the most determining factors in the combustor design since 3-5% nitrogen is intrinsically included from the current oxygen producing processes. Flame lengths and NOx concentrations were measured by varying flow velocities with and without installing quarls. Flame stabilities are significantly enhanced by oxyfuel combustion in contrast to air-fuel combustion. Flame length decreases with increasing fuel or oxygen velocity because of the enhancement of turbulent mixing. NOx concentration was reduced with increasing flo velocities. This can be attributed to the entrainment of inert product gases into flame decreasing flame temperature. The installation of quarl on the burners rather increased NOx concentration since the quarl blocked the entrainment above the nozzles.

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고집적회로에서 TiN/Ti Diffusion Barrier의 열처리에 따른 계면반응 및 구조변화에 대한 연구

  • 유성용;최진석;백수현;오재응
    • ETRI Journal
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    • 제13권4호
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    • pp.58-69
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    • 1991
  • 고집적회로에서 A1 금속공정의 diffusion barrier로 널리 사용되는 titanium nitride의 성질을 조사하였다. 실제 회로 구조의 열적 안정성을 관찰하기 위하여 준비된 TiN/Ti다층 barrier를 $600^{\circ}C$까지 열처리하여 x-ray photoelectron spectroscopy (XPS), cross-sectional transmission electron microscopy(XTEM) 등으로 분석하였다. 열처리 온도가 증가됨에 따라 oxygen은 TiN 층의 표면과 pure-Ti 층에 pile up 된다. TiN 층의 표면에서는 $600^{\circ}C$열처리시 TiN이 분해되어 완전히 $TiO_2$가 형성되며, TiN 층 내에서는 oxygen 함량은 열처리 온도의 증가에 따라 커지고 이때 형성되는 Ti-oxide는 $TiO_2$ 보다 TiO, $Ti_2$$O_3$ 상태로 존재하게 된다. Pure-Ti 층은 열처리시 두개의 층으로 나누어 지는 데, 표면에서 침투하는 oxygen과 pure-Ti이 반응하여 Ti-oxide 층이 생기며 실리콘 기판과의 반응으로 Ti-silicide를 형성한다. $600^{\circ}C$에서 모든 Ti 층이 반응으로 소모되고 열적 stress, Ti-silicide의 grain growth, oxygen의 침입으로 TiN 층에 blistering이 발생한다.

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SiC의 산화반응 기구 (Oxidation Mechanism of SiC)

  • 최태운;이홍림
    • 한국세라믹학회지
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    • 제18권2호
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    • pp.79-82
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    • 1981
  • SiC powder was heated in air over the temperature range of 1100-135$0^{\circ}C$. $\beta$-cristobalite was formed to cover the surfaces of SiC particles by the reaction: $SiC(s)+20_2(g)=SiO_2(s)+CO_2(g)$. It is assumed that the diffusion of oxygen ion through the formed surface layer of $\beta$-cristobalite controls the oxidation of the SiC particles. The diffusion coefficient of oxygen ion through the $\beta$-cristobalite layer was obtained as the following equation: $D=3.84{\times}10^{-17}$exp(-14.7/RT)

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확산한계전류밀도 고찰에 의한 방청도료의 내식성평가 (Evaluation of Corrosion Resistance of Anti-Corrosive Paint by Investigation of Diffusion Limiting Current Density)

  • 문경만;김윤해;이명훈;이인원;박현;전호환
    • 한국해양공학회지
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    • 제23권4호
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    • pp.64-68
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    • 2009
  • It has been observed that coated steel structures deteriorate more rapidly than the designed lifetime due to acid rain caused by air pollution, etc. Therefore, improving the corrosion resistance of anti-corrosive paint is very important in terms of safety and the economic point of view. In this study, the corrosion resistance of five kinds of anti-corrosive paints, including the Acryl, Fluorine, and Epoxy resin series, were investigated with electrochemical methods, such as corrosion potential measurements, polarization curves, diffusion limiting current density, etc. As a result, the corrosion resistance of the F101 specimen with the fluorine resin series was found to be superior to the other specimens, while E100 with the epoxy resin series also showed a somewhat good corrosion resistance. Furthermore, it was observed that the amount of water and oxygen entering the inner side of a painted film increased with an increase in immersion time, irrespective of the kind of resin series. However, the oxygen diffusion limiting current density of a specimen with good corrosion resistance was relatively decreased compared to other specimens, because of the difficulty of oxygen diffusion penetrating to the inner side of the film. Consequently it is suggested that we can qualitatively evaluate the corrosion resistance of an anti-corrosive paint by measuring the diffusion limiting current density as an electrochemical method.

중온형 고체산화물 연료전지를 위한 YSZ 전해질에서의 고성능 공기극 연구 (Study on high performance cathode on YSZ electrolyte for intermediate-temperature solid oxide fuel cells(IT-SOFC))

  • 이창보;배중면
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2006년도 추계학술대회
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    • pp.368-371
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    • 2006
  • [ $La_{0.8}Sr_{0.2}Co_{1-x}Mn_xO_3$ ] cathode as a high performance cathode on YSZ electrolyte was studied by analyzing impedance spectra. It was shown that cathode property of $La_{0.8}Sr_{0.2}Co_{1-x}Mn_xO_3$ is bet ter than that of$La_{0.8}Sr_{0.2}CoO_3$. At $700^{\circ}C$ in air environment, $La_{0.8}Sr_{0.2}Co_{0.4}Mn_{0.6}O_3$ cathode on CGO- layered YSZ electrolyte showed very low area specific resistance of $0.14{\Omega}cm^2$, which is low enough for intermediate-temperature sol id oxide fuel cells. This is because material properties of ionic conductivity and thermal expansion compatibility with electrolyte were optimized. Judging from activation energy and oxygen part i al pressure dependance of cathode property, it was noted that oxygen surface exchange kinetics is dominantly influential on cathode property in higher temperature region than $700^{\circ}C$ and oxygen self-diffusion in cathode material is more influential in lower temperature region.

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콘택트렌즈의 산소투과에 대한 피팅의 영향 (Model on the Oxygen Transmission of Contact Lenses according to the Fitting)

  • 김대수;박미정
    • 한국안광학회지
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    • 제8권2호
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    • pp.1-11
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    • 2003
  • 확산에 관한 Fick 법칙 및 연속법칙을 사용하여 액체(눈물)-콘택트 렌즈-눈물 층을 통하여 각막으로 유입되는 산소 flux 및 각막 표면의 산소 분압을 계산할 수 있는 일련(一連)의 방정식을 세우고 이들 식에 의거하여 피팅에 따른 눈물 층의 두께, 콘택트 렌즈의 Dk 및 두께 변화가 각막에 유입되는 산소 flux에 어떠한 영향을 미치는가를 예측하였다. 본 모델을 사용하여 적절한 피팅 조건에 부합하고 또한 각막 표면의 산소 분압이 보장되는 콘택트 렌즈의 Dk 및 두께를 결정할 수 있다. 대단히 높은 Dk값을 지닌 콘택트 렌즈라도 너무 flat 또는 tight하게 피팅된 경우 콘택트 렌즈의 주변부와 각막 사이 눈물 층의 간격이 커짐으로 인하여 각막 주변부에 도달하는 산소 flux 및 각막 주변부 표면의 산소 분압이 급격히 감소하게 될 수 있다.

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Effect of B-Cation Doping on Oxygen Vacancy Formation and Migration in LaBO3: A Density Functional Theory Study

  • Kwon, Hyunguk;Park, Jinwoo;Kim, Byung-Kook;Han, Jeong Woo
    • 한국세라믹학회지
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    • 제52권5호
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    • pp.331-337
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    • 2015
  • $LaBO_3$ (B = Cr, Mn, Fe, Co, and Ni) perovskites, the most common perovskite-type mixed ionic-electronic conductors (MIECs), are promising candidates for intermediate-temperature solid oxide fuel cell (IT-SOFC) cathodes. The catalytic activity on MIEC-based cathodes is closely related to the bulk ionic conductivity. Doping B-site cations with other metals may be one way to enhance the ionic conductivity, which would also be sensitively influenced by the chemical composition of the dopants. Here, using density functional theory (DFT) calculations, we quantitatively assess the activation energies of bulk oxide ion diffusion in $LaBO_3$ perovskites with a wide range of combinations of B-site cations by calculating the oxygen vacancy formation and migration energies. Our results show that bulk oxide ion diffusion dominantly depends on oxygen vacancy formation energy rather than on the migration energy. As a result, we suggest that the late transition metal-based perovskites have relatively low oxygen vacancy formation energies, and thereby exhibit low activation energy barriers. Our results will provide useful insight into the design of new cathode materials with better performance.

Cation Self-Diffusin and Impurity Diffusion of Mn and Zn in CoO: (I) A comparison of the Residual Activity and the Tracer Sectioning Method

  • Lee, Jong-Ho;Martin, Manfred
    • The Korean Journal of Ceramics
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    • 제4권2호
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    • pp.90-94
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    • 1998
  • Self diffusion coefficients of $^{67}$Co and impurity diffusion coefficients of $^{51}$Mn and $^{65}$Zn in single crystalline CoO have been measured by applying different radioactive isotopes simultaneously. To compare the residual activity method and the tracer sectioning method we analyzed our tracer diffusion experiments by using both methods simultaneously. According to our experimental results, the diffusion coefficients obtained from both methods are identical within experimental error, demonstrating the relibility of our experimental procedures. The diffusion coefficients of all the isotopes obtained during these test experiments for the methodology are similar in magnitude and show similar dependences on oxygen partial pressure. These first observations indicate that impurity diffusion of Mn and Zn occur via a vacancy mechanism as known for self diffusion of cobalt.

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Sap Temperature Distribution of the Xylem and Leaf Water Status of Apple Trees in Relation to Soil Oxygen Diffusion Rates

  • Ro, Hee-Myong
    • Journal of Applied Biological Chemistry
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    • 제43권3호
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    • pp.170-175
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    • 2000
  • A pot-lysimeter experiment was conducted with 3-year-old 'Tsugaru' apple (Malus domestica Borkh) trees to examine the changes in oxygen diffusion rate (ODR) with lateral flow velocity of water through soil. The influence of lateral water flow velocity on water relations and elemental content in leaf, and sap temperature distribution patterns of the xylem of trees were also determined. Trees were grown under four soil water regimes: (1) fast laterally flowing (FWT, $2.50{\times}10^{-4}cm\;s^{-1}$), (2) slow laterally flowing (SWT, $0.25{\times}10^{-4}cm\;s^{-1}$), and (3) stagnant water table (WLT) at 60-cm, and (4) drip-irrigation at -40 kPa of soil matric potential as a control. The rate of $O_2$ diffusion converged near $2{\times}10^{-3}g\;m^{-2}\;min^{-1}$ for FWT and control soils, but decreased below $1{\times}10^{-3}g\;m^{-2}\;min^{-1}$ 40 days after treatment (DAT) for WLT soils. For SWT soils, however, the ODR at 15 cm below the soil surface was similar to that of control, but at 45 cm below the soil surface, ODR was similar to that of the WLT treatment. Leaf water potential of FWT and SWT plants was similar to that of control plants, but the values for SWT plants declined by 98 DAT. Leaf water potential of WLT plants decreased from -1.86 MPa (9 DAT) to -2.41 MPa (59 DAT) and finally down to -2.70 MPa. The sap temperature measured at 1100-hr was lowest at top and highest at bottom for FWT and control plants, but this pattern of SWT and WLT plants was disturbed from 29 DAT. However, for SWT plants, such thermal disturbance of sap temperature disappeared from 63 DAT.

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