• Journal of the Korean Vacuum Society
• /
• v.9 no.2
• /
• pp.102-109
• /
• 2000

It is difficult to meet the cleanliness requirement of $10^{10}/\textrm{cm}^2$ for the giga level device fabrication with mechanical cleaning techniques like scrubbing which is widely used to remove the particles generated during Chemical Mechanical Polishing (CMP) processes. Therefore, the second cleaning process is needed to remove metallic contaminants which were not completely removed during the mechanical cleaning process. In this paper the experimental results for the removal of the metallic contaminants existing on the wafer surface using remote plasma $H_2$ cleaning and UV/$O_3$ cleaning techniques are reported. In the remote plasma $H_2$ cleaning the efficiency of contaminants removal increases with decreasing the plasma exposure time and increasing the rf-power. Also the optimum process conditions for the removal of K, Fe and Cu impurities which are easily found on the wafer surface after CMP processes are the plasma exposure time of 1min and the rf-power of 100 W. The surface roughness decreased by 30-50 % after remote plasma $H_2$ cleaning. On the other hand, the highest efficiency of K, Fe and Cu impurities removal was achieved for the UV exposure time of 30 sec. The removal mechanism of the metallic contaminants like K, Fe and Cu in the remote plasma $H_2$ and the UV/$O_3$ cleaning processes is as follows: the metal atoms are lifted off by $SiO^*$ when the $SiO^*$is evaporated after the chemical $SiO_2$ formed under the metal atoms reacts with $H^+ \; and\; e^-$ to form $SiO^*$.

• Journal of the Korean Electrochemical Society
• /
• v.9 no.1
• /
• pp.1-5
• /
• 2006

Lithium titanium oxide $(Li_4Ti_5O_{12})$ with spinel-framework structures as anode material for lithium-ion battery was prepared by sol-gel and high energy ball milling (HEBH) method. According to the X-ray diffraction (XRD), Particle Size Analyses(PSA) and scanning electron microscopy (SEM) analysis, uniformly distributed $Li_4Ti_5O_{12}$ particles with grain sizes of 100 nm were observed. Half cells, consisting of $Li_4Ti_5O_{12}$ as working electrode and lithium foil as both counter and reference electrodes showed the high performance of high rate discharge capacity and 173 mAh/g at 0.2C in the range of $1.0\sim2.5 V$. Furthermore, the crystalline structure of $Li_4Ti_5O_{12}$ didn't transform during the lithium intercalation and deintercalation process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.145-145
• /
• 2008

High-k materials have been paid much more attention for their characteristics with high permittivity to reduce the leakage current through the scaled gate oxide. Among the high-k materials, $ZrO_2$ is one of the most attractive ones combing such favorable properties as a high dielectric constant (k= 20 ~ 25), wide band gap (5 ~ 7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2$/Si structure. During the etching process, plasma etching has been widely used to define fine-line patterns, selectively remove materials over topography, planarize surfaces, and trip photoresist. About the high-k materials etching, the relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Among several etching techniques, we chose the inductively coupled plasma (ICP) for high-density plasma, easy control of ion energy and flux, low ownership and simple structure. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. During the etching process, the wafer surface temperature is an important parameter, until now, there is less study on temperature parameter. In this study, the etch mechanism of $ZrO_2$ thin film was investigated in function of $Cl_2$ addition to $BCl_3$/Ar gas mixture ratio, RF power and DC-bias power based on substrate temperature increased from $10^{\circ}C$ to $80^{\circ}C$. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by scanning emission spectroscope (SEM). The chemical state of film was investigated using energy dispersive X-ray (EDX).

• Journal of the Microelectronics and Packaging Society
• /
• v.14 no.2 s.43
• /
• pp.59-63
• /
• 2007

This paper presented a low-cost thick film gas sensor module, which was based on simple PCB (Printed Circuit Board) process. The proposed sensor module included a $NO_2/H_2$ gas sensor, a relative humidity sensor, and a heating element. The $NO_2/H_2$ gas and relative humidity sensors were realized by screen-printing $SnO_2,\;BaTiO_3$ nano-powders on IDTS (Interdigital Transducer) of a PCB substrate, respectively. At first 1% $H_2$ gas flowed into the sensor chamber. After 4 min, air filled the chamber while $H_2$ gas flow stopped. This experiment was performed repeatedly. The Identical procedure was used for the $NO_2$ detection. The result for sensing $H_2$ gas showed the increase of voltage from 0.8V to 3.5V due to the conductance increase and its reaction response time by hydrogen flow was 65 sec. $NO_2$ sensing results showed 2.7 V voltage drop due to the conductance decrease and its response time was 3 sec through a voltage monitoring.

• Journal of Veterinary Clinics
• /
• v.22 no.4
• /
• pp.377-381
• /
• 2005

We tried to extract bone morphogenetic protein (BMP) from the freeze-dried bovine cortical bone (FBCB) for bone graft, which were defatted with chloroform-methanol for 20 days, freeze-dried at $-80^{\circ}C$ for 7 days and sterilized by ethylene oxide gas. Two kg of FBCB were pulverized in a wheel mill to $0.5-2.0mm^3$ cubic in size. The bone particles were demineralized in 0.6N HCI for 10 days at chloroform-methanol$4^{\circ}C$ and defatted with chloroform-methanol for 6 hours at room temperature, which was going to be defatting and demineralized cortical bone (DDM). For extracting BMP, DDM was agitated continuously through 72 hours with magnetic stirrer at $4^{\circ}C$ into 12 times of volume of 6 M guanidine hydrochloride (Gdn-HCl) solution containing proteinase inhibitors to protect BMP such as 2mM N-ethylaleimide, 1mM iodoacetic acid, 1mM phenylmethylsulfonyl fluoride and a sterilizer, 1mM sodium azide. The extraction procedure was repeated for three times. All extracted solution was centrifuged at 10,000 rpm for 30 min and then, the supernatant was dialyzed with 12 times of volume of deionized water at $4^{\circ}C$ for 24-72 hours, which cut off below 6,000-8,000 molecular weight. The dialyzed specimen contained crude-BMP was centrifuged, freeze-dried, and weighted. Through these processing, we could obtained $84.9\%$ as FBCB, $17.8\%$ as DDM and $0.71\%$ as crude-BMP from the wet cortical bone without cancellous bone, marrow and muscles. The crude-BMP were obtained $68.3\%$ from the first extraction, $29.6\%$ from secondary and $2.1\%$ from tertiary, respectively. It was suggested that high yield of crude-BMP migth be explained by three-time repetition of the extraction processing for crude-BMP with Gdn-Hcl sol.

• Journal of the Korean Applied Science and Technology
• /
• v.32 no.4
• /
• pp.731-739
• /
• 2015

We conducted this study to investigate possibilities of applying cosmetic material about extrats from Sparassis crispa. The extracts of Sparassis crispa conducted a antibacterial activity against Straphylococcus epidermidis, Straphylococcus aureus, Escheri chia coli, Candida albicans by the paper disc method and antioxidative effect and Nitric oxide production inhibitory activity were performed in Raw 264.7 cells. Also, we evaluated of pH, viscosity, particle observation stability of emulsion that are applied of extracts from Sparassis crispa. The antimicrobial activity showed by the paper disc method against Straphylococcus aureus, Candida albicans. The physical stability were stable of pH, viscosity in emulsion included extracts from Sparassis crispa. Emulsion containing Sparassis crispa extracts did not change particles into optical microscope. These results suggest that extracts from Sparassis crispa may have value as the potential cosmetic formulations.

• Restorative Dentistry and Endodontics
• /
• v.35 no.3
• /
• pp.173-179
• /
• 2010

The purpose of the present study was to compare the influence of post-surface treatment with silane, hydrogen peroxide, hydrofluoric acid or sandblasting and to investigate the effect of silane in combination of the other treatments on the microtensile bond strength between fiber posts and composite resins for core build-up. Thirty-two glass-fiber posts (FRC Postec Plus, Ivoclar Vivadent, Schaan, Liechtenstein) were divided into eight groups according to the different surface pretreatments performed: silane application (S); immersion in 28% hydrogen peroxide (HP); immersion in hydrogen peroxide followed by application of silane (HP-S); immersion in 4% hydrofluoric acid gel (HF); immersion in hydrofluoric acid gel followed by application of silane (HF-S); sandblasting with aluminum oxide particles (SB); sandblasting followed by application of silane (SB-S). In control group, no surface treatment was performed. The composite resin (Tetric Flow, Ivoclar Vivadent, Schaan, Liechtenstein) was applied onto the posts to produce the composite cylinder specimen. It was sectioned into sticks to measure the microtensile bond strength. The data was analyzed with one-way ANOVA and LSD test for post hoc comparison (p < 0.05). Post pretreatment with sandblasting enhanced the interfacial strength between the fiber posts and core materials. Moreover, sandblasting followed by application of silane appears to be the most effective method that can improve the clinical performance of glass fiber posts.

• Journal of Powder Materials
• /
• v.24 no.6
• /
• pp.437-443
• /
• 2017

SiC-based composite materials with light weight, high durability, and high-temperature stability have been actively studied for use in aerospace and defense applications. Moreover, environmental barrier coating (EBC) technologies using oxide-based ceramic materials have been studied to prevent chemical deterioration at a high temperature of $1300^{\circ}C$ or higher. In this study, an ytterbium silicate material, which has recently been actively studied as an environmental barrier coating because of its high-temperature chemical stability, is fabricated on a sintered SiC substrate. $Yb_2O_3$ and $SiO_2$ are used as the raw starting materials to form ytterbium disilicate ($Yb_2Si_2O_7$). Suspension plasma spraying is applied as the coating method. The effect of the mixing method on the particle size and distribution, which affect the coating formation behavior, is investigated using a scanning electron microscope (SEM), an energy dispersive spectrometer (EDS), and X-ray diffraction (XRD) analysis. It is found that the originally designed compounds are not effectively formed because of the refinement and vaporization of the raw material particles, i.e., $SiO_2$, and the formation of a porous coating structure. By changing the coating parameters such as the deposition distance, it is found that a denser coating structure can be formed at a closer deposition distance.

• Journal of the Korean Electrochemical Society
• /
• v.10 no.1
• /
• pp.48-51
• /
• 2007

In order to investigate the effects of particle size and specific surface area(BET area) of spinel powder, $LiMn_2O_4$ were synthesized using metal oxide precursor by co-precipitation method(CoP) and solid state reaction (SSR) .X-ray diffraction(XRD) patterns revealed that the both prepared powder has a well developed spinel structure with Fd3m space group. The $LiMn_2O_4$ prepared by co-precipitation showed spherical morphology with narrow size distribution. However, the $LiMn_2O_4$ prepared by solid state reaction showed relatively smaller particles with irregular shape. The measured BET areas of the powers are $0.8m^2g^{-1}$ (CoP) and $3.6m^2g^{-1}$(SSR). The electrochemical performance of the Prepared $LiMn_2O_4$ powders was evaluated using coin type cells(CR2032) at elevated temperature ($55^{\circ}C$). The $LiMn_2O_4$ prepared by co-precipitation showed the better cycling performance(82.3%capacity retention at $50^{th}$ cycle) than that of the $LiMn_2O_4$(68.3%) prepared by solid state reaction at elevated temperature.

• Korean Journal of Materials Research
• /
• v.11 no.5
• /
• pp.405-412
• /
• 2001

Corrosion tests were carried out in $360^{\circ}C$ water and $360^{\circ}C$ 70ppm LiOH solution to investigate the corrosion behavior of new zirconium alloys (Zr-0.4Nb-0.8Sn-xFeCrMn, Zr-0.2Nb-1.1Sn-xFeCrMn, Zr-1.0Nb-xFeCu). Microstructures of tested alloys were analyzed by optical microscope and TEM. The cross-sectional surface and crystalline structure of the oxide layer were analyzed by SEM and XRD. From the results of corrosion test, all the alloys showed higher corrosion rates in $360^{\circ}C$ 70ppm LiOH aqueous solution thats in $360^{\circ}C$ water. Especially, high Nb-containing alloy exhibited the acceleration of corrosion rate in LiOH solution. The low Nb- and Sn-added alloys showed better corrosion resistance than the Sn- free high Nb alloy. from the effect of final annealing on the corrosion, it was observed that the partially recrystallized alloys showed better corrosion resistance than fully recrystallized alloys. This would be related to the size and distribution of the second phase particles.