• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.539-542
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• 2001

In SiC semiconductor device processing, it needs high temperature anneal for activation of ion implanted dopants. The macrosteps, 7~8nm in height, are formed on the surface of SiC substrates during activation anneal. We have investigated the effect of thermally-grown SiO$_2$layer on the suppression of macrostep formation during high temperature anneal. The cap oxide layer was found to be efficient for suppression of macrostep formation even though the annealing temperature is as high as the melting point of SiO$_2$. The thin cap oxide layer (10nm) was evaporated during anneal then the macrosteps were formed on SiC substrate. On the other hand the thicker cap oxide layer (50nm) remains until the anneal process ends. In that case, the surface was smoother and the macrosteps were rarely formed. The thermally-grown oxide layer is found to be a good material for the suppression of macrostep formation because of its feasibility of growing and processing. Moreover, we can choose a proper oxide thickness considering the evaporate rate of SiO$_2$at the given temperature.

• 한국자기학회지
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• 제18권2호
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• pp.79-83
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• 2008

본 논문에서는 초기 산화 피막의 형성이 전기화학적 방법을 이용한 다공성 알루미나 막 제작에 미치는 영향을 살펴보았다. 다공성 알루미나 막의 제작은 전해 연마된 알루미늄 포일을 사용하여 두 치체의 양극산화 과정을 통해 이루어졌으며 양극산화 시초기 산화 피막이 알루미나 막 표면의 기공구조형성에 미치는 영향을 알아보고자 일차 양극산화 전 1 V의 낮은 전압으로 약 10nm두께의 산화 피막을 형성하였다. 이후 옥살산 용액 안에서 40V의 전압으로 양극산화 과정을 수행한 결과 양극산화 반응은 매우 안정적이었으며 측정된 양극산화 전류 역시 일정하게 유지됨을 알 수 있었다. 이와 달리 초기 산화 피막이 형성되지 않았을 경우 양극산화 과정은 매우 불안정하였으며 양극산화 과정동안 전류가 계속적으로 증가함을 보였다. 이러한 결과를 통해 알루미늄 포일 표면에 초기 산화 피막을 형성함으로써 전기장의 불균일한 분포에 의해 발생하는 표면 손상을 방지하며 안정적인 양극산화 과정을 통해 다공성 알루미나 산화 막을 제작할 수 있음을 확인하였다.

• Bulletin of the Korean Chemical Society
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• 제30권11호
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• pp.2577-2583
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• 2009

Presented are the formation of iron oxide layers on evaporator tubes in an actual fossil power plant operated under all volatile treatment (AVT) condition and an experimental simulation of iron oxide formation in the presence of ferrous and ferric ions. After actual operations for 12781 and 36326 hr in the power plant, two iron oxide layers of magnetite on the evaporator tubes were found: a continuous inner layer and a porous outer layer. The experimental simulation (i.e., artificial corrosion in the presence of ferrous and ferric ions at 100 ppm level for 100 hr) reveals that ferrous ions turn the continuous inner oxide layer on tube metal to cracks and pores, while ferric ions facilitate the production of porous outer oxide layer consisting of large crystallites. Based on a comparison of the oxide layers produced in the experimental simulation with those observed on the actually used tubes, we propose possible routes for oxid layer formation schematically. In addition, the limits of the proposed corrosion routes are discussed in detail.

• 대한기계학회논문집A
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• 제27권3호
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• pp.335-342
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• 2003

In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to from the oxide layer and the characteristics of the oxide layer formation are investigated. AISI 52100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4 ${\mu}{\textrm}{m}$ in coating thickness. AISI 1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2001년도 제34회 추계학술대회 개최
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• pp.109-116
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• 2001

In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to form the oxide layer and the characteristics of the oxide layer formation are investigated. AIS152100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4um in coating thickness. AISI1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitride environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

• Corrosion Science and Technology
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• 제23권3호
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• pp.221-227
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• 2024

During hot stamping of hot-dip zinc-coated steel sheets such as hot-dip galvanized steel sheets and hot-dip galvannealed steel sheets, an oxide mainly composed of ZnO is formed on the sheet surface. However, excessive formation of ZnO can lead to a decrease in the amount of metal Zn in the coating layer, decreasing the corrosion resistance of hot-stamped members. Therefore, it is important to suppress excessive formation of ZnO. While the formation of Al oxides and Mn oxides along with ZnO layer during the hot stamping of hot-dip zinc-coated steel sheets can affect ZnO formation, crystal structures of such oxides have not been elucidated clearly. Thus, this study aimed to analyze structures of oxides formed during hot stamping of hot-dip galvannealed steel sheets using transmission electron microscopy. Results indicated the formation of an oxide layer comprising ZnAl₂O₄ at the interface between ZnO and the coating layer with Mn₃O₄ at the outermost of an oxide layer.

• 한국재료학회지
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• 제33권2호
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• pp.77-86
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• 2023

High-temperature oxidation of a Ni-based superalloy was analyzed with samples taken from gas turbine blades, where the samples were heat-treated and thermally exposed. The effect of Cr/Ti/Al elements in the alloy on high temperature oxidation was investigated using an optical microscope, SEM/EDS, and TEM. A high-Cr/high-Ti oxide layer was formed on the blade surface under the heat-treated state considered to be the initial stage of high-temperature oxidation. In addition, a PFZ (γ' precipitate free zone) accompanied by Cr carbide of Cr₂₃C₆ and high Cr-Co phase as a kind of TCP precipitation was formed under the surface layer. Pits of several ㎛ depth containing high-Al content oxide was observed at the boundary between the oxide layer and PFZ. However, high temperature oxidation formed on the thermally exposed blade surface consisted of the following steps: ① Ti-oxide formation in the center of the oxide layer, ② Cr-oxide formation surrounding the inner oxide layer, and ③ Al-oxide formation in the pits directly under the Cr oxide layer. It is estimated that the Cr content of Ni-based superalloys improves the oxidation resistance of the alloy by forming dense oxide layer, but produced the σ or µ phase of TCP precipitation with the high-Cr component resulting in material brittleness.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.346.2-346.2
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• 2014

To use the GaN based light-emitting diodes (LEDs) as solid state lighting sources, the improvement of light extraction and internal quantum efficiency is essential factors for high brightness LEDs. In this study, we suggested the new materials system of a zinc tin oxide (ZTO) layer formed on blue LED epi-structures to improve the light extraction. ZTO is a representative n-type oxide material consisted of ZnO and SnO system. Moreover, ZTO is one of the promising oxide semiconductor material. Even though ZTO has higher chemical stability than IGZO owing to its SnO2 content this has high mobility and high reliability. After formation of ZTO layer on p-GaN layer by using the spin coating method, structural and optical properties are investigated. The x-ray diffraction (XRD) measurement results show the successful formation of ZTO. The photoluminescence (PL) and absorption spectrum shows that it has 3.6-4.1eV band gap. Finally, the light extraction properties of ZTO/LED chip using electroluminescence (EL) measurement were investigated. The experimental and theoretical analyses were simultaneously conducted.

• 전자공학회논문지A
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• 제32A권9호
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• pp.121-127
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• 1995

We have analyzed the double insulating layer consisting of anodic oxide and ZnS through TEM experiments. The use of double insulating layer for HgCdTe surface passivation is one of the promising passivation method which has been recently studied deeply and the double insulating layer is formed by the evaporation of ZnS on the top of anodic oxide layer grown in H$_{2}$O$_{2}$ electrolyte. The structure of anodic oxide layer on HgCdTe is amorphous but the structure of oxide layer after the evaporation of ZnS has been changed to micro-crystalline. The interface layer of 150.angs. thickness has been found between ZnS and anodic oxide layer and is estimated to be ZnO layer. The results of analysis on the chemical components of ZnS, the interface layer and anodic oxide layer have showed that Zn has diffused into the anodic oxide layer deeply while Hg has been significantly decreased from HgCdTe bulk to the top of oxide layer. The formation of ZnO interface layer and the change of structure of anodic oxide layer after the evaporation of ZnS are estimated to be defects or to induce the defects which might possibly affect the increase of the positive fixed charges shown in C-V measurements of HgCdTe MIS.

• 소성∙가공
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• 제32권3호
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• pp.160-165
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• 2023

As the supply of eco-friendly vehicles increases, the application rate of hot stamping components is rising to reduce vehicle weight and improve safety. Although Al-Si coated steel sheets are commonly used in hot stamping processes, their manufacturing costs are elevated due to process patents and royalties. Various hot stamping studies have been conducted to reduce these production costs. In this study, we derived a process control method for suppressing the oxide layer of hot stamping parts using uncoated boron steel sheets. Firstly, hat-shaped parts were hot stamped under atmospheric conditions to analyze the tendency of oxide layer formation by location. Then, the Gleeble system was used to observe oxide layer formation based on oxygen content under various atmospheric conditions. Finally, the oxide layer thickness was quantitatively measured using SEM images.