• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.159-159
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• 2007

In order to reduce a signal delay in ULSI, low resistive metal and intermetal dielectric material of low dielectric constant are required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. In this study, ordered mesoporous silica films was synthesized using TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-$76^{(R)}$ surfactant. These films had the porosity of 40% and dielectric constant of 2.5. To lower dielectric constant, the ordered mesoporous silica films were surface-modified by HMDS (hexamethyldisilazane) treatment. HMDS substituted -OH groups on the surface of silica wall for -Si$(CH_3)_3$ groups. After the HMDS treatment, ordered mesoporous silica films were calcined at various calcination temperatures. Through the investigation, it was concluded that the proper calcination temperature is necessary as aspects of structural, electrical, and mechanical properties.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.8
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• pp.593-601
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• 2012

Ordered mesoporous oxide films have been focused because of their low density, high interior specific surface area, and high thermal insulation. Specially, the ordered mesoporous oxide films prepared by self-assembly has many advantages due to easy process and high reproducibility. In this work, ordered mesoporous $SiO_2$, $Al_2O_3$, and $TiO_2$ films were synthesized by control of composition and processing parameter. Also, their structural, thermal, and mechanical properties were characterized variously. In conclusion, ordered mesoporous oxides will be one of core materials in new technology due to their excellent and unique properties.

• Bulletin of the Korean Chemical Society
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• v.32 no.1
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• pp.186-190
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• 2011

Periodically ordered mesoporous manganese oxides were synthesized in a single and double replication procedure. Mesoporous SBA-15 and -16 silica and their reverse replica carbons were successively used as hard templates. The silica and carbon pore systems were infiltrated with $Mn(NO_3)_2{\cdot}xH_2O$ or $Mn(AcAc)_2$, which was then converted to $Mn_2O_3$ at 873 K; the silica and carbon matrix were finally removed by NaOH solution or calcinations in air. The structure of the mesoporous $Mn_2O_3$, using a carbon template, corresponds to that of the original SBA-15 and SBA-16 silica. The products consist of hexagonally arranged cylindrical mesopores with crystalline pore walls or cubic mesoporous pores. The structure of replica has been confirmed by XRD, TEM analysis, and its electrochemical properties were tested with cyclic voltammetry. Formation of $Mn_2O_3$ inside the mesoporous carbon pore system showed much improved electrical properties.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.229.1-229.1
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• 2010

We investigated the effect of chemical acid treatments on hydrogen storage behaviors of the ordered mesoporous carbons (MCs). The surface functional groups and specific elements of the MCs were characterized with Fourier Transform Infrared (FT-IR) spectrometry and X-ray photoelectron spectroscopy (XPS). Also, the changes in the surface functional groups of the MCs were quantitatively detected by Boehm's titration method. The structural properties of the MCs were investigated using X-ray diffraction (XRD). The hydrogen adsorption capacity of the MCs was evaluated by means of adsorption isotherms at 77 K/1 bar. The formation of surface functional groups by the acidic treatments could influence on the hydrogen storage capacity of the MCs.

• Bulletin of the Korean Chemical Society
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• v.31 no.12
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• pp.3730-3734
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• 2010

A simple, inexpensive and less time consuming electrochemical methods were carried out to prepare ordered mesoporous cobalt films. Ordered mesoporous cobalt films were successfully synthesized by templated electrodepostion of hexagonal $H_1$-e Co ion. The electrodeposited mesopores films were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), low angle X-ray diffraction (XRD) and voltammetric methods. The applicability of thin films as high - performance super capacitors electrode materials is demonstrated electrochemically using cyclic voltammetry (CV) technique.

• Carbon letters
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• v.23
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• pp.9-16
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• 2017

This paper introduces a nitrogen-doped ordered mesoporous carbon (NOMC) derived from glucosamine with hybrid capacitive behaviors, achieved by successfully combining electrical double-layer capacitance with pseudo-capacitance behaviors. The nitrogen doping content of the fabricated NOMC reached 7.4 at% while its specific surface area ($S_{BET}$) and total pore volume reached $778m^2g^{-1}$ and $1.17cm^3g^{-1}$, respectively. A dual mesoporous structure with small mesopores centered at 3.6 nm and large mesopores centered at 9.9 nm was observed. The specific capacitance of the reported materials reached up to $328Fg^{-1}$, which was 2.1 times higher than that of pristine CMK-3. The capacitance retention rate was found to be higher than 87.9% after 1000 charge/discharge cycles. The supplementary pseudocapacitance as well as the enhanced wettability and conductivity due to the incorporation of nitrogen heteroatoms within the carbon matrixes were found to be responsible for the excellent capacitive performance of the reported NOMC materials.

• Journal of the Korean Ceramic Society
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• v.45 no.1
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• pp.48-53
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• 2008

In order to reduce signal delay in ULSI, an intermetal material of low dielectric constant is required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. The ordered mesoporous silica film prepared by TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-76 surfactant was surface-modified by HMDS (hexamethyldisilazane) treatment to reduce its dielectric constant. HMDS can substitute $-Si(CH_3)_3$ groups for -OH groups on the surface of silica wall. In order to modify interior silica wall, HMDS was treated by two different processes except the conventional spin coating. One process is that film is dipped and stirred in HMDS/n-hexane solution, and the other process is that film is exposed to evaporated HMDS. Through the investigation with different HMDS treatment, it was concluded that surface modification in evaporated HMDS was more effective to modify interior silica wall of nano-sized pores.

• Bulletin of the Korean Chemical Society
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• v.35 no.1
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• pp.257-260
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• 2014

• Bulletin of the Korean Chemical Society
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• v.31 no.2
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• pp.415-418
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• 2010

Highly ordered mesoporous silver material was successfully synthesized from a mesoporous silica template (KIT-6) with 3-D channel structure using the nano-replication method. The effects of $H_2$ or $O_2$ pretreatments on the catalytic performance of the mesoporous silver were investigated using a temperature programmed CO oxidation technique in a fixed bed reactor. The mesoporous silver material that was pretreated with $H_2$ exhibited an excellent catalytic activity compared to the as-prepared and $O_2$-pretreated catalysts. Moreover, this present mesoporous silver material showed good catalytic stability. For the CO oxidation, the apparent activation energy of the $H_2$-pretreated mesoporous silver catalyst was $61{\pm}0.5\;kJ\;mol^{-1}$, which was also much lower than the as-prepared ($132{\pm}1.5\;kJ\;mol^{-1}$) and $O_2$-pretreated ($124{\pm}1.4\;kJ\;mol^{-1}$) catalysts.

• 한국신재생에너지학회:학술대회논문집
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• 2011.05a
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• pp.221.2-221.2
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• 2011

In this study, we prepared the magnesium oxide decorated ordered mesoporous carbons processed by the reduction of magnesium oxide precursor on the CMK-3 surfaces in order to investigate the characterization and the effect on their carbon dioxide adsorption behaviors. The magnesium contents of the prepared samples were characterized using XPS. The textural properties of the prepared samples were investigated by $N_2$/77 K adsorption isotherms by BET equation. The carbon dioxide adsorption capacities of the prepared samples were investigated by the amounts of carbon dioxide adsorptions at 298 K and 1.0 atm. The results showed that the magnesium oxide on the CMK-3 surface enhanced interaction between carbon dioxide and adsorbents. Consequently, it was found that the magnesium oxide led to an increase in the carbon dioxide adsorption capacity of the CMK-3.