• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.191-194
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• 2002

In optical pick-up, optical components such as objective lens, collimator, mirror, laser diode and photo diode are mounted on the pick-up base. These components must keep their original position during operation for proper transmittance of information from laser diode to optical disk and back to photo diode. However, micro thermal deformation of pick-up base which is induced by thermal environment during operation can deteriorate the performance of optical pick-up. Therefore, it is important to measure and analyze the thermal deformation behavior of pick-up base under thermal environment. In the present study, a measurement system using holographic interferometry was designed to measure micro thermal deformation of pick up base. The measurement system was verified by using the deformation of cantilever with prescribed motion actuated by PZT with 1 nm resolution. Interferometric measurement was compared quantitatively with that induced by PZT actuator. Finally, micro thermal deformation of pick-up base under actual thermal environment was measured using the present holographic interferometry and the results were analysed.

• Journal of the Optical Society of Korea
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• v.17 no.5
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• pp.392-398
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• 2013

As the essential techniques for the CD (Critical Dimension) measurement of the LCD pattern, there are various modules such as an optics design, auto-focus [1-4], and precise edge detection. Since the operation of image enhancement to improve the CD measurement repeatability, a ring type of the reflected lighting optics is devised. It has a simpler structure than the transmission light optics, but it delivers the same output. The edge detection is the most essential function of the CD measurements. The CD measurement is a vital inspection for LCDs [5-6] and semiconductors [7-8] to improve the production yield rate, there are numbers of techniques to measure the CD. So in this study, a new subpixel algorithm is developed through facet modeling, which complements the previous sub-pixel edge detection algorithm. Currently this CD measurement system is being used in LCD manufacturing systems for repeatability of less than 30 nm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Proceedings of the Optical Society of Korea Conference
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• 2001.08a
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• pp.158-159
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• 2001

• Proceedings of the Optical Society of Korea Conference
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• 1997.08a
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• pp.5-5
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• 1997

• Publications of The Korean Astronomical Society
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• v.19 no.1
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• pp.71-76
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• 2004

We have developed a tool for measuring optical aberrations of telescope. We adopt curvature sensing technique and use the least square method for finding the amplitudes of the Zernike polynomials. This tool runs under the PC Linux system and the PC windows system with Linux emulators such as Cygwin. The program for UNIX system is used for optical alignment of 1.8M optical telescope at the Bohyunsan Optical Astronomical Observatory (BOAO) and the PC based program is used for the Korea Astronomy Observatory (KAO) wide field telescope (named NEOPAT-3). Our tool is found to be efficient for precise measurement of the optical aberrations of telescopes.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.5
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• pp.48-53
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• 2004

Spectral irradiance measurement system was developed to measure the spectral irradiance of optical sources in the wavelength range from 250[nm] to 1600[nm]. Our system is composed of source system, fore-optics, monochromator system, optical detector system, and automatic control system. Optical detector system with PMT, Si, InGaAs, and IR enhanced InGaAs detectors is used to measure the wide spectrum of optical sources in ultraviolet visible, and infrared wavelength regions. Spectral irradiance of the 1[kW] quartz-halogen tungsten lamp was measured and compared in the wavelength range from 250[nm] to 1600[nm]. The differences between our results and those reported by NIST are below 3[%], 3.5[%], and 5[%] in the wavelength range of 450∼700[nm], 700∼1600[nm], 250∼400[nm], respectively.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.72-78
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• 2009

We developed a line standards measurement system using an optical microscope and measured two kinds of line standards. It consists of three main parts: an optical microscope module including a CCD camera, a stage system with a linear encoder, and a measurement program for a microscopic image processing. The magnification of microscope part was calibrated using one-dimensional gratings and the angular motion of stage was measured to estimate the Abbe error. The threshold level in line width measurement was determined by comparing with certified values of a line width reference specimen, and its validity was proved through the measurement of another line width specimen. The expanded uncertainty (k=2) was about 100 nm in the measurements of $1{\mu}m{\sim}10{\mu}m$ line width. In the comparison results of line spacing measurement, two kinds of values were coincide within the expanded uncertainty, which were obtained by the one-dimensional measuring machine in KRISS and the line standards measurement system. The expanded uncertainty (k=2) in the line spacing measurement was estimated as $\sqrt{(0.098{\mu}m)^2+(1.8{\times}10^{-4}{\times}L)^2}$. Therefore, it will be applied effectively to the calibration of line standards, such as line width and line spacing, with the expanded uncertainty of several hundreds nanometer.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.863-872
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• 2012

The squareness measurement of driving axes of a machine tool is very important to evaluate the performance of the machine. Laser interferometer measurement system is one of the most reliable equipment to measure the squareness. However, squareness measurement using laser system with an optical square result in restriction of straightness optics setup and Abbe's offset. This offset combines with angular errors during the motion of an axis to cause Abbe's error. In addition, the difficulty in optical square setup causes restriction of other optics and limitation of measurable range. In this paper, mathematical approaches are presented to eliminate the Abbe's error and to estimate squareness for full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurement of 3 axis machine tool were conducted and the proposed techniques were used for squareness evaluation with elimination of Abbe's error and squareness estimation for the full travel range.

• Journal of ILASS-Korea
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• v.18 no.3
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• pp.119-125
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• 2013

Digital holographic particle velocity measurement system can be a promising optical tool for the measurements of three dimensional particle velocities. In this research, validation experiments for the digital holographic particle velocity measurement system were conducted with measuring the velocities of glass beads on a rotating disk. Uncertainty analysis was performed to identify the sources of all relevant errors and to evaluate their magnitudes. The measurement results of particle velocities obtained with digital holographic method are compared reasonably well with the known values within acceptable range of errors. Moreover, digital holographic method showed better performance compared with that of optical holographic system.