• Title/Summary/Keyword: optical measurement system

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Direct Measurement of Distortion of Optical System of Lithography (노광 광학계의 왜곡수차 측정에 관한 연구)

  • Joo, WonDon;Lee, JiHoon;Chae, SungMin;Kim, HyeJung;Jung, Mee Suk
    • Korean Journal of Optics and Photonics
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    • v.23 no.3
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    • pp.97-102
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    • 2012
  • In general, one of the methods used to measure distortion is to use the full image of the regular pattern. However, because of low accuracy, this method is mainly used for an optical system such as a camera.. In order to measure distortion with high accuracy less than 1um, one can use the method of measuring the exact position of a mask image. In this case, a high accuracy stage with a laser encoder is required. In this paper, we investigate measurement of the distortion of high accuracy with a simple manual stage. The main idea is that we split and measure the mask image with the overlapping area by using CCD or CMOS, and then we get an exact position of the mask image by integrating the adjacent split images. We use the Canny Edge Detection method to get the position information of the mask image and we researched the process to exactly calculate distortion by using coordinate transformations and a least square method.

A Study On The Doppler Radar Of Range Measurement On Electro-Optical Tracking System (광학추적장비의 거리측정 도플러 레이더에 관한 연구)

  • Park, Doo-Jin;Noh, Young-Hwan
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2016.10a
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    • pp.700-702
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    • 2016
  • The Doppler Radar that mounted on Electro Optical Tracking System has been operated to measure range and velocity during the initial mission of space launch vehicle at Naro space center. In this paper, we mentioned configuration of MFCW(Multi frequency Continuous Wave) and FMCW(Frequency Modulation Continuous Wave) Doppler Radar on Electro Optical Tracking System and described method of range measurement.

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Development of Prototype Stylus Prototype for Large Optics Testing

  • Yang, Ho-Soon;Walker, David
    • Journal of the Optical Society of Korea
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    • v.5 no.2
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    • pp.60-66
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    • 2001
  • The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.

Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

  • Qibo, Feng;Bin, Zhang;Cuifang, Kuang
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.4
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    • pp.26-31
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    • 2008
  • A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

Study on Modeling and Experiment of Optical Three Axis Tool-Origin Sensor for Applications of Micro Machine-Tools (초소형 공작기계 적용을 고려한 광학식 3 축 공구원점 센서 모델링 및 실험에 관한 연구)

  • Shin, Woo-Cheol;Lee, Hyeon-Hwa;Ro, Seung-Kook;Park, Jong-Kweon;Noh, Myoung-Gyu
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.6
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    • pp.68-73
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    • 2009
  • One of the traditional optical methods to monitor a tool is a CCD sensor-based vision system which captures an aspect of the tool in real time. In the case using the CCD sensor, specific lens-modules are necessary to monitor the tool with higher resolution than its pixel size, and a microprocessor is required to attain desired data from captured images. Thus theses additional devices make the entire measurement system complex. Another method is to use a pair of an optical source and a detector per measuring axis. Since the method is based on the intensity modulation, the structure of the measurement system is simper than the CCD sensor-based vision system. However, in the case measuring the three dimensional position of the tool, it is difficult to apply to micro machine-tools because there may not be space to integrate three pairs of an optical source and a detector. In this paper, in order to develop a tool-origin measurement system which is employed in micro machine-tools, the improved method to measure a tool origin in x, y and z axes is introduced. The method is based on the intensity modulation and employs one pair of an optical source radiating divergent beams and a quadrant photodiode to detect a three dimensional position of the tool. This paper presents the measurement models of the proposed tool-origin sensor. The models were verified experimentally The verification results show that the proposed method is possible and the induced models are available for design.

Measurement of Color Uniformity of Liquid Crystal Projection Display

  • Ying, Chen;Haifeng, Li;Mo, Shen;Xu, Liu;Shizhe, Shen
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.483-486
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    • 2004
  • A CCD-based color uniformity measurement system was set up. Through measuring the two-dimensional brightness distributions of three primary colors on the screen, chromaticity coordinate distributions of combination gray can be obtained within a few seconds. This system can be widely used in the production of LCD projection.

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Research on Subcutaneous Pulse Shape Measurement by Near-infrared Moiré Technique

  • Chen, Ying-Yun;Liu, Zhizhen;Du, Jian;Chang, Rong-Seng
    • Journal of the Optical Society of Korea
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    • v.19 no.2
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    • pp.123-129
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    • 2015
  • A pulse is generated when the heart pumps blood into the arterial system. The heart pumps blood only when it contracts, not when it relaxes; therefore, blood enters the arterial system in a cyclical form. Artery beating is visible in some parts of the body surface, such as the radial artery of the wrist. This paper mainly uses the feature in which near-infrared spectroscopy penetrates skin to construct a non-invasive measurement system that can measure small vibration in the subcutaneous tissue of the human body, and then uses it for the pulse measurement. This measurement system uses the optical moir$\acute{e}$ principle, together with the fringe displacement made by small vibration in the subcutaneous tissue, and an image analysis program to calculate the height variation from small vibrations in the subcutaneous tissue. It completes a measurement system that records height variation with time, and that together with a fast Fourier transform (FFT) program, they can convert the pulse waveform generated by vibration (time-amplitude) to heartbeat frequency (frequency-amplitude). This is a new and non-invasive medical assistance system for measuring the pulse of the human body, with the advantages of being simple, fast, safe and objective.

Measurement Method and System of Optical Fiber-Based Beam Width Using a Reflective Grating Panel

  • Lee, Yeon-Gwan;Jang, Byeong-Wook;Kim, Yoon-Young;Kim, Jin-Hyuk;Kim, Chun-Gon
    • International Journal of Aeronautical and Space Sciences
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    • v.12 no.2
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    • pp.175-178
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    • 2011
  • An optical fiber-based beam width measurement technique is presented. The proposed system can be applied to the optical fiber industry in applications such as lensed fiber, optical fiber based laser beam source, and fiber optic sensor. The measurement system is composed of optical fiber, which is used as a transceiver, and a single grating panel which consists of a multi-reflection area with an even non-reflection area. The grating panel is used to vary the reflected light. When the widths of the reflection area and non-reflection area are larger than the optical beam width, the reflected light is varied at the interface between the reflection area and the non-reflection area by the movement of the grating panel. Experiments were conducted in order to verify the feasibility of the proposed technique. Multi-mode fiber combined with a collimator was selected as an emitter and a receiver, and the beam width measurement system was contrived. Subsequently, the proposed method and the system were verified by comparing the experimental results with the results of the conventional charge-coupled device technique.

A Study on a Hartmann Test of Optical Mirror for On-Machine Measurement of Polishing machine (광학면 연마기의 OMM을 위한 Hartmann Test 방법 연구)

  • 김옥현;이응석;오창진;김용관
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.1
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    • pp.40-45
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    • 2004
  • Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

Development of a Biological Reaction and Measurement Control System for Rapid Detection of the Insecticide Imidacloprid Residues (살충제 Imidacloprid 잔류물의 신속한 측정을 위한 생물반응 및 계측제어 시스템 개발)

  • Lim J. K.;Cho H. K.
    • Journal of Biosystems Engineering
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    • v.30 no.2 s.109
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    • pp.114-120
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    • 2005
  • In this study, a biological reaction and measurement control system was developed to rapidly measure the insecticide imidacloprid residues in agricultural products. The biological reaction part of the system was designed to include micro-pumps and valves for fluid transport, and a polystyrene covet as a reaction chamber. The measurement control part of the system consisted of a photodiode with a light-emitting diode for optical density measurement, and a control microcomputer to implement assay. Signal output was read as the rate of change in optical density at 645 nm. The sensitivity of the system was 2.2 ng/mL ($IC_50$). The system could execute a measurement cycle in about 19 minutes. Research will be continued to develop an automatic sampler fur imidacloprid residues from agricultural products.