• Journal of the Institute of Convergence Signal Processing
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• v.2 no.3
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• pp.86-92
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• 2001

Position controls are very important in semiconductor manufacturing devices, machine tools, precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. Thus an optical encoder that has such advantages as easy digital interface, economical price, and a resolution similar to that of laser interferometers can be used. In this paper, a interferometer-type linear scale with easy digital interface and high-resolution has been set up and measured the distance of movement based on the diffraction principle. Interference signals produced in this optical setup of the linear scale have beers digitalized through fabricated photodetectors and designed signal processing circuits. A resolution of 0.5${\mu}{\textrm}{m}$ is acquired from the experimental interferometer-type linear scale without for the movement of scales any additional dividing circuits. It is shown that from this experiment a high-resolution distance measurement device can be designed by a simple optical setup.

• Proceedings of the Korea Institute of Convergence Signal Processing
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• 2000.12a
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• pp.145-148
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• 2000

Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5${\mu}{\textrm}{m}$ and had digitalized moving quantities of scale.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1936-1938
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• 2002

A tunable fiber laser and the Quadrature Sampling technique are used to construct highly sensitive fiber-optic distributive Bragg grating strain sensor system. By using a wavelength-modulated fiber laser, the variations of strain-dependent Bragg wavelengths are transformed into the variations of time-domain reflection profiles. The locations of profile peaks that correspond to the applied strains are demodulated using a precise wavelength encoder that uses a fiber-optic Mach-Zehnder interferometer and Quadrature Sampling technique. With the extremely high sensitive optical encoder, we could obtain not only high sensitivity, but also very linear responses that was impossible with the conventional techniques. This paper is attempted to report the theoretical and experimental results.

• Journal of the Optical Society of Korea
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• v.18 no.2
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• pp.129-133
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• 2014

In this paper, we propose a simple Double random phase encryption (DRPE)-based orthogonal encoding technique for color image encryption. In the proposed orthogonal encoding technique, a color image is decomposed into red, green, and blue components before encryption, and the three components are independently encrypted with DRPE using the same key in order to decrease the complexity of encryption and decryption. Then, the encrypted data are encoded with a Hadamard matrix that has the orthogonal property. The purpose of the proposed orthogonal encoding technique is to improve the security of DRPE using the same key at the cost of a little complexity. The proposed orthogonal encoder consists of simple linear operations, so that it is easy to implement. We also provide the simulation results in order to show the effects of the proposed orthogonal encoding technique.

• Transactions of the Korean Society of Automotive Engineers
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• v.13 no.4
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• pp.58-65
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• 2005

A method measuring angular speed and estimating angular acceleration of an automotive wind shield wiper pivot with limited resources has been proposed. Limited resources refer to the fact that processes cannot be operated in real-time with a regular notebook running a Microsoft Windows. Also, they refer to the fact that data acquisition cards have only two general purpose counters as many generic cards do. An optical incremental encoder has been employed for measuring angular motion. To measure the angular speed of the pivot, periods for the encoder's output pulses have been measured as the speed is related to the reciprocal of the period. Since only information acquired from one counter channel is the magnitude of the angular speed, sign correction is necessary. Also the information for the exact time when a pivot passes left and right dead points is also missing and the situation is inherent to the hardware setup. To find out the zero-crossing time of the angular speed, a linear interpolation technique has been employed. Lastly, to overcome the imperfection of the mechanical encoders, the angular speed has been curve fitted to a spline. Angular acceleration can be obtained by a differentiation of the angular speed.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.72-78
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• 2009

We developed a line standards measurement system using an optical microscope and measured two kinds of line standards. It consists of three main parts: an optical microscope module including a CCD camera, a stage system with a linear encoder, and a measurement program for a microscopic image processing. The magnification of microscope part was calibrated using one-dimensional gratings and the angular motion of stage was measured to estimate the Abbe error. The threshold level in line width measurement was determined by comparing with certified values of a line width reference specimen, and its validity was proved through the measurement of another line width specimen. The expanded uncertainty (k=2) was about 100 nm in the measurements of $1{\mu}m{\sim}10{\mu}m$ line width. In the comparison results of line spacing measurement, two kinds of values were coincide within the expanded uncertainty, which were obtained by the one-dimensional measuring machine in KRISS and the line standards measurement system. The expanded uncertainty (k=2) in the line spacing measurement was estimated as $\sqrt{(0.098{\mu}m)^2+(1.8{\times}10^{-4}{\times}L)^2}$. Therefore, it will be applied effectively to the calibration of line standards, such as line width and line spacing, with the expanded uncertainty of several hundreds nanometer.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.7
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• pp.4405-4410
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• 2015

Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.