• Title/Summary/Keyword: optical density

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A Study on Photoresist Stripping Using High Density Oxygen Plasma (고밀도 산소 플라즈마를 이용한 감광제 제거공정에 관한 연구)

  • Jung, Hyoung-Sup;Lee, Jong-Geun;Park, Se-Geun;Yang, Jae-Kyun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.2
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    • pp.95-100
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    • 1998
  • A helical inductively coupled plasma asher, which produces low energy and high density plasma, has been built and investigated for photoresist stripping process. Oxygen ion density in the order of $10^{11}/cm^3$ is measured by Langmuir probe, and higher oxygen radical density is observed by Optical Emission Spectrometer. As RF source power is increased, the plasma density and thus photoresist stripping rate are increased. Independent RF bias power to the wafer stage provides a dc bias to the wafer and an ability to add the ion assisted reaction. At 1 KW of the source power, the coupling mechanism of the RF power to the plasma is changed from the inductive mode to the capacitive one at about 1 Torr. This change causes the plasma density and ashing rate decreases abruptly. The critical pressure of the mode change becomes larger with larger RF power.

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Experimental Study on Spin Coated Thin Cover Layer for High Numerical Aperture Optical Disc

  • Dohoon Chang;Myongdo Ro;Duseop Yoon;Park, Insik;Dongho Shin;Kim, Jinhwan
    • Macromolecular Research
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    • v.9 no.6
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    • pp.313-318
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    • 2001
  • The present study relates to a method of manufacturing 100$\mu\textrm{m}$ thick cover layer for the high density digital versatile disc system (HD-DVD), which uses a high numerical aperture of 0.85 at 405 nm wavelength. Spin coating technique was investigated as means for manufacturing the cover layer within sufficient margins of thickness variation and with good mechanical properties including small radial and tangential tilts. The influence of processing variables such as spinning speed, spinning time, and dispensing position was investigated. The effect of viscosity of UV-curable resin was also investigated.

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Measurements of Diameter Variation in Optical Fiber-Core. (광섬유 코어 Diameter-Variation 측정에 관한 연구)

  • 유봉선;이호준;원동호;박병철
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.12 no.4
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    • pp.335-346
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    • 1987
  • The principal reason for the backscattering in an optical fiber is the Rayleigh scattering which is caused by non-uniform density of structure material of an optical fiber and diameter variations of the optical fiber-core along an optical fiber axis. The backscattering signal which is detected by the optical time domain reflectometer system(O.T.D.R) conatains information about both tha actual decay of power and the diameter variation along the optical fiber. In this paper, the O.T.D.R. system with 2x2 fiber directional coupler, timing control unit and gated integrator is used to measure diameter variations of an optical fiber.

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Active Alignment and Performance Evaluation of Micro Hybrid Lens for Small Form Factor Optical Pickup (초소형 광 픽업용 하이브리드 렌즈의 능동 정렬 및 성능평가)

  • Kang Sung-Mook;Lee Jin-Eui;Cho Eun-Hyoung;Sohn Jin-Seung;Park No-Cheol;Park Young-Pil
    • 정보저장시스템학회:학술대회논문집
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    • 2005.10a
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    • pp.154-159
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    • 2005
  • The next generation of optical storage systems requires higher numerical aperture (NA) objective lenses and shorter wavelength laser in order to improve the unit areal density. A blu-ray technology satisfies a miniaturization and a high capacity which are the requirements of the portable device. In this paper, we analyze the optical performance of hybrid micro lens and do active alignment. The hybrid micro lens is manufactured by using a wafer based fabrication technology. Optical components of hybrid micro lens are evaluated. The measurement of the optical power, the spot size and the wavefront error awe performed to evaluate the hybrid micro lens with NA 0.85. Using the measured data, we estimate if the performance of hybrid micro lens corresponds to the designed performance. After the performance of hybrid micro lens is evaluated, the integrated optical pickup and the hybrid micro lens are assembled by active alignment using UV curing and the optical performance of SFFOP is satisfied with BD specifications.

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Active Alignment and Performance Evaluation of Micro Hybrid Lens for Small Form Factor Optical Pickup (초소형 광 픽업용 하이브리드 렌즈의 능동 정렬 및 성능평가)

  • Kang, Sung-Mook;Lee, Jin-Eui;Cho, Eun-Hyoung;Sohn, Jin-Seung;Park, No-Cheol;Park, Young-Pil
    • Transactions of the Society of Information Storage Systems
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    • v.2 no.1
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    • pp.79-84
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    • 2006
  • The next generation of optical storage systems requires higher numerical aperture(NA) objective lenses and shorter wavelength laser in order to improve the unit areal density. A blu-ray technology satisfies a miniaturization and a high capacity which are the requirements of the portable device. In this paper, we analyze the optical performance of hybrid micro lens and do active alignment. The hybrid micro lens is manufactured by using a wafer based fabrication technology. Optical components of hybrid micro lens are evaluated. The measurement of the optical power, the spot size and the wavefront error are performed to evaluate the hybrid micro lens with NA 0.85. Using the measured data, we estimate if the performance of hybrid micro lens corresponds to the designed performance. After the performance of hybrid micro lens is evaluated. the integrated optical pickup and the hybrid micro lens are assembled by active alignment using UV curing and the optical performance of SFFOP is satisfied with BD specifications.

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HOT GAS HALOS IN EARLY-TYPE GALAXIES AND ENVIRONMENTS

  • Kim, Eunbin;Choi, Yun-Young;Kim, Sungsoo S.
    • Journal of The Korean Astronomical Society
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    • v.46 no.1
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    • pp.33-40
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    • 2013
  • We investigate the dependence of the extended X-ray emission from the halos of optically luminous early-type galaxies on the small-scale (the nearest neighbor distance) and large-scale (the average density inside the 20 nearest galaxies) environments. We cross-match the 3rd Data Release of the Second XMMNewton Serendipitous Source Catalog (2XMMi-DR3) to a volume-limited sample of the Sloan Digital Sky Survey (SDSS) Data Release 7 with $M_r$ < -19.5 and 0.020 < z < 0.085, and find 20 early-type galaxies that have extended X-ray detections. The X-ray luminosity of the galaxies is found to have a tighter correlation with the optical and near infrared luminosities when the galaxy is situated in the low large-scale density region than in the high large-scale density region. Furthermore, the X-ray to optical (r-band) luminosity ratio, $L_X/L_r$, shows a clear correlation with the distance to the nearest neighbor and with large-scale density environment only where the galaxies in pair interact hydrodynamically with seperations of $r_p$ < $r_{vir}$. These findings indicate that the galaxies in the high local density region have other mechanisms that are responsible for their halo X-ray luminosities than the current presence of a close encounter, or alternatively, in the high local density region the cooling time of the heated gas halo is longer than the typical time between the subsequent encounters.

Measurement of the Crowd Density in Outdoor Using Neural Network (신경망을 이용한 실외 군중 밀도 측정)

  • Song, Jae-Won;An, Tae-Ki;Kim, Moon-Hyun;Hong, You-Sik
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.12 no.2
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    • pp.103-110
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    • 2012
  • The population growth along with the urbanization, has caused more problems in many public areas, such as subway airport terminals, hospital, etc. Many surveillance systems have been installed in the public areas, but not all of those can be monitored in real-time, because the operators that observe the monitors are very small compared with the number of the monitors. For example, the observer can miss some crucial accidents or detect after considerable delays. Thus, intelligent surveillance system for preventing the accidents are needed, such as Intelligent Surveillance Systems. in this paper, we propose a new crowd density estimation method which aims at estimating moving crowd using images from surveillance cameras situated in outdoor locations. The moving crowd is estimated from the area where using optical flow. The edge information is also used as feature to measure the crowd density, so we improve the accuracy of estimation of crowd density. A multilayer neural network is designed to classify crowd density into 5 classes. Finally the proposed method is experimented with PETS 2009 images.

Photostabilization and Cure Kinetics of UV-Curable Optical Resins Containing Photostabilizers

  • Cho, Jung-Dae;Kim, Sung-Hwa;Chang, In-Cheol;Kim, Kwon-Seok;Hong, Jin-Who
    • Macromolecular Research
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    • v.15 no.6
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    • pp.560-564
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    • 2007
  • The photostabilization and cure kinetics of UV-curable, optical resins containing various formulations of photostabilizers were investigated to determine the system with the highest cure conversion and durability. Photo-DSC analysis revealed that increasing the concentration of a UV absorber (UVA) decreased both the crosslink density and the cure rate due to competition for the incident photons between the photoinitiator and the UVA, whereas including a hindered amine light stabilizer (HALS) hardly affected either the cure conversion or the cure rate due to its very low absorption of 365 nm. This result was confirmed by FTIR-ATR spectroscopy and UV-visible spectroscopy analyses. QUV ageing experiments showed that the cure conversion and durability were the highest for the UVA/HALS formulation at a ratio of 1 : 2, which is due to their synergistic action.

Optical Properties of High-k Gate Oxides Obtained by Spectroscopic Ellipsometer (분광 타원계측기를 이용한 고굴절률 게이트 산화막의 광물성 분석)

  • Cho, Yong-Jai;Cho, Hyun-Mo;Lee, Yun-Woo;Nam, Seung-Hoon
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.1932-1938
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    • 2003
  • We have applied spectroscopic ellipsometry to investigate $high-{\kappa}$ dielectric thin films and correlate their optical properties with fabrication processes, in particular, with high temperature annealing. The use of high-k dielectrics such as $HfO_{2}$, $Ta_{2}O_{5}$, $TiO_{2}$, and $ZrO_{2}$ as the replacement for $SiO_{2}$ as the gate dielectric in CMOS devices has received much attention recently due to its high dielectric constant. From the characteristics found in the pseudo-dielectric functions or the Tauc-Lorentz dispersions, the optical properties such as optical band gap, polycrystallization, and optical density will be discussed.

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The Study on Optical Properties by Adding $La_2O_3$ in Multicomponent Glass Fiber (다성분계 Glass Fiber의 $La_2O_3$ 첨가에 따른 광학적 특성에 관한 연구)

  • 김용호;강원호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1994.11a
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    • pp.21-23
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    • 1994
  • By adding La₂O₃ to optical multicomponent glass composition, after making mother glass and core fiber that enable to enlarge the infrared transmittance region, then surveyed the optical properties. Through thermal analysis of the glass abstained by melt-quenching after selecting stable basic composition on devitrification and replace SiO₂ by 4-12wt% La₂O₃. As La₂O₃ increases up to l2wt% transition temperature, refractive index, density, deformation temperature increased, whereas thermal expansion coefficient decreased. As a result of inspectig transmittance in UV/VIS/IR region, visable region indicated the decrease of transmittance by increasing the La₂O₃ and transmittance region was enlarged by increasing the La₂O₃ in IR region. Also, fabricate core fiber at 820℃ and severy the optical loss we could fact that La₂O₃ composition added 12wt% showed the minimum optical loss.