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Study on an Electrostatic Deflector for Ultra-miniaturized Microcolumn to Realize sub-10 nm Ultra-High Resolution and Wide Field of View (10 nm 이하 초고해상도와 광폭 관측시야를 구현하기 위한 극초소형 마이크로컬럼용 정전형 디플렉터 연구)

  • Lee, Hyung Woo;Lee, Young Bok;Oh, Tae-Sik
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.4
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    • pp.29-37
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    • 2021
  • A 7 nm technology node using extreme ultraviolet lithography with a wavelength of 13.5 nm has been recently developed and applied to the semiconductor manufacturing process. Furthermore, the development of sub-3 nm technology nodes continues to be required. In this study, design factors of an electrostatic deflector for an ultra-miniaturized microcolumn system that can realize an electron wavelength of below 1.23 nm with an acceleration voltage of above 1 eV were investigated using a three-dimensional simulator. Particularly, the optimal design of the electrostatic octupole floating deflector was derived by optimizing the design elements and improving the driving method of the 1 keV low energy ultra-miniaturized microcolumn deflector. As a result, the entire wide field of view greater than 330 ㎛ at a working distance of 4 mm was realized with an ultra-high-resolution electron beam spot smaller than 10 nm. The results of this study are expected to be a basis technology for realizing a wafer-scale multi-array microcolumn system, which is expected to innovatively improve the throughput per unit time, which is the biggest drawback of electron beam lithography.

Bioremediation on the Benthic Layer in Polluted Inner Bay by Promotion of Microphytobenthos Growth Using Light Emitting Diode (LED) 1. Effects of irradiance and wavelength on the growth of benthic diatom, Nitzschia sp. (발광다이오드(LED)를 이용한 저서미세조류의 성장촉진에 의한 오염해역 저질환경개선 1. 저서규조류 Nitzschia sp. 성장에 영향을 미치는 광량과 파장)

  • Oh, Seok-Jin;Park, Dal-Soo;Yang, Han-Soeb;Yoon, Yang-Ho;Honjo, Tsuneo
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.10 no.2
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    • pp.93-101
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    • 2007
  • In order for bioremediate the benthic layer in polluted inner Bay, the effects of irradiance and wave-length irradiated from light emission diode (LED) on the growth of benthic diatom Nitzschia sp. (Hakozaki Bay strain of Japan) were investigated. The Nitzschia sp. was cultured under blue LED (450 nm), yellow LED (590 nm), red LED (650 nm) and fluorescent lamp (mixed wavelengths). At $25^{\circ}C$ and 30 psu, the growth of Nitzschia sp. showed its peak at $20\;{\mu}mol\;m^{-2}\;s^{-1}$ (blue LED) and $40\;{\mu}mol\;m^{-2}\;s^{-1}$ (fluorescent lamp), and was inhibited at the irradiance higher than that irradiance. Nitzschia sp. in yellow LED and red LED is fitted by a rectangular hyperbolic curve because no photoinhibition was observed under maximum irradiance used in this study. The irradiance-growth curves were described as ${\mu}=-0.46{\exp}(1-I/6.32)+0.46-0.00043I,\;(r^2=0.98)$ under blue LED, ${\mu}=0.42(I+7.87)/(I+58.9),\;(r^2=0.99)$ under yellow LED, ${\mu}=0.39(I+3.39)/(I+21.6),\;(r^2=0.94)$ under red LED, ${\mu}=-0.38{\exp}(1-I/7.23)+0.38-0.00016I,\;(r^2=0.96)$ under fluorescent lamp. Maximum specific growth rate of blue LED, yellow LED, red LED and fluorescent lamp was $0.44\;day^{-1},\;0.42\;day^{-1},\;0.39\;day^{-1}$ and $0.37\;day^{-1}$, respectively. The absorption coefficient ($a_{ph}$) of Nitzschia sp. was similar under all the wavelengths (400 nm-700 nm), although maximum $a_{ph}$ was $0.0224\;m^2\;mg\;chi.\;{\alpha}^{-1}$ in 472 nm and $0.0179\;m^2\;mg\;chi.\;{\alpha}^{-1}$) in 663 nm. The results may indicate the possibility of environmental improvement around the benthic layer in polluted coastal area because microphytobenthos growth is stimulated by means of irradiated blue LED at the benthic boundary layer during both autumn and winter, and yellow LED, which might have been suppressed growth of harmful algae, at the layer during both spring and summer.

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The Effect of Residual Stress on Magnetoresistance in GMR Head Multilayers (자기기록 MR 헤드 용 다층박막의 자기저항에 미치는 잔류응력 효과)

  • Hwang, Do-Guwn
    • Journal of the Korean Society for Nondestructive Testing
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    • v.23 no.4
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    • pp.322-327
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    • 2003
  • Giant magnetoresistance(GMR) NiO multilayer, which has been used to reading head of highly dense magnetic recording, was fabricated, and oxidized in an air during 80 days to study the dependence of magnetoresistance properties on residual stress in the interfaces. The magnetoresistance ratio and the exchange biasing $field(H_{ex})$ of $NiO(60nm)/Ni_{81}Fe_{19}(5nm)/Co(0.7nm)/Cu(2nm)/Co(0.7nm)/Ni_{81}Fe_{19}(7nm)$ spin valves were increased from 4.9% to 7.3%, and 110 Oe to 170 Oe after natural oxidation in the atmosphere for 80 days, respectively. The sheet resistivity ${\rho}$ decreased from $28{\mu}{\Omega}m$ to $17{\mu}{\Omega}m$, but ${\Delta}p$ did not almost change after the oxidation. Therefore, the increase of MR ratio is due to the decrease in the sheet resistivity. the reduced resistance may result from the increase in the reflection of conduction electrons at the oxidized top surface. Also, the increase in the exchange biasing field is originated from the reduction of residual stress at the interface of $NiO/Ni_{81}Fe_{19}$ according as the aging time increases.

Studies on the RK-temperate phage of bacillus cereus (Bacollis cereis의 RK-용원파아지에 관한 연구)

  • 이태우
    • Korean Journal of Microbiology
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    • v.23 no.2
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    • pp.129-137
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    • 1985
  • The RK-temperate phage which infected with Bacillus cereus was isolated and the characters were investigated. The induction of RK-temperate phage from host bacterium attained by ultraviolet light irradiation (15W, 30cm, 30-120sec) and mitomycin C treatment (0.2-2 ug/ml). The host range of RK-temperate phage was not revealed with lysogenic and related strains of B. cereus. But B. cereus(PS) 352 which obtained by N-nitrosoguanidine treatment (1,000{$\mu}g/ml)$ to phage infected with host bacteria was sensitive bacteria of RK-temperate phage. RK-temperate phage was stabilized at the condition of nutrient broth (pH 7-8), Tris-buffer (pH 7-8) and ammonium buffer (pH 8-9) and Sorensen's phosphate buffer (pH 6-7), but unstabilized at other salt solutions and pH range. Also, thermostability was to $45^{\circ}C$ but unstabilized at above $50^{\circ}C$. At RK-temperate phage, the measurment values of head, neck, mid tail and end tail were 59nm, $9{\times}16nm,\;10{\times}189nm,\;and\;10{\times}14nm$ respectively. The morphology of head was regular polyhedron, and the end tail was coneate form. On the one hand, the number of capsid protein layer of tail were consist of 4, 35, and 1 at neck, mid tail, and end tail, respectively. RK-temperate phage was identified with DNA phage and G+C contents were 38.63. The latent time of RK-temperate phage was 30 minutes and the burst size was 70-80. And the host bacteria was lysed in case of multi-infection, above moi 1.

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Analysis of Benzo(a)pyrene in Red Ginseng Beverage (홍삼음료 증 벤조피렌 분석)

  • Hu, Soo-Jung;Jin, Sun-Hee;Choi, Dong-Mi
    • Journal of Food Hygiene and Safety
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    • v.23 no.1
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    • pp.26-30
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    • 2008
  • Polycyclic Aromatic Hydrocarbons(PAHs) contamination arises from several source including processing of food(smoking, direct drying, cooking) and environmental contamination of air, water or soil. A red ginseng is produced by steaming the root followed by drying. The methodology involved extraction with n-hexane and washing with water, clean-up on Sep-Pak Florisil Cartridges and determination by HPLC/FLD. The mobile phase was a mixture of acetonitrile and water in 8:2 by the isocratic elution and the excitation wavelength of fluorescence detector was 294 nm and its emission wavelength was 404 nm. The average recovery was about 105% and the relative standard deviation was 0.5. The levels of benzopyrene in the selected red ginseng beverage samples were not detected.

Disjoining Process Isotherms for oil-water-oil Emulsion Films (오일-물-오일 에멜젼막의 Disjoining Pressure에 관한 연구)

  • 조완구
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.23 no.2
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    • pp.71-96
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    • 1997
  • We have used a novel liquid surface forces apparatus to determine the variation of disjoining pressure with film thickness for dodecane-water-dodecane emulsion films. The LSFA allows measurement of film thicknesses in the range 5-100 nm and disjoining pressure from 0-1500 Pa. Disjoining pressure isotherms are given for films stabilised by the nonionic surfactnat n-dodecyl pentaoxyethylene glycol ether$(C_{12}E_5)$ and n-decyl-$\beta$-D-glucopyranoside($C_{10}- $\beta$-Glu)$ and the anionic surfactant sodium bis(2-ethylhexyl) sulphosuccinate(AOT) in the presense of added electrolyte. For $C_{12}E_5$ and AOT, the emulsion films are indefinitely stable even for the highest concentration of NaCl tested (136.7 Nm) whereas the $C_{10}-{eta}-Glu$ film shows coalescence at this salt concentration. For film thicknesses greater than approximately 20 nm with all three surfactants, the disjoining pressure isotherms are reasonably well described in terms of electrostatic and van der Waals, forces. For the nonionic surfactant emulsion films, the charge properties of the monolayers are qualitatively similar to those seen for foam films. For AOT emulsion films, the monolayer surface potentials estimated by fitting the isotherms are similar to the values of the zeta potential measured for AOT stabilised emulsion droplets. For thin emulsion films certain systems showed isotherms which suggested the presence of an additional repulsive force with a range of approximately 20 nm.

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All-fiber Tm-Ho Codoped Laser Operating at 1700 nm

  • Park, Jaedeok;Ryu, Siheon;Yeom, Dong-Il
    • Current Optics and Photonics
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    • v.2 no.4
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    • pp.356-360
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    • 2018
  • We demonstrate continuous-wave operation of an all-fiber thulium-holmium codoped laser operating at a wavelength of 1706.3 nm. To realize laser operation in the short-wavelength region of the emission-band edge of thulium in silica fiber, we employ fiber Bragg gratings having resonant reflection at a wavelength around 1700 nm as a wavelength-selective mirror in an all-fiber cavity scheme. We first examine the performance of the laser by adjusting the central wavelength of the in-band pump source. Although a pump source possessing a longer wavelength is observed to provide reduced laser threshold power and increased slope efficiency, because of the characteristics of spectral response in the gain fiber, we find that the optimal pump wavelength is 1565 nm to obtain maximum laser output power for a given system. We further explore the properties of the laser by varying the fiber gain length from 1 m to 1.4 m, for the purpose of power scaling. It is revealed that the laser shows optimal performance in terms of output power and slope efficiency at a gain length of 1.3 m, where we obtain a maximum output power of 249 mW for an applied pump power of 2.1 W. A maximum slope efficiency is also estimated to be 23% under these conditions.

$Pr^{3+}-and$ $Pr^{3+}/Er^{3+}$-Doped Selenide Glasses for Potential $1.6{\mu}m$ Optical Amplifier Materials

  • Choi, Yong-Gyu;Park, Bong-Je;Kim, Kyong-Hon;Heo, Jong
    • ETRI Journal
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    • v.23 no.3
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    • pp.97-105
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    • 2001
  • $1.6\;{\mu}m$ emission originated from $Pr^{3+}:\;(^3F_3,\;^3F_4)\;{\longrightarrow}\;^3H_4$ transition in $Pr^{3+}-\;and\;Pr^{3+}/Er^{3+}$-doped selenide glasses was investigated under an optical pump of a conventional 1480 nm laser diode. The measured peak wavelength and fullwidth at half-maximum of the fluorescent emission are ~1650nm and 120nm, respectively. A moderate lifetime of the thermally coupled upper manifolds of ${\sim}212{\pm}10{\mu}s$ together with a high stimulated emission cross-section of ${\sim}(3{\pm}1){\times}10^{-20}\;cm^2$ promises to be useful for $1.6{\mu}m$ band fiber-optic amplifiers that can be pumped with an existing high-power 1480 nm laser diode. Codoping $Er^{3+}$ enhances the emission intensity by way of a nonradiative $Er^{3+}:\;^4I_{13/2}\;{\longrightarrow}\;Pr^{3+}:\;(^3F_3,\;^3F_4)$ energy transfer. The Dexter model based on the spectral overlap between donor emission and acceptor absorption describes well the energy transfer from $Er^{3+}$ to $Pr^{3+}$ in these glasses. Also discussed in this paper are major transmission loss mechanisms of a selenide glass optical fiber.

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Flexural Strength and Rotational Stiffness Estimation of Joint between Vertical and Horizontal Members in System Support (시스템 동바리 수직재와 수평재 연결부의 휨강도와 회전 강성 평가)

  • Won, Jeong-Hun;Lee, Hyung Do;Choi, Myeong-Ki;Park, Man Cheol
    • Journal of the Korean Society of Safety
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    • v.33 no.4
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    • pp.46-53
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    • 2018
  • This study examined the maximum resistant moment and nonlinear rotational stiffness of wedge joint between the vertical and horizontal members of system supports. To examine the maximum resistant moment and propose the nonlinear rotation stiffness of wedge joint, 6 specimens were tested and additional 3 specimens, where the horizontal member was welded to the vertical member, were tested to compare the moment capacity of wedge joints. The average maximum moment in the tested wedge joint was 1.183 kNm which represented about 70 % of the maximum moment developed in the welded specimens. And, as simulating nonlinear rotational stiffness of the wedge joint, a tri-linear model was suggested. The rotational stiffness was estimated as 23.095 kNm/rad in first stage, 7.945 kNm/rad in second stage, and 3.073 kNm/rad in third stage. For the failure mode, the specimen with the wedge joint showed the failure of joint between vertical and horizontal members. However, the specimen with welded joint represented the yielding of horizontal members.

Aggregation of Laser-Generated Gold Nanoparticles Mediated by Formalin

  • Alauddin, Md.;Kim, Kuk Ki;Roy, Madhusudan;Song, Jae Kyu;Kim, Myung Soo;Park, Seung Min
    • Bulletin of the Korean Chemical Society
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    • v.34 no.1
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    • pp.188-196
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    • 2013
  • We have investigated the effects of formalin on the assembly of colloidal gold nanoparticles (AuNPs) prepared by laser ablation of a solid gold target in deionized water. Upon addition of formalin, the surface plasmon resonance (SPR) band at 519 nm for pure AuNPs decreases and shifts to red while a new broad SPR band appears at ~700 nm. The red-shift is prominent with increase in the incubation time. The average size of the initial AuNPs is around 12 nm but it increases to 23 nm after addition of formalin. It turns out that formalin acts as a cationic surfactant for AuNPs with negative surface charge in the colloidal solutions. Furthermore, through analysis of the Raman spectrum of formalin and the density functional theory calculations, we confirm that methanediol is the main species in formalin which is in charge of the aggregation of AuNPs.