• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1178-1181
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• 2003

Nanotechnology is the creation and utilization of materials, devices, and systems through the control of matter on the nanometer-length scale, that is, at the level of atoms, molecules, and supramolecular structures. The essence of nanotechnology is the ability to work at these levels to generate larger structures with fundamentally new molecular organization. These nanostructures, made with building blocks understood from first principles, are the smallest human-made objects, and they exhibit novel physical, chemical, and biological properties and phenomena. The aim of nanotechnology is to learn to exploit these properties and efficiently manufacture and employ the structures. Control of matter on the nanoscale already plays an important role in scientific disciplines as diverse as physics, chemistry, materials science, biology, medicine, engineering, and computer simulation. This paper describes the superprecision nano separator to productive particle size of nano powder. this separator system is very important in the industrial area for other high technology parts.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.27-32
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• 2003

Nanotechnology is the creation and utilization of materials, devices, and systems through the control of matter on the nanometer-length scale, that is, at the level of atoms, molecules, and supramolecular structures. The essence of nanotechnology is the ability to work at these levels to generate larger structures with fundamentally new molecular organization. These nanostructures, made with building blocks understood from first principles, are the smallest human-made objects, and they exhibit novel physical, chemical, and biological properties and phenomena. The aim of nanotechnology is to loam to exploit these properties and efficiently manufacture and employ the structures. Control of matter on the nanoscale already plays an important role in scientific disciplines as diverse as physics, chemistry, materials science, biology, medicine, engineering, and computer simulation. This paper describes the superprecision nano separator to productive particle size of nano powder. this separator system is very important in the industrial area for other high technology parts.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.149-153
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• 2005

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.130-131
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• 2013

Nanostructured oxides are widely used in heterogeneous catalysis where their catalytic properties are closely associated with the size and morphology at nanometer level. The effect of particle size has been well decumented in the past two decades, but the shape of the nanoparticles has rarely been concerned. Here we illustrate that the redox and acidic-basic properties of oxides are largely dependent on their shapes by taking $Co_3O_4$, $Fe_2O_3$, $CeO_2$ and $La_2O_3$ nanorods as typical examples. The catalytic activities of these rod-shaped oxides are mainly governed by the nature of the exposed crystal planes. For instance, the predominant presence of {110} planes which are rich in active $Co^{3+}$ on $Co_3O_4$ nanorods led to a much higher activity for CO oxidation than the nanoparticles that mainly exposed the {111} planes. The simultaneous exposure of iron and oxygen ions on the surface of $Fe_2O_3$ nanorods have significantly enhanced the adsorption and activation of NO and thereby promoted the efficiency of DeNOx process. Moreover, the exposed surface planes of these rod-shaped oxides mediated the reaction performance of the integrated metal-oxide catalysts. Au/$CeO_2$ catalysts exhibited outstanding stability under water-gas shift conditions owing to the strong bonding of gold particle on the $CeO_2$ nanorods where the formed gold-ceria interface was resistant towards sintering. Cu nanoparticles dispersed on $La_2O_3$ nanorods efficiently catalyzed transfer dehydrogenation of primary aliphatic alcohols based on the uniue role of the exposed {110} planes on the support. Morphology control at nanometer level allows preferential exposure of the catalytically active sites, providing a new stragegy for the design of highly efficient nanostructured catalysts.

• Journal of the Korean institute of surface engineering
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• v.48 no.6
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• pp.360-370
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• 2015

As the size of the semiconductor devices shrinks to nanometer scale, the importance of plasma etching process to the fabrication of nanometer scale semiconductor devices is increasing further and further. But for the nanoscale devices, conventional plasma etching technique is extremely difficult to meet the requirement of the device fabrication, therefore, other etching techniques such as use of multi frequency plasma, source/bias/gas pulsing, etc. are investigated to meet the etching target. Until today, various pulsing techniques including pulsed plasma source and/or pulse-biased plasma etching have been tested on various materials. In this review, the experimental/theoretical studies of pulsed plasmas during the nanoscale plasma etching on etch profile, etch selectivity, uniformity, etc. have been summarized. Especially, the researches of pulsed plasma on the etching of silicon, $SiO_2$, and magnetic materials in the semiconductor industry for further device scaling have been discussed. Those results demonstrated the importance of pulse plasma on the pattern control for achieving the best performance. Although some of the pulsing mechanism is not well established, it is believed that this review will give a certain understanding on the pulsed plasma techniques.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.30 no.6
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• pp.232-236
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• 2020

In this study, the optical properties of CaF2-Al2O3-B2O3-TiO2 (CABT) system glass doped with rare earth ion, that is used in various light devices due to its excellent luminous properties, were analyzed as a function of kind of crystal phases formed and size of crystals generated in the glass matrix. TiO2 was added to control nucleation and crystallization, and Eu2O3 was added to enhance the luminescence characteristics. DTA analysis was performed to confirm the heat treatment condition of crystal generation, and XRD and SEM anal ysis were carried out for the crystal phase change of nanometer size. As a result of the analysis, the luminous properties of oxy-fluoride-based glass were improved duo to crystallization of nanometer size, but was rather degraded when excessively large crystals were generated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1074-1078
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• 2005

In precision positioning applications, such as scanning tunneling microscopy and diamond turning machines [1], it is often required that actuators have nanometer resolution in displacement, high stiffness, and fast frequency response. These requirements are met by the use of piezoceramic actuators. A major limitation of piezoceramic actuators, however, is their lack of accuracy due to hysteresis nonlinearity and drift. The maximum error due to hysteresis can be as much as 10-15% of the path covered if the actuators are run in an open-loop fashion. Hence, the accurate control of piezoceramic actuators requires a control strategy that incorporates some form of compensation for the hysteresis. One approach is to develop an accurate model of the hysteresis and the use the inverse as a compensator. The Preisach model has frequently been employed as a nonlinear model for representing the hysteresis, because it encompasses the basic features of the hysteresis phenomena in a conceptually simple and mathematically elegant way. In this paper, a new numerical inversion scheme of the Preisach model is developed with an aim of compensating hysteresis in piezoceramic actuators. The inversion scheme is implemented using the first-order reversal functions and is presented in a recursive form. The inverted model is then incorporated in an open-loop control strategy that regulates the piezoceramic actuator and compensates for hysteretic effects. Experimental results demonstrate satisfactory regulation of the position of the piezoceramic actuator to the desired trajectories.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.50-57
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• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.91-96
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• 2001

Ultrafine particles have been widely used in many high technology industrial areas. The spherical nonagglomerated and uniform nanometer-size $SiO_{2}$ particles are synthesized by the injection of TEOS vapor, ions and reaction gas in furnace. Ions were generated by Corona discharge electrode and these ions charge $SiO_{2}$ particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions, it's morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 kV to 5.0 kV, it is observed that the mean diameter of $SiO_{2}$ particle decreases from 94 nm to 42 nm.