Master Replication for the NIL process using Spin-On-Glass resist (Spin-On-Glass resist를 이용한 NIL 용 Master Replication)

• Park, S.Y.;Park, H.H.;Jeong, Mira;Lee, Jaejong
• • Proceedings of the Korean Society of Precision Engineering Conference
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  • 2013.05a
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  • pp.605-606
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  • 2013
• PDF

Polymer Photonic Crystal Nanosystem Technology (고분자 광자결정 나노시스템 기술)

• Choi Choon-Gi;Kim Jin Tae;Han Young-Tak;Lee Woo-Jin
• • Journal of the Korean Society for Precision Engineering
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  • v.22 no.12 s.177
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  • pp.22-27
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  • 2005
• PDF KSCI

PDMS molding과 Nano-Imprint Lithography를 이용한 초소수성을 가지는 대나무 잎의 나노구조 복제

• Hwang, Jae-Yeon;Hong, Seong-Hun;Lee, Heon
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2007.05a
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  • pp.38.1-38.1
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  • 2007
• PDF

Fabrication of Polymer Nanochannel Using Silicon Nanoimprinting and Solvent Assisted Sealing (실리콘 나노임프린팅 및 솔벤트증기를 이용한 폴리머 나노채널 제작)

• Cho, Y.H.;Kim, H.S.;Kim, B.J.;Han, A.
• • Proceedings of the Korean Society of Precision Engineering Conference
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  • 2010.05a
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  • pp.497-498
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  • 2010
• PDF

Moire Aligning Technology for UV NanoImprint (나노 임프린팅 공정에서의 모아레 정렬 기술)

• Kim, G.H.;Lee, J.J.;Choi, K.B.;Lim, H.J.
• • Proceedings of the Korean Society of Precision Engineering Conference
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  • 2009.06a
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  • pp.873-874
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  • 2009
• PDF

Study on template fabrication method using nanoimprint lithography (나노 임프린트 리소그라피를 이용한 template 제작 방법에 관한 연구)

• Mun, Gang-Hun;Choe, Bang-Rim;An, Jin-Ho;Yang, Gi-Yeon;Hong, Seong-Hun;Lee, Heon
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2005.05a
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  • pp.237-237
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  • 2005
• PDF

Prediction of Defects in Nanoimpring Lithography Using FEM Simulation (FEM 기반 결함 분석을 이용한 나노임프린트 공정 연구)

• Song, N.H.;Son, J.W.;Rhim, S.H.;Oh, S.I.
• • Proceedings of the Korean Society of Precision Engineering Conference
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  • 2007.06a
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  • pp.673-674
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  • 2007
• PDF

Surface Treatment and Functional Materials for Nanoimprint Lithography (나노임프린트를 위한 표면처리공정 및 기능성 재료)

• Choi Dae-Geun;Lee Eung-Sug
• • Polymer Science and Technology
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  • v.17 no.2
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  • pp.207-216
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  • 2006
• PDF

나노임프린트 리소그래피를 통한 sub micron급 2차원 나노 패턴의 다층 구조물 제작에 관한 연구

• Han, Kang-Su;Hong, Seong-Hun;Lee, Jong-Hwa;Lee, Heon
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2006.05a
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  • pp.40.2-40.2
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  • 2006
• PDF

Nano Mother Mold의 재사용을 위한 Imprinting용 Ni Nano Stamp 복제공정개발

• Lee, Jeong-Gi;Jo, Si-Hyeong;Lee, Jeong-Hwan;Kim, Dong-Jin;Im, Hyeon-U;Park, Jin-Gu
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2008.05a
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  • pp.32.2-32.2
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  • 2008
• PDF

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